CN215073097U

CN215073097U - High stability automatically regulated mechanism

Info

Publication number: CN215073097U
Application number: CN202121009515.XU
Authority: CN
Inventors: 邓荣兵; 高飞; 雷知迪; 甄亭亭; 雷阳阳
Original assignee: Shanghai Advanced Research Institute of CAS
Current assignee: Shanghai Advanced Research Institute of CAS
Priority date: 2021-05-12
Filing date: 2021-05-12
Publication date: 2021-12-07
Anticipated expiration: 2031-05-12

Abstract

The utility model relates to a high stability automatic regulating mechanism, including fix the bottom plate on ground with set up in supporting platform on the bottom plate, the bottom plate with be provided with the backing plate between the supporting platform, supporting platform is the marble platform, last electronic slip table and the temperature displacement feedback mechanism of being fixed with of supporting platform. The high-stability automatic adjusting mechanism of the utility model controls the electric sliding table to adjust the position of the beam element through the control device, and can realize micron-level high-precision adjustment; through the temperature displacement feedback mechanism, the displacement change caused by the temperature change can be accurately captured and fed back, and the position of the beam current element is correspondingly adjusted, so that the position stability of the beam current element is improved; the vibration reduction table is adopted for active vibration reduction, and vibration transmitted to the beam current element from the surrounding environment of the supporting platform is effectively attenuated.

Description

High stability automatically regulated mechanism

Technical Field

The utility model relates to a accurate automatically regulated field of beam high stability, more specifically relates to a high stability automatically regulated mechanism.

Background

The key performance index of the advanced light source large scientific device is the stability of a beam track. One of the main factors affecting the beam trajectory stability is the mechanical stability of the key elements of the accelerator, including the long-term stability of the settling effect, the medium-term stability of the temperature fluctuation effect and the short-term stability of the earth vibration effect. With the development of advanced light source large scientific devices, the requirements on the quality and stability of the light source are higher and higher. The nanometer stability requirement of the quadrupole magnet of the key focusing element is further provided in the undulator section of the fourth generation light source or the hard X free electron laser device.

Currently, beam energy is generally changed based on collimation adjustment of a beam, a source causing beam orbit change is attributed to position deviation of a key element, and deviation of the key element and deviation of beam position probe (BPM) under different energies are obtained through calculation and analysis of BPM measurement data, so that a proper adjustment scheme is provided. The key elements are directly adjusted on line from the angle of the beam position, so that the stability of the beam can be greatly improved. However, the method has very high requirements on a supporting and adjusting mechanism of a key element, and high-precision collimation needs to be realized, so that the requirement of nano-scale high stability of beam current is met.

The existing support adjusting mechanism usually comprises a first layer of support and a second layer of support, wherein the first layer of support is fixed on the ground, the second layer of support is fixed on the first layer of support, a base plate is arranged between the first layer of support and the second layer of support, settlement compensation is performed through the height of a manual adjusting base plate, time and labor are wasted, and remote online adjustment cannot be achieved only through re-collimation adjustment under the condition of stopping beam current. In addition, the existing support adjusting mechanism usually adopts a spring damper or a rubber pad to perform passive vibration reduction, so that high-frequency vibration can be reduced, but low-frequency vibration of the ground background in a noisy environment cannot be reduced, and the requirement on the nanoscale stability of beam current cannot be met. In addition, the existing support adjusting mechanism is a steel structure support, when the temperature changes +/-0.1 ℃, the position change of the steel structure support with the height of about 1 meter in the vertical direction reaches the micron level, and the requirement of the nanoscale stability of beam current cannot be met.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a high stability automatically regulated mechanism to carry out long-range automatically regulated to the position of restrainting the stream component, improve its positional stability.

The utility model provides a high stability automatic regulating mechanism, include: fix the bottom plate on ground with set up in supporting platform on the bottom plate, the bottom plate with be provided with the backing plate between the supporting platform, its characterized in that, last electronic slip table and the temperature displacement feedback mechanism of being fixed with of supporting platform.

