CN214694344U

CN214694344U - Crucible structure for evaporation and evaporation equipment

Info

Publication number: CN214694344U
Application number: CN202120198354.7U
Authority: CN
Inventors: 张麒麟
Original assignee: Fujian Huajiacai Co Ltd
Current assignee: Fujian Huajiacai Co Ltd
Priority date: 2021-01-25
Filing date: 2021-01-25
Publication date: 2021-11-12
Anticipated expiration: 2031-01-25

Abstract

The utility model discloses a crucible structure for evaporation and evaporation equipment, wherein the crucible structure comprises an inner crucible, an outer crucible, an upper cover, a first gasket and a second gasket; the inner layer crucible comprises a first cavity with an open top, and the first cavity is used for accommodating evaporation materials; the outer-layer crucible comprises a second cavity with an open top, the outer wall of the inner-layer crucible is arranged in the second cavity through the first gasket, and the first gasket is used for increasing the heat conduction uniformity of the inner-layer crucible and the outer-layer crucible; the bottom of upper cover passes through the second gasket setting on the top of inlayer crucible, the second gasket is used for increasing the heat conduction homogeneity between upper cover and the inlayer crucible, the upper cover includes the nozzle, the nozzle intercommunication one side of upper cover and the first cavity that is located the upper cover opposite side. The technical scheme solves the problem that the plating rate is unstable due to uneven heating of evaporated materials in the inner layer crucible, and reduces the probability of fragmentation of the outer layer crucible or the inner layer crucible.

Description

Crucible structure for evaporation and evaporation equipment

Technical Field

The field relates to the technical field of evaporation, in particular to a crucible structure for evaporation and evaporation equipment.

Background

An organic light-emitting diode (abbreviated as OLED) has the advantages of higher contrast, wide color gamut, wide viewing angle, low power consumption, smaller volume, and the like. The main process flow of the OLED display screen is a process of heating a vapor deposition object in a crucible to sublimate the vapor deposition object into gas molecules to be attached to a specific area of a substrate. The OLED device comprises an organic layer and a metal layer, wherein the metal layer is made of metal materials with low work function, good light transmittance and conductivity and the like, and generally comprises silver, magnesium, aluminum and the like, and the evaporation of the metal layer needs higher heating temperature compared with the evaporation of the organic layer. The crucible used for the metal layer at present is generally made of graphite or Pyrolytic Boron Nitride (PBN), which has good thermal conductivity and high temperature resistance, but high cost and fragility, so that the service life of the crucible is short, and the crucible needs to be replaced periodically.

To the above-mentioned problem, the present trade has the crucible scheme of proposing set formula, and set formula crucible is when actual high temperature heating, and the coating by vaporization material uniformity of being heated in the inlayer crucible is poor, and outer crucible appears breaking easily, and then leads to the coating by vaporization material to flow.

SUMMERY OF THE UTILITY MODEL

Therefore, a crucible structure for evaporation and evaporation equipment are needed to be provided, and the problem that the crucible is broken at high temperature to cause outflow of evaporation materials is solved.

In order to achieve the above object, the present embodiment provides a crucible structure for evaporation, including an inner crucible, an outer crucible, an upper cover, a first gasket, and a second gasket;

the inner layer crucible comprises a first cavity with an open top, and the first cavity is used for accommodating evaporation materials;

the outer-layer crucible comprises a second cavity with an open top, the outer wall of the inner-layer crucible is arranged in the second cavity through the first gasket, and the first gasket is used for increasing the heat conduction uniformity of the inner-layer crucible and the outer-layer crucible;

the bottom of upper cover passes through the second gasket setting on the top of inlayer crucible, the second gasket is used for increasing the heat conduction homogeneity between upper cover and the inlayer crucible, the upper cover includes the nozzle, the nozzle intercommunication one side of upper cover and the first cavity that is located the upper cover opposite side.

Further, the side wall of the upper cover is also arranged on the second cavity through a second gasket.

Further, the top of the outer crucible is lower than the top of the upper cover.

Further, the height of the top of the second gasket is lower than the height of the top of the outer crucible.

Further, the inner layer crucible is an inner layer crucible of pyrolytic boron nitride, the first gasket is a first gasket of graphite, and the outer layer crucible is an outer layer crucible of tantalum.

