CN215543358U - Particle collection apparatus and cleaning system - Google Patents

Abstract

The present invention relates to a particle collection apparatus for collecting particles from a surface for particle analysis in testing of technical cleanliness of a test body, and comprising: a centrifugal separator to which a suction line for sucking a particle/air mixture from a surface to be tested is connected; a collection container for collecting particles; and a negative pressure supply line comprising a filter holder for holding a replaceable analysis filter having a particle collection surface. The submerged tube of the centrifugal separator is connected to a negative pressure supply line, so that the air which is drawn from the centrifugal separator in the suction operation mode and flows through the negative pressure supply line flows through an analysis filter arranged in a filter holder before reaching a source of negative pressure for intercepting particles on a particle collecting surface. The utility model also relates to a cleaning system comprising a particle collection apparatus and a particle analysis device.

Description

Particle collection apparatus and cleaning system

Technical Field

The present invention relates to a particle collection apparatus for collecting particles from a surface for particle analysis in testing of technical cleanliness of test bodies, in particular workpieces, machines and/or circuit boards.

The utility model further relates to a cleaning system comprising the above-described particle collection device and a particle analysis apparatus for analyzing the technical cleanliness of a test body, in particular of a workpiece, a machine and/or a circuit board.

Background

In industrial manufacturing, there is an increasing demand for technical cleanliness of test bodies, in particular workpieces, machines and/or circuit boards with electronic components and assemblies. Therefore, for example, in order to verify the manufacturing process or as a conventional quality assurance measure in the manufacturing process, the workpieces, machines and/or circuit boards with electronic components and/or assemblies should be checked for technical cleanliness. For small volumes of test bodies, they are usually rinsed with liquid rinsing medium in a rinsing chamber, after which the rinsing medium leaves the rinsing chamber through an analysis filter. Subsequently, a filter residue is formed from the remaining particles, which are usually subjected to microscopic and/or gravimetric analysis with respect to size, nature, amount, etc. in order to elucidate the technical cleanliness of the test body and the manufacturing site.

The above-described procedure is problematic in the case of large and/or difficult-to-transport test bodies (e.g. engines or large bearings), since flushing in such flushing containers is not practical. Furthermore, it is not possible to localize the test to a partial area. In addition, in the case of test bodies with electronic components, the test body can be damaged by the rinsing medium.

For collecting particles from such test bodies, an indirect measurement method is also generally known, in which air is sucked through an analysis filter. Which is connected to a suction line through which particles can be sucked from a freely definable surface. On the output side, the analysis filter is connected to a source of negative pressure in order to cause the inhaled particles to impact the analysis filter. Which is then provided to microscopic analysis.

The disadvantages of the known method are: rapid clogging of the analysis filter, in particular in the case of relatively dirty surfaces, and the associated suction pressure loss, entails the risk that not all particles can be sucked off from the surface at a later point in time during a longer suction.

In addition, during the suction of circuit boards with electronic components and/or assemblies, the potential difference existing between the suction line and the surface to be tested is problematic, which may lead to voltage breakdowns by short discharge currents. For electronic components, such electrostatic discharge (ESD) is detrimental and may lead to partial or total damage. Therefore, electronic components and machines must be protected from electrostatic discharge.

SUMMERY OF THE UTILITY MODEL

Starting from the above prior art, the object of the present invention is to overcome the drawbacks of the prior art. The object of the utility model is in particular to provide a particle collection device for determining technical cleanliness which can be modified in such a way that it can be used flexibly for detecting different types of test bodies and enables the most direct determination of technical cleanliness by downstream optical analysis.

This object is achieved by a particle collection apparatus of the character described in the present application.

In addition, the object is also achieved by a cleaning system as described in the present application.

The idea of the utility model is to suck particles from the surface of a preferably large number of industrial test bodies to be tested, for example workpiece surfaces, machine surfaces or circuit boards, in order to detect particles from the surface, wherein the particles are rotated in a centrifugal separator, in particular by the tangential introduction of the sucked-in particle/air mixture, and are thrown against the inner wall of the centrifugal separator, so that the particles fall down into a collecting container, which is arranged in a particularly detachable manner.

For the purpose of sucking the particles into the centrifugal separator, the suction pressure or the underpressure is conveyed into the centrifugal separator by means of an in particular flexible underpressure supply line which is connected in an air-conducting manner to a submerged tube of the centrifugal separator, which preferably passes axially and/or along a vertical axis downwards beyond the point at which the suction line opens into the centrifugal separator, wherein the smallest or remaining particles are fed into an analysis filter (which in particular is preferably woven from plastic filaments) corresponding to the underpressure supply line, thereby ensuring that no large amounts or relevant particles are blown out or lost during the collection of the particles.

However, since the centrifugal separator principle according to the utility model is utilized in connection with the detection of the technical cleanliness of the test body, most of the particles are separated in the centrifugal separator and do not even reach the analysis filter, so that the suction pressure as well as the suction power do not deteriorate or only slightly deteriorate over time.

The particle collecting apparatus according to the utility model is easy to operate and requires little auxiliary and operating material for its operation, only one compressed air connection for generating the suction pressure (negative pressure source). Furthermore, the movement of a manual (hand-operated) or automated (handling device, for example a robot arm) on the surface of the test body can only detect partial regions of the test body. Furthermore, the test of technical cleanliness by means of the cleaning device according to the utility model does not lead to negative effects or damage to the test body, such as occur in the rinsing chamber of a liquid rinsing medium (known from the prior art).

In addition to downstream microscopic analysis of the collected particles, the particles in the analysis filter and/or the particles collected in the collection container may additionally or alternatively be subjected to gravimetric analysis.

Advantageous embodiments of the utility model are described in the examples. All combinations of at least two of the features disclosed in the description, the embodiments and/or the drawings are within the scope of the utility model.

It is particularly preferred if the collecting container is arranged on the centrifugal separator in a detachable manner by means of a screw connection, in particular in the mounted or fixed state, the collecting container being connected with the centrifugal separator in a suction air conducting and sealing manner by means of a sealing ring on one side. This advantageously promotes uniform dropping of the particles into the collection container. Alternatively, it is also preferably provided that the collecting container is connected to the centrifugal separator via an adapter element, wherein the adapter element preferably comprises a threaded connection. By means of the adapter element, different collection containers can be effectively connected to the centrifugal separator, so that a matching to the size of the collection container is achieved, irrespective of the number and/or nature of the particles.

In connection therewith it is furthermore provided that the collecting container comprises a collecting surface with a binding agent for the particles falling from the centrifugal separator. The adhesive is preferably chemically activated and is preferably covered by a protective film prior to activation. Furthermore, the correspondingly formed collecting container comprises a cover element to prevent contamination of the interior and/or the collecting surface of the collecting container by (additional) particles outside the measuring period in the transport state of the collecting container. The cover device thus enables a time-limited measurement to be carried out, since the number of particles collected in the collection container closed by the cover device is not changed. It is particularly preferred that the collection container is detachably connected to the adapter element by means of an adhesive in order to collect the particles on the collection surface during the measurement time (time period or prescribed time interval). The particles falling from the centrifugal separator are advantageously fixed in their position on the collecting surface by means of an adhesive. This advantageously prevents the formation of particle agglomerates or particle accumulations, which occur in particular in the transport phase of the particle-filled collecting container after the cleaning phase (suction mode of operation of the particle collecting apparatus).

