CN214937795U - Bushing and deposition equipment - Google Patents
Bushing and deposition equipment Download PDFInfo
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- CN214937795U CN214937795U CN202120343955.2U CN202120343955U CN214937795U CN 214937795 U CN214937795 U CN 214937795U CN 202120343955 U CN202120343955 U CN 202120343955U CN 214937795 U CN214937795 U CN 214937795U
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- cylindrical body
- bushing
- spring
- hole
- thimble
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Abstract
An embodiment of the utility model provides a pair of bush and deposition equipment, this bush includes: a hollow cylindrical body; a plurality of hole structures are arranged on the inner surface of the cylindrical body; the depth of the hole structure is directed from the inner surface of the cylindrical body to the outer surface of the cylindrical body; an elastic structure is arranged in the hole structure; the first end of the elastic structure is connected with the cylindrical body; a second end of the resilient structure protrudes out of the aperture structure; the cylindrical body is used for being sleeved on the outer side of the supporting rod, and the second end of the elastic structure faces the supporting rod. The utility model discloses a place elastic construction in the pore structure, then incline at the bracing piece and produce pressure to elastic construction, because elastic construction self's elasticity attribute can compress under the effect of pressure, consequently can not damage elastic construction, and then can not influence display panel's production process.
Description
Technical Field
The utility model relates to a show technical field, especially relate to a bush and deposition apparatus.
Background
Referring to fig. 1, a bushing used for a current deposition apparatus includes a bushing body 01, wherein, referring to fig. 2, in order to form the bushing body 01, a through hole 011 is formed in the bushing body 01, a groove 012 is formed in the through hole 011, and a ceramic roller 02 is disposed in the through hole 011, and in order to form the ceramic roller 02, referring to fig. 3, the ceramic roller 02 is a hollow structure; the hollow structure of the ceramic roller passes through the connecting rod 03, and the two ends of the connecting rod 03 are arranged in the grooves 012.
In the prior art, when carrying out technology processing to display panel, with the sleeve 01 cover in the outside of bracing piece 04, place the in-process on the bracing piece when display panel, the bracing piece can take place the slope, and the bracing piece 04 of slope can produce pressure to ceramic gyro wheel 02, and then causes ceramic gyro wheel 02's damage. But instead. The breakage of the ceramic roller 02 causes a series of problems such as: 1) ceramic fragments are easily clamped between the support rod 04 and the bushing 01, the support rod is limited to move relative to the bushing, the support rod 04 is further easy to break when the support rod rises, and meanwhile, a display panel on the support rod 04 is crushed, so that production accidents occur; 2) the recovery of the deposition equipment after the ceramic roller 02 is damaged takes a long time, and the production efficiency of the display panel is greatly influenced; 3) the cost of producing the display panel is increased.
SUMMERY OF THE UTILITY MODEL
The utility model provides a bush to it is easy damaged to solve current bush, and then influences the problem of display panel production.
The utility model discloses a first aspect provides a bush, and this bush includes: a hollow cylindrical body; a plurality of hole structures are arranged on the inner surface of the cylindrical body; the depth of the hole structure is directed from the inner surface of the cylindrical body to the outer surface of the cylindrical body;
an elastic structure is arranged in the hole structure; the first end of the elastic structure is connected with the cylindrical body; a second end of the resilient structure protrudes out of the aperture structure; the cylindrical body is used for being sleeved on the outer side of the supporting rod, and the second end of the elastic structure faces the supporting rod.
Optionally, a plurality of concave structures are arranged on the outer surface of the cylindrical body; a detachable fixing plate is embedded in the concave structure; one surface, facing the hole structure, of the fixing plate is provided with a first groove, and the position of the first groove corresponds to the position of the hole structure; the hole structure penetrates from the inner surface of the cylindrical body to the bottom surface of the concave structure; the first end of the elastic structure is arranged in the first groove.
