CN214782118U

CN214782118U - Substrate fixing clamp

Info

Publication number: CN214782118U
Application number: CN202120983289.9U
Authority: CN
Inventors: 劳伟民
Original assignee: Aifake Vacuum Technology Suzhou Co ltd
Current assignee: Aifake Vacuum Technology Suzhou Co ltd
Priority date: 2021-05-10
Filing date: 2021-05-10
Publication date: 2021-11-19
Anticipated expiration: 2031-05-10

Abstract

The utility model relates to a vacuum sputtering coating film technical field discloses a base plate mounting fixture, include: the fixing clamp comprises a fixing clamp body, a fixing piece and a spring piece, wherein the fixing clamp body is fixedly connected with a tray and used for fixing and limiting a substrate in a tray groove, the fixing clamp body is detachably arranged on the fixing clamp body and correspondingly located on the fixing block in the tray groove, and the spring piece is detachably arranged on the fixing block and used for abutting against the substrate. Through the mode, the elastic sheet is fixedly arranged on the fixing clamp body, rigid contact on the substrate is changed into elastic sheet type flexible contact, the use of the positioning ring is reduced, and the problems of complicated loading and unloading, deformation and the like caused by the positioning ring are solved; and the pressure of the elastic sheet on the substrate can be changed by adjusting the thickness of the fixing block, so that the fixing effect on the substrate is ensured.

Description

Substrate fixing clamp

Technical Field

The utility model relates to a vacuum sputtering coating film technical field especially relates to a base plate mounting fixture.

Background

In the LED chip market, the throughput requirement is very high, and the pursuit of how to improve the productivity and reduce the cost is extremely severe. Particularly on a vacuum coating post, because a mode of frequently and manually loading and unloading the substrate is adopted, the convenience of operators is further pursued to be improved so as to reduce the repeated labor time; the working efficiency is improved for operators, the yield is increased for enterprises, and the profit is improved.

The manual substrate loading and unloading mode is that an operator places an empty tray on a workbench, takes out a substrate (with the thickness of about 365 microns) to be coated from a wafer box by using a suction pen, places the substrate into the empty tray (tray groove), and then places the substrate into a positioning jig (positioning ring); then, repeatedly taking out the substrate and putting the substrate into the tray and putting the substrate into the positioning jig until the tray is filled with the substrate; and finally, fixing by using a fixing clamp, and finally putting into coating equipment (a vertical through type sputtering vacuum device) for vacuum sputtering coating.

Because the tray has more grooves for placing the substrate, the positioning ring must be matched and placed when the substrate is placed each time, which causes overlong loading and unloading time; since the positioning ring is directly placed (rigidly contacted) on the substrate, if the locking force of the fixing clamp is too large or the substrate is not placed in place, the positioning ring crushes the substrate when the fixing clamp is locked. Due to the shape structure of the positioning ring, the phenomenon of rolling and dropping is easy to occur, and the positioning ring is deformed after dropping, so that the positioning ring cannot be installed in the groove of the tray any more, and subsequent correction operation or new product replacement is needed.

SUMMERY OF THE UTILITY MODEL

The utility model mainly solves the technical problem of providing a substrate fixing clamp, which can change the rigid contact of the substrate into the flexible contact of the spring sheet type by fixedly arranging the spring sheet on the fixing clamp body, reduce the use of the positioning ring and solve the problems of complicated loading and unloading, deformation and the like caused by the positioning ring; and the pressure of the elastic sheet on the substrate can be changed by adjusting the thickness of the fixing block, so that the fixing effect on the substrate is ensured.

In order to solve the technical problem, the utility model discloses a technical scheme be: provided is a substrate fixing jig including: the fixing clamp comprises a fixing clamp body, a fixing piece and a spring piece, wherein the fixing clamp body is fixedly connected with a tray and used for fixing and limiting a substrate in a tray groove, the fixing clamp body is detachably arranged on the fixing clamp body and correspondingly located on the fixing block in the tray groove, and the spring piece is detachably arranged on the fixing block and used for abutting against the substrate.

Preferably, the number of the elastic sheets is two, and the two elastic sheets are symmetrically fixed on the fixed block.

Preferably, the elastic sheet is S-shaped, one end of the elastic sheet is fixedly connected with the fixed block, and the other end of the elastic sheet is defined as a limiting end and can be abutted against the substrate; the directions of the two elastic sheet limiting ends are opposite and not opposite.

Preferably, the fixing block is fixedly connected with the fixing clamp body through a first screw, and the elastic sheet is fixedly connected with the fixing block through a second screw.