It is also provided in an expanded manner that the particle collecting device is arranged on a carrier plate with a handle, in particular a grip handle. In this case, the centrifugal separator is preferably arranged on the carrying floor in such a way that the particles fall into the collecting container in the suction operating mode due to gravity, wherein the collecting surface formed by the collecting container is oriented horizontally. Furthermore, the filter holder is preferably also arranged on the carrier plate in such a way that the particle collection surface of the received analysis filter is oriented horizontally. Advantageously, this allows the particle collection apparatus to be easily transported to different sites of use, where technical cleanliness can be tested.

It has also proved advantageous in particular design aspects of the centrifugal separator if the centrifugal separator has as few corners and edges as possible, since particles may collect and/or adhere in the corners and edges. For this purpose, the centrifugal separator preferably has no other liquid-conducting internal structure, apart from the immersion tube, which is arranged radially on the inner circumferential wall. In particular, the centrifugal separator has no edges and no small radii in the region below the preferably tangentially opening suction line as described above.

This can be advantageously achieved in that the centrifugal separator has an inlet cylinder into the region of which the suction line enters or opens, wherein the inlet cylinder merges via a transition radius into a conical section located below, in which the rotational speed of the rotating particle/air mixture increases and thus a better sedimentation rate is ensured. Alternatively, instead of a conical section, a cylindrical section may be provided to avoid damage// sorting of the particles during descent due to higher flow velocities. This has the advantage that the corners and edges of the particles do not flake off, which may falsify the results of the technical cleanliness tests.

In a further development, it is preferably provided that the suction line is detachably connected to the centrifugal separator and the negative pressure supply line is detachably connected to the filter holder, wherein corresponding coupling units for the connection of the suction air conducting of the suction line or the negative pressure supply line are formed in the same way. This advantageously enables the particle collecting device to be operated without the need for a centrifugal separator, thereby detecting/analyzing a test body having only few and very small particles.

In a further embodiment, it is preferably provided that the filter holder is designed for the clamped accommodation of an analysis filter which is initially sheet-like or flat. Such an embodiment enables a comfortable and fast exchange of an analysis filter for analyzing particles located on the particle collection surface.

Furthermore, such an embodiment enables a particularly preferred variant of the particle collection device according to the utility model in which the filter holder deforms the initially flat, in particular sheet-like analysis filter into a receiving bowl in order to reliably prevent particles lying thereon from falling off from the side during removal or disassembly of the analysis filter and during transfer to the analysis means of the system. In this case, the preferably circular particle collecting surface is delimited on the circumferential side by the formed circumferential edge.

As already mentioned, it is additionally provided that the filter holder forms a receiving bowl for permanently deforming an initially planar or substantially two-dimensional analysis filter, in particular at least partially plastic, into a three-dimensional shape, characterized by a particularly circular and/or flat, in particular central receiving area (particle collection surface) and a (raised) circumferential edge which surrounds the particle collection surface on the outside, so that the particles collected during the collection of the particles are transported safely to the particle analysis device together with the analysis filter deformed into the three-dimensional receiving bowl, i.e. there is no risk that the particles can leave the receiving area from the side, since the particles are intercepted by the circumferential edge and/or are protected against being blown off by air turbulence and/or air currents by removing the analysis filter.

Particularly preferably, the filter holder is arranged such that the resulting receiving bowl is, after formation, open upwards with respect to the vertical, so that the particles are retained inside the bowl on the upper side of the central receiving area and are closed by a peripheral edge extending upwards therefrom.

From a constructional point of view, in order to achieve a deformation of the analysis filter into the shape of the receiving bowl, it is expedient if the filter holder comprises a first and a second filter holder housing which are tensioned against one another for clamping and deforming the analysis filter, for example by means of a screw-wing nut arrangement or other tensioning means. In the case of a horizontal arrangement of the particle collection device, the first filter housing is arranged in the vertical direction above the second filter holder housing, wherein an annular flange (annular projection) is provided on the second filter holder housing below, which annular flange extends upwards in the vertical direction, wherein the annular flange corresponds to an annular recess provided in the first filter holder, in particular of uniform shape, into which the annular flange engages in the tensioned state of the filter holder housing, so that the analysis filter is clamped in this region (i.e. between the annular flange and the annular recess) and is at the same time permanently deformed into the receiving bowl. The provision of an annular flange on the lower second filter holder housing ensures that the resulting peripheral edge is directed upwards starting from the inner receiving region (particle collection surface) in the direction of the first filter holder housing. It is also preferred that the particle collection surface extends in a horizontal plane and/or that the analysis filter does not need to be deflected during disassembly, so that a horizontal orientation of the particle collection surface is always achieved during disassembly.

Preferably, the height extension of the peripheral edge, measured from the particle collection surface adjacent thereto, is at least 2mm, preferably at least 3 mm. It is therefore preferred that the annular flange has at least such a height extension.

In particular, in the case of the preferred use of an analysis filter woven from plastic threads, after demoulding of the first and second filter holders, the outer peripheral edge tends to spring upwards from the annular groove and annular flange shape, whereby the overall height extension of the peripheral edge is enlarged, which increases the safety against particles falling off the bowl-shaped or three-dimensionally deformed side of the analysis filter.

In a further embodiment, it is provided that the suction line has a flexible connecting section and an end section, wherein the end section for suctioning the particle/air volume flow has a suction opening. This advantageously enables the suction line to be gripped and/or fixed at the end portion in order then to be moved over the surface of the test body in order to suck particles.

In a further embodiment, it is provided that the end section of the suction line and the flexible connecting section are connected in an electrically conductive manner and are designed such that the end section can be contacted in an electrically conductive manner and/or can be contacted by an ESD contact device for electrically conductive contact with a protective conductor (PE or ground). Thus, if the flexible connection portion is also connected with the protective conductor and/or the ground potential, a potential difference between the end portion of the suction line or the flexible connection portion and the surface to be tested of the test body can advantageously be prevented. This is particularly advantageous when testing the technical cleanliness of electronic components, since damage caused by electrostatic discharge (ESD) during movement of the surface to pump particles can be prevented.

Furthermore, it is provided here that the end section of the suction line is formed by a suction element, preferably formed as a suction mouth, which is connectable or alternatively permanently fixed to the flexible connecting section, in particular in a detachable manner. The suction element can preferably have a tapered inner circumference in order to produce a nozzle effect in the suction air volume flow.

It is also preferably provided that the suction element has electrically conductive and flexible bristles which are arranged at the suction opening in order to wipe the surface of the test body, so that particles adhering to the surface as a result of the charge loading are removed and sucked in by the suction line. Here, the suction element is also preferably formed from an electrically conductive material.

The bristles preferably comprise a plastic material in which electrically conductive particles, in particular graphite, are mixed. However, bristles consisting of electrically conductive polymers or metals are also conceivable.

