CN215177650U

CN215177650U - Micro-motion platform with installation cavity and motion device

Info

Publication number: CN215177650U
Application number: CN202121672151.3U
Authority: CN
Inventors: 袁嘉欣; 江旭初; 彭仁强
Original assignee: Shanghai Yinguan Semiconductor Technology Co Ltd
Current assignee: Shanghai Yinguan Semiconductor Technology Co Ltd
Priority date: 2021-07-22
Filing date: 2021-07-22
Publication date: 2021-12-14
Anticipated expiration: 2031-07-22

Abstract

The utility model belongs to the technical field of integrated circuit preparation, a fine motion platform and telecontrol equipment with installation cavity is specifically disclosed. Mounting a base; a vertical base; the rotating seat is rotatably sleeved inside the vertical base and is internally provided with an installation cavity with an opening at the upper end; the rotary driving motor is arranged between the vertical base and the rotary seat; the vertical driving device is arranged on the mounting base, the output end of the vertical driving device is connected to the vertical base, the vertical driving device comprises a voice coil motor assembly and a gravity compensation assembly, the stator phases of the voice coil motor assembly and the gravity compensation assembly are fixed to the mounting base, the rotor phases of the voice coil motor assembly and the gravity compensation assembly are fixed to the vertical base, the voice coil motor assembly is used for driving the vertical base to move relative to the mounting base along the Z direction, and the gravity compensation assembly is used for compensating gravity of the vertical base. The motion device comprises the micro-motion platform. The utility model discloses a fine motion platform and telecontrol equipment are favorable to realizing fine motion platform and telecontrol equipment function extension and lightweight and flattening design.

Description

Micro-motion platform with installation cavity and motion device

Technical Field

The utility model relates to an integrated circuit preparation technical field especially relates to a fine motion platform and telecontrol equipment with installation cavity.

Background

In the field of detecting the thickness of a semiconductor silicon wafer, a workpiece platform is required to be capable of completing the handover of the silicon wafer with a silicon wafer transmission system, and meanwhile, a 12-inch or 8-inch silicon wafer is required to be carried to complete vertical movement and 360-degree rotation movement, so that a moving device applied to the field of detecting the thickness of the semiconductor silicon wafer generally comprises an XY moving platform and a micro-motion platform arranged on the XY moving platform.

The micropositioner is the core component of a motion device that is generally capable of providing rotational motion about the Z-direction and vertical motion along the Z-direction. With the increasing demand for productivity and film thickness detection accuracy, the demands for the operating speed, acceleration and performance of the motion device are also increasing, which requires the motion device to be more lightweight and flat and to have better motion accuracy.

In order to realize the handing-over of the silicon wafers, the middle part of the existing part of the micro-motion platform is provided with a handing-over mechanism capable of realizing the handing-over of the silicon wafers. The prior art provides a micro-motion platform, which comprises a vertical base, an Rz rotary table rotatably arranged above the vertical base, wherein the vertical base and the Rz rotary table are both of a hollow structure, and the center of the vertical base and the Rz rotary table is provided with a handover mechanism for handing over a silicon wafer. The outside of vertical base is provided with three vertical drive arrangement of group and three gravity compensation device of group around its circumference interval, and vertical drive arrangement adopts voice coil motor to directly drive, and its voice coil motor's active cell is connected with vertical base, and every gravity compensation device of group all sets up between adjacent two sets of vertical drive arrangement, reduces voice coil motor's load.

The micro-motion platform provided by the prior art can realize the rotation around the vertical direction and the movement along the vertical direction, but the size of the micro-motion platform in the Z direction is larger because the Rz rotary table is arranged at the upper end of the vertical base, so that the light weight and flattening arrangement of the micro-motion platform are not facilitated; meanwhile, the gravity compensation device and the vertical driving device are arranged in a split mode, so that the structure size is large, the weight is heavy, and the cost reduction and the light-weight design of the micropositioner are not facilitated.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a fine motion platform with installation cavity to reduce the size of fine motion platform in the Z direction, set up with the platyzing in order to do benefit to the lightweight of fine motion platform, and can enrich the function of fine motion platform.

Another object of the present invention is to provide a motion device to reduce the size of the motion device in the Z direction, and improve the operation characteristics of the motion device.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a micropositioner, comprising:

mounting a base;

the vertical base is movably arranged above the mounting base;

the rotating seat is rotatably sleeved inside the vertical base, and an installation cavity with an opening at the upper end is formed inside the rotating seat;

the rotary driving motor is arranged between the vertical base and the rotary seat and used for driving the rotary seat to rotate around the Z direction relative to the vertical base;

vertical drive arrangement, set up in on the mounting base, and encircle vertical base interval sets up a plurality of, vertical drive arrangement's output is connected to vertical base, vertical drive arrangement includes voice coil motor subassembly and gravity compensation subassembly, voice coil motor subassembly's stator with gravity compensation subassembly's stator is all relative the mounting base is fixed, voice coil motor subassembly's active cell with gravity compensation subassembly's active cell is all relative vertical base is fixed, voice coil motor subassembly is used for the drive vertical base is relative the mounting base is followed the Z direction motion, gravity compensation subassembly is used for compensating the gravity of vertical base.

As a preferred embodiment of the micropositioner, the vertical base comprises:

the main body cylinder part is coaxially and rotatably sleeved on the outer side of the rotating seat;

the mounting plate portion is arranged in an extending mode in the radial direction of the main body cylinder portion, and the rotor of the voice coil motor assembly and the rotor of the gravity compensation assembly are fixedly connected with the mounting plate portion.

The structure setting of this kind of vertical base can make things convenient for the dismouting of vertical drive arrangement and vertical base when convenient and the rotation cover of roating seat is established, and improves compact structure nature and the whole aesthetic property of fine motion platform.

As a preferable technical solution of the micropositioner, an orthographic projection of the vertical driving device on the mounting base is located within an orthographic projection range of the mounting plate portion on the mounting base. By the arrangement, the vertical driving device can be located in the coverage range of the installation plate part, so that the vertical driving device 4 can be hidden below the installation plate part under the overlooking visual angle of the micro-motion platform, and the appearance attractiveness of the micro-motion platform is further improved.

