CN215587405U - Cleaning device - Google Patents

Abstract

The application discloses cleaning device especially relates to a cleaning device for semiconductor growth stove. The cleaning device includes: the cleaning assembly comprises a cleaning disc and a cleaning hairbrush, the cleaning hairbrush is arranged on the cleaning disc, at least part of bristles in the cleaning hairbrush form a cleaning head, and a first pore structure is arranged in the bristles in the cleaning head; the dust collection assembly comprises a dust collection pipeline, a dust collection bin and a first power device which are connected, a first channel is arranged in the cleaning disc, a dust collection opening is formed in an opening of the first pore structure, the first pore structure is communicated with the dust collection pipeline through the first channel, the cleaning hairbrush is used for removing dust on the inner wall of the piece to be cleaned, and the first power device is used for generating suction force so that the dust inside the piece to be cleaned sequentially passes through the first pore structure and the first channel and then enters the dust collection pipeline and is collected into the dust collection bin.

Description

Cleaning device

Technical Field

The application relates to a cleaning device, in particular to a cleaning device for a semiconductor growth furnace, and belongs to the technical field of semiconductors.

Background

With the rapid development of 5G, the Internet of things and new energy automobiles, the development of the third generation semiconductor (such as silicon carbide single crystal) industry in China is more and more rapid. The third generation semiconductor is also called wide bandgap semiconductor, and has the characteristics of high breakdown electric field, high saturated electron velocity, high thermal conductivity, high electron density, high mobility and the like, wherein the forbidden band width is more than 2.2 eV.

The current stage of production of silicon carbide feedstock and/or silicon carbide crystals is carried out in a crystal growth furnace. When materials undergo high-vacuum change, low-vacuum change, high-temperature heating and other processes in a hearth, physical and chemical reactions can occur. During the reaction process, dust or sublimed gas in the crucible can overflow from the gap of the crucible cover, so that the dust or the sublimed gas can adhere to the inner wall of the hearth and even form a coating on the inner wall.

When the first reaction is finished and the furnace is opened to take out the materials, the dust or the coating in the hearth needs to be cleaned. At present, dust or a coating in a hearth is cleaned by manually using a dust suction device in a state that a furnace cover is opened.

The cleaning mode can only realize point-to-point cleaning, and has the phenomenon of incomplete cleaning, thereby influencing the growth quality of the next heat; in addition, part of dust may fall into the workshop environment during the cleaning process, and pollute the working environment.

SUMMERY OF THE UTILITY MODEL

In order to solve the above problems, the present application proposes a cleaning device. This cleaning device not only can clean the impurity of treating the cleaning member inner wall, makes the impurity of disposing get into the dust absorption pipeline through the dust absorption mouth to collect to the dust collection storehouse in, prevent that the dust from wafting to the external environment, guarantee clean effect, can also practice thrift installation space, and collect the impurity of disposing to unified the processing behind the dust collection storehouse, thereby prevent that the dust from wafting everywhere and leading to secondary pollution, improve clean efficiency.

According to one aspect of the present application, there is provided a cleaning device comprising:

the cleaning assembly comprises a cleaning disc and a cleaning hairbrush, the cleaning hairbrush is arranged on the cleaning disc, at least part of bristles in the cleaning hairbrush form a cleaning head, and a first pore structure is arranged in the bristles in the cleaning head;

the dust collection assembly comprises a dust collection pipeline, a dust collection bin and a first power device which are communicated, a first channel is arranged in the cleaning disc, a dust collection opening is formed at an opening of the first pore structure, the first pore structure is communicated with the dust collection pipeline through the first channel,

the cleaning brush is used for removing dust on the inner wall of the piece to be cleaned, and the first power device is used for generating suction force so that the dust in the piece to be cleaned sequentially passes through the first pore structure and the first channel and then enters the dust collection pipeline and is collected in the dust collection bin.

Optionally, the cleaning device further comprises a purging assembly, the purging assembly comprises an exhaust port, an exhaust pipeline and a second power device which are connected, a second channel is arranged in the cleaning disc, the exhaust port is communicated with the exhaust pipeline through the second channel,

and the second power device is used for discharging purge gas, so that the purge gas sequentially passes through the exhaust pipeline and the second channel and then is discharged to the interior of the piece to be cleaned from the exhaust port, and the dust on the inner wall of the piece to be cleaned is removed.

Optionally, at least part of bristles in the cleaning brush form an exhaust head, a second duct structure is arranged in the middle of the bristles in the exhaust head, and an opening of the second duct structure forms the exhaust port.