Further, the cross section of the inner layer crucible is circular, the cross section of the first gasket is circular, and the cross section of the second cavity is circular.

This embodiment still provides an evaporation plating equipment, including crucible structure and heating device, heating device sets up one side of crucible structure, the crucible structure be above-mentioned arbitrary one a crucible structure for the evaporation plating.

Different from the prior art, the technical scheme is that the first gasket and the second gasket are arranged between the inner layer crucible and the outer layer crucible. The first gasket can ensure the uniformity of heat conduction of the inner crucible and the outer crucible in a high-temperature state. The second gasket prevents that the upper cover card from increasing the seal between inlayer crucible and the upper cover simultaneously on the inlayer crucible. Above-mentioned technical scheme solves the coating by vaporization thing among the inlayer crucible and is heated the uneven problem that causes the plating rate unstable, reduces outer crucible, inlayer crucible or upper cover and takes place cracked probability, avoids the coating by vaporization thing among the inlayer crucible to flow out and causes the evaporation source short circuit to damage, has improved production efficiency and economic benefits.

Drawings

FIG. 1 is a schematic sectional view of the crucible structure according to the present embodiment;

FIG. 2 is a schematic sectional view of the inner crucible, the upper lid and the second gasket of the present embodiment;

FIG. 3 is a top view of the outer crucible and the first spacer of this embodiment.

Description of reference numerals:

1. an inner crucible;

11. a first cavity;

2. an outer crucible;

3. an upper cover;

31. a nozzle;

4. a first gasket;

5. a second gasket.

Detailed Description

To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.

Referring to fig. 1 to 3, the present embodiment provides a crucible structure for evaporation, which includes an inner crucible 1, an outer crucible 2, an upper lid 3, a first spacer 4 and a second spacer 5. The inner layer crucible 1 comprises a first cavity 11 with an open top, and the first cavity 11 is used for accommodating evaporation materials. The outer crucible 2 comprises a second cavity with an open top, the outer wall of the inner crucible 1 is arranged in the second cavity through the first gasket 4, the first gasket is used for increasing the heat conduction uniformity of the inner crucible and the outer crucible, and the structure is shown in figure 1. The thermal expansion coefficient of the inner crucible 1 is lower than or equal to that of the first gasket 4, and the thermal expansion coefficient of the outer crucible 2 is higher than or equal to that of the first gasket 4. The bottom of the upper cover 3 is arranged on the top of the inner crucible 1 through a second gasket 5, the second gasket is used for improving the uniformity of heat conduction between the upper cover and the inner crucible, the structure is shown in figure 2, or the side wall of the upper cover 3 is also arranged on the second cavity through the second gasket 5. The upper cover 3 comprises a nozzle 31, the nozzle 31 is a through hole, the nozzle 31 is communicated with one side of the upper cover 3 and the first cavity 11 positioned on the other side of the upper cover 3, and the nozzle 31 is used as a channel for spraying evaporation materials from the inner layer crucible 1.

According to the technical scheme, the first gasket and the second gasket are arranged between the inner layer crucible and the outer layer crucible which are different. The thermal expansion coefficient of the first gasket is between that of the inner crucible and that of the outer crucible, so that the uniformity of heat conduction of the inner crucible and the outer crucible in a high-temperature state can be ensured, namely the first gasket controls the inner crucible and the outer crucible not to be over-expanded. The thermal expansion coefficient of the second gasket is between the thermal expansion coefficient of the inner crucible and the thermal expansion coefficient of the upper cover, the second gasket eliminates a gap between the upper cover and the inner crucible through self thermal expansion, the second gasket prevents the upper cover from being clamped on the inner crucible, and meanwhile, the airtightness between the inner crucible and the upper cover is improved. Above-mentioned technical scheme solves the coating by vaporization thing among the inlayer crucible and is heated the uneven problem that causes the plating rate unstable, reduces outer crucible or inlayer crucible and takes place cracked probability, avoids the coating by vaporization thing among the inlayer crucible to flow out and causes the evaporation source short circuit to damage, has improved production efficiency and economic benefits.

In this embodiment, in order to facilitate the removal of the upper lid from the top of the inner crucible, the top of the outer crucible 2 is at a lower height than the top of the upper lid 3, as shown in FIG. 1. The outer crucible 2 may be higher than the bottom of the upper lid 3, or the outer crucible 2 may be lower than the bottom of the upper lid 3. Preferably, the height of the outer crucible 2 accounts for more than eighty percent of the height of the inner crucible 1 and the upper cover 3, and a worker can conveniently control the grabbing mechanism to take the upper cover out of the outer crucible.

