CN214375830U - Auxiliary device for mask development - Google Patents

Abstract

The embodiment of the utility model provides a light shield development auxiliary device for to treat that the development light shield is arranged in the developing tank of splendid attire with developer and is implemented the development, including locating the other support frame of developing tank side, the pin joint is on the support frame and hang the rotating member of locating the notch top of developing tank and be fixed in the rotating member on and the anchor clamps of the rotatory axis of rotation of skew rotating member, the rotating member is rotatory and drive by the fixed waiting development light shield of anchor clamps centre gripping treat the assembly position of development light shield and will treat that the development light shield submerges completely between the development position under the developer liquid level in the dismouting round trip movement. This embodiment hangs the notch top of locating the developer tank through the rotating member with the help of the support frame, and anchor clamps are fixed in on the rotating member and the rotatory axis of skew rotating member, and after the fixed developing light cover of treating of anchor clamps centre gripping, through rotating the rotating member, anchor clamps are round trip movement between assembly position and development position under the drive of rotating member, and the development operation of treating the developing light cover is implemented, low in labor strength.

Description

Auxiliary device for mask development

Technical Field

The embodiment of the utility model provides a relate to light shield development technical field, especially relate to a light shield development auxiliary device.

Background

In the process of manufacturing a photomask, it is necessary to develop the exposed photomask. In the conventional developing method, an operator usually carries a dust-free glove, clamps two ends of a photomask to be developed with two hands, and horizontally puts the photomask to be developed with the film surface facing upwards in a developing solution to carry out development. However, because of the existence of artificial subjective operation, when the photomask to be developed is horizontally placed in the developer by two hands, the liquid level of the developer is easy to generate large fluctuation, and finally the developed photomask has black defects (such as black spots); in addition, because manual operation is adopted, the same developing effect of the photomask cannot be accurately ensured every time, and the posture of clamping the photomask to be developed needs to be kept by an arm of an operator for a long time, so that the labor intensity of the manual operation is relatively high.

SUMMERY OF THE UTILITY MODEL

The embodiment of the utility model provides a technical problem who solves provides a light shield development auxiliary device to reduce the light shield defect that the development caused and reduce intensity of labour.

In order to solve the technical problem, an embodiment of the utility model provides a following technical scheme: the utility model provides a light shield development auxiliary device for will treat that the development light shield is arranged in the developing bath implementation development of splendid attire developer solution, including locating other support frame, pin joint in the other support frame of developing bath side in and the support frame hangs and locate on the support frame the rotating member of the notch top of developing bath and be fixed in on the rotating member and skew the anchor clamps of the rotatory axis of rotation, the rotating member is rotatory and drive by the fixed assembly position of treating the development light shield at the dismouting of treatment development light shield of anchor clamps centre gripping and will treat that the development light shield submerges round trip movement between the development position under the developer solution liquid level completely.

Furthermore, the rotating part comprises a rotating shaft pivoted on the supporting frame and a supporting arm, one end of the supporting arm is fixed on the rotating shaft, the other end of the supporting arm deviates from the rotating central axis of the rotating shaft, and the clamp is fixed on the free end of the supporting arm.

Furthermore, the supporting arm is a telescopic rod.

Furthermore, at least two supporting arms are assembled on the rotating shaft, the clamp is assembled at the tail end of each supporting arm, and the clamps on the at least two supporting arms clamp and fix the photomask to be developed from the two symmetrical sides of the photomask to be developed respectively.

Furthermore, an operating part for rotating the rotating shaft is further arranged at one end of the rotating shaft.

Furthermore, the two opposite sides of the developing tank are respectively provided with one support frame, and the two opposite ends of the rotating shaft are respectively pivoted on one corresponding support frame.

Furthermore, the support frame is also provided with a positioning mechanism for movably positioning the support arm at the assembling position.

Furthermore, the support frame is provided with a pin hole, when the support arm rotates to the assembling position, a movable bolt is inserted into the pin hole and supports and limits the support arm, and the movable bolt and the pin hole form the positioning mechanism.

Furthermore, the surfaces of the supporting arm and the clamp, which are in contact with the developing solution, are provided with protective material layers which do not react with the developing solution.