As a preferred technical scheme of fine motion platform, the fine motion platform still includes vertical direction subassembly, vertical direction subassembly includes sliding fit's mounting and slider, the mounting with the mounting base is connected, the slider with vertical base is connected, vertical direction subassembly is used for doing vertical base is followed the Z direction motion is led. The vertical guide assembly is arranged, so that the vertical base can only move along the Z direction while the operation reliability of the vertical base along the Z direction is improved, the vertical base cannot deflect around the X direction and the Y direction, and the micro-motion platform only has two degrees of freedom in the Rz direction and the Z direction.

As a preferable technical solution of the micropositioner, an orthographic projection of the vertical guide assembly on the mounting base is located within an orthographic projection range of the mounting plate portion on the mounting base. The micro-motion platform has the advantages that the structure compactness and the appearance attractiveness of the micro-motion platform can be improved, and the vertical guide assembly can be conveniently disassembled and assembled.

As a preferred technical scheme of fine motion platform, vertical drive arrangement reaches vertical direction subassembly all is provided with N, the installation board is positive M limit shape structure, M2N, and every vertical drive arrangement reaches vertical direction subassembly all corresponds one the installation board is positive M limit shape's summit setting, and every vertical direction subassembly all is located adjacent two between the vertical drive arrangement. This kind of setting can reduce the whole terminal surface area of installation board when guaranteeing that the installation board covers vertical drive arrangement and vertical direction subassembly, further saves the whole occupation of land space of fine motion platform, improves compact structure nature. And this kind of setting for the spatial layout of fine motion platform is more reasonable, and the atress is more balanced.

As an optimal technical scheme of the micro-motion platform, the voice coil motor assembly comprises a voice coil motor stator and a voice coil motor rotor, the voice coil motor stator is fixed relative to the mounting base, the voice coil motor rotor is fixed relative to the vertical base, the voice coil motor stator is a coil, and the coils of all the vertical driving devices are connected in parallel. This kind of setting can guarantee the uniformity of the vertical drive power that all voice coil motor subassemblies provided better to guarantee the atress stationarity of vertical base.

As a preferred technical scheme of the micropositioner, the gravity compensation assembly comprises an air guide seat and a sliding seat, the lower end of the air guide seat is connected with the mounting base, the air guide seat is provided with an air cavity with an opening at the upper end, the sliding seat is arranged in the air cavity in a sliding and sealing manner, and the lower part of the air guide seat is provided with an air passage communicated with the air cavity;

the voice coil motor assembly comprises a voice coil motor stator and a voice coil motor rotor which are sleeved, the voice coil motor stator is installed in the air guide seat, and the voice coil motor rotor is connected with the sliding seat.

The gravity compensation component is arranged, the gravity compensation component can be realized in an air floatation mode, the structure is simple, the weight is light, the cost is low, and the light weight setting of the micropositioner can be further realized.

As a preferred technical scheme of the micropositioner, the micropositioner further comprises a handover mechanism, wherein the handover mechanism is positioned in the installation cavity and is used for handing over the substrate. The arrangement of the transfer mechanism can enable the micro-motion platform to execute the transfer work of substrates such as silicon wafers.

A motion device comprises an XY motion platform and the micro-motion platform, wherein the XY motion platform is used for driving the micro-motion platform to move along the X direction and/or the Y direction.

The beneficial effects of the utility model reside in that:

the utility model provides a micropositioner, through setting up the installation cavity in the roating seat and forming hollow structure, can make the handing-over mechanism that is used for handing-over basement such as silicon chip install in installation cavity, thus make the micropositioner can carry out the handing-over work of basement, or can be used for installing other functional modules, expand the function of micropositioner; meanwhile, the vertical base is sleeved outside the rotating seat, so that the height of the micro-motion platform along the Z direction can be reduced, and the flat arrangement of the micro-motion platform is facilitated; moreover, because the integration is provided with gravity compensation subassembly and voice coil motor subassembly among the vertical drive arrangement for vertical drive arrangement still possesses gravity compensation's effect when possessing vertical drive function, has effectively simplified the structure of fine motion platform, has improved the compact structure nature of fine motion platform, is favorable to the platyzization and the lightweight setting of fine motion platform more.

The utility model provides a motion device, through adopting foretell fine motion platform, can enrich the function that motion device can carry out, and be favorable to motion device's flattening and lightweight setting.

Drawings

Fig. 1 is a longitudinal sectional view of a micropositioner according to a first embodiment of the present invention;

fig. 2 is a top view of the micro-motion stage provided in the first embodiment of the present invention with the carrier removed;

FIG. 3 is a longitudinal cross-sectional view of a vertical drive according to an embodiment of the present invention;

fig. 4 is a longitudinal sectional view of a vertical driving device according to a second embodiment of the present invention;

fig. 5 is a longitudinal sectional view of a vertical driving device provided in a third embodiment of the present invention;

fig. 6 is a longitudinal sectional view of a micropositioner according to a fourth embodiment of the present invention;

fig. 7 is a top view of the micropositioner provided in the fourth embodiment of the present invention with the carrier removed;

fig. 8 is a schematic structural diagram of a handover mechanism according to a fourth embodiment of the present invention.

The figures are labeled as follows:

1. a rotary drive motor; 11. a rotor of a rotary motor; 12. a rotating electric machine stator;

2. a rotating base; 21. a first seat; 22. a second seat; 23. a mounting cavity; 24. a positioning projection;

3. a vertical base; 31. a main body cylinder part; 32. a mounting plate portion; 321. a guide hole; 322. positioning holes; 33. positioning the boss;

4. a vertical drive device; 41. a voice coil motor assembly; 411. a voice coil motor mover; 412. a voice coil motor stator; 42. a gravity compensation component; 421. a magnetic floating stator; 422. a magnetic levitation mover; 423. a gas guide seat; 4231. an air cavity; 4232. a ventilation airway; 424. a sliding seat; 425. closing the plate; 43. a stator base; 44. an animal seat; 441. a magnetic mounting portion; 4411. a mounting base; 4412. an adapter frame part; 442. a motor mounting portion; 443. a connecting seat part; 45. a connection base;

5. mounting a base; 6. a stage mounting base; 61. a sleeve portion; 62. a flange portion; 7. a stage; 8. rotating the bearing set; 81. a rotating bearing; 82. a limiting ring; 9. a vertical guide assembly; 91. a fixing member; 92. a slider; 10. a stator limiting part; 20. a mover limiting part; 30. an outer ring limiting piece; 40. a handover mechanism.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning. Herein, "X direction" (or "X direction", "X axis direction") and "Y direction" (or "Y direction", "Y axis direction") denote two directions orthogonal to each other in the horizontal direction, and "Z direction" (or "Z direction" and "Z axis direction") denotes a vertical direction.