It is particularly advantageous if the suction line is connected in an electrically conductive manner to the housing or housing element of the particle collection device in order to bring the ESD contacts of the ESD contacting means into electrically conductive contact. Advantageously, this enables the suction line to be indirectly grounded through the stationary housing of the particle collection apparatus.

Thus, during wiping of the surface for suction of particles, the ESD contact means do not have to move together with the suction line, but can be designed to be fixed between an ESD contact arranged on the housing and the protection conductor.

In a further embodiment, it is provided that the ESD contact is designed as a button receptacle, which detachably holds a button, which is arranged at one end at an electrical connection cable of the ESD connection device. The protective conductor is preferably tapped from a domestic and/or industrial socket, preferably designed as a Schuko socket. Alternatively, the protection conductor can also be tapped directly, for example as part of a house installation. It is particularly preferred that the ESD contacting means comprise a plug which can be plugged into a domestic and/or industrial socket, so that only electrical contact is made with the protective conductor. For this purpose, the pin contacts for tapping the phase and neutral conductors are made of an insulator, preferably plastic, or are not implemented in the plug. The simplest electrical contact between the ESD contact device and the protection conductor of the power supply system is thus advantageously achieved. In addition, the actual operation of the operator does not require electrical knowledge.

It is further provided that the suction line is designed in a multi-layer manner, wherein an inner layer, in particular the innermost layer, of polyvinyl chloride (PVC), which provides an inner surface with a particularly low surface roughness, is preferably included. The surface that is as smooth as possible advantageously promotes that few particles to be sucked will adhere to the inside of the suction line, which may lead to erroneous test results. In addition to the inner layer, an outer layer, in particular an outermost layer, is provided, which is formed in particular from a plastic containing electrically conductive particles, in particular graphite, or from an electrically conductive polymer or from a metal hose element, in order to achieve the electrical conductivity of the suction line. Preferred are flexible hoses or textile hoses made of metal or other electrically conductive textile material, for example using electrically conductive plastic filaments and/or designing the suction line as a bellows, wherein the suction hose of the suction line can remain flexible by means of the bellows structure despite the use of a rigid layer material. In a further development, it is also possible to use flexible materials to form the suction line, which is then reinforced with a specific textile structure.

It is particularly advantageous if the flexible connection part or the suction line comprises at least one sleeve element at the end, which sleeve element is arranged on the outer circumference of the flexible connection part and in particular achieves that: the suction element or suction nozzle is detachably inserted into a housing element of the centrifugal separator or the particle collecting apparatus and/or the flexible connecting portion is detachably inserted into a housing element of the centrifugal separator or the particle collecting apparatus. Since the sleeve element is preferably formed from an insulator (non-conductive material), it is further provided that the flexible connecting portion protrudes from the sleeve element at an end side in the axial direction. Advantageously, during the insertion of the sleeve element in the axially tapering receptacle (cone), an electrical contact can be made between the flexible connection and the inner surface of the cone by means of the axial projection of the flexible connection. Alternatively, the electrical contacting of the flexible connecting part can also be realized by a projecting, free cross section (annular surface) of the flexible connecting part, which lies in a form-fitting manner on the electrically conductive end face of the ESD contact device in the inserted state.

The correspondingly formed axial projection of the suction line makes electrical contact with the suction element or with the housing element or the centrifugal separator at both sides of the suction line possible.

In a further embodiment, it is provided that the particle collection device comprises a means for flooding the analysis filter accommodated by the filter holder in a flooded operating mode of the particle collection device, and a pouring means for discharging a liquid, in particular water or a cold cleaning agent, which floods the analysis filter. This embodiment of the particle collection device according to the utility model advantageously achieves that the particles intercepted in the suction mode of operation are uniformly rearranged on the particle collection surface.

It has been shown that in the suction mode of operation the particles are largely unevenly and/or marginally located on the particle collection surface, thereby making optical analysis for determining the number, size and/or nature of the particles difficult or impossible. In the present case, however, the particle collection surface can advantageously be briefly flooded by the liquid before the contaminated analysis filter is removed by the means for flooding in order to achieve a uniform and/or regular (new) arrangement of the particles, so that the optical analysis can be carried out immediately after the removal of the analysis filter.

The particles adhering to the particle collection surface are submerged by the supplied liquid and the particles increasingly deposited in the edge region of the particle collection surface are distributed uniformly over the surface of the liquid formed in the suction mode of operation. After the particle collection surface is completely submerged, the liquid is completely drained again by the pouring means in the draining mode of operation of the particle collection apparatus. Since the liquid flows slowly through the analytical filter during the discharge, evenly distributed particles settle on the particle collection surface after the liquid has been completely emptied.

In this case, it is furthermore provided that, during the discharge of the liquid, a small amount of liquid is also supplied, so that the particles sticking in the edge region become loose.

In addition, it is provided in one embodiment that the means for flooding comprise a hollow-cylindrical pipe section or pipe for forming the recess.

In this case, it is also provided that the filter holder and the recess are designed as coupling units which can be connected in series (i.e. suction-air-conducting and liquid-tight connectable). Advantageously, this enables a multi-stage filter, for example, in order to filter out larger particles in a first stage filter by means of an analysis filter having a large pore density and to filter out smaller particles in a second stage filter by means of an analysis filter having a small pore density.

In this case, it is also advantageously provided that the flooding of the particles on the two analysis filters takes place simultaneously or offset in time.

Furthermore, it is preferably provided that during the flooding of the two analysis filters, a fabric filter with a lower pore density is used to trap the liquid, in particular water or cold cleaning agent, so that the particle collection surface of the other analysis filter is flooded by flowing back the liquid.

It is further provided that the particle collection device comprises a cleaning unit, which is designed to: in the rinsing mode of operation, the particle collection device, in particular the assembly for guiding the particle/air mixture in the suction mode of operation, can be rinsed by suctioning the cleaning liquid in order to rinse off adhering particles.

It is preferably provided here that the cleaning unit comprises a liquid storage unit, which is in particular detachable with respect to the particle collecting device and/or is designed as a separate component, for supplying cleaning liquid for flushing through the particle collecting device, in particular the centrifugal separator, the filter holder, the suction line and/or for forming the negative pressure supply line in a flushing mode of operation of the particle collecting device.

In one embodiment, the cleaning unit comprises: in particular, an adapter unit is provided as a separate component, which is provided for the liquid-conducting connection of the adapter unit to a negative pressure source, in particular to a filter holder, instead of the collecting container and/or the connecting hose comprising the valve, in particular by way of a lateral socket, which is located in the filter holder in the liquid-conducting state of the valve.

In one embodiment, the cleaning unit comprises a membrane suction part which is detachable from the particle collection device and/or is formed as a separate component and which is formed for connection to the suction line at the end side, wherein pure air, in particular air which does not comprise particles, can be sucked in the drying mode of operation of the particle collection device via the gas-permeable membrane of the membrane suction part.