Optionally, the cleaning device further comprises a spray assembly, the spray assembly comprises a spray opening, a liquid discharge pipeline, a liquid storage bin and a third power device which are connected, a third channel is arranged in the cleaning disc, the spray opening is communicated with the liquid discharge pipeline through the third channel,

and the third power device is used for discharging the cleaning agent in the liquid storage bin into a liquid discharge pipeline and discharging the cleaning agent into the part to be cleaned through the spraying port.

Optionally, at least part of bristles in the cleaning brush form a spray header, a third pore channel structure is arranged in the middle of the bristles in the spray header, and an opening of the third pore channel structure forms the spray opening.

Optionally, the cleaning device further comprises a lifting assembly, the lifting assembly comprises a multi-stage hydraulic cylinder structure connected with the cleaning disc, the multi-stage hydraulic cylinder structure comprises a plurality of hydraulic cylinders sequentially sleeved along the axial direction, each hydraulic cylinder comprises a piston, a first oil inlet and outlet and a second oil inlet and outlet, and is adjacent to each other, the hydraulic cylinders are separated through the pistons to form a plurality of oil chambers, the first oil inlet and outlet and the second oil inlet and outlet are respectively arranged at the bottom and the top of the pistons, and are adjacent to each other, and the oil chambers are communicated with each other through the first oil inlet and outlet and the second oil inlet and outlet.

Optionally, the piston of each hydraulic cylinder is an annular piston with a hollow structure, the hollow structures are communicated with each other to form a hollow channel, and the dust suction pipeline is located in the hollow channel.

Optionally, the cleaning assembly further comprises a fourth power device, and the fourth power device is respectively connected with the multi-stage hydraulic cylinder structure and the cleaning disc and is used for driving the cleaning disc to rotate.

Optionally, the cleaning assembly further comprises a support shaft connected with the multi-stage hydraulic cylinder structure, the fourth power device is arranged between the support shaft and the cleaning disc, the support shaft is provided with a first annular groove along the radial direction, and the first annular groove is communicated with the first channel;

the supporting shaft is provided with a first pore passage along the axial direction, the cleaning disc is provided with a second pore passage along the axial direction, and the first pore passage, the second pore passage and the hollow passage are communicated to form a hollow cavity.

Optionally, a supporting member is arranged on the outer side of the multi-stage hydraulic cylinder structure, and the supporting member is used for fixing the multi-stage hydraulic cylinder structure at the opening of the member to be cleaned.

Benefits that can be produced by the present application include, but are not limited to:

1. according to the cleaning device provided by the application, the cleaning brush is arranged to rub the inner wall of the piece to be cleaned, so that impurities on the inner wall of the piece to be cleaned are removed; the first pore structure is arranged in the cleaning head, and the opening of the first pore structure forms the dust collection port, so that impurities removed by the cleaning head can enter the dust collection pipeline through the dust collection port and are collected in the dust collection bin, dust is prevented from falling to the external environment, the cleaning effect is ensured, the integrated arrangement of the cleaning head and the dust collection port can be realized, and the installation space is saved; in addition, through setting up the dust collection bin, collect the impurity that will clear and unify the processing behind the dust collection bin to prevent that the dust from wafting everywhere and leading to secondary pollution, improve clean efficiency, ensure the cleanliness of external environment.

2. According to the cleaning device provided by the application, the sweeping component is arranged, the sweeping gas discharged by the second power device is used for sweeping the inner wall of the piece to be cleaned, so that impurities which are not completely swept on the inner wall of the piece to be cleaned are further swept, and a cleaning dead angle is avoided; the middle part through setting up the exhaust head is second pore structure, and the opening of second pore structure forms the gas vent to make the exhaust head can treat the inner wall of cleaning member and play the friction effect, both can treat the inner wall of cleaning member as the cleaning head and play the cleaning effect, can regard as gas vent discharge sweep gas simultaneously, the function integration nature is strong.

3. According to the cleaning device provided by the application, by arranging the spraying assembly, the third power device discharges the cleaning agent in the liquid storage bin from the spraying port and sprays the cleaning agent into the part to be cleaned, so that impurities on the inner wall of the part to be cleaned are thoroughly removed, and the cleaning effect is further ensured; the middle part through setting up the shower head is third pore way structure, and the opening of third pore way structure forms the mouth that sprays to make the shower head can treat the inner wall of cleaning member and play the friction, both can regard as the cleaning head to treat the inner wall of cleaning member and play cleaning effect, can regard as the mouth that sprays discharge cleaner simultaneously, functional integration nature is strong, can realize treating the inside multistage cleanness of cleaning member, further improves this cleaning device's cleaning performance.