Optionally, the elastic structure comprises: a spring and a thimble; the first end of the spring is connected with the bottom surface of the first groove, and the second end of the spring is connected with the ejector pin; the thimble protrudes out of the hole structure and faces the support rod.
Optionally, a second groove is formed in a first end surface, facing the spring, of the thimble, and one end, far away from the fixing plate, of the spring is arranged in the second groove.
Optionally, the shape of the thimble includes: a first truncated cone shape; the shape of the pore structure includes: and the second truncated cone shape is matched with the first truncated cone shape.
Optionally, the diameter of the spring decreases progressively from the first end of the spring to the second end of the spring.
Optionally, the bottom surface of the recessed structure extends from one end of the cylindrical body to the second end of the cylindrical body; the plurality of concave structures are arranged at intervals along the radial direction of the cylindrical body.
Optionally, two hole structures are correspondingly arranged on the bottom surface of one concave structure; the two hole structures are arranged in parallel in the extending direction of the bottom surface of the concave structure; one of the hole structures corresponds to one of the fixing plates.
Optionally, a second end surface of the thimble, which faces away from the spring, is a spherical surface.
A second aspect of the invention provides a deposition apparatus comprising a liner as claimed in any preceding claim; further comprising: a base and a plurality of support rods; a plurality of via hole structures are arranged on the base; the bushings are arranged in the via hole structures and fixedly connected with the base, and the bushings are sleeved on the outer sides of the supporting rods in a one-to-one correspondence manner; the supporting rod can move relative to the bushing; the support rod is used for supporting the display panel.
An embodiment of the utility model provides a bush, include: a hollow cylindrical body; a plurality of hole structures are arranged on the inner surface of the cylindrical body; the depth of the hole structure is directed from the inner surface of the cylindrical body to the outer surface of the cylindrical body; an elastic structure is arranged in the hole structure; the first end of the elastic structure is connected with the cylindrical body; a second end of the resilient structure protrudes out of the aperture structure; the cylindrical body is used for being sleeved on the outer side of the supporting rod, and the second end of the elastic structure faces the supporting rod. The utility model discloses a place elastic construction in the pore structure, then incline at the bracing piece and produce pressure to elastic construction, because elastic construction self's elasticity attribute can compress under the effect of pressure, consequently can not damage elastic construction, and then can not influence display panel's production process.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive labor.
FIG. 1 is a schematic view of a prior art bushing;
FIG. 2 is a schematic view of a prior art bushing body construction;
FIG. 3 is a schematic structural view of a ceramic roller according to the prior art;
FIG. 4 is a schematic structural view of a prior art connecting rod;
fig. 5 is a schematic cross-sectional view of a bushing according to an embodiment of the present invention;
fig. 6 is a partial schematic view of a cylindrical body according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a fixing plate according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of another fixing plate according to an embodiment of the present invention;
fig. 9 is a schematic structural view of a thimble according to an embodiment of the present invention;
fig. 10 is a schematic structural view of a thimble according to an embodiment of the present invention;
fig. 11 is a schematic structural diagram of a spring according to an embodiment of the present invention;
fig. 12 is a schematic structural diagram of a deposition apparatus according to an embodiment of the present invention;
fig. 13 is a schematic structural diagram of a deposition apparatus in another state according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Referring to fig. 5, there is shown a schematic cross-sectional view of a bushing 10, the bushing 10 comprising: a hollow cylindrical body 11; a plurality of hole structures 111 are arranged on the inner surface of the cylindrical body; the depth of the hole structure 111 is directed from the inner surface a of the cylinder-type body 11 to the outer surface b of the cylinder-type body.
An elastic structure 12 is placed in the hole structure 111; the first end c of the elastic structure 12 is connected with the cylindrical body 11; the second end d of the elastic structure 12 protrudes out of the hole structure; the cylindrical body 11 is used to be sleeved outside the support rod 20, and the second end d of the elastic structure 12 faces the support rod 20.