Example one

As shown in fig. 1 to fig. 3, the present embodiment provides a micro stage with a mounting cavity, which can be applied to the field of integrated circuit manufacturing, such as an exposure stage of a lithography system or a worktable for detecting a semiconductor film thickness, and is used to drive substrates, such as silicon wafers, to perform vertical movement and rotation around the vertical direction. The micro-motion stage provided by this embodiment can also be applied to other scenes and fields that need to perform Rz (vertical rotation) and Z (vertical) direction motion on the workpiece carried on the micro-motion stage, and this embodiment does not limit this.

Specifically, the micro-motion platform comprises a mounting base 5, a rotating base 2, a vertical base 3, a vertical driving device 4 and a rotary driving motor 1. The vertical base 3 is arranged above the mounting base 5, the rotating base 2 is rotatably sleeved inside the vertical base 3 around a Z axis, the position of the rotating base 2 in the Z direction is unchanged relative to the vertical base 3, and a mounting cavity 23 with an opening at the upper end is formed inside the rotating base 2; the rotary driving motor 1 is arranged between the rotary seat 2 and the vertical base 3 and is used for driving the rotary seat 2 to rotate around the Z direction relative to the vertical base 3; vertical drive arrangement 4, set up on mounting base 5, vertical drive arrangement 4 encircles vertical base 3 interval and is provided with a plurality of, and the output of this vertical drive arrangement 4 is connected to vertical base 3, and vertical drive arrangement 4 encircles vertical base 3 interval and is provided with a plurality of, specifically, this vertical drive arrangement 4 includes voice coil motor subassembly 41 and gravity compensation subassembly 42, wherein, voice coil motor subassembly 41's stator and gravity compensation subassembly 42's stator are all fixed relative mounting base 5, voice coil motor subassembly 41's active cell and gravity compensation subassembly 42's active cell are all fixed relative vertical base 3, voice coil motor subassembly 41 is used for driving vertical base 3 relative mounting base 5 along the Z direction motion, gravity compensation subassembly 42 is used for compensating the gravity of vertical base 3.

According to the micropositioner provided by the embodiment, the installation cavity 23 is arranged in the rotating base 2 to form a hollow structure, so that a handover mechanism for handing over substrates such as silicon wafers and the like can be installed in the installation cavity 23, and the micropositioner can execute handover work of the substrates or can be used for installing other functional modules to expand functions of the micropositioner; meanwhile, the vertical base 3 is sleeved outside the rotating base 2, so that the height of the micro-motion platform along the Z direction can be reduced, and the flat arrangement of the micro-motion platform is facilitated; furthermore, because the integration is provided with gravity compensation subassembly 42 and voice coil motor element 41 in vertical drive device 4 for vertical drive device 4 still possesses gravity compensation's effect when possessing vertical drive function, has effectively simplified the structure of fine motion platform, has improved the compact structure nature of fine motion platform, and compare in prior art with gravity compensation device setting in vertical base 3 below, the vertical drive device 4 of this embodiment is favorable to the flattening and the lightweight setting of fine motion platform more.

In the present embodiment, the mounting base 5 has a flat plate-like structure perpendicular to the Z direction, so that the structure of the mounting base 5 is simplified and the weight of the mounting base 5 is reduced. In other embodiments, the mounting base 5 may also be a sleeve-shaped structure with an open upper end, and the vertical base 3, the rotating base 2, the vertical driving device 4, and the like are all installed inside the mounting base 5, which helps to protect the vertical base 3, the rotating base 2, and the vertical driving device 4.

The rotary driving motor 1 comprises a rotary motor stator 12 and a rotary motor rotor 11 which are coaxial and are sleeved at intervals, the rotary motor stator 12 is preferably installed on the inner side wall of the vertical base 3, and the rotary motor rotor 11 is installed on the inner side wall of the rotary base 2. This arrangement can reduce the dimension of the rotary drive motor 1 in the Z direction, and is further advantageous for the flattening arrangement of the micropositioner.

For the installation of convenience rotary driving motor 1, be formed with one end open-ended motor mounting groove between the lateral wall of roating seat 2 and the inside wall of vertical base 3, rotary driving motor 1 sets up in the motor mounting groove. The setting of motor mounting groove is favorable to making rotary drive motor 1 carry out the dismouting through the notch of motor mounting groove, makes things convenient for rotary drive motor 1's dismouting and maintenance.

In this embodiment, the notch of motor mounting groove sets up down, can prevent that impurity such as dust, steam from getting into the motor mounting groove and causing the influence to rotation driving motor 1, improves rotation driving motor 1's safety in utilization and reliability. In other embodiments, the slot opening of the motor mounting groove may be disposed upward.

In order to facilitate the installation of the rotary motor rotor 11, a rotor ring groove is formed in one side groove wall of the motor installation groove, the rotary motor rotor 11 is installed in the rotor ring groove, and the rotary motor rotor 11 is at least abutted to one side groove wall of the rotor ring groove. The fixing mode of the rotary motor mover 11 in the mover ring groove can be bonding or fixing mode of other existing motor movers.

In the present embodiment, the mover annular groove penetrates through the lower end surface of the rotary base 2, and the mover stopper 20 is detachably connected to the lower end surface of the rotary base 2, and the mover stopper 20 abuts against the lower end surface of the rotary motor mover 11 to restrict the downward movement of the rotary motor mover 11 relative to the rotary base 2. This kind of setting can be when realizing the installation of rotating electrical machines active cell 11 spacing, the dismouting of rotary driving motor 1 is made things convenient for more.