4. According to the cleaning device provided by the application, the lifting assembly is arranged, so that the cleaning disc can be driven to move up and down, the height of the cleaning head is reduced, and meanwhile, all axial positions of the inner wall of the piece to be cleaned can be cleaned, and the cleaning effect is ensured; be multistage hydraulic cylinder structure through setting up lifting unit, multistage hydraulic cylinder structure includes a plurality of pneumatic cylinders of establishing along the axial cover in proper order, and the cylinder of one-level pneumatic cylinder behind the piston conduct of preceding one-level pneumatic cylinder, multistage hydraulic cylinder shrink back, and the overall height is shorter, compact structure, and occupation space is little, is applicable to the cleaning member of treating of multiple size.

5. The application provides a cleaning device, the piston through setting up the pneumatic cylinder all is hollow structure, and the piston of pneumatic cylinder is ring shape piston promptly, and a plurality of hollow structure communicate each other, can provide installation space for the dust absorption pipeline, reduces the installation area, and in addition, the cavity pipeline can regard as the gas exchange passageway of treating the inside and external environment of cleaning piece to the inside and outside atmospheric pressure of cleaning piece is treated in the balance.

6. The cleaning device that this application provided is through setting up first ring channel to guarantee that the cleaning disc is at rotatory in-process, first passageway and first ring channel intercommunication all the time, ensure that impurity such as inspiratory dust gets into in the dust collection bin behind first pore structure, first passageway, first ring channel, dust absorption pipeline in proper order.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:

fig. 1 is a perspective view of a cleaning device according to an embodiment of the present disclosure;

FIG. 2 is a front view of a cleaning device according to an embodiment of the present application;

FIG. 3 is a cross-sectional view of a cleaning device according to an embodiment of the present application;

fig. 4 is a sectional view of a cleaning disk in a cleaning apparatus according to an embodiment of the present application.

List of parts and reference numerals:

1. cleaning the disc; 2. a cleaning head; 3. a dust collection duct; 4. a dust collection bin; 5. a first channel; 6. an exhaust duct; 7. a second channel; 8. an exhaust head; 9. a liquid discharge conduit; 10. a liquid storage bin; 11. a third channel; 12. a shower head; 13. a multi-stage hydraulic cylinder structure; 14. a first oil inlet and outlet; 15. a second oil inlet and outlet; 16. a hollow channel; 17. a flange structure; 18. a fourth power unit; 19. a support shaft; 20. a first annular groove; 21. a second annular groove; 22. a third annular groove; 23. and a guide post.

Detailed Description

In order to more clearly explain the overall concept of the present application, the following detailed description is given by way of example in conjunction with the accompanying drawings.

In order that the above objects, features and advantages of the present application can be more clearly understood, the present application will be described in further detail with reference to the accompanying drawings and detailed description. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, however, the present application may be practiced in other ways than those described herein, and therefore the scope of the present application is not limited by the specific embodiments disclosed below.

In addition, in the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on those shown in the drawings, are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present application.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The cleaning device of the application can be used for cleaning the inner wall of any equipment with a cavity structure, for example, the cavity structure can be a cavity structure formed by a cylindrical shape or a square cylindrical shape, and the outer wall of the cavity structure can be a non-hollowed-out outer wall or a hollowed-out outer wall, which is not limited in the application. In the present embodiment, a clean cylindrical silicon carbide crystal growth furnace is taken as an example for explanation, but the invention is not limited thereto.

As shown in fig. 1 to 4, embodiments of the present application disclose a cleaning apparatus including: a cleaning assembly and a dust suction assembly. The cleaning assembly comprises a cleaning disc 1 and a cleaning hairbrush, a cleaning head 2 is arranged on the cleaning disc 1, at least part of bristles in the cleaning hairbrush form the cleaning head 2, and a first pore structure is arranged in the bristles 2 in the cleaning head; the dust collection assembly comprises a dust collection pipeline 3, a dust collection bin 4 and a first power device which are connected, a first channel 5 is arranged in the cleaning disc 1, a dust collection opening is formed in an opening of a first pore structure, the first pore structure is communicated with the dust collection pipeline 3 through the first channel 5, the cleaning head 2 is used for removing dust on the inner wall of a piece to be cleaned, and the first power device is used for generating suction force, so that the dust inside the piece to be cleaned enters the dust collection pipeline 3 after passing through the first pore structure and the first channel 5 in sequence and is collected into the dust collection bin 4. The cleaning brush is arranged to rub the inner wall of the hearth so as to remove dust or a coating; the first pore structure is arranged in the cleaning head 2, and the opening of the first pore structure forms a dust collection port, so that impurities removed by the cleaning head 2 can enter the dust collection pipeline 3 through the dust collection port and are collected in the dust collection bin 4, dust is prevented from falling to the outside of the hearth, the cleaning effect is ensured, the integrated arrangement of the cleaning head 2 and the dust collection port can be realized, and the installation space is saved; in addition, through setting up dust collection bin 4, collect the impurity that will clear up to dust collection bin 4 back unified processing to prevent that the dust from drifting around and leading to secondary pollution, improve clean efficiency, ensure the cleanliness in workshop.

