CN215617788U - Single crystal growing furnace draft tube dismouting auxiliary device - Google Patents

Single crystal growing furnace draft tube dismouting auxiliary device Download PDF

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Publication number
CN215617788U
CN215617788U CN202122314198.9U CN202122314198U CN215617788U CN 215617788 U CN215617788 U CN 215617788U CN 202122314198 U CN202122314198 U CN 202122314198U CN 215617788 U CN215617788 U CN 215617788U
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China
Prior art keywords
mounting
guide cylinder
single crystal
auxiliary device
dismounting
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CN202122314198.9U
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Chinese (zh)
Inventor
刘明成
梁旭松
胡楚汉
张军
马自成
杨佩均
张学谦
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Sichuan Yongxiang Photovoltaic Technology Co ltd
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Sichuan Yongxiang Photovoltaic Technology Co ltd
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Priority to CN202122314198.9U priority Critical patent/CN215617788U/en
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Abstract

The utility model provides an auxiliary device for dismounting a guide cylinder of a single crystal furnace, and aims to solve the problem that the guide cylinder in the prior art is inconvenient to dismount. This single crystal growing furnace draft tube dismouting auxiliary device includes: pushing a cart; the lifting platform is arranged at the top of the trolley; the turnover mechanism is arranged on the lifting platform; and the guide cylinder bracket is hinged with the turnover mechanism, and the middle part of the guide cylinder bracket is provided with a guide cylinder mounting hole. According to the trolley, the auxiliary device is pushed to the designated position, then the guide cylinder is fixed in the guide cylinder bracket to support the guide cylinder, and then the turnover mechanism is matched with the guide cylinder bracket to realize disassembly, so that the guide cylinder is prevented from being disassembled and cleaned by matching of a plurality of people, and potential safety hazards in the disassembly and cleaning process are avoided.