The rotating electrical machines active cell 11 encircles the setting of roating seat 2, and its a plurality of rotating electrical machines magnet steel that set up including the circumference interval that encircles roating seat 2. The mover limiting part 20 is preferably of an annular structure, so that the abutting limitation of all the rotating electronic magnetic steels is realized by adopting one mover limiting part 20, and the structure of the mover limiting part 20 is simplified.

Further, for realizing the installation of the rotating electric machine stator 12 is limited and positioned, the positioning boss 33 is arranged on the inner side wall of the vertical base 3 in an upward protruding mode, one end of the rotating electric machine stator 12 abuts against the positioning boss 33, the vertical base 3 is detachably connected with the stator limiting part 10 at the notch of the motor installation groove, and the other end of the rotating electric machine stator 12 abuts against the stator limiting part 10. Namely, the rotating electric machine stator 12 is positioned and limited in a matched manner through the positioning boss 33 and the stator limiting member 10, and the assembling and disassembling of the rotating electric machine stator 12 are facilitated due to the arrangement. In the present embodiment, the stator limiting member 10 is connected to the lower end of the vertical base 3.

The rotating electric machine stator 12 is disposed along the inner wall of the vertical base 3, and includes a plurality of rotating electric machine coils disposed at intervals along the inner wall of the vertical base 3. The stator limiting member 10 is preferably of an annular structure, so that the stator limiting member 10 can be ensured to abut against all the coils of the rotating electric machine, and the structure of the stator limiting member 10 is simplified. The inner diameter of the stator limiting member 10 is preferably larger than the outer diameter of the mover limiting member 20, and the mover limiting member 20 is located inside the stator limiting member 10 to prevent the mover limiting member 20 from interfering with the stator limiting member 10.

For the rotation smoothness nature that improves roating seat 2, be provided with swivel bearing group 8 between roating seat 2 and the vertical base 3, swivel bearing group 8 includes that one or a plurality of sets up rolling bearing 81 side by side along the Z direction. The inner ring of the rotating bearing 81 is fixed with the rotating base 2, and the outer ring of the rotating bearing 81 is connected with the inner side wall of the vertical base 3.

In this embodiment, the rotating bearing set 8 includes two rotating bearings 81 spaced along the Z-direction, and the two rotating bearings 81 are spaced by a spacing ring 82. In other embodiments, two adjacent rotational bearings 81 may directly abut against each other, or only one or more rotational bearings 81 may be provided.

For the installation of convenient swivel bearing group 8, be formed with the bearing mounting groove between the lateral wall of roating seat 2 and the inside wall of vertical base 3, the notch of bearing mounting groove deviates from the setting with the notch of motor mounting groove. The rotating bearing set 8 is installed in the bearing installation groove. In this embodiment, the notch of the bearing mounting groove faces upward, and the bearing mounting groove is located above the motor mounting groove. In other embodiments, the location of the bearing mounting slot and the motor mounting slot may be interchanged.

In order to realize the installation, positioning and limiting of the rotating bearing group 8, a positioning convex part 24 is convexly arranged on the outer side wall of the rotating seat 2, the positioning convex part 24 is opposite to the positioning boss 33 and is arranged at an interval, and the upper end faces of the positioning convex part 24 and the positioning boss 33 jointly form the groove bottom of the bearing installation groove. The lower end surface of the inner ring of the lower rotary bearing 81 abuts on the upper end surface of the positioning projection 24, and the lower end surface of the outer ring of the rotary bearing 81 abuts on the upper end surface of the positioning boss 33.

In order to prevent the rotating bearing 81 from moving upwards out of the bearing mounting groove, the upper end surface of the rotating seat 2 is detachably connected with an inner ring limiting structure, and the upper end surface of the vertical base 3 is detachably connected with an outer ring limiting part 30. The upper end surface of the inner ring of the rotating bearing 81 abuts against the inner ring limit structure, and the upper end surface of the outer ring of the rotating bearing 81 abuts against the outer ring limit stopper 30.

In the embodiment, the outer ring limiting member 30 is an annular structure, and the inner diameter of the outer ring limiting member 30 is larger than the outer diameter of the inner ring limiting member 30, and the inner ring limiting member is located inside the outer ring limiting member 30 to avoid interference.

Preferably, since the radial width of the rotary driving motor 1 is greater than that of the rotary bearing 81, in the present embodiment, the rotary base 2 includes a first seat portion 21 and a second seat portion 22 which are continuously disposed along the Z direction, the outer diameter of the first seat portion 21 is smaller than that of the second seat portion 22, a motor mounting groove is formed between the first seat portion 21 and the vertical base 3, and a bearing mounting groove is formed between the second seat portion 22 and the vertical base 3. In other embodiments, when the radial dimension of the rotating bearing 81 is larger than the radial dimension of the rotating driving motor 1, a bearing installation groove may be formed between the first seat portion 21 and the vertical base 3, and a motor installation groove may be formed between the second seat portion 22 and the vertical base 3.

In this embodiment, a stage mounting base 6 is detachably connected to an upper end surface of the rotary base 2, a stage 7 is detachably mounted on an upper end surface of the stage mounting base 6, the stage 7 is used for adsorbing a substrate, and an adsorption manner of the stage 7 to the substrate may be vacuum adsorption or electrostatic adsorption. The stage mounting base 6 includes a sleeve portion 61 fitted around the outer side of the rotary base 2, and the sleeve portion 61 abuts on the inner ring end surface of the rotating bearing group 8, that is, the sleeve portion 61 forms the above-described inner ring stopper structure.

Preferably, the upper end of the sleeve portion 61 is provided with an annular flange portion 62 extending radially outward, the flange portion 62 is located inside the outer ring limiting member 30, and the outer diameter of the flange portion 62 is equal to or slightly smaller than the inner diameter of the outer ring limiting member 30, so that the flange portion 62 can shield the gap between the outer ring limiting member 30 and the inner ring limiting structure, prevent external dust, impurities and the like from entering the inside of the rotating bearing 81, and improve the rotation smoothness of the rotating bearing 81.

