CN214956780U

CN214956780U - Sapphire substrate annealing furnace

Info

Publication number: CN214956780U
Application number: CN202121234855.2U
Authority: CN
Inventors: 王慧芳; 林传宝
Original assignee: Jiaozuo Huahan Photoelectric Co ltd
Current assignee: Jiaozuo Huahan Photoelectric Co ltd
Priority date: 2021-06-03
Filing date: 2021-06-03
Publication date: 2021-11-30
Anticipated expiration: 2031-06-03

Abstract

The utility model provides a sapphire substrate annealing furnace, which relates to the technical field of annealing furnaces, and comprises an annealing furnace body and a supporting frame for supporting the annealing furnace body, wherein the upper surface of the supporting frame is connected with a conveying platform in a sliding way along the transverse direction, the top of the conveying platform is provided with a material frame, silicon-molybdenum rods are inserted on the material frame, the number of the conveying platforms is two, one conveying platform is positioned inside the annealing furnace body, and the other conveying platform is positioned outside the annealing furnace body; when the transmission screw rotates, the two conveying platforms synchronously move leftwards until the conveying platform positioned inside the annealing furnace body transversely moves to the outside of the annealing furnace body, and the conveying platform positioned outside the annealing furnace body transversely moves to the inside of the annealing furnace body, so that silicon-molybdenum rods on the two conveying platforms can be replaced, the heating continuity of the sapphire substrate is ensured, and the processing efficiency of the sapphire substrate is improved.

Description

Sapphire substrate annealing furnace

Technical Field

The utility model relates to an annealing furnace technical field specifically is a sapphire substrate annealing furnace.

Background

The sapphire crystal has unique and excellent physical and chemical properties, the light transmission range of the sapphire crystal is 0.14-6.0 mu m, the sapphire crystal covers vacuum ultraviolet, visible, near infrared to mid-infrared bands, and has high optical transmittance in the band of 3-5 mu m; has the mechanical and thermal properties of high hardness (second to diamond), high strength, high thermal conductivity and high thermal shock resistance quality factor. Sapphire is the most widely used oxide substrate material due to its best overall properties. Meanwhile, the sapphire crystal is also an excellent window material of an infrared military device, a missile, a submarine, a satellite space technology, a detection and high-power strong laser and the like, a high-quality optical material, a wear-resistant bearing material and the like, and particularly has an irreplaceable effect in military products such as missile fairings, submarine windows, atomic clocks and the like. With the large-scale popularization and popularity of smart phones and wearable devices, the use of sapphire screens will be a big highlight.

The utility model discloses a high-temperature sapphire crystal annealing furnace, which comprises an annealing furnace body, wherein the inner cavity of the annealing furnace body is provided with a support frame, the two ends of the support frame are arranged at the two sides of the annealing furnace body, the right end of the support frame is provided with a control box, the two ends of the support frame are symmetrically welded with support side plates in front and back, a transmission screw rod is transversely arranged between the two sets of support side plates, and the two ends of the transmission screw rod respectively penetrate through the side walls of the two sets of support side plates, the silicon-molybdenum rod is uniformly inserted at the top of a material frame, the material frame and a conveying platform are fixedly inserted, the material frame with the silicon-molybdenum rod is conveyed to the position of a lifting platform by sliding the conveying platform on the transmission screw rod, the silicon-molybdenum rod is installed and disassembled by controlling the lifting of the lifting platform, and a second set of silicon-molybdenum rods can be synchronously installed at the other side, the silicon-molybdenum rod can be conveniently replaced, and the working efficiency of the annealing furnace body is improved.

However, the technical scheme has the following defects that the conveying platform can slide rightwards under the action of the rotation of the transmission screw and the threads between the transmission screw and the conveying platform, the sapphire substrate cannot be heated in the process of disassembling the material frame, and only after the second batch of material frame and the silicon-molybdenum rod are installed, the transmission screw is restarted to enable the conveying platform to slide leftwards to the inside of the annealing furnace body, so that the sapphire substrate can be continuously processed, the continuity of processing the sapphire substrate cannot be ensured, and the processing efficiency of the sapphire substrate is reduced.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a sapphire substrate annealing stove aims at solving the lower problem of efficiency of annealing stove processing sapphire substrate among the prior art.