Description

Single crystal growing furnace draft tube dismouting auxiliary device
Technical Field
The utility model relates to the technical field of single crystal furnaces, in particular to an auxiliary device for dismounting a guide cylinder of a single crystal furnace.
Background
The thermal field of the single crystal furnace is an important part in the single crystal furnace, and the guide cylinder of the thermal field is one of the important parts of the thermal field. In the prior Czochralski single crystal process, after a single crystal rod is pulled, a guide shell needs to be thoroughly disassembled and cleaned after a single crystal furnace is stopped and cooled, and impurities such as silicon carbide and the like attached to the guide shell are removed. Moreover, the guide cylinder of the single crystal furnace has higher temperature within a certain time after the furnace is shut down, and a plurality of operators need to wear high-temperature-resistant gloves for operation. Have the operation inconvenient, waste time and energy, inefficiency snatchs the insecure condition that leads to the draft tube to break, and the safe risk is great, tears the problem of clear inefficiency.
SUMMERY OF THE UTILITY MODEL
The utility model provides a single crystal furnace guide cylinder dismounting auxiliary device, aiming at solving the problem of inconvenient dismounting of a guide cylinder in the prior art, the auxiliary device is pushed to an appointed position through a cart, then the guide cylinder is fixed in a guide cylinder bracket to support the guide cylinder, then the dismounting is realized through the matching of a turnover mechanism and the guide cylinder bracket, and the potential safety hazard existing in the dismounting process due to the fact that the guide cylinder is dismounted in a matching way by a plurality of people is avoided.
The technical scheme adopted by the utility model is as follows:
a single crystal growing furnace draft tube dismouting auxiliary device includes:
pushing a cart;
the lifting platform is arranged at the top of the trolley;
the turnover mechanism is arranged on the lifting platform; and
and the guide cylinder bracket is hinged with the turnover mechanism, and a guide cylinder mounting hole is formed in the middle of the guide cylinder bracket.
Optionally, the cart comprises:
a frame;
the wheels are arranged at the bottom of the frame;
the bearing plate is arranged at the top of the frame; and
and the handrail is arranged on one side of the frame.
Optionally, the lift platform comprises:
the two guide rails are arranged on the top of the trolley in parallel;
one ends of the two first lifting rods are respectively hinged with the two guide rails;
one ends of the two second lifting rods are respectively connected with the two guide rails in a sliding manner, and the middle parts of the first lifting rod and the second lifting rod are hinged to form an X-shaped lifting frame;
a connecting rod connected between the second lifting rods;
the power output shaft of the driving piece is connected with the connecting rod; and
the supporting plate is connected with the other end of the first lifting rod in a sliding mode and hinged to the other end of the second lifting rod.
Optionally, the turnover mechanism comprises:
the at least two supporting rods are symmetrically arranged on the lifting platform;
the two mounting plates are respectively mounted at the tops of the two support rods, and the support plates are provided with mounting holes and pin shaft holes;
the rotating pin penetrates through the mounting hole and is then rotatably connected with the guide cylinder bracket; and
and one end of the positioning pin penetrates through the pin shaft hole and then is connected with the guide cylinder bracket.
Optionally, two auxiliary supporting rods are arranged on the supporting rods.
Optionally, the guide shell bracket comprises:
the two mounting pieces are respectively and rotatably connected to the mounting plate through the rotating pins, and positioning holes matched with the positioning pins are formed in the mounting pieces;
the lower tray is arranged on the two mounting pieces, and the middle part of the lower tray is provided with a clamping groove and a first through hole;
the upper tray is arranged in the clamping groove, and a second through hole matched with the guide cylinder is formed in the middle of the upper tray; and
the limiting pieces are arranged at the top of the upper tray, and a limiting groove is formed between every two adjacent rotating pieces;
the cylinder body of the guide cylinder sequentially penetrates through the second through hole and the first through hole and then is clamped in the limiting groove.
Optionally, a rotary limiting groove is formed in the upper tray, and a positioning rod matched with the rotary limiting groove is arranged on the lower tray.
Optionally, a plurality of openings are provided on the lower tray.
Optionally, the positioning holes are multiple, and the positioning holes are distributed on the mounting member in an arc shape.
Optionally, the bottom of the upper tray is provided with a roller.
Compared with the prior art, the utility model has the beneficial effects that:
1. the support of the guide shell is realized through a lifting mode, the work of disassembling the guide shell by a single person is realized, and the disassembling efficiency is improved;
2. the guide shell which is detached by the turnover mechanism is rotated by a certain angle, so that a worker can clean the inside of the guide shell conveniently.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of the overall structure of an auxiliary device for mounting and dismounting a guide cylinder of a single crystal furnace.
FIG. 2 is a schematic view of a partial structure of a lifting platform of the auxiliary device for dismounting and mounting the draft tube of the single crystal furnace.
FIG. 3 is a schematic structural view of a draft tube bracket of the auxiliary device for dismounting and mounting a draft tube of a single crystal furnace.