In this embodiment, the height of the top of the second spacer 5 is lower than the height of the top of the outer crucible.

In this embodiment, the inner crucible 1 is an inner crucible of pyrolytic boron nitride, the outer crucible 2 is an outer crucible of tantalum, the upper cover 3 is an upper cover of pyrolytic boron nitride, the first gasket 4 is a first gasket of graphite, and the second gasket 5 is a second gasket of graphite. The graphite has the characteristics of loose material, excellent heat-conducting property, high temperature resistance, strong chemical stability and the like, and can greatly increase the heating uniformity of the inner crucible and the outer crucible. Meanwhile, the graphite is a non-hard substance so as to prevent the inner crucible and the outer crucible from being scratched when the graphite is taken out.

In certain embodiments, the inner crucible is graphite, the first gasket is ceramic, and the outer crucible is tantalum, copper, aluminum, or the like.

In this embodiment, the volume of the evaporation material in the first cavity of the inner crucible is not more than eighty percent of the volume of the first cavity, so that the evaporation material is prevented from bumping and overflowing the crucible, and the evaporation source is prevented from being damaged.

In this embodiment, the cross section of the inner crucible is circular, the cross section of the first spacer is circular, and the cross section of the second cavity is circular, as shown in fig. 3. The first gasket 4 can cover the side wall and/or the bottom of the inner crucible 1, and the outer diameter of the inner crucible 1 is equal to or slightly larger than the inner diameter of the first gasket 4, so that the inner crucible 1 has an extrusion effect on the first gasket 4 and can be tightly attached to the first gasket 4 to increase the tightness between the inner crucible and the first gasket. The first gasket 4 is arranged in the second cavity, and the first gasket 4 is tightly attached to the outer crucible 2 after the outer crucible 2 is arranged in the first gasket 4, so that the tightness between the first gasket and the outer crucible is increased. The second gasket 5 is arranged between the inner crucible 1 and the upper cover 3, and the second gasket 5 is annular and does not shield the first cavity 11.

This embodiment still provides an evaporation plating equipment, including crucible structure and heating device, heating device sets up one side of crucible structure, crucible structure be the above-mentioned arbitrary embodiment of a crucible structure for evaporation plating. The heating device may be a resistance heating source, a laser heating source, or the like, and is used to heat the vapor deposition material in the first cavity 11 of the crucible. The crucible structure can be a plurality of crucible structures, and the plurality of crucible structures are arranged in an array, for example, the plurality of crucible structures form a straight line. The heating device simultaneously heats the evaporation material in the first cavity in the plurality of crucible structures. The crucible structure can bear larger temperature, so the crucible structure has the best effect for evaporating metal materials.

It should be noted that, although the above embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, the changes and modifications of the embodiments described herein, or the equivalent structure or equivalent process changes made by the contents of the specification and the drawings of the present invention, directly or indirectly apply the above technical solutions to other related technical fields, all included in the protection scope of the present invention.

Claims

1. A crucible structure for evaporation is characterized by comprising an inner layer crucible, an outer layer crucible, an upper cover, a first gasket and a second gasket;

2. The crucible structure for evaporation according to claim 1, wherein the side wall of the upper cover is also disposed on the second cavity through the second spacer.

3. The crucible structure for evaporation as claimed in claim 1, wherein the top of the outer crucible is lower than the top of the upper lid.

4. The crucible structure for evaporation according to claim 1, wherein the height of the top of the second spacer is lower than the height of the top of the outer crucible.

5. The crucible structure for evaporation according to claim 1, wherein the inner crucible is an inner crucible of pyrolytic boron nitride, the first gasket is a first gasket of graphite, and the outer crucible is an outer crucible of tantalum.

6. The crucible structure for evaporation according to claim 1, wherein the inner crucible has a circular cross-section, the first spacer has a circular cross-section, and the second cavity has a circular cross-section.

7. An evaporation apparatus, comprising a crucible structure and a heating device, wherein the heating device is arranged on one side of the crucible structure, and the crucible structure is the crucible structure for evaporation according to any one of claims 1 to 6.