In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides a sapphire substrate annealing furnace, includes annealing furnace body and is used for supporting the support frame of annealing furnace body, the upper surface of support frame has conveying platform along transverse direction sliding connection, conveying platform's top is provided with the material frame, it has the silicomolybdenum stick to peg graft on the material frame, conveying platform's quantity is two, one conveying platform is located annealing furnace body's inside, another one conveying platform is located annealing furnace body's outside, two conveying platform's the equal fixedly connected with screw thread piece in bottom, the inside threaded connection of screw thread piece has drive screw, the equal fixedly connected with bearing frame in position that drive screw is close to its both ends, the one end fixedly connected with of support frame is used for driving drive screw pivoted motor.

In order to make the utility model discloses have the effect of lateral sliding conveying platform, the utility model discloses a further technical scheme does, the upper surface of support frame has two guide rails that are parallel to each other along horizontal direction fixed mounting, conveying platform's lower fixed surface installs the slider with guide rail looks adaptation.

In order to make the utility model discloses have the effect of being convenient for install the material frame, the utility model discloses a further technical scheme does, conveying platform's upper surface has seted up the locating hole, the lower fixed surface of material frame is connected with the locating lever corresponding with the locating hole.

In order to make the utility model discloses have the effect of installation silicon molybdenum stick, the utility model discloses a further technical scheme does, the slot that is used for installing the silicon molybdenum stick is evenly offered to the upper surface of material frame.

In order to make the utility model discloses have the effect of fixed material frame, the utility model discloses a further technical scheme does, the material frame has four sides, conveying platform's last fixed surface is connected with four fixed subassemblies that are used for fixed material frame of group, four groups fixed subassembly sets up four sides at the material frame respectively.

In order to make the utility model discloses have the firm effect of messenger's material frame, the utility model discloses a further technical scheme does, fixed subassembly includes the thread bush of fixed mounting in conveying platform upper surface edge, the inside threaded connection of thread bush has locking screw, locking screw is close to the spacing dish of one end fixedly connected with of material frame.

In order to make the utility model discloses have the effect of protection, the utility model discloses a further technical scheme does, annealing furnace body both sides all are provided with the guard gate, the top fixedly connected with connecting rod of guard gate, the top fixedly connected with roof of connecting rod, the last fixed surface of roof installs the flexible part that is used for driving the roof and goes up and down.

In order to make the utility model discloses have the effect that drives the guard gate and go up and down, the utility model discloses a further technical scheme does, telescopic part is cylinder or pneumatic cylinder.

The utility model has the advantages that:

1. when the silicon-molybdenum rod in the annealing furnace body needs to be replaced, the transmission screw rod is driven to rotate through the starting motor, so that the two conveying platforms synchronously move leftwards, until the conveying platform in the annealing furnace body transversely moves to the outside of the annealing furnace body, and the conveying platform outside the annealing furnace body transversely moves to the inside of the annealing furnace body, at the moment, the silicon-molybdenum rod can be detached and replaced, in the process of detaching and replacing the silicon-molybdenum rod on one material frame, the silicon-molybdenum rod on the other material frame can enable the annealing furnace body to continuously work, the continuity of heating the sapphire substrate can be guaranteed, and the processing efficiency of the sapphire substrate is improved.

2. Four sides of material frame are fixed respectively to four fixed subassemblies of group, at the in-process of lateral shifting conveying platform, make the fixed more firm of material frame, prevent that the fixed unstability of material frame from leading to the silicon molybdenum stick to produce the problem of rocking and damaging, it descends to drive the guard gate through flexible part, make the guard gate can shelter from partial annealing furnace body, avoid the staff to stretch into the inside of annealing furnace body with the hand and lead to the injured problem, the effectual guard action that plays, the while also has heat retaining effect.