FIG. 4 is a schematic structural view of a lower tray of the auxiliary device for dismounting and mounting the draft tube of the single crystal furnace.
FIG. 5 is a schematic structural view of an upper tray of the auxiliary device for dismounting and mounting the draft tube of the single crystal furnace.
FIG. 6 is a schematic structural diagram of a mounting plate of the auxiliary device for dismounting and mounting the draft tube of the single crystal furnace.
Reference numerals:
1. pushing a cart; 11. a frame; 12. a wheel; 13. a bearing plate; 14. a handrail;
2. a lifting platform; 21. a guide rail; 22. a first lifting rod; 23. a second lifting rod; 24. a support plate; 25. a drive member; 26. a connecting rod;
3. a turnover mechanism; 31. a support bar; 32. mounting a plate; 33. mounting holes; 34. a pin shaft hole; 35. a rotation pin; 36. positioning pins; 37. an auxiliary support bar;
4. a draft tube bracket; 41. a mounting member; 411. positioning holes; 42. a lower tray; 421. a first through hole; 422. a card slot; 423. positioning a rod; 424. an opening; 43. an upper tray; 431. a second through hole; 432. rotating the limiting groove; 433. a roller; 44. a limiting member; 45. a limiting groove.
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicate an orientation or positional relationship based on that shown in the drawings, or the orientation or positional relationship conventionally used in the use of the products of the present invention, or the orientation or positional relationship conventionally understood by those skilled in the art, are merely for convenience and simplicity of description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly above and obliquely above the second feature, or simply meaning that the first feature is at a lesser level than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the utility model. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize applications of other processes and/or uses of other materials.
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 1, an embodiment of the present invention provides an auxiliary device for dismounting and mounting a guide cylinder of a single crystal furnace, including: the device comprises a trolley 1, a lifting platform 2, a turnover mechanism 3 and a guide cylinder bracket 4, wherein the lifting platform 2 is arranged at the top of the trolley 1, and the turnover mechanism 3 is suitable for the lifting platform 2; the guide shell bracket 4 is arranged on the turnover mechanism 3. The cart 1 is used for adjusting the position of the whole auxiliary device, and the lifting platform 2 is used for enabling the turnover mechanism 3 and the guide cylinder bracket 4 to be close to or far away from the single crystal furnace, so that the guide cylinder on the single crystal furnace can be conveniently disassembled and assembled. The turnover mechanism 3 is used for rotating the guide shell in a vertical plane, so that workers can conveniently clean the interior of the guide shell; the guide shell bracket 4 is used for being connected with the guide shell and rotating the guide shell bracket 4 for a certain angle, so that the guide shell is separated from the single crystal furnace.
When using, through the below of shallow 1 with this auxiliary device propelling movement to single crystal growing furnace, rise through lift platform 2 for the draft tube card of single crystal growing furnace is on draft tube bracket 4, then drives draft tube bracket 4 through this auxiliary device and rotates and make draft tube and single crystal growing furnace separation, and lift platform 2 descends afterwards, takes off the draft tube. Simultaneously in order to conveniently clear up the inside wall of draft tube, rotate certain angle with the draft tube through tilting mechanism 3, make things convenient for the workman to clear up it. Support is realized to the draft tube through this auxiliary device, avoids many people to wear the manual work of gloves and demolish the inconvenient operation that exists in the draft tube, waste time and energy, inefficiency, probably cause the scald to the workman and snatch the problem that the jail led to the fact the draft tube to damage demolish the in-process.
In another embodiment, as shown in fig. 1, in order to facilitate the movement of the auxiliary device, the cart 1 comprises: the lifting device comprises a frame 11, a plurality of wheels 12 arranged at the bottom of the frame 11, a bearing plate 13 arranged at the top of the frame 11, a handrail 14 arranged at one end of the frame 11, and a lifting device arranged on the bearing plate 13. In use, a worker pushes the frame 11 to the lower part of the guide shell of the single crystal furnace through the handrail 14, and the auxiliary device is prevented from being carried by other work.
In another embodiment, as shown in fig. 2, 3 and 6, in order to adjust the heights of the turnover mechanism 3 and the guide cylinder bracket 4, the lifting platform 2 includes: the two guide rails 21 are arranged on the mounting plate 32 in parallel, the two first lifting rods 22 and the two second lifting rods 23 are arranged, one ends of the two first lifting rods 22 are hinged to the two guide rails 21, one ends of the two second lifting rods 23 are connected with the guide rails 21 in a sliding mode, when the first lifting rods 22 and the second lifting rods 23 are installed, the middle portions of the two first lifting rods 22 and the two second lifting rods 23 are hinged, the first lifting rods 22 and the second lifting rods 23 form an X-shaped lifting frame, the supporting plate 24 is installed at the other ends of the first lifting rods 22 and the second lifting rods 23, the first lifting rods 22 are connected with the bottom of the supporting plate 24 in a sliding mode, and the second lifting rods 23 are hinged to the bottom of the supporting plate 24. In order to facilitate the pushing of the second lifting rod 23 to slide towards the first lifting rod 22, the mounting plate 32 is provided with the driving member 25, the two second lifting rods 23 are connected together through the connecting rod 26, and a power output shaft of the driving member 25 is connected with the middle part of the connecting rod 26, so that the two second connecting rods 26 are prevented from deflecting in the pushing process.
