CN215328453U - Crucible elevating system that monocrystalline silicon production was used and can be weighed - Google Patents
Crucible elevating system that monocrystalline silicon production was used and can be weighed Download PDFInfo
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- CN215328453U CN215328453U CN202121254244.4U CN202121254244U CN215328453U CN 215328453 U CN215328453 U CN 215328453U CN 202121254244 U CN202121254244 U CN 202121254244U CN 215328453 U CN215328453 U CN 215328453U
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Abstract
The utility model relates to a field of monocrystalline silicon production especially relates to a crucible elevating system that monocrystalline silicon production is with weighing, its include crucible lift skeleton and with crucible lift skeleton sliding connection's crucible shaft support, be provided with the lead screw on the crucible lift skeleton, the lead screw on the cover be equipped with along the coupling assembling of lead screw removal, coupling assembling and crucible lift skeleton sliding connection, be provided with the weighing member that weighs to crucible load between coupling assembling and crucible shaft support. This application has weighing member and weighs crucible shaft support, crucible axle and crucible, and remaining silicon material in can the real-time detection crucible at the in-process of pulling crystal detects more accurately, reduces the calculation deviation, reachs crystal bar according to the measured data and draws whether accomplish, can in time stop pulling crystal work, has reduced the waste of silicon material, has improved work efficiency's effect.
Description
Technical Field
The application relates to the field of monocrystalline silicon production, in particular to a crucible lifting mechanism capable of weighing for monocrystalline silicon production.
Background
At present, a single crystal silicon rod is generally carried out in a crucible, and a solution contained in the crucible is pulled out to form a semiconductor crystal to form the single crystal silicon rod.
In the related art, in the crystal pulling process, the weight of the crystal bar is usually measured, and the weight of the residual silicon material in the crucible is calculated, so that whether the crystal bar is pulled is obtained.
However, the formed crystal bar contains impurities and other substances, so that the measured weight of the crystal bar is greater than the weight of the silicon material used in the drawing process, calculation deviation occurs, the weight of the residual silicon material in the crucible cannot be accurately obtained, and the accuracy of data is reduced.
In view of the above related technologies, the inventor believes that in the crystal pulling process, the weight of the crystal ingot is measured to calculate the weight of the silicon material remaining in the crucible, but the measured weight of the crystal ingot is greater than the weight of the silicon material used in the pulling process due to impurities and other substances contained in the formed crystal ingot, so that calculation deviation occurs, the weight of the silicon material remaining in the crucible cannot be accurately obtained, the accuracy of data is reduced, and the work efficiency is also reduced.
SUMMERY OF THE UTILITY MODEL
In order to improve the problems that in the crystal pulling process, the method for measuring the weight of a crystal bar and calculating the weight of the residual silicon material in a crucible is adopted, the measured weight of the crystal bar is larger than the weight of the silicon material used in the pulling process, calculation deviation occurs, the weight of the residual silicon material in the crucible cannot be accurately obtained, and the data accuracy and the work efficiency are reduced, the application provides the crucible lifting mechanism capable of weighing for monocrystalline silicon production.
The application provides a crucible elevating system that monocrystalline silicon production is with weighing adopts following technical scheme:
the utility model provides a crucible elevating system that monocrystalline silicon production is with weighing, includes crucible lift skeleton and with crucible lift skeleton sliding connection's crucible shaft support, is provided with the lead screw on the crucible lift skeleton, the lead screw on the cover be equipped with along the coupling assembling of lead screw removal, coupling assembling and crucible lift skeleton sliding connection be provided with the weighing piece of weighing to crucible load and weighing between coupling assembling and crucible shaft support.
By adopting the technical scheme, the weighing piece weighs the crucible shaft support, the crucible shaft and the crucible, so that the residual silicon material in the crucible can be detected in real time in the crystal pulling process, the detection is more accurate, the calculation deviation is reduced, whether crystal bar drawing is completed or not is obtained according to the detection data, the crystal pulling work can be stopped in time, the waste of the silicon material is reduced, and the work efficiency is improved.
Optionally, the weighing part comprises at least one weighing sensor, and the connecting assembly is connected with the crucible shaft support through the weighing sensor.
By adopting the technical scheme, the dynamic response of the weighing sensor is fast, the stability of the weighing sensor is high, the weight change in the crucible can be sensed in time, and the detection accuracy is improved.
Optionally, the connecting assembly comprises a nut and a nut connecting block located above the nut, the nut and the nut connecting block are sleeved on the screw rod, the nut connecting block is connected with the crucible lifting framework in a sliding mode, and the weighing sensor is located between the nut connecting block and the crucible shaft support and is connected with the nut connecting block and the crucible shaft support respectively.
Through adopting above-mentioned technical scheme, the nut has the supporting role to the nut connecting block to go up and down on the lead screw, drive the nut connecting block and go up and down, thereby drive weighing sensor, crucible shaft support, crucible axle and crucible and go up and down, make things convenient for weighing sensor to weigh crucible shaft support, crucible axle and crucible, the operation of being convenient for.