Specifically, the material of the cleaning head 2 is not limited in this embodiment, as long as the inner wall of the hearth can be cleaned. Preferably, in order to prevent that cleaning head 2 from producing the damage to the furnace inner wall when rubbing the furnace inner wall, can guarantee to clear away the dust or the cladding material of furnace inner wall simultaneously, cleaning head 2 can be rubber or silica gel material.

Specifically, the number and the positions of the cleaning heads 2 are not limited in this embodiment, as long as the inner wall of the hearth can be cleaned. Preferably, in order to further ensure the cleaning effect and prevent the occurrence of dead cleaning corners, the cleaning heads 2 are uniformly arranged on the side wall of the cleaning tray 1, and the cleaning heads 2 are also arranged above the cleaning tray 1.

Specifically, the cleaning head 2 and the cleaning disc 1 may be detachably connected or fixedly connected. In order to facilitate cleaning and replacement of the cleaning head 2 and to prevent the cleaning head 2 from being blocked and reducing the dust suction effect, the cleaning head 2 and the cleaning disc 1 are preferably detachably connected.

Specifically, the type of the first power device is not limited in this embodiment, and may be, for example, an exhaust fan or the like, as long as the dust and other impurities in the growth furnace can be sucked into the dust collecting chamber 4.

As an implementation mode, the cleaning device further comprises a blowing component, the blowing component comprises an exhaust port, an exhaust pipeline 6 and a second power device which are connected, a second channel 7 is arranged in the cleaning disc 1, the exhaust port is communicated with the exhaust pipeline 6 through the second channel 7, the second power device is used for discharging blowing gas, and the blowing gas is discharged into the member to be cleaned from the exhaust port after sequentially passing through the exhaust pipeline 6 and the second channel 7 so as to remove dust on the inner wall of the member to be cleaned. Through setting up the subassembly that sweeps, the exhaust sweeping gas of second power device is used for sweeping the inner wall of crystal growth stove, further clears away the not clear away complete dust or cladding material of growth stove inner wall, avoids appearing clean dead angle.

Specifically, the present embodiment does not limit the position and shape of the exhaust port, as long as the exhaust purge gas can clean the inner wall of the growth furnace.

In a preferred embodiment, at least part of the bristles in the cleaning brush form an exhaust head 8, a second pore structure is arranged in the middle of the bristles in the exhaust head 8, and an opening of the second pore structure forms an exhaust port. The middle part through setting up exhaust head 8 is second pore structure, and the opening of second pore structure forms the gas vent, and exhaust head 8 can play the friction effect to the inner wall of growth furnace, both can play the cleaning action as cleaning head 2 to the inner wall of growth furnace, can regard as gas vent discharge sweep gas simultaneously, and the function integration is strong.

Specifically, the material of the exhaust head 8 is not limited in this embodiment, as long as the inner wall of the furnace chamber can be cleaned. Preferably, in order to prevent the exhaust head 8 from damaging the inner wall of the hearth when rubbing the inner wall of the hearth, the exhaust head 8 can be made of rubber or silica gel and can ensure that the dust or the plating layer on the inner wall of the hearth is removed.

Specifically, the number and the positions of the exhaust heads 8 are not limited in this embodiment, as long as the exhaust gas discharged by the exhaust heads can clean the inner wall of the furnace. Preferably, in order to further ensure the cleaning effect and prevent the occurrence of dead cleaning corners, the exhaust heads 8 are uniformly distributed on the side wall of the cleaning disc 1, and the exhaust heads 8 are also distributed above the cleaning disc 1; the exhaust head 8 may be disposed adjacent to the cleaning head 2.

Specifically, the exhaust head 8 and the cleaning plate 1 may be detachably connected or fixedly connected. In order to facilitate cleaning and replacement of the exhaust head 8 and to prevent the exhaust head 8 from being blocked and reducing the exhaust effect, the exhaust head 8 and the cleaning disc 1 are preferably detachably connected.

Specifically, the present embodiment does not limit the type of the second power unit, and may be, for example, a blower or the like as long as purge gas can be discharged.

