CN214862795U

CN214862795U - Copper process is with high-efficient preparation facilities of stripping liquid

Info

Publication number: CN214862795U
Application number: CN202120816401.XU
Authority: CN
Inventors: 戈烨铭; 何珂; 汤晓春
Original assignee: JIANGYIN RUNMA ELECTRONIC MATERIAL CO Ltd
Current assignee: JIANGYIN RUNMA ELECTRONIC MATERIAL CO Ltd
Priority date: 2021-04-21
Filing date: 2021-04-21
Publication date: 2021-11-26
Anticipated expiration: 2031-04-21

Abstract

The utility model relates to a copper process is with high-efficient preparation facilities who peels off liquid belongs to the preparation technical field who peels off liquid. Including the alcohol ether storage tank, organic solvent storage tank, corrosion inhibitor storage tank, surfactant storage tank, deionized water storage tank with be in the same order the blending tank, governing valve, filter equipment and the finished product jar of being connected with blending tank access connection respectively, it is protruding to be provided with the annular on the inner wall of blending tank, be provided with the flow guide disc in the annular arch, the central point of flow guide disc is circular cone arch, the avris of flow guide disc is the inside water conservancy diversion ring that has the slope, and the interval forms the water conservancy diversion passageway between the bellied outside of circular cone and the inboard of water conservancy diversion ring, the bottom surface intercommunication honeycomb duct of water conservancy diversion passageway, the internal diameter from the top down of honeycomb duct reduces gradually, even being provided with a plurality of holes on the pipe wall of honeycomb duct, still be provided with agitating unit in the blending tank. The utility model discloses simple structure makes each component raw materials intensive mixing mix, has shortened the required time of production.

Description

Copper process is with high-efficient preparation facilities of stripping liquid

Technical Field

The utility model relates to a preparation technical field of peeling off liquid, in particular to copper process is with high-efficient preparation facilities of peeling off liquid.

Background

When the ic chip is continuously developed toward light, thin, short, small and high density, the tolerance to the defect is relatively reduced, and as the density of the ic devices increases, the area of the unit chip becomes smaller and smaller, and the defect that does not affect the yield originally becomes a fatal killer of the yield. In the manufacturing process of liquid crystal panels and the like, multiple precise microcircuits are formed on a silicon wafer or a glass substrate through multiple processes of pattern mask irradiation exposure, etching and the like, after the microcircuits are formed, photoresist coated on a microcircuit protection area as a mask is further removed by using special stripping liquid, and in order to avoid the generation of physical or chemical defects on the wafer, the stripping liquid with higher quality and higher purity needs to be prepared.

For example, chinese utility model patent No. CN208865479U discloses a device for preparing stripping liquid for copper process, which comprises an alcohol ether storage tank, an organic solvent storage tank, a corrosion inhibitor storage tank, a surfactant storage tank, a deionized water storage tank, a mixing tank, a regulating valve, a filtering device and a finished product tank, which are respectively connected with an inlet of the mixing tank; still be equipped with water conservancy diversion mechanism in the blending tank, water conservancy diversion mechanism includes the feed liquor dish that upper end and blending tank import position correspond in the blending tank and the honeycomb duct that is linked together with feed liquor dish bottom surface, the blending tank inner wall is equipped with annular arch, the feed liquor dish is placed on annular arch, the bottom surface diameter of feed liquor dish is greater than the internal diameter between the annular arch. Be equipped with water conservancy diversion mechanism in the above-mentioned patent mixing tank, the raw materials liquid gets into the internal back of jar, flow to the feed liquor dish on, the honeycomb duct is flowed out to the raw materials liquid under the effect of gravity, make each component raw materials intensive mixing, the required time of production has been shortened, but the feed liquor dish is the disc of flat formula, the production time has been prolonged slowly to the speed that the raw materials flowed into the honeycomb duct because of the action of gravity to can directly follow the honeycomb duct bottom outflow after the raw materials flowed into the honeycomb duct, the effect of aperture is difficult to show on the honeycomb duct.