The structure of microscope carrier mount 6 and microscope carrier 7 can refer to prior art, this is not the utility model discloses a key point, no longer give consideration to here.

The vertical base 3 includes a main body tube 31 and a mounting plate 32 extending along the radial direction of the main body tube 31, the main body tube 31 is coaxially and rotatably sleeved outside the rotary base 2, the mounting plate 32 is connected to the upper end of the main body tube 31, and the upper end surface of the mounting plate 32 is preferably flush with the upper end surface of the main body tube 31. The vertical driving device 4 is disposed around the main body cylinder 31, and the mover of the voice coil motor assembly 41 and the mover of the gravity compensation assembly 42 are both fixedly connected to the mounting plate portion 32. This kind of vertical base 3's structure setting can make things convenient for vertical drive arrangement 4 and vertical base 3's dismouting when convenient establishing with the rotation cover of roating seat 2, and improves compact structure nature and the whole aesthetic property of fine motion platform.

Preferably, the orthographic projection of the vertical driving device 4 on the mounting base 5 is located in the orthographic projection range of the mounting plate portion 32 on the mounting base 5, so that the vertical driving device 4 can be located in the coverage range of the mounting plate portion 32, and the vertical driving device 4 can be hidden under the mounting plate portion 32 in the top view of the micropositioner, thereby further improving the appearance aesthetic property of the micropositioner.

In order to improve the reliability of the movement of the vertical base 3 along the Z direction, the micro-motion platform further comprises a vertical guiding assembly 9, the vertical guiding assembly 9 comprises a fixing part 91 and a sliding part 92 which are in sliding fit, the fixing part 91 is connected with the mounting base 5, the sliding part 92 is connected with the vertical base 3, and the vertical guiding assembly 9 is used for guiding the movement of the vertical base 3 along the Z direction. The vertical guide assembly 9 can improve the operation reliability of the vertical base 3 along the Z direction, and meanwhile, the vertical base 3 can only move along the Z direction and can not deflect around the X direction and the Y direction, namely, the micropositioner only has two degrees of freedom in the Rz direction and the Z direction.

The vertical guide assembly 9 is preferably arranged outside the main body barrel part 31, and the orthographic projection of the vertical guide assembly 9 on the installation base 5 is positioned in the orthographic projection range of the installation plate part 32 on the installation base 5, so that the structure compactness and the appearance attractiveness of the micropositioner are improved, and the vertical guide assembly 9 can be conveniently detached.

More preferably, the vertical guide assemblies 9 are arranged in a plurality at intervals along the circumferential direction of the main body barrel portion 31, each vertical guide assembly 9 is located between two adjacent vertical driving devices 4, and only one set of vertical guide assembly 9 is arranged between two adjacent vertical driving devices 4, so that the structure compactness and the vertical motion reliability of the vertical base 3 are further improved. It will be understood that the number and specific positions of the vertical guiding assemblies 9 are not limited to the above, and the specific number and specific positions of the vertical guiding assemblies 9 can be designed according to actual needs as long as the purpose of guiding the Z-direction movement of the vertical base 3 can be achieved.

In this embodiment, the fixing member 91 is a guide shaft disposed along the Z direction, the sliding member 92 is a guide sleeve slidably sleeved on the guide shaft, the lower end of the guide shaft is vertically connected to the mounting base 5, a guide hole 321 is formed in the mounting plate portion 32 corresponding to the guide shaft, the guide shaft penetrates through the guide hole 321, and the guide sleeve is mounted on the lower end surface of the mounting plate portion 32. The vertical guide assembly 9 is simple in structure, high in guide reliability and convenient to install and arrange. The guide sleeve can be a linear bearing or a sleeve made of a lubricating material. In other embodiments, the vertical guiding assembly 9 may also adopt other structures capable of realizing linear motion guiding, such as a guide rail and slider mechanism.

Preferably, vertical drive device 4 and vertical direction subassembly 9 all are provided with N, and installation board portion 32 is positive M limit shape structure, and M2N, and every vertical drive device 4 and vertical direction subassembly 9 all correspond the positive M limit shape's of an installation board portion 32 summit setting, and every vertical direction subassembly 9 all is located between two adjacent vertical drive device 4, and every vertical drive device 4 all is located between two adjacent vertical direction subassemblies 9. This kind of setting can be when guaranteeing that installation board portion 32 covers vertical drive arrangement 4 and vertical guide assembly 9, reduces the whole terminal surface area of installation board portion 32, further saves the whole occupation of land space of fine motion platform, improves compact structure nature. And this kind of setting for the spatial layout of fine motion platform is more reasonable, and the atress is more balanced.

In this embodiment, N is 3, which can reduce the cost while ensuring a sufficient driving force to the vertical base 3. In other embodiments, N may equal 4 or other numbers. In another embodiment, the vertical driving device 4 and the vertical guiding component 9 may not be in a one-to-one relationship, or the installation plate portion 32 may not be in a regular polygon structure, the utility model discloses do not limit the concrete shape of installation plate portion 32, as long as can guarantee the installation space of vertical driving device 4 and vertical guiding component 9.

As shown in fig. 1 and 3, wherein only a portion of the structure of the vertical driving device 4 is shown in fig. 1, fig. 3 is a schematic structural diagram of the vertical driving device 4 in this embodiment, in fig. 3, the voice coil motor assembly 41 includes a voice coil motor stator 412 and a voice coil motor mover 411 that are sleeved at intervals, the voice coil motor stator 412 is fixed relative to the mounting base 5, and the voice coil motor mover 411 is fixed relative to the vertical base 3. Voice coil motor mover 412 is a magnetic steel and voice coil motor stator 411 is a coil. Preferably, the coils of all the vertical driving devices 4 are connected in parallel, so as to better ensure the consistency of the vertical driving force provided by all the voice coil motor assemblies 41, and thus ensure the stress stability of the vertical base 3.