In addition, it is preferably provided in this case that, in the flushing mode of operation, the particle collecting device is designed and/or arranged such that the adapter unit is connected to the centrifugal separator, wherein the valve is switched into the fluid-blocking state and cleaning fluid can be sucked in from the fluid storage unit via the suction line for flushing the particle collecting device, in particular the centrifugal separator and/or the filter holder, and/or that, in the drying mode of operation, the particle collecting device is designed and/or arranged such that the membrane suction part is connected to the suction line at the end side and cleaning fluid sucked in the centrifugal separator can be discharged via the connecting hose and the liquid-conducting valve into the negative pressure source, in particular into the filter holder, so that the cleaning fluid is discharged from the particle collecting device, in particular the suction line, the centrifugal separator, the filter holder, The negative pressure supplies the residual cleaning liquid of the line and/or the filter holder.

Within the scope of the utility model, a cleaning system is also protected in which the particle collection device according to the utility model is combined, in particular with a particle analysis device which analyzes the particles sucked and collected by means of the particle collection device, wherein the particle collection device comprises further functional elements.

It is further provided that the functional element is formed by a module, wherein the module can be combined with or expanded by a plurality of further modules.

In one embodiment, the further functional element can advantageously be designed as a box, which can be folded up the particle collection device for safe transport. Furthermore, it is preferably provided that the particle collecting device can be arranged on the closed box during operation and can be detachably fixed to the box via a fixing device. This achieves advantageous operation of the particle collection apparatus at different points of use. In addition, higher demands on the particle collection apparatus, simplified handling and also protection of the particle collection apparatus from damage and contamination are also achieved.

In a further refinement, it is provided that the module is formed by a vacuum cleaner which is operatively connected to the particle collection device, so that a negative pressure source for suction is formed. Advantageously, the vacuum cleaner can be arranged directly below the transport box of the particle collecting apparatus and be fixed by means of the fixing means, which enables particularly comfortable transport. In addition, conveyor rollers are preferably provided on the underside of the module.

Drawings

Further advantages, features and details of the utility model can be taken from the following description of preferred embodiments with reference to the drawings. Wherein

FIG. 1 illustrates a perspective view of a first embodiment of a particle collection apparatus formed in accordance with the present inventive concept;

fig. 2a, 2b, 2c show different partial cross-sectional views of a centrifugal separator (cyclone) of the particle collecting device according to fig. 1;

FIG. 3 shows a cross-sectional view of two respective filter holder housings for an alternative and preferred filter holder for the particle collection apparatus according to FIG. 1;

FIG. 4 is a three-dimensional illustration of two filter holder housings according to FIG. 3;

FIG. 5a shows an analysis filter deformed during clamping between filter holder housings according to FIG. 4;

FIG. 5b shows the analysis filter deformed relative to the containment housing;

fig. 6a, 6b are different embodiments of the connection of the suction line in conductive and electrically conductive communication with the suction air of the centrifugal separator;

FIG. 7 is a schematic view of a filter holder including means for flooding for the rearrangement of particles collected on the particle collection surface of an analysis filter;

FIG. 8 is a perspective view of a cleaning system formed in accordance with the concepts of the present invention having a particle collection apparatus in accordance with a second embodiment of the present invention, which may be disposed on or in a transport bin;

fig. 9a, 9b are schematic views of a particle collection apparatus comprising a cleaning unit to rinse off particle residues from the particle collection apparatus.

Detailed Description

In the drawings, the same elements and elements having the same functions are denoted by the same reference numerals.

Fig. 1 shows a portable particle collection apparatus 1 for collecting particles from a surface for particle analysis in the detection of technical cleanliness of a test body, in particular an industrial work piece, a machine and/or a circuit board. The particle collecting device 1 comprises a mounting plate or carrier plate 2 having a handle in the form of two spaced-apart grips 3, 4. A frame structure 5 is fixed to the carrier plate 2 for holding the various components.

The device 1 further comprises a compressed air connection 6 for detachably connecting a compressed air system, not shown in fig. 1, to form a negative pressure source, and a regulating device 7 for regulating the operating point of the negative pressure source, in particular to set a nominal pressure of preferably 5 bar. In this case, the suction pressure/underpressure can be generated in the underpressure supply line 9 via a nozzle by the compressed air supplied by the compressed air system.

The air flowing out of the source of underpressure (sum of sucked air and compressed air) can be connected via a not shown connecting line to the silencer 10 of the device 1, so that the particle collecting device 1 can be operated with little noise.

Alternatively, the negative pressure source can also be realized by a vacuum cleaner in order to operate the particle collecting apparatus 1 according to the utility model independently of a stationary compressed air system.

Furthermore, the negative pressure supply line 9 comprises at the end side a filter holder 25, which filter holder 25 is designed for holding the analysis filter 46 such that particles which are not filtered out of the suctioned particle/air mixture by the centrifugal separator 11 are caught on a particle collecting surface 80 formed by the analysis filter 46 before reaching the negative pressure source.

As described above, the negative pressure source generates negative pressure in the negative pressure supply line 9, and the centrifugal separator 11 (cyclone) is supplied with negative pressure through the negative pressure supply line 9. Whereby the air/particle mixture is sucked from the surface to be tested into the centrifugal separator 11 through the suction line 12.

The suction line 12 comprises a flexible connecting portion 60 and an end portion 61, wherein the end portion 61 comprises a suction opening 62 for sucking the particle/air mixture. Furthermore, the end portion 61 is designed for accommodating a plurality of suction nozzles 13.

As can be seen from fig. 2a, the suction line 12 opens tangentially into an (upper) inlet cylinder 14 of the centrifugal separator 11, which inlet cylinder 14 merges in a lower region over a larger radius R of 20mm into a conical portion 15, which conical portion 15 terminates in a lower region in a filling portion 16, which filling portion 16 serves for filling a collecting container 17, which is detachably connected to the centrifugal separator 11 and is shown in fig. 1, which collecting container 17 is made of a transparent polymer material in the embodiment shown. The collecting container 17 can be fixed to the centrifugal separator 11 by means of a screw connection 52.

The centrifugal separator 11 is connected in suction-air communication with the negative pressure supply line 9 via a dip tube 22 shown in fig. 2c, so that a suction-air volume flow (air mixture with a portion of particles) flows through the filter holder 25 into the negative pressure source.

Fig. 2c furthermore shows a sectional view of the centrifugal separator 11 known from fig. 2b, wherein an alternative particle collection unit 56 is used as the collection container 17. The particle collection unit 56 comprises a particle collection surface 53 for receiving particles falling from the centrifugal separator 11. Furthermore, the collecting surface 53 is provided with a chemically acting binder 54 in order to adhere the particles to the collecting surface 53. The particle collection unit 56 is arranged relative to the centrifugal separator 11 via an adapter element 55, which adapter element 55 in turn is detachably connected with the centrifugal separator 11 by means of the threaded connection 52. For this purpose, an adhesive 54 is advantageously used in the edge region of the collecting surface 53. After the test has been performed, the particle collection unit 56 can be very easily detached from the centrifugal separator 11 and closed by a cover for subsequent safe transport of the particle collection unit 56 to the analysis site. The particles are firmly fixed to the collecting surface 53 by means of the binder 54, so that wear or the formation of particle agglomerates is advantageously avoided. Optical analysis of the size, quantity and properties of the particles can thus be carried out directly at the analytical site.