Further, temperature displacement feedback mechanism includes support, adjusting screw and displacement sensor, the support is fixed supporting platform is last, adjusting screw sets up on the support, displacement sensor sets up on the adjusting screw, adjusting screw is located electronic slip table top.

Further, electronic slip table includes motor, first layer slip table structure and second floor slip table structure, first layer slip table structure set up in on the supporting platform, second floor slip table structure set up in first layer slip table is structural, the motor respectively with first layer slip table structure with second floor slip table structure links to each other.

Furthermore, the first layer of sliding table structure comprises a first ball screw, a first guide rail and a first sliding table, the first guide rail is fixed on the supporting platform, the first sliding table is arranged on the first guide rail in a sliding manner, and the first ball screw is connected with the first sliding table; the second layer of sliding table structure comprises a second ball screw, a second guide rail and a second sliding table, the second guide rail is fixed on the first sliding table, the second sliding table is arranged on the second guide rail in a sliding mode, and the second ball screw is connected with the second sliding table; the motor is respectively connected with the first ball screw and the second ball screw.

Further, the vibration reduction table and the nanometer positioning table are further included, the vibration reduction table is fixed to the electric sliding table, and the nanometer positioning table is fixed to the vibration reduction table.

Further, the supporting platform is a marble platform.

Further, the stent is made of Invar (Invar) material.

Further, the bottom plate and the ground are fixed through foundation bolts and grouting.

The high-stability automatic adjusting mechanism of the utility model controls the electric sliding table to adjust the position of the beam element through the control device, and can realize micron-level high-precision adjustment; through the temperature displacement feedback mechanism, the displacement change caused by the temperature change can be accurately captured and fed back, and the position of the beam current element is correspondingly adjusted, so that the position stability of the beam current element is improved; the vibration reduction table is adopted for active vibration reduction, and vibration transmitted to the beam current element from the surrounding environment of the supporting platform is effectively attenuated.

Drawings

Fig. 1 is a schematic structural diagram of an automatic adjusting mechanism with high stability according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a bottom plate of the high-stability automatic adjusting mechanism of the present invention;

fig. 3 is the utility model discloses a structural schematic diagram after high stability automatic regulating mechanism gets rid of first slip table top part.

Detailed Description

The following description of the preferred embodiments of the present invention will be made with reference to the accompanying drawings.

As shown in fig. 1, the embodiment of the present invention provides a high-stability automatic adjusting mechanism for supporting

beam elements

100 or 200 and adjusting their positions to maintain their positional stability, including a bottom plate 1, a backing plate 2, and a supporting platform 3, wherein the bottom plate 1 is fixed on the ground, the supporting platform 3 is arranged on the bottom plate 1 and detachably connected to the bottom plate 1, the backing plate 2 is clamped between the bottom plate 1 and the supporting platform 3, and the height of the supporting platform 3 can be adjusted by adjusting the size of the backing plate 2, so that the height of the supporting platform is kept stable without being affected by ground settlement; the upper surface of the supporting platform 3 is provided with an electric sliding table 4, and the beam element 100 is arranged on the upper surface of the electric sliding table 4; a temperature displacement feedback mechanism 5 extends upwards from the side surface of the supporting platform 3 and is used for monitoring and feeding back the position change of the beam current element caused by the temperature change; after the positions of the

beam elements

100 and 200 are changed, the electric sliding table 4 can slide as required, so that the positions of the

beam elements

100 and 200 can be adjusted, and the position stability of the beam elements can be kept.