Wherein the bushing 10 has a guiding sliding function for the support rod 20. Wherein, the distance D1 between the second end that sets up two elastic construction relatively is greater than or equal to the diameter D2 of bracing piece 20, and the setting can guarantee that the bracing piece is when ascending or descending relative bush 10 like this, and elastic construction 12 can not hinder the relative motion between bracing piece and the bush 10, and in addition, when the bracing piece takes place the slope, the bracing piece is on the basis that does not harm elastic construction 12, and elastic construction 12 can produce a resilience for the bracing piece, makes the bracing piece resume original straight form.
In the embodiment of the present invention, referring to fig. 6-8, wherein the structure shown in fig. 6 and the fixing plate 113 shown in fig. 7 and 8 together form a cylindrical body 11, and a plurality of concave structures 112 are disposed on the outer surface of the cylindrical body 11; a detachable fixing plate 113 is embedded in the concave structure 112; a first groove 1131 is formed on a surface of the fixing plate 113 facing the hole structure 111, and the position of the first groove 1131 corresponds to the position of the hole structure 111; the hole structure 111 penetrates from the inner surface of the cylindrical body to the bottom surface 1121 of the recess structure 112; the first end c of the resilient structure 12 is disposed within the first recess 1131.
Specifically, the cylindrical body 11 is configured to be detachable, that is, the fixing plate 113 is detachable, so as to facilitate the subsequent installation of the spring 121 and the thimble 122.
In an embodiment of the present invention, referring to fig. 9-11, wherein fig. 9 is a schematic structural diagram of one surface of the thimble 122, fig. 10 is a schematic structural diagram of another surface of the thimble 122, and fig. 11 is a schematic structural diagram of the spring 121, and the elastic structure 12 includes: a spring 121 and a thimble 122; a first end c of the spring 121 is connected to the bottom surface of the first groove 1131, and a second end of the spring 121 is connected to the thimble 122; the thimble 122 protrudes out of the hole structure 111 toward the support rod 20.
The spring 121 is made of a metal material, and the thimble 122 is made of a ceramic material.
In the embodiment of the present invention, when the thimble 122 is stressed, the spring can be compressed, so that the thimble 122 cannot be damaged, and when the thimble 122 is not stressed, the thimble 122 will return to the original position to abut against the support rod 20, and the dead condition of the thimble 122 will not occur.
The embodiment of the utility model provides an in, set up thimble 122 and spring 121's structure, the life of extension bush 10 that can be very big has practiced thrift display panel's preparation cost to reduce deposition apparatus's operational risk, guaranteed the stability of deposition apparatus production operation.
In the embodiment of the present invention, referring to fig. 9, the thimble 122 faces the second groove 1221 disposed on the first end surface of the spring 111, and one end of the spring 111 away from the fixing plate 113 is disposed in the second groove 1221.
In the embodiment of the present invention, one end of the spring 111 is disposed in the second groove 1221 of the thimble 122, so that the spring 111 is firmly connected to the thimble 122, and when the thimble 122 receives pressure, the spring is compressed, and the restoring force of the spring 121 can also be accurately applied to the thimble.
In the embodiment of the present invention, the shape of the thimble 122 includes: a first truncated cone shape; the shape of the pore structure 111 includes: and the second truncated cone shape is matched with the first truncated cone shape.
In the embodiment of the present invention, the thimble 122 is disposed in the hole structure 111, and the shape of the hole structure 111 is required to be matched with the shape of the thimble 122.
Specifically, referring to fig. 11, the diameter L of the spring 111 is gradually reduced from the first end c of the spring to the second end e of the spring 111.
In fig. 11, the spring 111 is a shaped spring, and the diameter L of the spring decreases stepwise in the X direction. The shape of the spring 111 matches the shape of the thimble 122, so that the best acting force can be exerted on the thimble.
In the embodiment of the present invention, the shape of the spring 111 may be other shapes, which is not limited herein.
In the embodiment of the present invention, referring to fig. 6, the bottom surface 1121 of the concave structure 112 extends from one end of the cylindrical body 11 to the second end of the cylindrical body 11; a plurality of the concave structures 112 are arranged at intervals along the radial direction of the cylindrical body 11.