In this embodiment, the gravity compensation assembly 42 adopts a magnetic suspension gravity compensation structure, and the gravity compensation assembly 42 includes a magnetic suspension stator 421 and a magnetic suspension rotor 422 that are sleeved at intervals, the magnetic suspension stator 421 and the voice coil motor stator 412 are both fixed to the mounting base 5, and the voice coil motor rotor 411 and the magnetic suspension rotor 422 are both fixed to the vertical base 3. Therefore, when the coil in the voice coil motor assembly 41 generates lorentz force by cutting, driving force is provided for the Z-direction movement of the rotary base 2, and the magnetic suspension stator 421 and the magnetic suspension rotor 422 generate suspension force due to magnetic force to compensate the gravity of the vertical base 3.

In order to facilitate the connection of the vertical driving device 4 with the vertical base 3 and the mounting base 5, the vertical driving device 4 further comprises a stator seat 43 and a rotor seat 44; the stator seat 43 is fixed with the mounting base 5, and the magnetic levitation stator 421 and the voice coil motor stator 412 are both arranged on the stator seat 43, so that the magnetic levitation stator 421 and the voice coil motor stator 412 are both fixedly connected to the mounting base 5 through the stator seat 43; the rotor base 44 is fixed relative to the vertical base 3, and the magnetic levitation rotor 422 and the voice coil motor rotor 411 are both fixed on the rotor base 44, so that the magnetic levitation rotor 422 and the voice coil motor rotor 411 are both connected to the vertical base 3 through the rotor base 44.

When the voice coil motor stator 412 is electrified, magnetic force generated between the voice coil motor stator 412 and the voice coil motor rotor 411 drives the voice coil motor rotor 411 to move along the Z direction, so that the rotor base 44 fixedly connected with the voice coil motor rotor 411 is driven to vertically move along the Z direction, namely the rotor base 44 drives the vertical base 3 to move along the Z direction; meanwhile, magnetic force exists between the magnetic suspension stator 421 and the magnetic suspension rotor 422, and the magnetic suspension rotor 422 has a tendency of moving upwards along the Z direction by the magnetic suspension stator 421, so that an upwards suspension supporting force is applied to the rotor base 44 through the magnetic suspension rotor 422, namely, an upwards supporting force is applied to the vertical base 3.

Through all fixing voice coil motor stator 412 and magnetic levitation stator 421 on stator seat 43, all fix voice coil motor active cell 411 and magnetic levitation active cell 422 on rotor seat 44, can integrate gravity compensation arrangement to vertical drive arrangement 4 in, help improving the integrated degree of fine motion platform, improve overall structure's compactness, reduce vertical drive arrangement 4 and gravity compensation arrangement's space occupancy to be favorable to the lightweight of fine motion platform and flattening setting more.

Preferably, in this embodiment, the stator base 43 is cylindrical, the lower end of the stator base 43 is connected to the mounting base 5, the voice coil motor stator 412 is mounted on the outer wall of the stator base 43, and the magnetic levitation stator 421 is mounted on the inner wall of the stator base 43. Preferably, the magnetic levitation stator 421 is mounted on the lower end of the stator base 43, and the voice coil motor stator 412 is mounted on the upper end of the stator base 43.

The mover seat 44 includes a magnetic mounting portion 441 located inside the stator seat 43, a motor mounting portion 442 located outside the stator seat 43, and a connection seat portion 443 connected between the magnetic mounting portion 441 and the motor mounting portion 442, the connection seat portion 443 is located above the stator seat 43 and is connected to or abutted against the mounting plate portion 32, the magnetic levitation mover 422 is mounted on the magnetic mounting portion 441 and located inside the magnetic levitation stator 421, and the voice coil motor mover 411 is mounted on the motor mounting portion 442 and located outside the voice coil motor stator 412.

The connection seat portion 443 is preferably screwed to the mounting plate portion 32 to ensure positional stability between the connection seat portion 443 and the vertical base 3. In order to improve the mounting and positioning accuracy between the vertical base 3 and the vertical driving device 4, it is preferable that the mounting plate portion 32 is provided with a positioning hole 322, and the upper end of the connecting seat portion 443 is protruded with a positioning post (not shown) inserted into the positioning hole 322.

In another embodiment, the connection seat 443 may be only abutted against the installation plate portion 32, and the installation plate portion 32 is pushed to move up and down by the driving force of the movement, thereby moving up and down the vertical base 3.

In this embodiment, the vertical drive device 4 is located substantially below the mounting plate portion 32, which can improve the overall aesthetics of the micropositioner and provide shielding protection for the vertical drive device 4. It is understood that the vertical drive unit 4 may extend through the positioning hole 322 to the upper side of the mounting plate portion 32, for example, when the upper end of the vertical drive unit 4 is small in size, the upper end of the vertical drive unit 4 passes through the positioning hole 322 and is connected to the mounting plate portion 32.

In order to realize the installation and positioning of each stator and each rotor, preferably, the inner wall of the stator seat 43 is provided with an inner installation groove, the outer wall of the stator seat 43 is provided with an outer installation groove, the magnetic levitation stator 421 is embedded in the inner installation groove, and the voice coil motor stator 412 is embedded in the outer installation groove. An annular mounting ring groove is formed in the outer wall of the magnetic mounting portion 441, and the magnetic levitation rotor 422 is embedded in the mounting ring groove so as to improve the mounting accuracy of the magnetic levitation rotor 422. An installation convex ring is convexly arranged on the outer wall of the motor installation part 442, the inner side of the voice coil motor rotor 411 is fixed on the outer wall of the motor installation part 442, and the lower end of the voice coil motor rotor 411 abuts against the upper end face of the installation convex ring. It is understood that the mounting and positioning structures of the stators and the movers are all exemplary structures, and the present embodiment does not limit this.

The magnetic mounting portion 441 includes a mounting base portion 4411 and an adapter rack portion 4412, an upper end of the mounting base portion 4411 is detachably connected with a lower end of the adapter rack portion 4412, an upper end of the adapter rack portion 4412 is detachably connected with the connection seat portion 443, and the magnetic levitation mover 422 is mounted on the mounting base portion 4411. This arrangement can simplify the processing of the mover seat 44, and facilitate the installation of the magnetic levitation mover 422, so that the magnetic levitation mover 422 can be installed on the installation base 4411, and then the installation base 4411 is connected to the adapter frame 4412.