Fig. 3 shows a schematic sectional view of a filter holder 25 for receiving a plate-shaped, woven analysis filter 46. The filter holder 25 includes: a first filter holder housing 27 located above along the vertical line V and a corresponding lower second filter holder housing 28 arranged fixedly on the frame on the mounting plate side. In the assembled state, with reference to fig. 1, the sucked-in air (which has residual particles not separated by the collection container 17) reaches into the first filter holder housing 27 via the negative pressure supply line 9 and then contacts the particle collection surface 80 of the clamped analysis filter 46 between the filter holder housings 27, 28.

In the clamped state, the analysis filter 46 has the shape shown in fig. 5 a. This is due to the fact that the second filter holder housing 28 has a circumferential annular flange 48 on the top side facing the first filter holder housing 27, which annular flange 48 corresponds to a substantially uniformly shaped annular recess 49 in the first filter holder housing 27, wherein the initially sheet-like analysis filter 46 is clamped between the annular flange 48 and the annular recess 49.

Due to the tensioning of the two filter holder housings 27, 28 along the vertical line V, in particular by means of a wing nut locking mechanism, in a preferred embodiment of the device 1 according to the utility model it is provided that the preferably woven analysis filter 46 is plastically deformed to produce the receiving bowl 47 shown in fig. 5 b. As a result of the connection of the filter holder housing 28 to the negative pressure source 8, this deformation is intensified by the negative pressure on the bottom side of the analysis filter 46 in the clamped state, so that particles or residual particles are transported via the negative pressure supply line 9 into the first filter holder housing 27 and thus onto the particle collection surface 80 formed along the horizontal plane on the top side of the analysis filter 46.

In addition to the deformation effect, the annular collar/ annular groove combination 48, 49 also has a sealing effect, wherein the analysis filter 46 clamped therebetween assumes the function of a flat seal in order to reliably prevent lateral intake of outside air.

In fig. 4, the second filter holder housing 28 according to fig. 3 is shown in a three-dimensional oblique view. A circumferential annular collar 48 can be seen, which annular collar 48 corresponds in the clamped state to an annular groove 49 of the first filter holder housing 27.

After testing technical cleanliness and suctioning the particles, the first filter holder housing 27 is removed from the fixed second filter holder housing 28, and the analysis filter 46 or the receiving bowl 47 formed therefrom with the particles located thereon can then be removed and transferred into a particle analysis device.

Fig. 5a shows a sectional view of the analysis filter 46 in the filter holder 25. The contour of the annular flange 48 can be clearly seen, which annular flange 48 circumferentially defines a horizontally oriented particle collecting surface 80.

Preferably, after the test procedure, the receiving bowl 47 formed by the analysis filter 46 comprises a substantially flat inner or central receiving area 50, which receiving area 50 forms the particle collecting surface 80 and is surrounded radially on the outside by a peripheral rim 51, which peripheral rim 51 extends upwards along the vertical line V and surrounds the receiving area 50 or the bowl bottom in the manner of a bowl wall, so that particles are reliably prevented from falling off from the side.

When a commercially available woven plate filter is used, a cross-sectional view of the receiving bowl shape shown in fig. 5b is obtained. It can be seen that the outer edge or the outer peripheral edge portion is folded upwards, which may be due to the internal stress of the analysis filter material and its rounded shape.

As can be seen in comparison with fig. 5a, this outer edge region, while still clamped, is bent downward and rests against the outer circumferential side of the annular collar 48.

Fig. 6a shows a cross-sectional view of a preferred configuration of the suction line 12, which suction line 12 comprises in the embodiment shown a flexible connecting portion 60 and a sleeve element 35. The suction line 12 may be connected in suction air communication with the particle collecting device 1 or with the centrifugal separator 11 by means of a conical connection 34. In addition to the suction-air-conducting connection of the suction line 12, an electrical contact of the flexible connecting portion 60 with the particle collection device 1 is also achieved by the conical connection 34, so that an advantageous ESD contact of the suction line 12 described below is achieved.

The cross-sectional view shows the multi-layer structure of the suction line 12. In the present case, the suction line 12 comprises an inner layer 30 and an outer layer 31. The inner layer 30 is composed of polyvinyl chloride (PVC) and is optimized for a smooth surface so that it will adhere to as few particles as possible during suction during operation. The outer layer 31 consists of plastic mixed with graphite to provide electrical conductivity. Furthermore, the suction line 12 comprises a fabric material 32 to enhance its structure (rigidity).

On the outside of the flexible connecting section 60, on the end side of the suction line 12, a conical sleeve element 35 is provided, which in the inserted state achieves a mechanical fixing of the suction line 12 to the particle collecting device 1. To achieve a plug connection, the sleeve element 35 comprises a conical outer side surface which tapers at the end.

Furthermore, the conical sleeve element 35 is arranged on the outer circumference of the suction line 12 in such a way that the suction line 12 partially protrudes axially over the sleeve element 27, which is why the axial projection 29 is formed from the flexible connecting portion 60. Advantageously, this achieves that the suction line 12 can be in electrical contact with the outer cone 36, which outer cone 36 is connected in an electrically conductive manner to the ESD contact means.

For the connection of the suction line 12 in suction air communication with the particle collecting apparatus 1 or with the centrifugal separator 11, the sleeve element 35 is inserted into the outer cone 36 by a transverse insertion movement, so that an electrical contact between the electrically conductive outer layer 31 and the outer cone 36 is brought about by the axial projection 29 of the flexible connecting portion 60. In order to avoid an unintentional detachment of the conical connection 34 during the suction process, the conical connection 34 is preferably equipped with a pivotable shield 33 arranged on the outer cone 36, which shield 33 in the fixed state connects the suction line 12 with the particle collection device 1 in a suction-air conducting manner, preferably in a form-fitting manner, so that the sleeve element 35 abuts and an (accidental) detachment of the conical connection 34 is avoided.

Fig. 6b shows a sectional view of an alternative embodiment of the suction line 12, which is accommodated by a plug connection, which makes electrical contact with the suction line 12 in addition to the suction-air-conducting connection of the suction line 12.

The suction line 12 comprises a flexible connecting section 60 with an outer layer 31 and an inner layer 30, wherein the outer layer 31 is also designed here to be electrically conductive. In this case, a cylindrical sleeve element 38 is arranged on the end face of the suction line 12, which sleeve element 38 forms a circumferential-side stop 39 formed in the radial direction in order to limit the transverse insertion movement during the introduction of the suction line 12.

The sleeve element 38 is arranged on the outer circumference of the suction line 12 in such a way that an axial projection 29 is formed in this case also from the end of the suction line 12.