There are many beam elements, and the requirements for stability and position accuracy of different beam elements are different. The beam element 100 (including a corrector, a phase shifter, a cavity beam position detector (CBPM), etc.) is not too high in stability and position accuracy, and can be placed on the electric slide table 4, and the position of the electric slide table 4 is adjusted to meet the accuracy requirement. The beam element 200 (for example, a quadrupole magnet) has high requirements on stability and position accuracy, and needs to reach nano-scale accuracy, and the electric sliding table 4 cannot meet the accuracy requirement, so a vibration reduction table 61 and a nano positioning table 62 can be further sequentially arranged on the electric sliding table 4, the beam element 200 is arranged on the nano positioning table 62, the vibration reduction table 61 is used for actively attenuating the original vibration of the automatic adjusting mechanism, and the nano positioning table 62 is used for nano-scale adjustment of the position of the beam element 200, so that the position of the beam element 200 meets the accuracy requirement.

Supporting platform 3 includes platform body and platform bottom plate, the platform body passes through bottom plate lower sinking hole bolted connection with the platform bottom plate, be provided with four L type pieces 7 on the bottom plate 1, be located four base angle departments of supporting platform 3 respectively, L type piece 7 is fixed on bottom plate 1 through the bolt of vertical direction, be equipped with the bolt hole of vertical direction and the bolt hole of horizontal direction on the L type piece 7, bolt hole and bottom plate 1 bolted connection through vertical direction, behind another bolt screw in horizontal direction's the bolt hole, one end pushes up supporting platform 3's platform bottom plate side, a horizontal direction for adjusting supporting platform 3, can loosen after adjusting to target in place, also can demolish L type piece 7. Be provided with jack-up bolt 8 between bottom plate 1 and the supporting platform 3 for carry out auxiliary stay to supporting platform 3, when needs adjust supporting platform 3's height, lift up supporting platform 3 earlier to by jack-up bolt 8 withstands supporting platform 3's platform bottom plate, then change the backing plate 2 of required size, put down jack-up bolt 8 after the completion, through bolt 9 with supporting platform 3, backing plate 2 and bottom plate 1 fixed connection.

The supporting platform 3 is a natural granite marble platform, has good stability and low thermal expansion coefficient, is little in deformation influenced by temperature change, has good planeness, can achieve 20-micron grade in planeness, has low processing cost, and has low influence on the beam position because the marble is nonmagnetic.

As shown in fig. 2, four alignment holes 11 are provided on the bottom plate 1 for placing target balls, the target balls cooperate with the laser tracker to collect the three-dimensional coordinates of the bottom plate 1, and the bottom plate 1 can be accurately leveled to 0.02mm by the collected coordinate values. After accurate leveling, the bottom plate 1 is fixed with the ground through foundation bolts and grouting, and then fixed with the supporting platform 3 through bolts. Three grouting holes 12 are arranged on the bottom plate 1 to ensure that the grouting inside the bottom plate is uniform. Effective fixation of the bottom plate 1 and the ground can be guaranteed through grouting, and therefore stability of the automatic adjusting mechanism is improved.

In this embodiment, the electric sliding table 4 includes a motor 41, a speed reducer 42 and a two-layer sliding table structure, wherein the second-layer sliding table structure is disposed on the first-layer sliding table structure, and the motor 41 is connected to and drives the two-layer sliding table structure to slide through the speed reducer 42. Specifically, the first layer of sliding table structure includes two first guide rails 431, two first sliding blocks 432, two first sliding tables 44 and two first ball screws 47, the two first guide rails 431 are respectively and oppositely disposed on two sides of the top surface of the supporting platform 3, the first sliding blocks 432 are slidably disposed in the first guide rails 431, the first sliding tables 44 are fixed on the first sliding blocks 432, the first ball screws 47 are fixed on the supporting platform 3 and connected with the first sliding tables 44, the motor 41 is connected with the first ball screws 47 through the speed reducer 42 to drive the first ball screws 47 to operate, so that the first sliding tables 44 slide along the first guide rails 431; the second-layer sliding table structure comprises two second guide rails 451, two second sliding blocks 452, two second sliding tables 46 and two second ball screws 48, the two second guide rails 451 are respectively fixed on two sides of the top surface of the first sliding table 44, the second sliding blocks 452 are slidably arranged in the second guide rails 451, the second sliding tables 46 are fixed on the second sliding blocks 452, the second ball screws 48 are fixed on the first sliding tables 44 and respectively connected with the speed reducer 42 and the second sliding tables 46, and the second ball screws 48 drive the second sliding tables 46 to slide along the second guide rails 451 under the driving of the motor 41 and the speed reducer 42.