Because the magnetic levitation rotor 422 can move along the Z direction relative to the magnetic levitation stator 421, preferably, the height of the magnetic levitation rotor 422 along the Z direction is greater than the height of the magnetic levitation rotor 422 along the Z direction, and the height difference between the magnetic levitation rotor 422 and the magnetic levitation stator 421 along the Z direction is at least greater than the movement stroke of the rotary base 2 along the Z direction.

Preferably, the vertical driving device 4 further includes a connection base 45, the upper end of the connection base 45 is detachably connected to the lower end of the stator seat 43, the connection base 45 abuts against the upper surface of the mounting base 5 and is detachably connected to the mounting base 5, the connection base 45 is provided with a base through hole coaxially arranged with the stator seat 43 along the Z direction, and the lower end of the rotor seat 43 can extend into the base through hole to reduce the size of the vertical driving device 4 in the Z direction.

Preferably, in order to detect the displacement stroke of the rotating base 2 along the Z direction, the micro-motion stage further comprises a vertical displacement detection device. In this embodiment, vertical position detection device is including vertical displacement encoder and the vertical grating chi of cooperation use, the vertical setting of vertical grating chi, and one of vertical displacement encoder and the vertical grating chi sets up on vertical base 3, and another setting is on mounting base 5, and vertical displacement encoder sets up with vertical grating chi relatively. In this embodiment, preferably, the vertical displacement encoder is disposed on the mounting base 5, and the vertical grating ruler is disposed on the vertical base 3.

Further, in order to detect the rotation angle of the rotating base 2 around the Z direction, the micropositioner further comprises an angle detection device. In this embodiment, angle detection device includes angle detection encoder and angle detection grating chi, and angle detection encoder sets up on vertical base 3, and the angle detection grating sets up on roating seat 2.

The principle and the specific structure of the grating ruler matched with the encoder to realize vertical displacement measurement or angle detection are more conventional, and are not repeated here. It can be understood that other conventional displacement detecting devices may be used to detect the vertical movement stroke or the rotation angle of the rotating base 2, which is not limited in this embodiment.

Further, the fine motion platform is still including electric locating part and the mechanical locating part that is used for restricting the vertical motion formation of roating seat 2, and prior art can be referred to the structure of electric locating part and mechanical locating part, the utility model discloses do not limit to this.

Example two

In this embodiment, a micro stage is provided, and compared with the first embodiment, the structure of the micro stage provided in this embodiment is substantially the same as that of the first embodiment, and only the arrangement of the vertical driving device 4 is different, and the structure that is the same as that of the first embodiment is not described again in this embodiment.

As shown in fig. 4, the vertical driving device 4 includes a voice coil motor assembly 41 and a gravity compensation assembly 42, the voice coil motor assembly 41 includes a voice coil motor stator 412 and a voice coil motor rotor 411 that are sleeved at an inner and an outer interval, and the gravity compensation assembly 42 includes a magnetic levitation rotor 422 and a magnetic levitation stator 421 that are sleeved at an inner and an outer interval. In this embodiment, the magnetic suspension stator 421 is fixedly disposed inside the voice coil motor stator 412, and the magnetic suspension rotor 422 and the voice coil motor rotor 411 are integrated into a whole and are voice coil motor magnetic steel matched with the voice coil motor stator 412. This kind of setting mode can effectively reduce vertical drive device 4's structural complexity, and alleviates vertical drive device 4's weight.

Preferably, the vertical driving mechanism comprises a stator base 43, the voice coil motor stator 412 is mounted on the outer wall of the stator base 43, and the magnetic levitation stator 421 is mounted on the inner wall of the stator base 43. The magnetic levitation stator 421 is a magnet structure of a column or a cylinder. And preferably, voice coil motor stator 412 is embedded on the outer wall of stator holder 43.

Voice coil motor magnet steel can direct mount in the lower surface of the installation board portion 32 of vertical base 3, also can be when installation space is enough, install on the inner wall of locating hole 322, or voice coil motor magnet steel also can be connected with vertical base 3 through the rotor seat, and this embodiment does not do specific restriction to this, as long as guarantee that voice coil motor magnet steel is fixed can relative vertical base 3.

EXAMPLE III

As shown in fig. 5, the vertical driving device 4 includes a voice coil motor assembly 41 and a gravity compensation assembly 42, the voice coil motor assembly 41 includes a voice coil motor stator 412 and a voice coil motor rotor 411 that are sleeved at an inner and an outer interval, and the gravity compensation assembly 42 compensates the gravity of the rotary base 2 in an air floating manner.

Specifically, the gravity compensation assembly 42 includes an air guide seat 423 and a sliding seat 424, the air guide seat 423 has an air cavity 4231 with an open upper end, an air passage 4232 communicated with the air cavity 4231 is arranged in the air guide seat 423, one end of the air passage 4232 is communicated with the air cavity 4231, and the other end of the air passage 4232 penetrates through the outer side wall of the air guide seat 423 and is communicated with an air source device. The sliding seat 424 is slidably and hermetically disposed in the air cavity 4231, the voice coil motor mover 411 is fixed opposite to the sliding seat 424, and the voice coil motor stator 412 is mounted on an outer wall of the air guide seat 423.

When the voice coil motor mover 411 moves along the Z direction relative to the voice coil motor stator 412, the sliding seat 424 slides up and down in the air cavity 4231 under the driving of the voice coil motor mover 411, the volume of the air cavity 4231 is changed, the air pressure in the air cavity 4231 is changed by inflating or deflating the air cavity 4231 through the air passage 4232 by the air source device, and the air in the air cavity 4231 can apply upward air pressure to the sliding seat 424, so that the gravity of the rotary seat 2 can be compensated.

This kind of gravity compensation subassembly 42's setting can make gravity compensation subassembly 42 adopt the mode of air supporting to realize gravity compensation, and simple structure, weight is lighter, and the cost is lower, can further realize the lightweight setting of fine motion platform.