As an implementation mode, the cleaning device further comprises a spraying assembly, the spraying assembly comprises a spraying opening, a liquid discharge pipeline 9, a liquid storage bin 10 and a third power device, the spraying opening, the liquid storage bin and the third power device are connected, a third channel 11 is arranged in the cleaning disc 1, the spraying opening is communicated with the liquid discharge pipeline 9 through the third channel 11, and the third power device is used for discharging the cleaning agent in the liquid storage bin 10 into the liquid discharge pipeline 9 and discharging the cleaning agent into a part to be cleaned through the spraying opening. Through setting up the spray set, the cleaner of third power device in with stock solution storehouse 10 is discharged from spraying the mouth, and the blowout is inside to growing furnace, thoroughly clears away the dust or the cladding material of furnace inner wall, further plays clean effect.

Specifically, the specific components of the cleaning agent in this embodiment are not limited, and examples thereof include clear water capable of adsorbing dust, chemicals capable of removing a plating layer, and the like.

Specifically, the present embodiment does not limit the position and shape of the spray opening, as long as the discharged cleaning agent can clean the inner wall of the growth furnace.

In a preferred embodiment, at least part of the bristles in the cleaning brush form a spray head 12, a third pore channel structure is arranged in the middle of the bristles in the spray head 12, and the opening of the third pore channel structure forms a spray opening. The middle part through setting up shower head 12 is third pore way structure, and the opening of third pore way structure forms the mouth that sprays to make shower head 12 can play the friction effect to the inner wall of growth furnace, both can play cleaning effect as cleaning head 2 to the inner wall of growth furnace, can regard as the mouth that sprays discharge cleaner simultaneously, functional integration nature is strong, can realize the multistage cleanness inside the growth furnace, further improves this cleaning device's clean effect.

Specifically, the material of the spray header 12 is not limited in this embodiment, as long as the inner wall of the furnace chamber can be cleaned and the cleaning agent can be discharged. Preferably, in order to prevent the spray header 12 from damaging the inner wall of the hearth when rubbing the inner wall of the hearth, and simultaneously, the spray header 12 can be made of rubber or silica gel to ensure that dust or a plating layer on the inner wall of the hearth is removed.

Specifically, the number and the positions of the spray headers 12 are not limited in this embodiment, as long as the cleaning agent discharged from the spray headers can clean the inside of the furnace. Preferably, in order to further ensure the cleaning effect and prevent the occurrence of cleaning dead corners, the spray headers 12 are uniformly distributed on the side wall of the cleaning disc 1, and the spray headers 12 are also distributed above the cleaning disc 1; the shower head 12, the exhaust head 8 may be disposed adjacent to the cleaning head 2.

Specifically, the shower head 12 and the cleaning plate 1 may be detachably connected or fixedly connected. In order to facilitate cleaning and replacement of the shower head 12 and to prevent the shower head 12 from being blocked and thus preventing the cleaning agent from being smoothly discharged, the shower head 12 and the cleaning plate 1 are preferably detachably connected.

Specifically, the present embodiment does not limit the type of the third power unit, and may be, for example, a pump body, as long as the third power unit can discharge the cleaning agent.

It can be understood that the first power device, the second power device and the third power device in the embodiment can work simultaneously or independently, and the working sequence can be changed at will according to the cleaning requirement. For example, the first power device can be started, the cleaning head 2 starts to work, dust and a coating on the inner wall of the growth furnace are removed by friction, the removed dust and the coating are sucked into the dust collection bin 4 through the dust collection pipeline 3 to finish rough cleaning, and then the first power device is closed; starting the second power device, starting the exhaust head 8 to work, further rubbing and removing the dust and the coating on the inner wall of the growth furnace by the exhaust head 8, blowing the inner wall of the growth furnace by the discharged blowing gas to avoid cleaning dead corners, finishing fine cleaning, and then closing the second power device; the third power device is started, the spray header 12 starts to work, the spray header 12 can not only remove the dust and the plating layer on the inner wall of the growth furnace in the working process, but also can adsorb the residual dust in the growth furnace by the sprayed cleaning agent, and thoroughly removes the plating layer on the inner wall of the hearth, so that the ultra-precision cleaning is completed, and the multi-stage cleaning in the growth furnace is realized.