Therefore, the invention discloses a high-efficiency preparation device of stripping liquid for copper processing.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem that proposes in the above-mentioned background art, provide a copper process is with high-efficient preparation facilities who peels off liquid, simple structure makes each component raw materials intensive mixing mix, has shortened the required time of production.

The purpose of the utility model is realized like this: the efficient preparation device of the stripping liquid for the copper process comprises an alcohol ether storage tank, an organic solvent storage tank, a corrosion inhibitor storage tank, a surfactant storage tank, a deionized water storage tank, a mixing tank, a regulating valve, a filtering device and a finished product tank which are respectively connected with an inlet of the mixing tank, wherein an annular bulge is arranged on the inner wall of the mixing tank;

the stirring device is further arranged in the mixing tank and comprises a motor and a stirring shaft, the motor is arranged at the top of the mixing tank, the stirring shaft penetrates through the top of the mixing tank and the center of the diversion disc and is connected with the motor, a transverse stirring rod is arranged at the bottom of the stirring shaft, a vertical stirring rod is arranged at the end part of the transverse stirring rod, the transverse stirring rod is positioned below the diversion pipe, and the vertical stirring rod is positioned outside the diversion pipe;

furthermore, at least three flow guide pipes are arranged, and each flow guide pipe is uniformly arranged below the flow guide channel;

further, the gradient of the guide ring is 30-45 degrees;

further, the transverse stirring rods and the vertical stirring rods are heat-conducting stirring rods;

further, the inner walls of the mixing tank and the finished product tank are polytetrafluoroethylene layers.

Compared with the prior art, the utility model has the advantages of:

the utility model discloses utilize circular cone arch and water conservancy diversion ring to make the raw materials flow in the water conservancy diversion passageway fast, utilize raw materials self weight to make it flow in the honeycomb duct afterwards to the internal diameter from the top down of honeycomb duct reduces gradually, lead to the raw materials to diminish because of inner space and flow out from the hole on the pipe wall, the vertical poking bar of cooperation avris stirs, and can heat when stirring, make each component raw materials intensive mixing mix, shortened the required time of production, production efficiency has obtained promotion by a relatively large margin.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic structural view of a mixing tank;

wherein, 1 mixing tank, 2 alcohol ether storage tanks, 3 organic solvent storage tanks, 4 corrosion inhibitor storage tanks, 5 surfactant storage tanks, 6 deionized water storage tanks, 7 regulating valves, 8 filtering devices, 9 finished product tanks, 11 annular bulges, 12 flow guide discs, 13 flow guide channels and 14 flow guide pipes.

Detailed Description

The invention is described below with reference to the accompanying drawings and specific embodiments:

as shown in fig. 1-2, a high-efficiency preparation device of stripping liquid for copper process, comprising an alcohol ether storage tank 2, an organic solvent storage tank 3, a corrosion inhibitor storage tank 4, a surfactant storage tank 5, a deionized water storage tank 6, a mixing tank 1, an adjusting valve 7, a filtering device 8 and a finished product tank 9 which are respectively connected with an inlet of the mixing tank 1, wherein an annular protrusion 11 is arranged on the inner wall of the mixing tank 1, a diversion disc 12 is arranged on the annular protrusion 11, the diameter of the bottom surface of the diversion disc 12 is greater than the inner diameter between the annular protrusions 11, the center of the diversion disc 12 is a conical protrusion, the side of the diversion disc 12 is a diversion ring with a slope inwards, a diversion channel 13 is formed between the outer side of the conical protrusion and the inner side of the diversion ring at an interval, so that the flow rate of an internal material flow guiding channel 13 is increased, the bottom surface of the diversion channel 13 is communicated with a diversion pipe 14, the inner diameter of the draft tube 14 is gradually reduced from top to bottom, a plurality of holes are uniformly formed in the tube wall of the draft tube 14, and raw materials can flow out of the holes in the tube wall due to the fact that the inner space is reduced, so that the raw materials can be mixed more uniformly;