The connection of the suction line 12 in communication with the suction air of the centrifugal separator 11 is effected by a transverse insertion movement, wherein the sleeve element 38 is inserted into the hollow-cylindrical connecting element 37 and the insertion movement is limited by the 3-stop 39. The stop 39 advantageously defines the insertion depth of the suction line 12, so that an electrical contact is made between the suction line 12 and the hollow-cylindrical receptacle 37 (i.e. with an annular fastening contact surface 41) via a (free) end surface 40 of the outer layer 31 of the suction line 12. For fixing the suction line 12 and for sealing, the cylindrical sleeve element 38 comprises two annular seals 42 which are arranged in the outer circumferential surface and interact in a fixed and sealing manner with the cylindrical receptacle 37 in the inserted state.

Fig. 7 shows a schematic cross-sectional view of a filter holder 25 according to a preferred embodiment of the utility model. The filter holder 25 is advantageously formed with a tube or sleeve portion 84 with a recess 83, which recess 83 cooperates with the means 81 for flooding of the particle collecting surface 80. In this case, the means 81 for flooding are designed such that the particle collection surface 80 can be completely flooded by the liquid in the flooding mode of operation, so that particles (previously) deposited on the particle collection surface 80 in the suction mode of operation float on the surface of the liquid.

As a result of the flooding of the particles in the flooding mode of operation of the particle collecting device 1, already formed particle agglomerates and particle accumulations are loosened. Furthermore, the particles floating on the formed liquid surface due to the surface tension of the liquid are evenly distributed over the liquid surface. The intercepted liquid can be discharged again through the controllable pouring device 82, whereby the uniform arrangement of the particles can be advantageously maintained. Thus, the particles can be optically analyzed immediately after the removal of the analysis filter 46.

It is also particularly advantageous if the filter holder 25 shown in fig. 7 is designed as a two-stage coupling unit 85, wherein in principle several coupling units 85 can also be connected to one another in succession (in series) in the suction-air conducting manner.

It is thereby advantageously achieved that larger particles are filtered out of the particle/air mixture in a first filter stage of the first analysis filter 46b having a first pore density, and that smaller particles are filtered out of the particle/air mixture in a second filter stage of the second analysis filter 46b having a smaller pore density (compared to the first pore density). The maximum measurement time of the particle collecting device is thereby advantageously extended, since the total number of particles is distributed over the two analysis filters 46a, 46 b.

In addition, it is provided in this case that such a multistage filter can be flooded by a common flooding mode of operation, so that the particles on the particle collection surface are rearranged in a new, in particular uniform manner.

Advantageously, in order to intercept or accumulate the liquid of the device 81 for flooding, it is preferably provided that the last analysis filter 46a arranged in suction-air-conducting manner has a low pore density, and in a corresponding structural design, a parallel and horizontal orientation of the particle collection surfaces 80 of the first and second analysis filters 46b, 46a arranged vertically spaced apart from one another is preferred.

In fig. 8 a cleaning system 76 for cleaning the particle collecting device 1 according to a preferred embodiment of the present invention is schematically shown. The cleaning system 76 comprises an easy-to-operate particle collecting device 1 according to the utility model, which is arranged in a detachable manner on the transport bin 74 by means of a fixing means 75.

A transport box 74 capable of fully containing the particle collection apparatus 1 for transport or safe storage stands on a multi-socket module 77 having four sockets 78. After the connection cable 79, which can be stored and transported inside the multi-outlet module 77, has been connected to the electricity supply network at the place of use by the domestic and/or industrial outlet 90 used, the outlet 78 can be used for the energy supply of the energy consumers.

On the outside of the multi-socket module 77, a lighting device 91 is provided, the lighting state of which lighting device 91 signals the electrical supply network which is electrically contacted and therefore the protective conductor of which is electrically contacted.

Furthermore, the illustrated cleaning system 76 comprises a further module formed by a vacuum cleaner 92, so that at the place of use the underpressure source of the particle collecting device 1 according to the utility model can be formed independently of the stationary compressed air system. For this purpose, the vacuum cleaner hose 97 is connected in a suction-air conducting manner to a vacuum supply line 9, which vacuum supply line 9 comprises the filter holder 25.

For transport, the vacuum cleaner 92 has rollers 93 for moving the stacked modules or the transport cleaning system 76. In this case, the particle collecting device 1 may be arranged accordingly on top of the transport box 74, or may also be stored in the transport box 74 for longer transport routes or safe storage.

The second preferred embodiment of the particle collection apparatus 1 according to the utility model shown in fig. 8 further comprises: a centrifugal separator 11 forming a first stage filter for the particles being pumped; and a filter holder 25 accommodating a replaceable analysis filter 46, which forms at least a second stage filter for the particles to be suctioned.

The suction line 12 comprises a flexible connecting portion 60 and an end portion 61 arranged at the free end, which end portion 61 has a suction opening 62 for sucking the particle/air mixture by means of the generated suction air flow. The suction line 12 opens tangentially into the centrifugal separator 11 in order to collect a first fraction of the particles in a detachably arranged collecting container 17.

The centrifugal separator 11 is also connected in suction-air communication with the vacuum supply line 9 via a submerged pipe 22, not shown.

The end portion 61 of the suction line 12 is connected via a flexible connection portion 60 and a plug connection known from fig. 6b with an ESD contact means 63 of the particle collection device 1, which ESD contact means 63 comprises a button accommodation not shown, so that an electrical contact between the ESD contact means 63 and the protection conductors of the first socket 95 of the multi-socket module 77 is achieved via a connection cable 94 comprising a button on the end side. For this purpose, the connecting cable 94 comprises, on the end side, a dummy plug 96 made of a polymer material, which dummy plug 96 can be inserted into the socket 78 of the multi-socket module 77 for protecting the electrical contact of the conductors. The dummy plug 96 comprises a contact pin made of a polymer material, so that only one electrical connection can be realized between the protection conductor and the connection cable 94, wherein the respective contact is formed by an electrically conductive material.

Alternatively, the ESD contacting means 63 of the particle collecting device 1 can also be connected to the protective conductor of the electrical supply network via the vacuum cleaner 92. This has the advantage that the respective domestic and/or industrial socket 90 not only advantageously supplies the energy for operating the vacuum cleaner 93, but also establishes an electrical contact with the protective conductor of the electrical supply network.

During operation, a suction air flow for sucking the particle/air mixture is generated by the vacuum cleaner 92.

Advantageously, the suction line 12 of the particle collecting device 1 shown is grounded to prevent the generation of a potential difference between the end portion 61 and the test body during passage over the surface of the test body, thus not causing electrostatic discharges that negatively affect the electronic components.

Since the suction line 12 is connected in a detachable manner in a suction-air conducting manner to the centrifugal separator 11 and the negative pressure supply line 9 is connected in a detachable manner in a suction-air conducting manner to the filter holder 25, the particle collecting device 1 shown can also be operated in an alternative operating type only by means of the filter holder 25. For this purpose, only the suction line 12 has to be connected directly to the filter holder 25 in a suction-air-conducting manner, which can be achieved without an additional adapter unit owing to the same dimensions.

In fig. 9a schematic view of a particle collection apparatus 1 according to another preferred embodiment of the present invention is shown, the particle collection apparatus 1 being used for collecting particles from a surface for particle analysis in testing of technical cleanliness of a test body, in particular a workpiece, a machine and/or a printed circuit board.