As shown in fig. 3, the first sliding table 44 is a frame structure formed by welding three cross beams and three longitudinal beams, bottom surfaces of the cross beams at two ends of the first sliding table are fixedly connected with the first sliding block 432, the second guide rail 451 is fixed on top surfaces of the cross beams at two ends, and the second ball screw 48 is fixed on a cross beam in the middle of the first sliding table 44. Specifically, the second ball screw 48 includes a screw 481, a nut 482 and two bearings 483, the screw 481 is fixed on a cross beam in the middle of the first sliding table 44 through the two bearings 483 after passing through the nut 482, one end of the screw 481 is connected with the speed reducer 42 through a coupling, the nut 482 is fixedly connected with the second sliding table 46 through a bolt, and under the driving of the motor 41 and the speed reducer 42, the screw 481 rotates to slide the nut 482 on the screw 481, so that the second sliding table 46 is driven to slide correspondingly. The structure of first ball 47 is the same as that of second ball 48, and it is no longer repeated here, and first ball 47 is fixed on supporting platform 3 through two bearings, and the one end of its screw rod passes through the shaft coupling with reduction gear 42 and links to each other, and the nut then with the crossbeam bottom surface fixed connection in the middle of first slip table 44, when the screw rod rotates, the nut drives first slip table 44 and slides along first guide rail 431.

The first rail 431 is provided on the upper surface of the support platform 3, and is a horizontal surface, and the height is not changed, so that the horizontal position of the first slide table 44 can be adjusted when sliding along the first rail 431. The upper surfaces of the three cross members of the first slide table 44 are disposed obliquely with a certain slope, so that the second guide rail 451 is also disposed obliquely, and when the second slide table 46 slides along it, the height of the second slide table 46 will change, thereby achieving adjustment of the height of the second slide table 46. The beam element 100 is placed on the second slide table 46, and the horizontal position and height of the beam element can be adjusted by the cooperative movement, i.e., the front-back and up-down movement, between the first slide table 44 and the second slide table 46. Preferably, the first sliding table 44 and the second sliding table 46 are both provided with grating rulers 49 for measuring and feeding back the precise relative displacement between the upper and lower connecting parts of each layer of guide rail, and the motor 41 drives the reducer 42 and the ball screw according to the position of the beam element to drive the beam element on the sliding tables to move to a required position. The resolution of the grating ruler 49 can reach 0.1 micron, and the positioning precision of the electric sliding table 4 can reach +/-2.5 microns.

The temperature displacement feedback mechanism 5 comprises a support 51, an adjusting screw 52, a locking nut 53 and a capacitance displacement sensor 54, wherein the bottom of the support 51 is fixed on the supporting platform 3 through a bolt, the top of the support is positioned above the electric sliding table 4 and is provided with a screw hole, the locking nut 53 is arranged outside the screw hole, the adjusting screw 52 is screwed into the screw hole and the locking nut 53, the support 51 is fixed through the locking nut 53, and the adjusting screw 52 can move up and down through rotation; a capacitance displacement sensor 54 is fixed on the adjusting screw 52 for monitoring and feeding back the position change of the beam current element caused by the temperature change. Preferably, the adjusting screw 52 is a hollow rod having an inner diameter of 10mm, the capacitive displacement sensor 54 has a diameter of 9mm, the capacitive displacement sensor 54 is located in the hollow rod and exposed from the sensing surface, a set screw passes through the adjusting screw and the capacitive displacement sensor 54 to fixedly connect the two, such that, the detection surface of the capacitance displacement sensor 54 can be slowly close to the beam element by rotating the adjusting screw 52 until the distance between the detection surface and the

