CN215494540U - 一种用于均匀涂覆光刻胶的装置 - Google Patents
一种用于均匀涂覆光刻胶的装置 Download PDFInfo
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- CN215494540U CN215494540U CN202121128038.9U CN202121128038U CN215494540U CN 215494540 U CN215494540 U CN 215494540U CN 202121128038 U CN202121128038 U CN 202121128038U CN 215494540 U CN215494540 U CN 215494540U
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 63
- 239000011248 coating agent Substances 0.000 title claims abstract description 26
- 238000000576 coating method Methods 0.000 title claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 69
- 239000003292 glue Substances 0.000 claims abstract description 57
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 16
- 238000003756 stirring Methods 0.000 claims description 9
- 229910052742 iron Inorganic materials 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims 2
- 238000001179 sorption measurement Methods 0.000 claims 2
- 238000000034 method Methods 0.000 abstract description 3
- 238000004026 adhesive bonding Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 206010034960 Photophobia Diseases 0.000 description 1
- 238000013475 authorization Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010073 coating (rubber) Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004100 electronic packaging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 208000013469 light sensitivity Diseases 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 239000001054 red pigment Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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CN202121128038.9U CN215494540U (zh) | 2021-05-24 | 2021-05-24 | 一种用于均匀涂覆光刻胶的装置 |
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CN202121128038.9U CN215494540U (zh) | 2021-05-24 | 2021-05-24 | 一种用于均匀涂覆光刻胶的装置 |
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CN202121128038.9U Active CN215494540U (zh) | 2021-05-24 | 2021-05-24 | 一种用于均匀涂覆光刻胶的装置 |
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Address after: 201500 second floor, no.558 Jinshi Road, Jinshanwei Town, Jinshan District, Shanghai Patentee after: SHANGHAI FUBAI CHEMICAL Co.,Ltd. Country or region after: China Patentee after: Shenzhen Songbai Science and Technology Co.,Ltd. Patentee after: ZHUHAI SONGBAI TECHNOLOGY Co.,Ltd. Address before: 200540 floor 2, No. 558 Jinshi Road, Jinshanwei Town, Jinshan District, Shanghai Patentee before: SHANGHAI FUBAI CHEMICAL Co.,Ltd. Country or region before: China Patentee before: SHENZHEN CYPRESS INDUSTRIAL DEVELOPMENT Co.,Ltd. Patentee before: ZHUHAI SONGBAI TECHNOLOGY Co.,Ltd. |