the mixing tank 1 is internally provided with a stirring device, the stirring device comprises a motor and a stirring shaft, the motor is arranged at the top of the mixing tank 1, the stirring shaft penetrates through the top of the mixing tank 1 and the center of the flow guide disc 12 and is connected with the motor, the bottom of the stirring shaft is provided with a transverse stirring rod, the end part of the transverse stirring rod is provided with a vertical stirring rod, the transverse stirring rod is positioned below the flow guide pipe 14, the vertical stirring rod is positioned outside the flow guide pipe (14), and when the raw materials flow out of the holes, the vertical stirring rod is matched with the raw materials, so that the raw materials of all components are fully stirred and mixed, and the time required by production is shortened;

furthermore, at least three draft tubes 14 are arranged, and each draft tube 14 is uniformly arranged below the draft channel 13;

further, the gradient of the guide ring is 30-45 degrees;

furthermore, the transverse stirring rods and the vertical stirring rods are heat-conducting stirring rods, so that heating can be performed in the stirring process, and the mixing production efficiency is effectively improved;

further, the inner walls of the mixing tank 1 and the finished product tank 9 are polytetrafluoroethylene layers.

In this embodiment, utilize the circular cone arch to make the raw materials flow in water conservancy diversion passageway 13 fast with the water conservancy diversion ring, utilize raw materials self weight to make it flow in honeycomb duct 14 afterwards, and honeycomb duct 14's internal diameter from the top down reduces gradually, lead to the raw materials to diminish from the hole outflow on the pipe wall because of inner space, the vertical poking bar of cooperation avris stirs, and can heat in the stirring, make each component raw materials intensive mixing, the required time of production has been shortened, production efficiency has obtained promotion by a relatively large margin.

The above is only a specific application example of the present invention, and does not constitute any limitation to the protection scope of the present invention. All the technical solutions formed by equivalent transformation or equivalent replacement fall within the protection scope of the present invention.

Claims

1. The utility model provides a copper process is with high-efficient preparation facilities of stripping liquid, includes respectively with blending tank (1) access connection's alcohol ether storage tank (2), organic solvent storage tank (3), corrosion inhibitor storage tank (4), surfactant storage tank (5), deionized water storage tank (6) and blending tank (1), governing valve (7), filter equipment (8) and finished product jar (9) of connecting in proper order, its characterized in that: the inner wall of the mixing tank (1) is provided with annular protrusions (11), the annular protrusions (11) are provided with flow guide discs (12), the diameter of the bottom surfaces of the flow guide discs (12) is larger than the inner diameter between the annular protrusions (11), the central positions of the flow guide discs (12) are conical protrusions, the sides of the flow guide discs (12) are flow guide rings with slopes inwards, flow guide channels (13) are formed between the outer sides of the conical protrusions and the inner sides of the flow guide rings at intervals, the bottom surfaces of the flow guide channels (13) are communicated with flow guide pipes (14), the inner diameters of the flow guide pipes (14) are gradually reduced from top to bottom, and a plurality of holes are uniformly formed in the pipe walls of the flow guide pipes (14);

still be provided with agitating unit in blending tank (1), agitating unit includes motor and (mixing) shaft, the motor sets up the top at blending tank (1), the (mixing) shaft runs through the top of blending tank (1) and the center of water conservancy diversion dish (12) is connected with the motor, the (mixing) shaft bottom is provided with horizontal poking bar, the tip of horizontal poking bar is provided with vertical poking bar, horizontal poking bar is located the below of honeycomb duct (14), and vertical poking bar is located the outside of honeycomb duct (14).

2. The apparatus for efficiently preparing the stripping solution for copper plating according to claim 1, wherein: the number of the draft tubes (14) is at least three, and each draft tube (14) is uniformly arranged below the draft channel (13).

3. The apparatus for efficiently preparing the stripping solution for copper plating according to claim 2, wherein: the gradient of the guide ring is 30-45 degrees.

4. The apparatus for efficiently preparing the stripping solution for copper plating according to claim 1, wherein: the horizontal stirring rod and the vertical stirring rod are heat-conducting stirring rods.

5. The apparatus for efficiently preparing a stripping solution for copper processing according to any one of claims 1 to 3, wherein: the inner walls of the mixing tank (1) and the finished product tank (9) are polytetrafluoroethylene layers.