Drawings

Fig. 1 is a schematic perspective view of an embodiment of the present invention;

fig. 2 is a schematic structural view of a conveying platform according to an embodiment of the present invention;

FIG. 3 is a schematic diagram of a Si-Mo rod structure according to an embodiment of the present invention;

FIG. 4 is a schematic front view of the structure of FIG. 3;

fig. 5 is a schematic view of a positioning hole structure according to an embodiment of the present invention;

fig. 6 is a schematic structural view of a material shelf according to an embodiment of the present invention;

FIG. 7 is a schematic structural view of a fixing assembly according to an embodiment of the present invention;

fig. 8 is a schematic structural view of a protective door according to an embodiment of the present invention.

In the figure: 1. an annealing furnace body; 2. a support frame; 3. a conveying platform; 4. a material rack; 5. a silicon-molybdenum rod; 6. a thread block; 7. a drive screw; 8. a bearing seat; 9. a motor; 10. a guide rail; 11. a slider; 12. positioning holes; 13. positioning a rod; 14. a slot; 15. a fixing assembly; 151. a threaded sleeve; 152. locking the screw rod; 153. a limiting disc; 16. a protective door; 17. a connecting rod; 18. a top plate; 19. a telescoping member.

Detailed Description

The following description will further describe embodiments of the present invention with reference to the accompanying drawings.

As shown in fig. 1-8, a sapphire substrate annealing furnace, including annealing furnace body 1 and the support frame 2 that is used for supporting annealing furnace body 1, the upper surface of support frame 2 has conveying platform 3 along transverse direction sliding connection, conveying platform 3's top is provided with material frame 4, it has silicon molybdenum rod 5 to peg graft on the material frame 4, conveying platform 3's quantity is two, a conveying platform 3 is located annealing furnace body 1's inside, another conveying platform 3 is located annealing furnace body 1's outside, the equal fixedly connected with thread block 6 in bottom of two conveying platform 3, the inside threaded connection of thread block 6 has drive screw 7, drive screw 7 is close to the equal fixedly connected with bearing frame 8 in position at its both ends, the one end fixedly connected with of support frame 2 is used for driving drive screw 7 pivoted motor 9.

In this embodiment, when the silicon-molybdenum rod 5 inside the annealing furnace body 1 needs to be replaced, the driving screw 7 is driven to rotate by the starting motor 9, so that the two conveying platforms 3 synchronously move leftwards until the conveying platform 3 inside the annealing furnace body 1 transversely moves to the outside of the annealing furnace body 1, and the conveying platform 3 outside the annealing furnace body 1 transversely moves to the inside of the annealing furnace body 1, at this time, the silicon-molybdenum rod 5 can be detached and replaced, and in the process of detaching and replacing the silicon-molybdenum rod 5 on one material frame 4, the silicon-molybdenum rod 5 on the other material frame 4 can enable the annealing furnace body 1 to continuously work, so that the continuity of heating the sapphire substrate can be ensured, and the processing efficiency of the sapphire substrate is improved.

The utility model discloses a in another embodiment, the upper surface of support frame 2 has two guide rails 10 that are parallel to each other along transverse direction fixed mounting, and conveying platform 3's lower fixed surface installs the slider 11 with guide rail 10 looks adaptation for two conveying platform 3 can be along the direction lateral shifting of guide rail 10 through setting up guide rail 10 and slider 11.

Specifically, locating hole 12 has been seted up to conveying platform 3's upper surface, and the lower fixed surface of material frame 4 is connected with locating lever 13 corresponding with locating hole 12, through setting up locating hole 12 and locating lever 13, when installing material frame 4, can fix a position material frame 4 fast, improves the installation rate of material frame 4.

Specifically, the upper surface of the material frame 4 is uniformly provided with slots 14 for mounting the silicon-molybdenum rods 5, and the silicon-molybdenum rods 5 are convenient to fix and mount through the slots 14.

Specifically, the material frame 4 is provided with four side surfaces, four groups of fixing assemblies 15 used for fixing the material frame 4 are fixedly connected to the upper surface of the conveying platform 3, the four groups of fixing assemblies 15 are respectively arranged on four sides of the material frame 4, the four groups of fixing assemblies 15 are respectively used for fixing four side surfaces of the material frame 4, and in the process of transversely moving the conveying platform 3, the material frame 4 is fixed stably, so that the problem that the silicon-molybdenum rod 5 is shaken and damaged due to unstable fixation of the material frame 4 is solved.