In addition to the known centrifugal separator 11 and the filter holder 25, the particle collecting device 1 shown also comprises a cleaning unit 101 with an adapter unit 103, which adapter unit 103 is in operative connection with the centrifugal separator 11 via a housing 100 designed as a screw connection 52.

The adapter unit 103 comprises a schematically illustrated connecting hose 105, wherein a switchable valve 104 is arranged in the connecting hose 105 for interrupting the liquid conduction, which valve 104 is switchable between a liquid-conducting state and a liquid-blocking state.

The free end of the connecting hose 105 is in operative connection with the negative pressure source 8, wherein in this embodiment the negative pressure source 8 is formed by a wet cleaner 92, which wet cleaner 92 is in operative connection with the negative pressure supply line 9 comprising the filter holder 25.

Furthermore, the illustrated cleaning unit 101 comprises a liquid storage unit 102, which liquid storage unit 102 is schematically formed by a tub containing cleaning liquid in the figure.

To perform cleaning of the particle collecting apparatus 1, the suction line 12 is first immersed into the cleaning liquid of the liquid storage unit 102. Subsequently, the valve 104 is switched to a liquid blocking state to ensure that no cleaning liquid can flow through the connection hose 105.

The flushing mode of operation of the particle collecting apparatus 1 is now initiated, which is designed to generate a negative pressure by switching on the vacuum cleaner 92. This causes the suction line 12 to suck in cleaning liquid which flows into the centrifugal separator 11 and flows here through the filter holder 25 via the immersion tube 22 and the negative pressure supply line 9. Advantageously, the attached particles are floated by the cleaning liquid so that they do not negatively affect the measurement results of the subsequent tests. After flowing through the negative pressure supply line 9 or the filter holder 25, the cleaning liquid is collected in the storage unit of the wet cleaner 92.

During the flushing mode of operation, which is schematically illustrated in fig. 9a, the analysis filter 46 is preferably not present in the filter holder 25, so that all particles are spilled and cleaning liquid is not retained in the particle collecting device 1.

Furthermore, a large number of studies have shown that by using the adapter unit 103, advantageously a total of about 1 litre of cleaning liquid is required to be sufficient for completely cleaning the particle collecting device 1. Thus, the flushing mode of operation of the particle collecting apparatus 1 may be run several times before the storage unit of the wet cleaner 92 is completely filled with collected cleaning liquid and has to be emptied by the operator.

After the rinsing mode of operation of the particle collection apparatus 1 is performed, a drying mode of operation of the particle collection apparatus 1 is performed, which is schematically illustrated in fig. 9 b.

In order to implement the drying mode of operation, the vacuum cleaner 92 must first be deactivated, wherein the drying mode of operation preferably takes place immediately after the above-described rinsing mode of operation. Then, the film suction portion 106 is connected to the suction line 12 so that the suction opening 62 of the suction line 12 is completely covered with the gas permeable membrane 123 of the film suction portion 106.

After the suction air is conductively connected to the membrane suction portion 106, the valve 104 is switched to a liquid-conducting state. The vacuum cleaner 92 is then switched on to activate the negative pressure source 8.

The small-pore membrane 123 of the membrane module part 106 ensures that, in the currently active drying phase, the suction line 12 sucks only the pure air mixture flowing through the particle collection device 1 for removing the liquid residues of the cleaning liquid. Advantageously, the cleaning liquid sucked in the centrifugal separator 11 is collected during the rinsing mode of operation and discharged via the connecting hose 105 and the valve 104 switched to the liquid conducting state. Thus, it is only necessary to run for a few seconds to clean all liquid residues from the particle collection apparatus 1 immediately after the dry mode of operation of the particle collection apparatus 1 is performed to perform a new suction mode of operation to determine technical cleanliness.

The utility model thus makes it possible to overcome the disadvantages known from the prior art in a very simple manner and to provide a particle collecting device which can be used universally and which is not only designed to be mobile but is also suitable for testing different test bodies (determining technical cleanliness) in different production facilities.

List of reference numerals

1 a particle collection device;

2 bearing plate (mounting plate);

3, a handle is grabbed;

4, a handle is grabbed;

5, a frame structure;

6, a compressed air connector;

7 adjusting device

8 negative pressure source

9 negative pressure supply line

10, a silencer;

11 centrifugal separators (cyclones);

12 a suction line;

13 a suction nozzle;

14 input cylinders;

15 a conical portion;

16 a filling portion;

17 a collection vessel;

22 a submerged pipe;

25 a filter holder;

27 a first filter holder housing;

28 a second filter holder housing;

29 an axial projection;

30 an inner layer;

31 an outer layer;

32 a fabric material;

33 a pivotable guard;

34 a conical connecting part;

35 a conical sleeve member;

36 an outer cone;

37 a hollow cylindrical receiving portion;

38 a cylindrical sleeve member;

39 stop;

40 annular contact surfaces;

41 fixed contact surface;

42 an annular seal;

46 an analytical filter;

46a analytical filter with a smaller pore density;

46b analytical filters with a greater pore density;

47 accommodating bowl;

48 an annular flange;

49 an annular groove;

50 a housing area;

51 a peripheral edge;

52, screw thread connection;

53 a collection surface;

54 a binder;

55 an adapter element;

56 replaceable particle collection units;

60 a flexible connecting portion;

61 an end portion;

62 suction opening;

63 an ESD-contact device;

74 a shipping box;

75 a fixing device;

76 cleaning the system;

77 a multi-outlet module;

78 a socket;

79 connecting the cable;

80 analyzing a particle collection surface of the filter;

81 means for flooding;

82 a pouring device;

83 a recess;

84 tubes;

85 a coupling unit;

90 household and/or industrial outlets;

91 a lighting device;

92 a vacuum cleaner;

93 a roller;

94 connecting the cable;

95 a first socket;

96 dummy plugs for contacts of PE;

97 a vacuum cleaner tube;

100 an accommodating part;

101 a cleaning unit;

102 a liquid storage unit;

103 an adapter unit;

104 a switchable valve;

105 connecting a hose;

106 a film suction portion;

123 air permeable membrane.

Claims (23)

1. A particle collection apparatus for collecting particles from a surface for particle analysis in testing of technical cleanliness of a test body, the test body being a workpiece, a machine and/or a circuit board, the particle collection apparatus (1) comprising:

a centrifugal separator (11), to which centrifugal separator (11) a suction line (12) for sucking a particle/air mixture from a surface to be tested is connected, so that in a suction mode of operation the sucked particle/air mixture is rotated in the centrifugal separator (11) and the particles can be thrown against a wall and thus can be separated;

a collection container (17) for collecting the separated particles, the collection container (17) being detachably fixed to the centrifugal separator (11) in correspondence with the centrifugal separator (11); and

-a negative pressure supply line (9), the negative pressure supply line (9) comprising a filter holder (25), the filter holder (25) being intended to hold an exchangeable analysis filter (46) having a particle collection surface (80), wherein the dip tube (22) of the centrifugal separator (11) is connected to the negative pressure supply line (9) such that air which is drawn from the centrifugal separator (11) and flows through the negative pressure supply line (9) in the suction operating mode flows through the analysis filter (46) arranged in the filter holder (25) before reaching a negative pressure source (8) for intercepting the particles on the particle collection surface (80).