Optionally, two side edges of the crucible lifting framework, which are close to the crucible shaft support, are respectively provided with a linear guide rail, the side surface of the crucible shaft support, which is close to the crucible lifting framework, is provided with at least two sliding blocks which are matched with the linear guide rails for use, and the nut connecting block is fixedly connected with the two sliding blocks.
Through adopting above-mentioned technical scheme, crucible lifting framework passes through slider and slide rail with the crucible shaft support and forms sliding connection, conveniently goes up and down crucible shaft support, crucible shaft and crucible, the operation of being convenient for.
Optionally, at least two installation seats are arranged on the side surface of the crucible shaft support close to the crucible lifting framework, the nut connecting block is respectively connected with the two installation seats, and the sliding block is located on the side surface of the installation seat close to the crucible lifting framework.
Through adopting above-mentioned technical scheme, the mount pad has increased the stability of crucible shaft support, stability when can improving crucible shaft support and go up and down.
Optionally, bottom plates are arranged at the bottoms of the crucible lifting framework and the crucible shaft support, and a worm reducer connected with a lead screw is arranged on each bottom plate.
Through adopting above-mentioned technical scheme, worm reducer adjusts the slew velocity of lead screw, can make the lifting speed of weighing sensor and crucible shaft support and weighing sensor's real-time detection frequency form the cooperation, has improved the precision that weighing sensor detected.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the weighing piece in the application weighs the crucible shaft support, the crucible shaft and the crucible, so that the residual silicon material in the crucible can be detected in real time in the crystal pulling process, the detection is more accurate, the calculation deviation is reduced, whether the crystal bar is pulled or not is obtained according to the detection data, the crystal pulling work can be stopped in time, the waste of the silicon material is reduced, and the work efficiency is improved;
2. the dynamic response of the weighing sensor in the application is fast, the stability is high, the weight change in the crucible can be sensed in time, and the detection accuracy is improved.
Drawings
Fig. 1 is a schematic structural diagram of the present application.
Fig. 2 is a schematic structural view embodying the load cell, the crucible shaft support, and the nut connecting block of the present application.
Fig. 3 is an enlarged view of a in fig. 2.
Description of reference numerals: 1. crucible lifting framework, 11, guide rail, 2, crucible shaft support, 21, slider, 22, mount pad, 3, lead screw, 4, crucible shaft, 5, coupling assembling, 51, nut, 52, nut connecting block, 6, weighing sensor, 7, bottom plate, 8, worm reducer, 9, servo motor.
Detailed Description
The present application is described in further detail below with reference to figures 1-3.
The embodiment of the application discloses crucible elevating system for monocrystalline silicon production.
Referring to fig. 1, a crucible elevating system that monocrystalline silicon production is with weighing, including crucible lifting skeleton 1, crucible shaft support 2 with crucible lifting skeleton 1 sliding connection and install crucible shaft support 2 bottom plate 7 on the single crystal growing furnace, crucible lifting skeleton 1 includes two stands and a horizontal pole that is located two stand tops, horizontal pole and two stand fixed connection, respectively be provided with a guide rail 11 on the side that two stands are close to crucible shaft support 2, be provided with servo motor 9 and worm reduction gear 8 on bottom plate 7, servo motor 9 installs in the outside of crucible shaft support 2, worm reduction gear 8 is located between two stands and is connected with servo motor 9, be connected with the lead screw 3 that vertical direction was placed on worm reduction gear 8, servo motor 9 drives lead screw 3 through worm reduction gear 8 and rotates.
The crucible shaft support 2 is provided with a crucible shaft 4 for mounting a crucible, the side of the crucible shaft support 2 close to the crucible lifting framework 1 is provided with two mounting seats 22, the side of the mounting seat 22 close to the crucible lifting framework 1 is provided with four sliding blocks 21, the two sliding blocks 21 on the same horizontal plane are in a group, and the side of one mounting seat 22 close to the crucible lifting framework 1 is provided with two sliding blocks 21 which are in sliding connection with one guide rail 11.
The screw 3 is sleeved with a connecting assembly 5, the connecting assembly 5 comprises a nut 51 and a nut connecting block 52 contacted with the nut 51, the nut connecting block 52 is positioned above the nut 51, and two ends of the nut connecting block 52 are respectively fixedly connected with the two mounting bases 22.
Referring to fig. 2 and 3, the nut 51 and the nut connecting block 52 are sleeved on the screw rod 3, and the nut 51 moves up and down along the screw rod 3, drives the nut connecting block 52 to move up and down along the screw rod 3, and drives the crucible shaft support 2 to move up and down. Be provided with between nut connecting block 52 and crucible shaft bracket 2 and carry out the weighing piece that weighs to crucible shaft bracket 2, crucible axle 4 and crucible, weighing piece still carries out the load to crucible shaft bracket 2, crucible axle 4 and crucible, and weighing piece includes two weighing sensor 6, and weighing sensor 6's one end passes through bolt fixed connection with nut connecting block 52, and its other end stretches into in crucible shaft bracket 2 and weighs crucible shaft bracket 2, crucible axle 4 and crucible.