The guide rail 21 is provided with a sliding groove, so that the sliding distance of the second lifting rod 23 is the length of the sliding groove, and the second lifting rod 23 is prevented from derailing to cause the direct contact of the guide cylinder and the bearing plate 13 and the damage of the guide cylinder.
The driving member 25 in this embodiment may be a cylinder, a hydraulic cylinder, an electric telescopic rod, a hydraulic telescopic rod or a pneumatic telescopic rod in the prior art. Most preferred of these are hydraulic cylinders.
In another embodiment, as shown in fig. 1, 3 and 6, in order to facilitate cleaning the inside of the guide shell, the turnover mechanism 3 includes: the guide cylinder support comprises two support rods 31 and a mounting plate 32, wherein one ends of the two support rods 31 are fixedly connected with the top of the support plate 24, the mounting plate 32 is mounted at the other ends of the two support rods 31, mounting holes 33 and pin shaft holes 34 are formed in the mounting plate 32, and a rotating pin 35 penetrates through the mounting holes 33 to be rotatably connected with the guide cylinder bracket 4, so that the guide cylinder bracket 4 can rotate around the axis of the rotating pin 35; when the guide shell bracket 4 rotates to a certain angle, the positioning pin 36 can penetrate through the pin shaft hole 34 and then be inserted into the guide shell bracket 4 for limiting, so that the guide shell bracket 4 is prevented from resetting after a worker releases his hands.
The guide cylinder is rotatably positioned by adopting the matching of the rotating pin 35 and the positioning pin 36, so that a single worker can conveniently clean the inside of the guide cylinder.
In another embodiment, as shown in fig. 1, in order to improve the structural strength of the support rods 31, auxiliary support rods 37 are respectively provided at both sides of the two support rods 31.
In another embodiment, as shown in fig. 3, 4 and 5, in order to facilitate the removal of the guide shell from the single crystal furnace, the guide shell holder 4 includes: two installed parts 41, lower tray 42, go up tray 43 and a plurality of locating part 44, two installed parts 41 rotate with swivel pin 35 respectively and are connected, correspond locating pin 36 at two installed parts 41 and are equipped with locating hole 411, make things convenient for locating pin 36 on the mounting panel 32 to insert the location that realizes draft tube bracket 4 in locating hole 411. Lower tray 42 fixed mounting installed part 41, the middle part of lower tray 42 is equipped with first through-hole 421, set up draw-in groove 422 on the lateral wall of first through-hole 421, first through-hole 421 supplies the draft tube to pass through, go up tray 43 joint in draw-in groove 422, the middle part of going up tray 43 is provided with the second through-hole 431 that supplies the draft tube to pass through, a plurality of locating parts 44 set up the top at last tray 43, form spacing groove 45 between two adjacent locating parts 44, the partial structure joint of draft tube is in spacing groove 45, make the draft tube break away from single crystal growing furnace through rotatory tray 43.
When using, the draft tube passes second through-hole 431 and first through-hole 421 in proper order, and the joint is in spacing groove 45 afterwards, and the rotatory tray 43 of going up of workman for draft tube and single crystal growing furnace separation, when the separation back needs to clear up draft tube inside, make draft tube bracket 4 around the rotatory certain angle of axis of rotatory round pin 35 after, it can to fix a position through locating pin 36.
In another embodiment, as shown in fig. 3, 4 and 5, in order to control the rotation angle of the upper tray 43, a rotation limiting groove 432 is formed on the upper tray 43, the rotation limiting groove 432 is formed in an arc shape, and a positioning rod 423 engaged with the rotation limiting groove 432 is formed on the lower tray 42. So that the rotation angle of the upper tray 43 is the angle between the two ends of the rotation-restricting groove 432.
In another embodiment, as shown in fig. 4, in order to reduce the overall weight of the draft tube tray, a plurality of openings 424 are formed on the lower tray 42, and a "u-shape" type of engaging member is formed between the openings 424, the engaging members are uniformly distributed on the top of the lower tray 42 along the axis of the lower tray 42, and the upper tray 43 is engaged between the engaging members.
In another embodiment, as shown in fig. 3, in order to facilitate the positioning of the draft tube bracket 4, the positioning holes 411 are plural, and the plural positioning holes 411 are distributed in an arc shape, so that the positioning holes 411 and the positioning pins 36 are aligned after rotating by a certain angle.
In another embodiment, as shown in fig. 3, in order to facilitate the movement of the upper tray 43, rollers 433 are provided on the bottom of the upper tray 43.
The specific working principle is as follows:
when using, push away this auxiliary device to single crystal growing furnace one side through shallow 1, make draft tube bracket 4 aim at the draft tube, pneumatic cylinder work makes X type crane rise, make the draft tube be located tray 43 and lower tray 42 middle part, the partial structure card of draft tube is in spacing groove 45 between locating part 44 afterwards, then the workman rotates tray 43 and separates draft tube and single crystal growing furnace on, its rotation angle is the contained angle between the both ends of the rotatory spacing groove 432 that sets up on last tray 43, then the power output shaft of pneumatic cylinder drives connecting rod 26 motion, make X type crane descend, drive the draft tube and descend (the installation of its draft tube is opposite with aforementioned flow). Need clear up the inside of draft tube after descending, promote tray 42 down and drive whole draft tube bracket 4 rotatory around the axis of swivel pin 35, insert the locating hole 411 that sets up on installed part 41 through locating pin 36 after rotatory certain angle and carry on spacingly.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the utility model. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. The utility model provides a single crystal growing furnace draft tube dismouting auxiliary device which characterized in that includes:
pushing a cart;
the lifting platform is arranged at the top of the trolley;
the turnover mechanism is arranged on the lifting platform; and
and the guide cylinder bracket is hinged with the turnover mechanism, and a guide cylinder mounting hole is formed in the middle of the guide cylinder bracket.
2. The auxiliary device for dismounting and mounting the guide cylinder of the single crystal furnace according to claim 1, wherein the cart comprises:
a frame;
the wheels are arranged at the bottom of the frame;
the bearing plate is arranged at the top of the frame; and
and the handrail is arranged on one side of the frame.
3. The auxiliary device for dismounting and mounting the guide cylinder of the single crystal furnace according to claim 1, wherein the lifting platform comprises:
the two guide rails are arranged on the top of the trolley in parallel;
one ends of the two first lifting rods are respectively hinged with the two guide rails;
one ends of the two second lifting rods are respectively connected with the two guide rails in a sliding manner, and the middle parts of the first lifting rod and the second lifting rod are hinged to form an X-shaped lifting frame;
a connecting rod connected between the second lifting rods;
the power output shaft of the driving piece is connected with the connecting rod; and
the supporting plate is connected with the other end of the first lifting rod in a sliding mode and hinged to the other end of the second lifting rod.
4. The auxiliary device for dismounting and mounting the guide shell of the single crystal furnace according to claim 1, wherein the turnover mechanism comprises:
the at least two supporting rods are symmetrically arranged on the lifting platform;
the two mounting plates are respectively mounted at the tops of the two support rods, and the support plates are provided with mounting holes and pin shaft holes;
the rotating pin penetrates through the mounting hole and is then rotatably connected with the guide cylinder bracket; and
and one end of the positioning pin penetrates through the pin shaft hole and then is connected with the guide cylinder bracket.
5. The auxiliary device for dismounting and mounting the guide shell of the single crystal furnace according to claim 4, wherein auxiliary support rods are arranged on both the support rods.
6. The auxiliary device for dismounting and mounting the guide shell of the single crystal furnace according to claim 4, wherein the guide shell bracket comprises:
the two mounting pieces are respectively and rotatably connected to the mounting plate through the rotating pins, and positioning holes matched with the positioning pins are formed in the mounting pieces;
the lower tray is arranged on the two mounting pieces, and the middle part of the lower tray is provided with a clamping groove and a first through hole;
the upper tray is arranged in the clamping groove, and a second through hole matched with the guide cylinder is formed in the middle of the upper tray; and
the limiting pieces are arranged at the top of the upper tray, and a limiting groove is formed between every two adjacent rotating pieces;
the cylinder body of the guide cylinder sequentially penetrates through the second through hole and the first through hole and then is clamped in the limiting groove.
7. The auxiliary device for dismounting and mounting a guide shell of a single crystal furnace according to claim 6, wherein a rotation limiting groove is arranged on the upper tray, and a positioning rod matched with the rotation limiting groove is arranged on the lower tray.
8. The auxiliary device for dismounting and mounting the guide cylinder of the single crystal furnace according to claim 6, wherein a plurality of openings are arranged on the lower tray.
9. The auxiliary device for dismounting and mounting the guide shell of the single crystal furnace as claimed in claim 6, wherein the positioning holes are plural, and the plural positioning holes are distributed on the mounting member in an arc shape.
10. The auxiliary device for dismounting and mounting the guide cylinder of the single crystal furnace according to claim 6, wherein the bottom of the upper tray is provided with a roller.
CN202122314198.9U 2021-09-24 2021-09-24 Single crystal growing furnace draft tube dismouting auxiliary device Active CN215617788U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122314198.9U CN215617788U (en) 2021-09-24 2021-09-24 Single crystal growing furnace draft tube dismouting auxiliary device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122314198.9U CN215617788U (en) 2021-09-24 2021-09-24 Single crystal growing furnace draft tube dismouting auxiliary device

Publications (1)

Publication Number Publication Date
CN215617788U true CN215617788U (en) 2022-01-25

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CN202122314198.9U Active CN215617788U (en) 2021-09-24 2021-09-24 Single crystal growing furnace draft tube dismouting auxiliary device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116590786A (en) * 2023-07-18 2023-08-15 苏州晨晖智能设备有限公司 Single crystal furnace thermal field dismounting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116590786A (en) * 2023-07-18 2023-08-15 苏州晨晖智能设备有限公司 Single crystal furnace thermal field dismounting device
CN116590786B (en) * 2023-07-18 2023-09-22 苏州晨晖智能设备有限公司 Single crystal furnace thermal field dismounting device

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