Further, the vertical driving device 4 further includes a rotor base 44, the voice coil motor rotor 411 is disposed on the rotor base 44, the rotor base 44 is fixedly connected to the top of the sliding base 424, and the rotor base 44 is fixed relative to the vertical base 3. Preferably, the mover seat 44 has a cylindrical structure with a closed upper end and an open lower end, the voice coil motor stator 412 is disposed at the upper end of the air guide seat 423, and the upper end of the air guide seat 423 extends into the mover seat 44.

Preferably, a mounting protrusion extends inward from the periphery of the lower opening of the mover seat 44, an outer wall of the voice coil motor mover 411 is fixed to an inner sidewall of the mover seat 44, and a lower end of the voice coil motor mover 411 abuts against an upper surface of the mounting protrusion.

Example four

As shown in fig. 6 to 8, the micro-motion stage provided in this embodiment is further improved based on the first embodiment, the second embodiment or the third embodiment, and the improvement point is that a handover mechanism is additionally disposed in the installation cavity 23, and the structure of this embodiment is not repeated.

Specifically, the interface mechanism 40 is disposed in the mounting cavity 23, and the interface mechanism 40 is used for interfacing a substrate, such as a silicon wafer. By arranging the handover mechanism, the micro-motion platform can execute handover work of substrates such as silicon wafers.

The detailed structure of the handover mechanism 40, the handover principle and the detailed operation of the substrate can be found in the prior art, and are not described in detail in this embodiment.

EXAMPLE five

The embodiment provides a motion device, which comprises an XY motion table and a micro-motion table in any one of the first embodiment to the fourth embodiment, wherein the micro-motion table is arranged on the XY motion table, and the XY motion table is used for driving the micro-motion table to move along the X direction and/or the Y direction.

The XY moving stage can refer to the structure in patent application 202011523638.5, and other structures of XY moving stage in the prior art can also be adopted, and this embodiment does not specifically limit this.

It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.

Claims

1. A micropositioner having a mounting cavity, comprising:

a mounting base (5);

the vertical base (3) is movably arranged above the mounting base (5);

the rotating seat (2) is rotatably sleeved inside the vertical base (3), and an installation cavity (23) with an opening at the upper end is formed inside the rotating seat (2);

the rotary driving motor (1) is arranged between the vertical base (3) and the rotary seat (2) and is used for driving the rotary seat (2) to rotate around the Z direction relative to the vertical base (3);

vertical driving devices (4) arranged on the mounting base (5) and arranged around the vertical base (3) at intervals, the output end of the vertical driving device (4) is connected to the vertical base (3), the vertical driving device (4) comprises a voice coil motor component (41) and a gravity compensation component (42), the stator of the voice coil motor component (41) and the stator of the gravity compensation component (42) are both fixed relative to the mounting base (5), the rotor of the voice coil motor component (41) and the rotor of the gravity compensation component (42) are both fixed relative to the vertical base (3), the voice coil motor assembly (41) is used for driving the vertical base (3) to move along the Z direction relative to the mounting base (5), the gravity compensation assembly (42) is used for compensating the gravity of the vertical base (3).

2. Micropositioner according to claim 1, characterized in that the vertical base (3) comprises:

the main body cylinder part (31) is coaxially and rotatably sleeved on the outer side of the rotating seat (2);

and the mounting plate part (32) extends along the radial direction of the main body cylinder part (31), and the rotor of the voice coil motor assembly (41) and the rotor of the gravity compensation assembly (42) are fixedly connected with the mounting plate part (32).

3. Micropositioner according to claim 2, characterized in that the orthographic projection of the vertical drive (4) on the mounting base (5) is within the range of the orthographic projection of the mounting plate (32) on the mounting base (5).

4. The micropositioner of claim 2, further comprising a vertical guide assembly (9), said vertical guide assembly (9) comprising a fixed part (91) and a sliding part (92) in sliding fit, said fixed part (91) being connected to said mounting base (5), said sliding part (92) being connected to said vertical base (3), said vertical guide assembly (9) being adapted to guide said vertical base (3) for movement in the Z direction.

5. The micropositioner according to claim 4, characterized in that the orthographic projection of the vertical guide assembly (9) on the mounting base (5) is within the range of the orthographic projection of the mounting plate portion (32) on the mounting base (5).

6. The micropositioner according to claim 4, characterized in that N vertical driving devices (4) and vertical guiding assemblies (9) are provided, the mounting plate portion (32) is of a regular M-sided polygonal structure, M is 2 x N, each vertical driving device (4) and vertical guiding assembly (9) is provided corresponding to the vertex of a regular M-sided polygonal shape of the mounting plate portion (32), and each vertical guiding assembly (9) is located between two adjacent vertical driving devices (4).

7. Micropositioner according to any one of claims 1 to 6, in which the voice coil motor assembly (41) comprises a voice coil motor stator (412) and a voice coil motor mover (411), the voice coil motor stator (412) being fixed with respect to the mounting base (5), the voice coil motor mover (411) being fixed with respect to the vertical base (3), the voice coil motor stator (412) being a coil, the coils of all the vertical drives (4) being connected in parallel.

8. The micropositioner according to any one of claims 1 to 6, wherein the gravity compensation assembly (42) comprises an air guide seat (423) and a sliding seat (424), the lower end of the air guide seat (423) is connected with the mounting base (5), the air guide seat (423) is provided with an air cavity (4231) with an open upper end, the sliding seat (424) is arranged in the air cavity (4231) in a sliding and sealing manner, and the lower part of the air guide seat (423) is provided with an air vent passage (4232) communicated with the air cavity (4231);

voice coil motor subassembly (41) including voice coil motor stator (412) and voice coil motor active cell (411) that the cover was established, voice coil motor stator (412) install in air guide seat (423), voice coil motor active cell (411) connect in seat (424) slide.

9. The micropositioner according to any one of claims 1 to 6, further comprising a hand-over mechanism located within the installation chamber (23) for handing over substrates.

10. A movement device, characterized by comprising an XY-movement stage for driving the micro-movement stage in the X-direction and/or Y-direction and a micro-movement stage according to any of claims 1-9.