As an implementation mode, the cleaning device further comprises a lifting assembly, the lifting assembly comprises a multi-stage hydraulic cylinder structure 13 connected with the cleaning plate 1, the multi-stage hydraulic cylinder structure 13 comprises a plurality of hydraulic cylinders sequentially sleeved along the axial direction, each hydraulic cylinder comprises a piston, a first oil inlet and outlet 14 and a second oil inlet and outlet 15, adjacent hydraulic cylinders are separated through the pistons to form a plurality of oil chambers, the first oil inlet and outlet 14 and the second oil inlet and outlet 15 are respectively arranged at the bottom and the top of the piston, and the adjacent oil chambers are communicated with each other through the first oil inlet and outlet 14 and the second oil inlet and outlet 15. The cleaning disc 1 can be driven to move up and down by arranging the lifting assembly, so that the height of the cleaning head 2 is reduced, all positions of the inner wall of the growth furnace along the axial direction can be cleaned, and the cleaning effect is ensured; be multistage hydraulic cylinder structure 13 through setting up lifting unit, multistage hydraulic cylinder structure 13 includes a plurality of pneumatic cylinders of establishing along the axial cover in proper order, and the cylinder of one-level pneumatic cylinder behind the piston conduct of preceding one-level pneumatic cylinder, multistage hydraulic cylinder shrink back, and the overall height is shorter, compact structure, and occupation space is little, is applicable to the furnace body of multiple size.

It can be understood that, in the present embodiment, a multi-stage hydraulic cylinder is adopted as the lifting assembly, which is only one implementation manner, and other telescopic devices such as an air cylinder may also be selected. Specifically, a sealing ring is arranged between adjacent hydraulic cylinders.

Specifically, the operating principle of the multi-stage hydraulic cylinder is the existing operating principle, for convenience of description, the hydraulic cylinder far away from the cleaning disc 1 is called a first-stage hydraulic cylinder, and the hydraulic cylinder is upward respectively a second-stage hydraulic cylinder, a third-stage hydraulic cylinder and the like, until the last-stage hydraulic cylinder, the oil inlet and outlet far away from the cleaning disc 1 is a first oil inlet and outlet 14, and the oil inlet and outlet close to the cleaning disc 1 is a second oil inlet and outlet 15. When oil is fed far away from the first oil inlet/outlet 14 and oil is fed back from the second oil inlet/outlet 15, the first-stage hydraulic cylinder extends outwards at the lowest oil pressure, and when the stroke end is reached, the second-stage hydraulic cylinder extends outwards, and so on until the last-stage hydraulic cylinder with the smallest diameter extends out finally; when the second oil inlet and outlet 15 feeds oil and the first oil inlet and outlet 14 feeds oil, the last-stage hydraulic cylinder with the smallest diameter starts to retract, and the like until the first-stage hydraulic cylinder retracts.

In one embodiment, the piston of each hydraulic cylinder is an annular piston with a hollow structure, a plurality of hollow structures are communicated with each other to form a hollow passage 16, and the dust suction pipeline 3 is positioned in the hollow passage 16. The piston through setting up the pneumatic cylinder all is hollow structure, and the piston of pneumatic cylinder is ring shape piston promptly, and a plurality of hollow structure communicate each other, can provide installation space for dust absorption pipeline 3, reduces the installation area, and in addition, the gas exchange passageway of furnace body inside and external environment can be regarded as to the hollow pipeline to atmospheric pressure inside and outside the balance furnace body.

Specifically, a flange structure 17 is installed on the outer side of the primary hydraulic cylinder, and the first power device, the dust collection bin 4, the second power device, the liquid storage bin 10 and the third power device are all arranged below the flange structure 17. Specifically, the exhaust pipeline 6 and the liquid discharge pipeline 9 are located in the hollow channel 16, the dust suction pipeline 3, the exhaust pipeline 6 and the liquid discharge pipeline 9 penetrate through the hollow channel 16, and the bottom end of the middle hole channel is connected with the first power device, the second power device and the third power device respectively. Specifically, the outer diameter of the flange structure 17 is not smaller than the inner diameter of the opening of the growth furnace, so that when the growth furnace is cleaned, the opening of the growth furnace can be sealed by the flange structure 17, and impurities such as dust in the growth furnace are prevented from falling into a workshop.

Specifically, the top end of the hollow pipeline is provided with the filter medium, so that certain effects of blocking impurities such as dust are achieved, and the workshop environment is further prevented from being polluted. Specifically, the type of the filter medium is not limited in this embodiment, and may be, for example, an ultrafine fiber membrane or filter cotton.

In one embodiment, the cleaning assembly further comprises a fourth power device 18, and the fourth power device 18 is connected to the multi-stage hydraulic cylinder structure 13 and the cleaning disk 1 respectively, and is used for driving the cleaning disk 1 to rotate. The fourth power device 18 is arranged to drive the cleaning disc 1 to rotate, so that the cleaning head 2, the exhaust head 8 and the spray header 12 on the cleaning disc 1 generate radial friction force on the inner wall of the growth furnace, and the cleaning effect is further improved.

