CN214422780U - Zone-melting seed crystal clamp - Google Patents
Zone-melting seed crystal clamp Download PDFInfo
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- CN214422780U CN214422780U CN202120282466.0U CN202120282466U CN214422780U CN 214422780 U CN214422780 U CN 214422780U CN 202120282466 U CN202120282466 U CN 202120282466U CN 214422780 U CN214422780 U CN 214422780U
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- seed crystal
- holder
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- melting
- cylindrical cavity
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- 239000013078 crystal Substances 0.000 title claims abstract description 90
- 238000004857 zone melting Methods 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 abstract description 13
- 238000010899 nucleation Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a zone-melting seed crystal anchor clamps, including seed crystal holder and interior axle, the center department of the lower terminal surface of seed crystal holder is equipped with inside sunken cylindrical cavity, and cylindrical cavity inner wall is equipped with the internal thread, and the axle point outer wall of interior axle is equipped with the external screw thread with internal thread assorted, and interior axle point inserts in the cylindrical cavity of locating the seed crystal holder to through threaded connection. Zone-melting seed crystal anchor clamps simple structure, reasonable in design, low in manufacturing cost can alleviate rocking that the single crystal produced at seeding and expanding shoulder growth in-process, ensure that the single crystal is stable to be grown.
Description
Technical Field
The utility model belongs to the technical field of zone-melting single crystal growth, especially, relate to a zone-melting seed crystal anchor clamps.
Background
The zone-melting single crystal furnace is key equipment in the middle and upper reaches of the semiconductor industry, is mainly used for producing a zone-melting single crystal silicon rod, is production equipment which is suitable for long-time continuous work and has high precision, high reliability and high automation degree, and comprises the following specific processes: vertically fixing a high-purity polycrystalline silicon rod on a main shaft of an upper furnace chamber, aligning the lower end of a polycrystalline material to a seed crystal fixed in a lower furnace chamber, adopting an electromagnetic induction heating mode, coupling an induction coil with the polycrystalline silicon rod to generate a vortex to melt the lower end of the polycrystalline silicon rod, then connecting a silicon single crystal (seed crystal) fixed on the upper part of a shaft tip in the lower furnace chamber with a melt, slowly pulling the seed crystal downwards after the seed crystal is melted with the melt, controlling the upper main shaft to move downwards, enabling the polycrystalline material to move relative to a melting zone, and enabling the crystal to grow on the upper end of the seed crystal; then, controlling the seed crystal to grow a thin neck with the length of 60-80mm and the diameter of 3-5mm, and eliminating dislocation of atomic arrangement generated by strong thermal shock of the high-temperature solution to the seed crystal, wherein the process is seeding; then, amplifying the diameter of the crystal to the size required by the process, generally 75-200 mm, wherein the process is called shouldering; then, the process enters an equal diameter process, and single crystals with certain diameter and size are grown by controlling the temperature of the thermal field and the lifting speed of the crystals.
In the manufacturing process of the zone-melting silicon single crystal, the silicon seed crystal holder is an essential component, because in the growth process, particularly in the seeding and shoulder expanding stages of the single crystal growth, the single crystal which is growing is shaken due to the vibration generated by the alternate forward and reverse rotation of the lower shaft of the zone-melting single crystal furnace, the unreasonable design of the seed crystal holder and the shaft tip of the inner shaft, the unreasonable fastening design of the seed crystal holder and the seed crystal and the like, particularly the shaking of the large-size single crystal is obvious, and the growth stability of the single crystal is seriously influenced.
Patent CN201605348U discloses a seed crystal holder for keeping seed crystal stable in the process of crystal growth, which explains the fastening device of seed crystal and seed crystal holder, and adopts the method of fastening seed crystal by sleeve, thus improving the problems of seed crystal and seed crystal holder, reducing the shaking and improving the stability of silicon single crystal growth. But the fixation between the seed holder and the inner spindle tip is not improved. The seed crystal holder used at present usually consists of a seed crystal holder and an inner shaft pivot, the inner shaft pivot is inserted into a groove at the bottom of the seed crystal holder to match the seed crystal holder and the inner shaft pivot, and the relative sliding is prevented by the rough friction force between side walls. The connection mode has the main problems that a, the seed crystal holder and the shaft tip have spaciousness, and the shoulder expanding stage easily causes single crystal shaking; b. the seed crystal holder and the shaft tip have the spaciousness, so that the seed crystal holder is easy to draw circles in the seeding stage, and the seeding is difficult; c. the seed crystal holder and the shaft tip are in non-fixed contact, so that the seed crystal holder and the shaft tip are easy to fall off; d. the seed crystal holder and the shaft tip have the spaciousness, and relative movement is easy to generate after the single crystal is started to rotate positively and negatively, so that the growth of the crystal is influenced.