beam element

100 or 200 is half of the measuring range of the capacitance displacement sensor 54 (for example, the measuring range is 0.5mm, the distance is adjusted to 0.25mm), when the

beam element

100 or 200 generates large thermal expansion along with the temperature change, the distance between the beam current element and the detection surface of the capacitance displacement sensor changes, and at the moment, the position of the beam current element needs to be adjusted through the electric sliding table 4 or the nanometer positioning table 62, so that the position of the beam current element is kept stable.

In the present embodiment, Invar (Invar) material is used for the support 51, and the Invar (Invar) material has a very low coefficient of thermal expansion and can maintain a fixed length in a wide temperature range, so that the support 51 can be regarded as a standard ruler which does not change along with temperature, and the influence of the support 51 on the change of the distance between the beam current element and the capacitance displacement sensor is reduced.

The vibration reduction table 61 is fixed on the second sliding table 46 and driven by a voice coil motor, a voice coil motor and a vibration sensor are arranged in the vibration reduction table, a permanent magnet of the voice coil motor is installed on the bottom surface of the vibration reduction table 61, a coil of the voice coil motor is installed on the top surface of the vibration reduction table 61, the vibration sensor is used for monitoring the background vibration of the vibration reduction table 61, and the voice coil motor operates according to a vibration signal of the vibration sensor to reduce the vibration of 1-100Hz, so that the vibration reduction effect is achieved. The nano positioning table 62 is fixed on the vibration reduction table 61 and can be driven by piezoelectric ceramics, and position adjustment of nano precision can be realized. The nano-positioning stage 62 can be a piezoelectric nano-positioning stage of different types according to actual needs, for example, in this embodiment, the nano-positioning stage 62 is a piezoelectric nano-positioning stage of type XD-604 in tomorrow.

The high-stability automatic adjusting mechanism of the utility model further comprises a control device 300, which is respectively electrically connected or in communication connection with the motor 41, the grating ruler 49, the voice coil motor, the vibration sensor and the nanometer positioning table 62, and controls the motor 41 or the nanometer positioning table 62 to make the beam element reach a required position through the beam element position fed back by the grating ruler or fed back by the positioning table 62; the control device 300 may further receive a vibration signal fed back by the vibration sensor, and drive the voice coil motor to perform vibration reduction after passing through a vibration reduction algorithm. When the device is used, the control device 300 is placed outside the beam track, and other components are positioned in the beam track, so that the position of the beam element can be conveniently adjusted through the control device 300. The control device 300 may be, for example, a single chip microcomputer, a computer, or the like.

The following description will be made of the operation process and principle of the high-stability automatic adjusting mechanism using a four-pole magnet as an example:

the vibration stability of the quadrupole magnet requires that the root mean square displacement of 1-100Hz is less than 100nm, the step length is adjusted to be 50nm, and the root mean square displacement of 1-100Hz of the ground background vibration is about 200 nm. The quadrupole magnet is fixed on the nanometer positioning table 62 through the supporting plate, the distance between the detection surface of the capacitance displacement sensor and the quadrupole magnet is half of the measuring range of the capacitance displacement sensor by rotating the adjusting screw rod 52, and the vibration reduction table 61 is always opened to attenuate the foundation vibration transmitted to the quadrupole magnet to be within 100nm during the beam orbit operation; when the reading of the capacitance displacement sensor does not change in a short time, the automatic adjusting mechanism does not act; when the temperature changes, the quadrupole magnet and the supporting plate thereof expand or contract to cause the reading change of the capacitance displacement sensor, when the displacement change exceeds 50nm and does not exceed the range of the nanometer positioning table 62, the position of the nanometer positioning table 62 is adjusted, and the electric sliding table 4 does not work; when the displacement change is between the range of the nanometer positioning table 62 and the range of the electric sliding table 4, the position of the electric sliding table 4 is firstly adjusted to be within the range of the nanometer positioning table 62 (namely within the micrometer range), and then the electric sliding table is adjusted to be in place through the nanometer positioning table 62; when the displacement change exceeds the range of the electric sliding table 4 due to the settlement of the floor, the height of the supporting platform 3 is adjusted through the backing plate 2 to complete the adjustment at the millimeter level, and then the adjustment at the micrometer level and the nanometer level is completed through the electric sliding table 4 and the nanometer positioning table 62 in sequence, so that the quadrupole magnet is adjusted in place.