As can be understood by those skilled in the art, in the process of extending or retracting the multi-stage hydraulic cylinder, the fourth power device is simultaneously started to enable the cleaning disc 1 to perform self-rotation movement while performing axial movement, and the cleaning head 2, the exhaust head 8 and the spray header 12 on the cleaning disc 1 can rub the inner wall of the growth furnace, so as to clean dust and a coating on the inner wall. As an embodiment, the cleaning assembly further comprises a supporting shaft 19 connected with the multi-stage hydraulic cylinder structure 13, a fourth power device 18 is arranged between the supporting shaft 19 and the cleaning disc 1, the supporting shaft 19 is radially provided with a first annular groove 20, and the first annular groove 20 is communicated with the first channel 5; the supporting shaft 19 is provided with a first hole along the axial direction, the cleaning disk 1 is provided with a second hole along the axial direction, and the first hole, the second hole and the hollow passage 16 are communicated to form a hollow cavity. Through setting up first ring channel 20 to guarantee that cleaning disc 1 is at the rotatory in-process, first passageway 5 communicates with first ring channel 20 all the time, ensures that the impurity such as inspiratory dust gets into in the dust collecting bin 4 after first pore structure, first passageway 5, first ring channel 20, dust absorption pipeline 3 in proper order.

Specifically, the supporting shaft 19 is provided with a second annular groove 21 and a third annular groove 22 along the radial direction, the second annular groove 21 is communicated with the second channel 7, and the third annular groove 22 is communicated with the third channel 11, so that the second channel 7 is always communicated with the second annular groove 21 and the third channel 11 is always communicated with the third annular groove 22 in the rotating process of the cleaning disc 1, the blowing gas is ensured to be discharged into the growth furnace after sequentially passing through the exhaust pipeline 6, the second annular groove 21, the second channel 7 and the second pore structure, and the cleaning agent is sprayed into the growth furnace after sequentially passing through the liquid discharge pipeline 9, the third annular groove 22, the third channel 11 and the third pore structure.

Specifically, the first annular groove 20, the second annular groove 21 and the third annular groove 22 are isolated by using O-rings, so that the first annular groove 20, the second annular groove 21 and the third annular groove 22 are not communicated with each other, independent spaces are formed, and different media such as dust, purge gas and cleaning agent are prevented from flowing and channeling with each other.

Specifically, the present embodiment does not limit the type of the fourth power device 18 as long as the cleaning disk 1 can be driven to rotate. Preferably, the fourth power device 18 is a rotating electrical machine. Specifically, a mounting cavity is arranged between the supporting shaft 19 and the cleaning disc 1, and the fourth power device 18 is mounted in the mounting cavity. An output shaft of the fourth power device 18 is sleeved with a gear, a rack ring is arranged on the side wall, close to the mounting cavity, of the cleaning disc 1, and the gear is meshed with the rack ring to enable the fourth power device 18 to drive the cleaning disc 1 to rotate.

In particular, the power control line of the fourth power means 18 is connected to a power source via the hollow passage 16, the power source being mounted on the flange structure 17. The power supply can adopt a storage battery for supplying power, so that the cleaning device is convenient to move and clean different growing furnaces.

Specifically, the cleaning disk 1 is connected to the supporting shaft 19 through a bearing, so that the cleaning disk 1 and the supporting shaft 19 rotate relatively.

As an embodiment, a support member is provided outside the multi-stage hydraulic cylinder structure 13, and the support member is used for fixing the multi-stage hydraulic cylinder structure 13 at an opening of a member to be cleaned. Through setting up support piece with this cleaning device with treat to fix between the cleaning piece, prevent that this cleaning device from taking place to rock among the cleaning process, and saved the clear process of manpower, make the cleaning process more automatic.

Specifically, the supporting member is a guide post 23 installed below the flange structure 17, and a transfer tray and a track matched with the guide post 23 can be arranged below the growth furnace, so that the movement and the positioning of the cleaning device are realized.

Specifically, the working process of the cleaning device is as follows: after the growth furnace is opened, the materials are conveyed out of the furnace body, the guide rail is started, the cleaning device matched with the transfer tray through the guide column 23 moves to the position below the growth furnace along the guide rail, then the lifting device below the guide rail is started, and the cleaning device is lifted until the flange structure 17 seals the opening of the growth furnace, so that furnace sealing is realized; after the furnace sealing is finished, starting the multi-stage hydraulic cylinder, the first power device, the second power device, the third power device or the fourth power device 18 according to the cleaning requirement to clean the inner wall of the furnace body; after cleaning, the first power device, the second power device, the third power device and the fourth power device 18 are closed, the multi-stage hydraulic cylinder is contracted, the lifting device moves the cleaning device downwards to blow the furnace, the cleaning device is reset, and the next cleaning instruction is waited.

