CN215328348U

CN215328348U - Silicon carbide coating equipment

Info

Publication number: CN215328348U
Application number: CN202121260260.4U
Authority: CN
Inventors: 韩科选; 薛赓
Original assignee: Suzhou Bukos New Material Technology Co ltd
Current assignee: Suzhou Bukos New Material Technology Co ltd
Priority date: 2021-06-07
Filing date: 2021-06-07
Publication date: 2021-12-28
Anticipated expiration: 2031-06-07

Abstract

The utility model discloses silicon carbide coating equipment which comprises a vapor deposition furnace body and a containing box, wherein the containing box is arranged on one side of the vapor deposition furnace body, a crucible, a deposition chamber, a material collecting box and an air duct are arranged in the vapor deposition furnace body from bottom to top, a heater is coated outside the deposition chamber, the material collecting box and the air duct, a heat insulating layer is coated outside the heater, the heater and the heat insulating layer respectively play a role in heating and heat insulating, a water cooling jacket is coated outside the heat insulating layer and used for cooling the vapor deposition furnace body, a first through hole communicated with the deposition chamber and the material collecting box is formed in the material collecting box, a dust collecting chamber is arranged in the material collecting box, a dust collecting chamber cover plate is covered above the dust collecting chamber, and a second through hole communicated with the dust collecting chamber and the material collecting box is formed in the dust collecting chamber cover plate; the utility model can simply and effectively carry out four-stage filtration on the discharged air, thereby avoiding polluting resources.

Description

Silicon carbide coating equipment

Technical Field

The utility model relates to the technical field of production of silicon carbide coatings, in particular to silicon carbide coating equipment.

Background

The silicon carbide has excellent physical and chemical properties, such as high melting point, high hardness, corrosion resistance, oxidation resistance and the like, and particularly has good ablation resistance in the range of 1800 plus 2000 ℃, so the silicon carbide has wide application prospect in the fields of aerospace, weapon equipment and the like. However, silicon carbide by itself cannot be used as a structural material, so a method of preparing a coating is generally used to utilize its wear resistance and ablation resistance. The silicon carbide coating is generally prepared on the surface of a part by adopting methods such as physical or chemical vapor deposition, spraying and the like. Among them, the chemical vapor deposition method is commonly used. Chemical vapor deposition, is the most widely used technique in the semiconductor industry for depositing a variety of materials, including a wide range of insulating materials, most metallic materials and metal alloy materials. Generally, chemical vapor deposition is understood as that two or more gaseous raw materials are introduced into a reaction chamber, and then a vapor phase thermal decomposition reaction occurs between the two raw materials to form a new material which is deposited on the surface of a substrate wafer, so that the substrate obtains better surface quality effect; the gas raw material is generally a gas such as metal vapor, volatile metal halide, hydride, or metal organic compound.

When the traditional chemical vapor deposition furnace is used for conveying gas into the furnace, a gas conveying pipe is generally directly conveyed into the furnace, the conveying pipe is single, the gas raw materials are easily distributed unevenly, the deposition rate is easily reduced, the compactness and uniformity of a silicon carbide coating are poor, and the product quality is reduced. In view of the above drawbacks, it is desirable to design a silicon carbide coating apparatus.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to a silicon carbide coating apparatus to solve the problems set forth above in the background art.

In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a carborundum coating equipment, includes vapor deposition furnace body and containing box, the containing box sets up the one side at the vapor deposition furnace body, inside crucible, deposit chamber, receiving box and the air duct of being provided with from bottom to top of vapor deposition furnace body, the cladding has the heater outside deposit chamber, receiving box, the air duct, the outside cladding of heater has the heat preservation, and heater and heat preservation play heating and heat retaining effect respectively, the outside cladding of heat preservation has the water-cooling to press from both sides the cover, and the water-cooling presss from both sides the cover and is used for cooling for the vapor deposition furnace body, sets up the first through-hole of intercommunication deposit chamber and receiving box on the receiving box, and the inside dust collecting chamber that is provided with of receiving box, the top lid of dust collecting chamber is equipped with the chamber lid and collects the dust collecting plate, sets up the second through-hole of intercommunication dust collecting chamber and receiving box on the dust collecting chamber lid.