Patent application No. 201210349314.3 entitled "the hole at the lower end of the seed crystal guide rod is fixed with the outer circle at the upper end of the inner shaft through a set screw" in the seed crystal guide device of the zone melting furnace, namely, the seed crystal holder and the inner shaft are fixed by screws, although the method can fix the seed crystal holder and the inner shaft, the existence of the screws can cause the unbalance of the whole holding device, and the single crystal growing can also shake, especially the shake of large size is more obvious, and the crystal growth is influenced.
Therefore, how to improve the connection between the seed crystal holder and the inner shaft so as to reduce the shaking of the shoulder expanding growth of the single crystal and improve the growth stability of the single crystal in the process of growing the single crystal is a problem to be solved at present.
Disclosure of Invention
In view of this, the present invention provides a zone-melting seed crystal fixture with simple structure, reasonable design and low manufacturing cost, which can reduce the shaking generated during the seeding and shoulder-expanding growth process of the single crystal and ensure the stable growth of the single crystal, so as to solve the above-mentioned problems.
In order to achieve the above purpose, the technical scheme of the utility model is realized like this:
a zone-melting seed crystal clamp comprises a seed crystal holder and an inner shaft, wherein an inwards-recessed cylindrical cavity is formed in the center of the lower end face of the seed crystal holder, internal threads are formed in the inner wall of the cylindrical cavity, external threads matched with the internal threads are formed in the outer wall of the shaft tip of the inner shaft, and the shaft tip of the inner shaft is inserted into the cylindrical cavity of the seed crystal holder and connected with the cylindrical cavity through threads.
Compared with the prior art, the zone-melting seed crystal clamp has the following advantages:
(1) the zone-melting seed crystal clamp has simple structure, reasonable design and low manufacturing cost, the cylindrical cavity of the seed crystal clamp is connected with the shaft tip of the inner shaft through the screw thread, the connection is more compact, and the single crystal shaking caused by untight matching can be reduced; when the single crystal moves downwards, the separation of the seed crystal holder and the lower shaft tip can be avoided; the close fit between the seed holder and the shaft tip of the inner shaft avoids the problem of difficult seeding caused by the fact that the seed holder draws a circle in the seeding stage.
(2) Zone-melting seed crystal anchor clamps in seed crystal holder pass through threaded connection with interior axle, avoided the overall structure weight grow that the screw connection exists, the screw exists the whole asymmetry of structure that leads to, unbalanced, the single crystal is opened positive and negative back of changeing, the condition emergence of the easy skew of zone-melting seed crystal anchor clamps.
Drawings
The accompanying drawings, which form a part hereof, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention without undue limitation. In the drawings:
FIG. 1 is a schematic view of the connection of a seed holder to an inner shaft in the prior art;
fig. 2 is a schematic structural view of a zone-melting seed crystal holder according to an embodiment of the present invention.
Description of reference numerals:
1-seed holder; 2-inner shaft; 3-screw thread.
Detailed Description
It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; they may be mechanically coupled, directly coupled, indirectly coupled through intervening media, or may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in figure 1, which is a schematic view of the connection between the seed holder and the inner shaft in the prior art, the shaft tip of the inner shaft is directly inserted into the groove at the bottom of the seed holder, and the inner shaft and the seed holder are connected through the friction force between the side walls or through a screw.
As shown in figure 2, a zone-melting seed crystal anchor clamps, including seed holder 1 and interior axle 2, the center department of the lower terminal surface of seed holder 1 is equipped with inside sunken cylindrical cavity, cylindrical cavity inner wall is equipped with the internal thread, the axle point outer wall of interior axle 2 be equipped with internal thread assorted external screw thread, interior axle 2 axle point is inserted and is located the cylindrical cavity of seed holder 1 to through threaded 3 connection.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (1)
1. The utility model provides a zone-melting seed crystal anchor clamps, includes seed crystal holder (1) and interior axle (2), its characterized in that: the seed crystal holder is characterized in that an inwards-recessed cylindrical cavity is formed in the center of the lower end face of the seed crystal holder (1), internal threads are formed in the inner wall of the cylindrical cavity, external threads matched with the internal threads are formed in the outer wall of the shaft tip of the inner shaft (2), and the shaft tip of the inner shaft (2) is inserted into the cylindrical cavity of the seed crystal holder (1) and connected through threads (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120282466.0U CN214422780U (en) | 2021-02-01 | 2021-02-01 | Zone-melting seed crystal clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120282466.0U CN214422780U (en) | 2021-02-01 | 2021-02-01 | Zone-melting seed crystal clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214422780U true CN214422780U (en) | 2021-10-19 |
Family
ID=78070021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120282466.0U Active CN214422780U (en) | 2021-02-01 | 2021-02-01 | Zone-melting seed crystal clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214422780U (en) |
-
2021
- 2021-02-01 CN CN202120282466.0U patent/CN214422780U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
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| CP03 | Change of name, title or address |