The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the system embodiment, since it is substantially similar to the method embodiment, the description is simple, and for the relevant points, reference may be made to the partial description of the method embodiment.

The above description is only an example of the present application and is not intended to limit the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

Claims (10)

1. A cleaning device, characterized in that it comprises:

the cleaning assembly comprises a cleaning disc and a cleaning hairbrush, the cleaning hairbrush is arranged on the cleaning disc, at least part of bristles in the cleaning hairbrush form a cleaning head, and a first pore structure is arranged in the bristles in the cleaning head;

the dust collection assembly comprises a dust collection pipeline, a dust collection bin and a first power device which are communicated, a first channel is arranged in the cleaning disc, a dust collection opening is formed at an opening of the first pore structure, the first pore structure is communicated with the dust collection pipeline through the first channel,

the cleaning brush is used for removing dust on the inner wall of the piece to be cleaned, and the first power device is used for generating suction force so that the dust in the piece to be cleaned sequentially passes through the first pore structure and the first channel and then enters the dust collection pipeline and is collected in the dust collection bin.

2. The cleaning device of claim 1, further comprising a purge assembly, the purge assembly comprising an exhaust port, an exhaust conduit and a second power device connected together, a second passage being provided in the cleaning tray, the exhaust port being in communication with the exhaust conduit via the second passage,

and the second power device is used for discharging purge gas, so that the purge gas sequentially passes through the exhaust pipeline and the second channel and then is discharged to the interior of the piece to be cleaned from the exhaust port, and the dust on the inner wall of the piece to be cleaned is removed.

3. The cleaning device of claim 2, wherein at least a portion of the bristles of the cleaning brush form an air discharge head, and a second hole structure is arranged in the middle of the bristles of the air discharge head, and the opening of the second hole structure forms the air discharge opening.

4. The cleaning device of claim 1, further comprising a spray assembly, wherein the spray assembly comprises a spray port, a liquid discharge pipeline, a liquid storage bin and a third power device which are connected, a third channel is arranged in the cleaning disc, the spray port is communicated with the liquid discharge pipeline through the third channel,

and the third power device is used for discharging the cleaning agent in the liquid storage bin into a liquid discharge pipeline and discharging the cleaning agent into the part to be cleaned through the spraying port.

5. The cleaning device of claim 4, wherein at least some bristles of the cleaning brush form a shower head, and a third channel structure is arranged in the middle of the bristles of the shower head, and the opening of the third channel structure forms the shower opening.

6. The cleaning device according to any one of claims 1 to 5, further comprising a lifting assembly, wherein the lifting assembly comprises a multi-stage hydraulic cylinder structure connected with the cleaning plate, the multi-stage hydraulic cylinder structure comprises a plurality of hydraulic cylinders sequentially sleeved along an axial direction, each hydraulic cylinder comprises a piston, a first oil inlet and outlet and a second oil inlet and outlet, adjacent hydraulic cylinders are separated by the pistons to form a plurality of oil chambers, the first oil inlet and outlet and the second oil inlet and outlet are respectively arranged at the bottom and the top of the piston, and the adjacent oil chambers are communicated with each other through the first oil inlet and outlet and the second oil inlet and outlet.

7. The cleaning device as claimed in claim 6, wherein the piston of each hydraulic cylinder is an annular piston having a hollow structure, a plurality of hollow structures are communicated with each other to form a hollow passage, and the dust suction duct is located in the hollow passage.

8. The cleaning apparatus as claimed in claim 7, wherein the cleaning assembly further comprises a fourth power device connected to the multi-stage hydraulic cylinder structure and the cleaning tray, respectively, for driving the cleaning tray to rotate.

9. The cleaning apparatus as claimed in claim 8, wherein the cleaning assembly further comprises a support shaft connected to the multi-stage hydraulic cylinder structure, the fourth power unit being disposed between the support shaft and the cleaning tray, the support shaft being radially provided with a first annular groove communicating with the first passage;

the supporting shaft is provided with a first pore passage along the axial direction, the cleaning disc is provided with a second pore passage along the axial direction, and the first pore passage, the second pore passage and the hollow passage are communicated to form a hollow cavity.

10. The cleaning device as claimed in claim 6, characterized in that a support member is arranged outside the multi-stage hydraulic cylinder structure, and the support member is used for fixing the multi-stage hydraulic cylinder structure at the opening of the member to be cleaned.

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