The crucible elevating system that monocrystalline silicon production was used and can be weighed implements the principle and does: before the crucible pulling device is used, the weights of the crucible shaft support 2, the crucible shaft 4, the crucible and the like are reset, then silicon materials are added into the crucible, and the net weight of the silicon materials is obtained.
When the crucible shaft support 2, the crucible shaft 4 and the crucible are lifted up and down, the silicon material in the crucible is pulled into a crystal bar, when the crucible shaft support 2, the crucible shaft 4 and the crucible are lifted up or down, the servo motor 9 stops rotating, the crucible shaft support 2, the crucible shaft 4 and the crucible are suspended in the air, the crucible shaft support and the crucible are supported by the weighing sensor 6, the weight of the crucible shaft support 2, the crucible shaft 4 and the crucible is completely pressed on the weighing sensor 6, the weighing sensor 6 is deformed, an electric signal is output and transmitted to an external control device, the weight of the crucible shaft support 2, the crucible shaft 4, the crucible and the residual silicon material in the crucible is displayed on a display screen of the control device, the weight of the crucible shaft support 2, the crucible shaft 4 and the crucible is measured before crystal pulling, the weight of the residual silicon material in the crucible can be obtained, and the weighing sensor 6 can detect the weight of the residual silicon material in the crucible in real time in the crystal pulling process; the weight of the silicon material required for pulling the crystal bar is fixed, and whether crystal pulling is finished or not can be known according to the net weight of the silicon material and the weight of the silicon material left in the crucible; if the weight of the silicon material left in the crucible is equal to the weight of the silicon material left in the crucible obtained before crystal pulling, the completion of crystal pulling is indicated, and the control device stops the crystal pulling work in time.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (6)
1. The utility model provides a monocrystalline silicon production is with crucible elevating system that can weigh, include crucible lifting framework (1) and with crucible lifting framework (1) sliding connection's crucible shaft support (2), be provided with lead screw (3) on crucible lifting framework (1), its characterized in that: the crucible lifting device is characterized in that the screw rod (3) is sleeved with a connecting assembly (5) moving along the screw rod (3), the connecting assembly (5) is connected with the crucible lifting framework (1) in a sliding mode, and a weighing piece for weighing and loading a crucible is arranged between the connecting assembly (5) and the crucible shaft support (2).
2. The weighable crucible lifting mechanism for single-crystal silicon production as claimed in claim 1, wherein: the weighing part comprises at least one weighing sensor (6), and the connecting assembly (5) is connected with the crucible shaft support (2) through the weighing sensor (6).
3. The weighable crucible lifting mechanism for single-crystal silicon production as claimed in claim 2, wherein: coupling assembling (5) include nut (51) and be located nut connecting block (52) of nut (51) top, nut (51) and nut connecting block (52) suit on lead screw (3), nut connecting block (52) and crucible lift skeleton (1) sliding connection, weighing sensor (6) are located between nut connecting block (52) and crucible shaft bracket (2) and are connected with crucible shaft bracket (2) with nut connecting block (52) respectively.
4. The weighable crucible lifting mechanism for single-crystal silicon production as claimed in claim 3, wherein: two side edges of the crucible lifting framework (1) close to the crucible shaft support (2) are respectively provided with a linear guide rail (11), and the side surface of the crucible shaft support (2) close to the crucible lifting framework (1) is provided with at least two slide blocks (21) matched with the linear guide rails (11) for use.
5. The weighable crucible lifting mechanism for single-crystal silicon production as claimed in claim 4, wherein: the crucible shaft support (2) is provided with at least two installation seats (22) on the side surface close to the crucible lifting framework (1), the nut connecting block (52) is respectively connected with the two installation seats (22), and the sliding block (21) is positioned on the side surface of the installation seat (22) close to the crucible lifting framework (1).
6. The weighable crucible lifting mechanism for single-crystal silicon production as claimed in claim 1, wherein: the crucible lifting framework (1) and the crucible shaft support (2) are provided with bottom plates (7) at the bottoms, and the bottom plates (7) are provided with worm reducers (8) connected with the screw rods (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121254244.4U CN215328453U (en) | 2021-06-05 | 2021-06-05 | Crucible elevating system that monocrystalline silicon production was used and can be weighed |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121254244.4U CN215328453U (en) | 2021-06-05 | 2021-06-05 | Crucible elevating system that monocrystalline silicon production was used and can be weighed |
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| CN215328453U true CN215328453U (en) | 2021-12-28 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116183004A (en) * | 2023-02-21 | 2023-05-30 | 连城凯克斯科技有限公司 | Real-time measuring device for material weight in crucible of single crystal furnace |
-
2021
- 2021-06-05 CN CN202121254244.4U patent/CN215328453U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116183004A (en) * | 2023-02-21 | 2023-05-30 | 连城凯克斯科技有限公司 | Real-time measuring device for material weight in crucible of single crystal furnace |
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