Preferably, the top of vapor deposition furnace body has seted up the exhaust hole, the exhaust hole is linked together with the air duct, install annular connecting plate on the exhaust hole, install first honeycomb duct on annular connecting plate, the one end that annular connecting plate was kept away from to first honeycomb duct extends to in the purifying liquid storage box, purifying liquid storage box fixed mounting is on the bottom inner wall of containing box.

Preferably, the top of the containing box is provided with an opening, vertical plates are fixedly mounted on the inner walls of the two sides of the containing box respectively, bolt holes are formed in the vertical plates, first grooves are formed in the sides, close to each other, of the two vertical plates respectively, and the inner wall of the top of each first groove is provided with an opening; be provided with the rose box in two first recesses, install the second honeycomb duct in the bottom of rose box, the bottom of second honeycomb duct extends to in the purifying liquid storage box, be provided with first subassembly in the rose box.

Preferably, the first component comprises a non-woven fabric filter layer, a first synthetic fiber filter layer, a second synthetic fiber filter layer and an activated carbon filter layer, the first synthetic fiber filter layer is fixedly arranged at the top of the non-woven fabric filter layer, the second synthetic fiber filter layer is fixedly arranged at the top of the first synthetic fiber filter layer, and the activated carbon filter layer is fixedly arranged at the top of the second synthetic fiber filter layer.

Preferably, the top both ends fixed mounting of rose box has the connecting block, has seted up the connecting hole on the connecting block, is provided with the bolt in the connecting hole, and the bolt passes the bolt hole spiro union on connecting block and the riser.

Preferably, the third through-hole of intercommunication deposit room is seted up at the top of crucible, the bottom fixed mounting of crucible has the gas-supply pipe, the top fixed mounting of gas-supply pipe has the cylinder piece, two the installation pipe is fixed mounting respectively in the both sides of cylinder piece, and two bent mouth shower nozzles are fixed mounting respectively in the one end that two installation pipes kept away from each other, and the injection opposite direction of two bent mouth shower nozzles.

Preferably, a second groove is formed in the bottom of the cylindrical block, a sealing bearing is fixedly installed in the second groove, an inner ring of the sealing bearing is fixedly sleeved on the gas pipe, vent holes are formed in inner walls of two sides of the second groove, the two vent holes are respectively communicated with the two installation pipes, and a plurality of gas transmission holes are formed in the tops of the two installation pipes and the cylindrical block.

Compared with the prior art, the silicon carbide coating equipment has the advantages that the first guide pipe, the purified liquid storage box, the filter box, the non-woven fabric filter layer, the first synthetic fiber filter layer, the second synthetic fiber filter layer and the active carbon filter layer are matched with one another, so that four-stage filtration can be simply and effectively carried out on discharged air, resources are prevented from being polluted, and the operation of a user is facilitated; the receiving box is used for collecting silicon carbide dust which is not deposited, the receiving box is internally provided with the dust collecting chamber and the dust collecting chamber cover plate which is covered above the dust collecting chamber, the silicon carbide dust which is not deposited in the production process is entrained by airflow and enters the receiving box, part of the silicon carbide dust can be settled in the receiving box, and when the airflow enters the receiving box through the air duct and the first flow guide pipe, a large amount of dust can be rapidly generated and dropped in the dust collecting chamber due to temperature reduction, so that the multistage collection of the silicon carbide dust is realized, and the product yield is improved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model without limiting the utility model in which:

FIG. 1 is a schematic structural view of a silicon carbide coating apparatus of the present invention;

FIG. 2 is a schematic view showing the internal structure of a crucible in a silicon carbide coating apparatus according to the present invention.

In the drawings:

1. a vapor deposition furnace body; 2. a crucible; 3. a deposition chamber; 4. a material receiving box; 5. an air duct; 6. a heater; 7. a heat-insulating layer; 8. a water-cooled jacket; 9. a first through hole; 10. a dust collecting chamber; 11. a dust collecting chamber cover plate; 12. a second through hole; 13. an exhaust hole; 14. an annular connecting plate; 15. a first draft tube; 16. a storage box; 17. a purified liquid storage tank; 18. a vertical plate; 19. a first groove; 20. a filter box; 21. a second draft tube; 22. a non-woven fabric filter layer; 23. a first synthetic fiber filter layer; 24. a second synthetic fiber filter layer; 25. an activated carbon filter layer; 26. connecting blocks; 27. a bolt; 28. a gas delivery pipe; 29. a cylindrical block; 30. installing a pipe; 31. a bent nozzle spray head; 32. a second groove; 33. a gas transmission hole; 34. a third via.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1 and 2, the present invention provides a technical solution: a silicon carbide coating device comprises a vapor deposition furnace body 1 and a containing box 16, wherein the containing box is arranged at one side of the vapor deposition furnace body 1, the interior of the vapor deposition furnace body 1 is provided with a crucible 2, a deposition chamber 3, a receiving box 4 and an air duct 5 from bottom to top, the deposition chamber 3, the material receiving box 4 and the gas guide tube 5 are externally coated with a heater 6, the heater 6 is externally coated with a heat insulation layer 7, the heater 6 and the heat insulation layer 7 respectively play roles in heating and heat insulation, a water-cooling jacket 8 is coated outside the heat-insulating layer 7, the water-cooling jacket 8 is used for cooling the vapor deposition furnace body 1, a first through hole 9 communicating the deposition chamber 3 and the material receiving box 4 is arranged on the material receiving box 4, a dust collecting chamber 10 is arranged inside the material receiving box 4, a dust collecting chamber cover plate 11 is covered above the dust collecting chamber 10, and a second through hole 12 for communicating the dust collecting chamber 10 and the material receiving box 4 is formed in the dust collecting chamber cover plate 11.

In this embodiment, the top of the vapor deposition furnace body 1 is provided with an exhaust hole 13, the exhaust hole 13 is communicated with the gas guide tube 5, the exhaust hole 13 is provided with an annular connecting plate 14, the annular connecting plate 14 is provided with a first flow guide tube 15, one end of the first flow guide tube 15, which is far away from the annular connecting plate 14, extends into a purified liquid storage box 17, the purified liquid storage box 17 is fixedly installed on the inner wall of the bottom of the storage box 16, the top of the storage box 16 is provided with an opening, inner walls on two sides of the storage box 16 are respectively and fixedly provided with a vertical plate 18, the vertical plates 18 are provided with bolt holes, one sides of the two vertical plates 18, which are close to each other, are respectively provided with a first groove 19, and the inner wall of the top of the first groove 19 is provided with an opening; be provided with rose box 20 in two first recesses 19, install second honeycomb duct 21 in the bottom of rose box 20, the bottom of second honeycomb duct 21 extends to in the purifying liquid storage box 17, be provided with first subassembly in the rose box 20, first subassembly is including non-woven fabrics filter layer 22, first synthetic fiber filter layer 23, second synthetic fiber filter layer 24 and active carbon filter layer 25, first synthetic fiber filter layer 23 fixed mounting is at the top of non-woven fabrics filter layer 22, 24 fixed mounting at the top of first synthetic fiber filter layer 23 of second synthetic fiber filter layer, active carbon filter layer 25 fixed mounting is at the top of second synthetic fiber filter layer 24.

In this embodiment, the two ends of the top of the filtering box 20 are fixedly provided with connecting blocks 26, the connecting blocks 26 are provided with connecting holes, bolts 27 are arranged in the connecting holes, and the bolts 27 penetrate through the connecting blocks 26 to be screwed with bolt holes in the vertical plate 18. When the filter box 20 needs to be disassembled, the bolts 27 are screwed to move out of the vertical plates, so that the filter box 20 can be disassembled, and the reverse operation can be performed, so that the filter box can be fixed, and the installation and the disassembly are convenient.

In this embodiment, the third through hole 34 communicating with the deposition chamber 3 is formed in the top of the crucible 2, the gas pipe 28 is fixedly mounted at the bottom of the crucible 2, the cylindrical block 29 is fixedly mounted at the top end of the gas pipe 28, the two mounting pipes 30 are respectively and fixedly mounted at two sides of the cylindrical block 29, the two bent nozzle spray heads 31 are respectively and fixedly mounted at one ends of the two mounting pipes 30, which are far away from each other, and the spraying directions of the two bent nozzle spray heads 31 are opposite.