In the embodiment of the present invention, the recessed structures 112 are disposed on the outer surface of the bushing 10, in fig. 6, four recessed structures 112 are symmetrically disposed on the outer surface of the bushing 10, and two via structures 111 are disposed on each recessed structure 112, so as to enable the elastic structure 12 to symmetrically abut against the supporting rod 20, and ensure that the supporting rod 20 can move along the axial direction of the bushing 10 when moving relative to the bushing 10.
In the embodiment of the present invention, two hole structures 111 are correspondingly disposed on the bottom surface 1121 of one of the recessed structures 112; the two hole structures 111 are arranged in parallel in the extending direction of the bottom surface 1121 of the recess structure 112; one of the hole structures 111 corresponds to one of the fixing plates 113.
In the embodiment of the present invention, the fixing plate 113 and the recessed structure 112 are in interference fit, so that the fixing plate 113 and the recessed structure 112 are firmly connected.
In the embodiment of the present invention, referring to fig. 5-8, in the installation process, the spring 121 and the thimble 122 are installed first, then the spring 121 and the thimble 122 are passed through the hole structure 111, then the fixing plate 113(b) is installed on the recessed structure 112, and finally the fixing plate 113(a) is installed.
In the embodiment of the present invention, a recessed structure can only be disposed on one fixing plate 113, and two second grooves 1131 corresponding to the hole structures 111 are disposed on one fixing plate 113, which is not limited herein.
In the embodiment of the present invention, the second end surface d of the thimble 122 deviating from the spring 121 is a spherical surface.
In the embodiment of the present invention, the thimble 122 is deviated from the second end surface d of the spring 121 is set to be a spherical surface, so that the thimble 122 can be stressed by the spherical surface, and the thimble 122 is further prevented from being damaged.
Referring to fig. 12-13, there is shown a schematic structural view of a deposition apparatus according to an embodiment of the present invention, including a liner 10 as described in any one of the above; further comprising: a base 30 and a plurality of support rods 20; a plurality of via structures are arranged on the base 30; the bushings are arranged in the via hole structures and fixedly connected with the base, and the bushings 20 are sleeved on the outer sides of the supporting rods 30 in a one-to-one correspondence manner; the support rod 30 is movable relative to the bushing 20; the support bar 30 is used to support the display panel 40.
In an embodiment of the present invention, the deposition apparatus includes: a vapor deposition (CVD) apparatus; wherein the deposition apparatus further comprises: a support mechanism 50 and a drive motor 60, wherein the support mechanism 50 supports the base 30 and the drive motor 60 is used to power the support mechanism 50.
In the embodiment of the present invention, the deposition apparatus includes a cavity structure P, the bushing 10, the support rod 20, and the base 30 are all placed in the cavity structure P, and the display panel 40 performs the deposition process in the cavity structure P.
Fig. 12 shows a state of the deposition apparatus when the display panel 40 is placed; when the display panel 12 needs to be placed, the supporting rod 20 is ejected out of the bushing 10, then the display panel 40 is placed, the supporting rod 20 is inclined under the action of force when the display panel 40 is placed, and the spring 121 is arranged in the bushing 10, so that when the supporting rod 20 is inclined, the spring 121 is compressed, the ejector pin 122 cannot be damaged, the technological process of the deposition equipment cannot be influenced, and the production efficiency of the display panel is improved.
Further, fig. 13 shows that after the display panel 40 is placed, the base 30 is moved upward, so that the display panel 40 is dropped on the base 30, and then the deposition process may be performed on the display panel 40; wherein, the display panel includes: a glass substrate.
In the embodiment of the present invention, the base 30 can also be used as a first electrode of a capacitor structure, wherein a second electrode (not shown) is disposed opposite to the first electrode, the display panel 40 is disposed between the first electrode and the second electrode, and the first electrode and the second electrode form the capacitor structure.