The embodiment of the utility model provides a high stability automatic regulating mechanism, through controlling device 300 control electronic slip table 4 to restraint the flow element position and adjust, can realize the high accuracy regulation of micron level; the displacement change caused by the stable change can be accurately captured and fed back through the temperature displacement feedback mechanism, and the position of the beam current element is correspondingly adjusted, so that the position stability of the beam current element is improved; the vibration reduction table 61 is adopted for active vibration reduction, and vibration transmitted to beam elements from the surrounding environment of the supporting platform is effectively attenuated.

What has been described above is only the preferred embodiment of the present invention, not for limiting the scope of the present invention, but various changes can be made to the above-mentioned embodiment of the present invention. All the simple and equivalent changes and modifications made according to the claims and the content of the specification of the present invention fall within the scope of the claims of the present invention. The present invention is not described in detail in the conventional technical content.

Claims

1. The utility model provides a high stability automatically regulated mechanism, including fix the bottom plate on ground with set up in supporting platform on the bottom plate, the bottom plate with be provided with the backing plate between the supporting platform, its characterized in that, last electronic slip table and the temperature displacement feedback mechanism of being fixed with of supporting platform.

2. The high-stability automatic adjusting mechanism according to claim 1, wherein the temperature and displacement feedback mechanism comprises a support, an adjusting screw and a displacement sensor, the support is fixed on the supporting platform, the adjusting screw is arranged on the support, the displacement sensor is arranged on the adjusting screw, and the adjusting screw is located above the electric sliding table.

3. The high-stability automatic adjusting mechanism according to claim 1, wherein the electric sliding table comprises a motor, a first layer of sliding table structure and a second layer of sliding table structure, the first layer of sliding table structure is disposed on the supporting platform, the second layer of sliding table structure is disposed on the first layer of sliding table structure, and the motor is connected with the first layer of sliding table structure and the second layer of sliding table structure respectively.

4. The high-stability automatic adjusting mechanism according to claim 3, wherein the first layer of sliding table structure comprises a first ball screw, a first guide rail and a first sliding table, the first guide rail is fixed on the supporting platform, the first sliding table is slidably arranged on the first guide rail, and the first ball screw is connected with the first sliding table; the second layer of sliding table structure comprises a second ball screw, a second guide rail and a second sliding table, the second guide rail is fixed on the first sliding table, the second sliding table is arranged on the second guide rail in a sliding mode, and the second ball screw is connected with the second sliding table; the motor is respectively connected with the first ball screw and the second ball screw.

5. The high-stability automatic adjusting mechanism according to any one of claims 1 to 4, further comprising a vibration reduction table and a nanometer positioning table, wherein the vibration reduction table is fixed on the electric sliding table, and the nanometer positioning table is fixed on the vibration reduction table.

6. The high stability automatic adjustment mechanism of claim 1, wherein the support platform is a marble platform.

7. The high stability self-adjusting mechanism of claim 2, wherein the bracket is made of invar material.

8. The high stability self-adjusting mechanism of claim 1, wherein the base plate is fixed to the ground by anchor bolts and grout.