In this embodiment, a second groove 32 is formed in the bottom of the cylindrical block 29, a sealing bearing is fixedly installed in the second groove 32, an inner ring of the sealing bearing is fixedly sleeved on the gas pipe 28, vent holes are formed in inner walls of two sides of the second groove 32, the two vent holes are respectively communicated with the two installation pipes 30, and a plurality of gas transmission holes 33 are formed in the tops of the two installation pipes 30 and the cylindrical block 29. When gas is conveyed into the vapor deposition furnace body 1 through the gas conveying pipe 28, the gas enters the second groove 32 of the cylindrical block 29, a small amount of gas is conveyed into the vapor deposition furnace body 1 through the gas conveying hole 33 at the top of the cylindrical block 29, meanwhile, the gas in the second groove 32 enters the mounting pipe 30 through the vent hole, part of the gas is output to the vapor deposition furnace body 1 from the gas transmission hole 33 at the top of the mounting pipe 30, the rest gas is sprayed out from the two bent nozzle nozzles 31 to the vapor deposition furnace body 1, because the two bent nozzle spray heads 31 spray in opposite directions, the two bent nozzle spray heads 31 and the two mounting pipes 30 rotate due to the reaction force of the air flow sprayed by the two bent nozzle spray heads 31 at the two sides of the cylindrical block 29, therefore, the conveyed gas raw materials can be uniformly distributed, the deposition rate is improved, the compactness and the uniformity of the silicon carbide coating are improved, and the product quality is improved.

The central axes of the first through hole 9, the second through hole 12, the third through hole 34 and the air duct 4 in this embodiment are located on the same straight line.

In this embodiment, one side fixed mounting that vapor deposition furnace body 1 is close to containing box 16 has two first supporting blocks, one side and containing box 16 fixed connection that vapor deposition furnace body 1 was kept away from to first supporting block, one side fixed mounting of purifying liquid storage box 17 has third pipeline and fourth pipeline, the one end that purifying liquid storage box 17 was kept away from to the third pipeline extends to outside containing box 16, the one end that purifying liquid storage box 17 was kept away from to the fourth pipeline extends to outside containing box 16, the fourth pipeline is located the below of third pipeline, be equipped with first valve on the fourth pipeline.

The working principle of the utility model is as follows: adorn 2 insides with solid raw materials, gaseous raw materials passes through gas-supply pipe 28 and the even direct entering into deposit room 3 of gas delivery hole 33 in process of production, and blow in deposit room 3 with solid raw materials, gaseous raw materials and solid raw materials react each other in deposit room 3 the inside and generate carborundum, most carborundum deposit is to in the deposit room 3, partly undeposited carborundum and unreacted solid raw materials enter into in receiving box 4 along with the air current, receiving box 4 and dust collecting chamber 10 collect carborundum dust, gaseous raw materials tail gas enters into containing box 16 through first honeycomb duct 15 and handles, discharge to reach standard.

When needing to handle exhaust air, exhaust air can be poured into in the purifying liquid storage box 17 through first honeycomb duct 15 earlier, when the air continues to flow, impurity wherein can mix with water, then infuse in rose box 20 through second honeycomb duct 21, under nonwoven filter layer 22, first synthetic fiber filter layer 23, second synthetic fiber filter layer 24 and active carbon filter layer 25 mutually support, can carry out the level four filtration to the air of getting rid of impurity, then pass through the exhaust air after purifying, discharge again, avoid polluting the resource.

According to the utility model, the first guide pipe 15, the purified liquid storage box 17, the filter box 20, the non-woven fabric filter layer 22, the first synthetic fiber filter layer 23, the second synthetic fiber filter layer 24 and the activated carbon filter layer 25 are matched with each other, so that four-stage filtration can be simply and effectively carried out on the discharged air, the pollution to resources is avoided, and the operation by a user is convenient.