An embodiment of the utility model provides a bush, include: a hollow cylindrical body; a plurality of hole structures are arranged on the inner surface of the cylindrical body; the depth of the hole structure is directed from the inner surface of the cylindrical body to the outer surface of the cylindrical body; an elastic structure is arranged in the hole structure; the first end of the elastic structure is connected with the cylindrical body; a second end of the resilient structure protrudes out of the aperture structure; the cylindrical body is used for being sleeved on the outer side of the supporting rod, and the second end of the elastic structure faces the supporting rod. The utility model discloses a place elastic construction in the pore structure, then incline at the bracing piece and produce pressure to elastic construction, because elastic construction self's elasticity attribute can compress under the effect of pressure, consequently can not damage elastic construction, and then can not influence display panel's production process.
It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described systems, apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A bushing, comprising: a hollow cylindrical body; a plurality of hole structures are arranged on the inner surface of the cylindrical body; the depth of the hole structure is directed from the inner surface of the cylindrical body to the outer surface of the cylindrical body;
an elastic structure is arranged in the hole structure; the first end of the elastic structure is connected with the cylindrical body; a second end of the resilient structure protrudes out of the aperture structure; the cylindrical body is used for being sleeved on the outer side of the supporting rod, and the second end of the elastic structure faces the supporting rod.
2. The bushing of claim 1, wherein the outer surface of the cartridge body is provided with a plurality of recessed features; a detachable fixing plate is embedded in the concave structure; one surface, facing the hole structure, of the fixing plate is provided with a first groove, and the position of the first groove corresponds to the position of the hole structure; the hole structure penetrates from the inner surface of the cylindrical body to the bottom surface of the concave structure; the first end of the elastic structure is arranged in the first groove.
3. The bushing of claim 2 wherein said resilient structure comprises: a spring and a thimble; the first end of the spring is connected with the bottom surface of the first groove, and the second end of the spring is connected with the ejector pin; the thimble protrudes out of the hole structure and faces the support rod.
4. The bushing of claim 3 wherein said pin has a second recess formed in a first end surface thereof facing said spring, an end of said spring remote from said retainer plate being disposed in said second recess.
5. The bushing of claim 4 wherein said shape of said thimble comprises: a first truncated cone shape; the shape of the pore structure includes: and the second truncated cone shape is matched with the first truncated cone shape.
6. The bushing of claim 5 wherein the diameter of the spring decreases from the first end of the spring to the second end of the spring.
7. The bushing of claim 2, wherein a bottom surface of the recessed feature extends from one end of the cartridge body to a second end of the cartridge body; the plurality of concave structures are arranged at intervals along the radial direction of the cylindrical body.
8. The bushing of claim 7 wherein two of said hole structures are disposed on a bottom surface of one of said dimple structures; the two hole structures are arranged in parallel in the extending direction of the bottom surface of the concave structure; one of the hole structures corresponds to one of the fixing plates.
9. The bushing of claim 4 wherein a second end surface of said thimble facing away from said spring is spherical.
10. A deposition apparatus comprising a liner as claimed in any one of claims 1 to 9; further comprising: a base and a plurality of support rods; a plurality of via hole structures are arranged on the base; the bushings are arranged in the via hole structures and fixedly connected with the base, and the bushings are sleeved on the outer sides of the supporting rods in a one-to-one correspondence manner; the supporting rod can move relative to the bushing; the support rod is used for supporting the display panel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120343955.2U CN214937795U (en) | 2021-02-05 | 2021-02-05 | Bushing and deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120343955.2U CN214937795U (en) | 2021-02-05 | 2021-02-05 | Bushing and deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214937795U true CN214937795U (en) | 2021-11-30 |
Family
ID=79120881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120343955.2U Active CN214937795U (en) | 2021-02-05 | 2021-02-05 | Bushing and deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214937795U (en) |
-
2021
- 2021-02-05 CN CN202120343955.2U patent/CN214937795U/en active Active
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