Specifically, the fixed component 15 includes the thread bush 151 of fixed mounting in conveying platform 3 upper surface edge, and the inside threaded connection of thread bush 151 has locking screw 152, and locking screw 152 is close to the spacing dish 153 of one end fixedly connected with of material frame 4, through rotating locking screw 152 for four sides of material frame 4 can be fixed to spacing dish 153 on four groups of fixed components 15, and it is very convenient to install or dismantle material frame 4.

Specifically, 1 both sides of annealing furnace body all are provided with guard gate 16, the top fixedly connected with connecting rod 17 of guard gate 16, the top fixedly connected with roof 18 of connecting rod 17, the last fixed surface of roof 18 installs the flexible part 19 that is used for driving roof 18 to go up and down, it descends to drive guard gate 16 through flexible part 19, make guard gate 16 can shelter from partial annealing furnace body 1, avoid the staff to stretch into the inside to annealing furnace body 1 with the hand and lead to injured problem, the effectual guard action that plays, the while also has heat retaining effect.

Specifically, the telescopic component 19 is an air cylinder or a hydraulic cylinder, and when the telescopic component 19 is an air cylinder or a hydraulic cylinder, the telescopic component can drive the protective door 16 to lift, and it should be noted that the protective door 16 is installed on a support, and the support is installed on the ground.

In the description of the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides a sapphire substrate annealing stove, includes annealing furnace body (1) and is used for supporting support frame (2) of annealing furnace body (1), the upper surface of support frame (2) has conveying platform (3) along transverse direction sliding connection, the top of conveying platform (3) is provided with material frame (4), it has silicon molybdenum stick (5), its characterized in that to peg graft on material frame (4): the conveying platform (3) is two in quantity, one conveying platform (3) is located the inside of annealing furnace body (1), another one conveying platform (3) is located the outside of annealing furnace body (1), two the equal fixedly connected with screw block (6) in bottom of conveying platform (3), the inside threaded connection of screw block (6) has drive screw (7), the equal fixedly connected with bearing frame (8) in position that drive screw (7) are close to its both ends, the one end fixedly connected with of support frame (2) is used for driving drive screw (7) pivoted motor (9).

2. The sapphire substrate annealing furnace according to claim 1, wherein the upper surface of the support frame (2) is fixedly provided with two parallel guide rails (10) along the transverse direction, and the lower surface of the conveying platform (3) is fixedly provided with a slide block (11) matched with the guide rails (10).

3. The sapphire substrate annealing furnace according to claim 1, wherein the upper surface of the conveying platform (3) is provided with positioning holes (12), and the lower surface of the material holder (4) is fixedly connected with positioning rods (13) corresponding to the positioning holes (12).

4. The sapphire substrate annealing furnace according to claim 1, wherein slots (14) for mounting silicon-molybdenum rods (5) are uniformly formed in the upper surface of the material rack (4).

5. The sapphire substrate annealing furnace according to any one of claims 1 to 4, wherein the material rack (4) has four sides, four sets of fixing assemblies (15) for fixing the material rack (4) are fixedly connected to the upper surface of the conveying platform (3), and the four sets of fixing assemblies (15) are respectively arranged on the four sides of the material rack (4).

6. The sapphire substrate annealing furnace according to claim 5, wherein the fixing assembly (15) comprises a threaded sleeve (151) fixedly installed at the edge of the upper surface of the conveying platform (3), a locking screw (152) is connected to the inner thread of the threaded sleeve (151), and a limiting disc (153) is fixedly connected to one end, close to the material shelf (4), of the locking screw (152).

7. The sapphire substrate annealing furnace according to claim 6, wherein two sides of the annealing furnace body (1) are provided with protective doors (16), the top of each protective door (16) is fixedly connected with a connecting rod (17), the top of each connecting rod (17) is fixedly connected with a top plate (18), and the upper surface of each top plate (18) is fixedly provided with a telescopic part (19) for driving each top plate (18) to ascend and descend.

8. The sapphire substrate annealing furnace according to claim 7, wherein the telescopic member (19) is a cylinder or a hydraulic cylinder.