The utility model has the advantages that: the utility model can directly put all substrates into the grooves of the tray during operation by arranging the elastic pieces on the fixing clamp body, and finally, directly fix the fixing clamp body with the elastic pieces on the tray, thereby reducing the time for putting all positioning rings and the use of the positioning rings, greatly shortening the operation time of operators, improving the production efficiency and reducing the maintenance cost; and due to the design and use of the elastic sheet, the buffer is added between the substrate and the fixing clamp body, the rigid contact of the substrate is changed into the elastic sheet type flexible contact, and the problem of substrate fragmentation caused by operation reasons is reduced. The distance between the substrate in the tray groove and the fixing clamp body can be adjusted by utilizing the thickness of the fixing block, so that the pressure of the elastic sheet on the substrate can be controlled conveniently according to actual use conditions, and the substrate is conveniently fixed. The two elastic sheets can ensure the fixing effect on the substrate; the S-shaped spring plate has simple structural design and good use effect.

Drawings

Fig. 1 is a schematic structural view of a tray in a substrate fixing jig according to the present invention;

fig. 2 is a schematic cross-sectional view of a substrate fixing jig according to the present invention;

fig. 3 is a partially enlarged schematic view of a portion a in fig. 2.

The parts in the drawings are numbered as follows: 1. a tray; 10. a groove; 2. a substrate; 3. fixing the clamp body; 31. fixing screws; 4. a fixed block; 41. a first screw; 5. a spring plate; 51. a second screw.

Detailed Description

The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.

Referring to fig. 1 to 3, an embodiment of the present invention includes:

a substrate holding jig comprising: the fixing clamp comprises a fixing clamp body 3, a fixing block 4 and two elastic sheets 5, wherein the fixing clamp body 3 is fixedly connected with the tray 1 and used for fixing and limiting the substrate 2 in the tray groove 10, the fixing block 4 is installed on the fixing clamp body 3 and correspondingly located in the tray groove 10, and the two elastic sheets 5 are symmetrically arranged on the fixing block 4 and used for abutting against the substrate 2. The fixing block 4 is detachably fixed on the fixing clamp body 3 through a first screw 41. The elastic sheet 5 is S-shaped, one end of the elastic sheet 5 is fixedly connected with the fixed block 4 through a second screw 51, and the other end of the elastic sheet 5 is defined as a limiting end and can be abutted against the substrate 2; the directions of the limiting ends of the two elastic sheets 5 are opposite and not opposite, and the structural design has the best limiting effect on the substrate.

The distance between the substrate 2 in the tray groove 10 and the fixing clamp body 3 can be adjusted by utilizing the thickness of the fixing block 4, so that the pressure of the elastic sheet 5 on the substrate 2 can be conveniently controlled, and the substrate 2 can be conveniently fixed. The spring 5 improves the yield strength through heat treatment to meet the repeated use condition; fix shell fragment 5 on mounting fixture body 3 through fixed block 4, form the integration of shell fragment 5 and mounting fixture body 3 to directly use this base plate mounting fixture to all fix all substrates 2 on tray 1.

The use method of the substrate fixing clamp comprises the following steps: when the substrates 2 are installed in operation, firstly, all the substrates 2 are placed in the grooves 10 of the tray 1, and then the fixing clamp body 3 with the elastic sheets 5 is directly fixed on the tray 1 by using the fixing screws 31; when the substrate 2 is removed, the fixing jig body 3 can be removed after the fixing screws 31 are removed, and then all the substrates 2 can be directly taken out.

The utility model can design the elastic sheet 5 on the original fixing clamp, and can directly put all the substrates 2 into the groove 10 of the tray 1 during operation, and finally directly fix the fixing clamp body 3 with the elastic sheet 5 on the tray 1, thereby reducing the time for putting all the positioning rings and the use of the positioning rings, greatly shortening the operation time of operators, improving the production efficiency and reducing the maintenance cost; and due to the design and use of the elastic sheet 5, the buffer is added between the substrate 2 and the fixing clamp body 3, the rigid contact of the substrate 2 is changed into elastic sheet type flexible contact, and the problem of cracking of the substrate 2 caused by operation is reduced.

The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A substrate fixing jig characterized by comprising: the fixing clamp comprises a fixing clamp body, a fixing piece and a spring piece, wherein the fixing clamp body is fixedly connected with a tray and used for fixing and limiting a substrate in a tray groove, the fixing clamp body is detachably arranged on the fixing clamp body and correspondingly located on the fixing block in the tray groove, and the spring piece is detachably arranged on the fixing block and used for abutting against the substrate.

2. The substrate holding jig according to claim 1, wherein: the number of the elastic pieces is two, and the two elastic pieces are symmetrically fixed on the fixed block.

3. The substrate holding jig according to claim 2, wherein: the elastic sheet is S-shaped, one end of the elastic sheet is fixedly connected with the fixed block, and the other end of the elastic sheet is defined as a limiting end and can be abutted against the substrate; the directions of the two elastic sheet limiting ends are opposite and not opposite.

4. A substrate holding jig according to claim 1, 2 or 3, wherein: the fixing block is fixedly connected with the fixing clamp body through a first screw, and the elastic piece is fixedly connected with the fixing block through a second screw.