The material receiving box 4 is used for collecting silicon carbide dust which is not deposited, the material receiving box 4 is internally provided with a dust collecting chamber 10 and a dust collecting chamber cover plate 11 which covers the dust collecting chamber 10, the silicon carbide dust which is not deposited in the production process is entrained by airflow and enters the material receiving box 4, part of the silicon carbide dust is settled in the material receiving box 4, and when the airflow enters the material receiving box 16 through the air duct 5 and the first flow guide pipe 15, a large amount of dust is rapidly generated and falls into the dust collecting chamber 10 due to temperature reduction, so that the multistage collection of the silicon carbide dust is realized, and the product yield is improved.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A silicon carbide coating apparatus, characterized by: comprises a vapor deposition furnace body (1) and a containing box (16), wherein the containing box (16) is arranged at one side of the vapor deposition furnace body (1), a crucible (2), a deposition chamber (3), a material collecting box (4) and an air duct (5) are arranged in the vapor deposition furnace body (1) from bottom to top, the deposition chamber (3), the material collecting box (4) and the gas guide tube (5) are externally coated with a heater (6), the heater (6) is externally coated with an insulating layer (7), the insulating layer (7) is externally coated with a water cooling jacket (8), the material receiving box (4) is provided with a first through hole (9) for communicating the deposition chamber (3) with the material receiving box (4), the material receiving box (4) is internally provided with a dust collecting chamber (10), a dust collecting chamber cover plate (11) is covered above the dust collecting chamber (10), and a second through hole (12) for communicating the dust collecting chamber (10) and the material receiving box (4) is formed in the dust collecting chamber cover plate (11).

2. A silicon carbide coating apparatus as set forth in claim 1, wherein: exhaust hole (13) have been seted up at the top of vapour deposition furnace body (1), exhaust hole (13) are linked together with air duct (5), install annular connecting plate (14) on exhaust hole (13), install first honeycomb duct (15) on annular connecting plate (14), the one end that annular connecting plate (14) were kept away from in annular connecting plate (14) extended to purifying liquid storage box (17) in first honeycomb duct (15), purifying liquid storage box (17) fixed mounting is on the bottom inner wall of containing box (16).

3. A silicon carbide coating apparatus as set forth in claim 2, wherein: the top of the containing box (16) is provided with an opening, the inner walls of two sides of the containing box (16) are respectively and fixedly provided with a vertical plate (18), the vertical plates (18) are provided with bolt holes, one sides of the two vertical plates (18) close to each other are respectively provided with a first groove (19), and the inner wall of the top of the first groove (19) is provided with an opening; be provided with rose box (20) in two first recesses (19), install second honeycomb duct (21) in the bottom of rose box (20), the bottom of second honeycomb duct (21) extends to in purifying liquid storage box (17), be provided with first subassembly in rose box (20).

4. A silicon carbide coating apparatus as set forth in claim 3, wherein: the first component comprises a non-woven fabric filter layer (22), a first synthetic fiber filter layer (23), a second synthetic fiber filter layer (24) and an activated carbon filter layer (25), the first synthetic fiber filter layer (23) is fixedly arranged at the top of the non-woven fabric filter layer (22), the second synthetic fiber filter layer (24) is fixedly arranged at the top of the first synthetic fiber filter layer (23), and the activated carbon filter layer (25) is fixedly arranged at the top of the second synthetic fiber filter layer (24).

5. A silicon carbide coating apparatus as set forth in claim 3, wherein: connecting blocks (26) are fixedly mounted at two ends of the top of the filter box (20), connecting holes are formed in the connecting blocks (26), bolts (27) are arranged in the connecting holes, and the bolts (27) penetrate through the connecting blocks (26) and are in threaded connection with bolt holes in the vertical plate (18).

6. A silicon carbide coating apparatus as set forth in claim 2, wherein: the third through-hole (34) of intercommunication deposit room (3) is seted up at the top of crucible (2), the bottom fixed mounting of crucible (2) has gas-supply pipe (28), the top fixed mounting of gas-supply pipe (28) has cylinder piece (29), and two installation pipe (30) are fixed mounting respectively in the both sides of cylinder piece (29), and two bent mouth shower nozzles (31) are fixed mounting respectively in the one end of keeping away from each other of two installation pipe (30), and the injection opposite direction of two bent mouth shower nozzles (31).

7. A silicon carbide coating apparatus as set forth in claim 6, wherein: the bottom of the cylindrical block (29) is provided with a second groove (32), a sealing bearing is fixedly arranged in the second groove (32), the inner ring of the sealing bearing is fixedly sleeved on the gas pipe (28), the inner walls of two sides of the second groove (32) are provided with vent holes, the two vent holes are respectively communicated with the two mounting pipes (30), and the tops of the two mounting pipes (30) and the cylindrical block (29) are provided with a plurality of gas transmission holes (33).