2. A particle collecting device according to claim 1, characterized in that the collecting container (17) can be detachably fixed to the centrifugal separator (11) by means of a screw connection (52), or the collecting container (17) can be fixed to the centrifugal separator (11) by means of an adapter element having a screw connection on one side.

3. A particle collecting device according to claim 2, characterized in that the collecting container (17) for collecting the separated particles comprises a collecting surface (53), which collecting surface (53) has a chemically acting binding agent (54), whereby the separated particles are fixed on the collecting surface (53) and the collecting container (17) is fixed on the adapter element by means of the binding agent (54).

4. The particle collecting device according to claim 1 or 2, characterized in that the particle collecting device (1) is arranged on the carrying floor (2) by means of a handle (3, 4), whereby the particle collecting device (1) is designed to be transportable.

5. The particle collection installation according to claim 1 or 2, characterised in that the centrifugal separator (11) is not immersed, apart from the immersion tube (22), and/or in that the centrifugal separator (11) is designed in the region below the suction line (12) without an edge or with a continuous transition, wherein the suction line (12) opens tangentially.

6. A particle collecting device according to claim 1 or 2, c h a r a c t e r i z e d in that the centrifugal separator (11) comprises an inlet cylinder (14) and a conical portion (15) therebelow, between which a surrounding transition radius is arranged.

7. A particle collecting device according to claim 1 or 2, characterized in that the suction line (12) is detachably connected to the centrifugal separator (11) and the negative pressure supply line (9) is detachably connected to a filter holder (25), the suction line (12) being designed such that it can be exchanged to the negative pressure supply line (9) so that the particle collecting device (1) can be operated with or without the centrifugal separator (11).

8. Particle collecting device according to claim 1 or 2, characterized in that the filter holder (25) is designed for clamping accommodation of the exchangeable analysis filter (46), wherein the filter holder (25) comprises a first filter holder housing (27) and a second filter holder housing (28).

9. The particle collection apparatus according to claim 8, characterized in that the filter holder (25) is designed such that it deforms the initially flat analysis filter (46) into a three-dimensional receiving bowl (47), the receiving bowl (47) having a circular and/or planar receiving area (50) and a peripheral edge (51) which surrounds the receiving area (50) on the outside, the receiving bowl (47) being removable from the filter holder (25) after operation of the particle collection apparatus (1).

10. A particle collecting device according to claim 4, characterized in that the suction line (12) comprises a flexible connecting portion (60) and an end portion (61), wherein the end portion (61) has a suction opening (62) for sucking the particle/air mixture, wherein a suction nozzle (13) is detachably mountable on the end portion (61).

11. A particle collecting device according to claim 10, characterized in that the end portion (61) and the flexible connecting portion (60) are designed to be electrically conductive, wherein the end portion (61) is contactable in an electrically conductive manner via the flexible connecting portion (60) and/or is contactable with an ESD-contact means (63), which ESD-contact means (63) is intended for electrically conductive contact with a protective conductor, wherein the end portion (61) is formed by a suction element (65), which suction element (65) is detachably connectable with the flexible connecting portion (60).

12. A particle collecting device as claimed in claim 11, characterized in that the suction element (65) is designed as a suction mouth (13, 64) and/or the suction element (65) has electrically conductive and flexible bristles (66), which bristles (66) are used to wipe the surface of the test body.

13. A particle collecting device according to claim 11 or 12, characterized in that the suction line (12) is electrically conductive and that the suction line (12) is connectable to a housing element (67) of the particle collecting device (1) for contacting an ESD-contact (68) of the ESD-contacting means (63) arranged on the housing element (67), wherein the housing element (67) comprises the carrier plate (2).

14. A particle collecting device according to claim 11 or 12, characterized in that the suction line (12) is formed in multiple layers with an inner layer (30) forming an inner surface (70) and an outer layer (31), the inner layer (30) consisting of polyvinyl chloride (PVC), wherein the outer layer (31) comprises a hose element of plastic, electrically conductive polymer and/or metal with electrically conductive particles for ensuring electrical conductivity.

15. A particle collecting device according to claim 13, characterized in that the electrical contact between the flexible connection portion (60) and the suction element (65) and/or between the flexible connection portion (60) and the housing element (67) is achieved by means of an axial projection (29) of the flexible connection portion (60), which axial projection (29) projects out of a sleeve element (69) arranged on the outer circumference of the flexible connection portion (60), which sleeve element (69) consists of an electrically non-conductive material for forming a detachable connection with the suction element (65) or the housing element (67).

16. The particle collection apparatus of claim 1 or 2, wherein the particle collection apparatus (1) comprises:

means (81) for flooding the particle collection surface (80), in a flooding mode of operation of the particle collection apparatus (1) particles which were unevenly deposited on the particle collection surface (80) in the suction mode of operation being levitated by the liquid; and

a pouring device (82) for discharging the liquid, in a discharge mode of operation the liquid flowing through the analysis filter (46) and the particles being evenly distributed and dampable over the particle collection surface (80).

17. A particle collecting device according to claim 16, characterized in that the means (81) for flooding comprise a hollow cylindrical pipe section or tube (84) for forming a recess (83), wherein the means (81) for flooding, starting from the filter holder (25), extend in height direction (HR) opposite to the flow direction of the particle/air mixture in the suction mode of operation.

18. A particle collecting apparatus according to claim 17, characterized in that the filter holder (25) and at least the recess (83) are designed as coupling units (85) which can be connected in series in a suction-air conducting manner, wherein at least two coupling units (85) can be arranged one after the other in a suction-air conducting manner, so that in the submerged mode of operation the particle collecting surfaces (80) of the at least two coupling units (85) can be submerged by means of the means (81) for submerging.

19. A particle collecting device according to claim 1 or 2, characterized in that the particle collecting device (1) comprises a cleaning unit (101), the cleaning unit (101) being designed such that the particle collecting device (1) can be flushed by sucking cleaning liquid in a flushing mode of operation, in which mode the assembly of particle/air mixture is guided, so that the adhering particles are flushed away.

20. A cleaning system comprising a particle collection apparatus according to any one of claims 1 to 19 and a particle analysis device for analysing particles sucked by means of the particle collection apparatus (1), characterized in that the particle collection apparatus (1) further comprises a functional element.

21. The cleaning system according to claim 20, characterized in that the functional elements are formed as modules, wherein a plurality of modules form a transport system which can be supplemented or expanded by further modules.

22. The cleaning system according to claim 20 or 21, characterized in that the functional element is formed as a transport box (74) for transporting the particle collection device (1), wherein the particle collection device (1) can be arranged on the transport box (74) for easy access and can be detachably fixed on the transport box (74) by means of a fixing means (75).

23. The cleaning system according to any one of claims 20 or 21, characterized in that at least one module is formed by a vacuum cleaner (92), said vacuum cleaner (92) being in operative connection with the particle collection device (1) capable of suctioning the particle/air mixture.

Images