After the technical scheme is adopted, the embodiment of the utility model provides an at least, following beneficial effect has: the embodiment of the utility model provides a hang above the notch of developer tank through the revolving part with the help of the support frame, anchor clamps are fixed on the revolving part and deviate from the rotatory axis of revolving part, when concrete operation, after the anchor clamps centre gripping is fixed and is waited to develop the light shield, through rotating the revolving part, anchor clamps move back and forth between assembly position and development position under the drive of revolving part, implement the development operation of treating the development light shield, and is easy to operate, because treat that the development light shield is the liquid level of business turn over developer solution adopting the circular motion mode, treat that the development light shield is the slant business turn over when business turn over the liquid level of developer solution, influence to the liquid level of developer solution is relatively less, the light shield defect that has reduced the development and caused; and, because the utility model discloses light shield development auxiliary device develops the light shield for mechanical operation at every turn, need not the manual work and grips for a long time and treat the development light shield, has reduced intensity of labour to the development error that manual development caused has been avoided.

Drawings

Fig. 1 is a schematic perspective view of an alternative embodiment of the mask developing auxiliary device of the present invention.

Fig. 2 is a schematic cross-sectional view of the fixture of an alternative embodiment of the mask developing aid of the present invention along the axial plane of the developing tank when the fixture is in the assembled position.

Fig. 3 is a schematic cross-sectional view of the fixture of an alternative embodiment of the mask developing aid of the present invention along the axial plane of the developing tank when the fixture is in the developing position.

Detailed Description

The present application will now be described in further detail with reference to the accompanying drawings and specific examples. It is to be understood that the following illustrative embodiments and description are only intended to illustrate the present invention, and are not intended to limit the present invention, and features in the embodiments and examples may be combined with each other in the present application without conflict.

As shown in fig. 1 to fig. 3, an optional embodiment of the present invention provides a photomask development auxiliary device, for to wait to develop photomask 1 and arrange in developing bath 3 that contains the developer in and implement development, including locating the other support frame 4, the pin joint of developing bath 3 side in support frame 4 go up and hang and locate the rotating member 5 of developing bath 3's notch top and be fixed in on the rotating member 5 and skew anchor clamps 6 of the rotatory axis of rotating member 5, rotating member 5 is rotatory and drive by 6 fixed waiting of centre gripping of anchor clamps 1 is waiting to develop photomask 1 at the dismouting and is waiting to develop photomask 1's assembly position a and will wait to treat that developing photomask 1 submerges completely between the developing position B under the developer liquid level round trip movement.

In an alternative embodiment of the present invention, the rotating member 5 includes a rotating shaft 50 pivotally connected to the supporting frame 4 and a supporting arm 52 having one end fixed to the rotating shaft 50 and the other end deviating from a central axis of rotation of the rotating shaft 50, and the clamp 6 is fixed to a free end of the supporting arm 52. In the embodiment, the rotating shaft 50 and the supporting arm 52 are adopted, the supporting arm 52 and the clamp 6 fixed on the supporting arm 52 are driven to rotate by the rotation of the rotating shaft 50, the photomask 1 to be developed can be effectively placed in the developer, and the structure is relatively simple.

In yet another alternative embodiment of the present invention, the support arm 52 is a telescopic rod. The support arm 52 of this embodiment adopts the telescopic link, because the developer solution liquid level of developer tank probably has the difference, through adopting the telescopic link, guarantees that the support arm 52 can effectually stretch into the liquid level of developer solution.

In another optional embodiment of the present invention, at least two supporting arms 52 are assembled on the rotating shaft 50, the end of each supporting arm 52 is assembled with the fixture 6, and at least two fixtures 6 on the supporting arms 52 respectively clamp and fix the mask 1 to be developed from two symmetrical sides of the mask 1 to be developed. This embodiment is through setting up two at least support arm 52, two at least moreover anchor clamps 6 on the support arm 52 are followed respectively treat that the symmetry both sides centre gripping of development light shield 1 is fixed treat development light shield 1, treat that the fixed effect of development light shield 1 is better, avoid treating that development light shield 1 takes place shake and skew at the in-process of motion and development.

In another alternative embodiment of the present invention, an operating member 501 for rotating the rotating shaft 50 is further disposed on one end of the rotating shaft 50. In this embodiment, by providing the operating member 501, the operator can rotate the rotating shaft 50 by the operating member 501, and the clamp 6 can clamp the mask 1 to be developed to perform development. In a specific implementation, the operation member 501 may be an operation handle or an operation grip, and in the embodiment shown in fig. 1, the operation member 501 is an operation handle.

In another optional embodiment of the present invention, the supporting frames 4 are respectively disposed beside two opposite sides of the developing tank 3, and two opposite ends of the rotating shaft 50 are respectively pivoted to the corresponding supporting frames 4. In this embodiment, the supporting frames 4 are respectively disposed at two sides of the developing tank 3, and the two opposite ends of the rotating shaft 50 are respectively pivoted to the corresponding supporting frames 4, so that the overall supporting structure is more stable. In the embodiment shown in fig. 1, the supporting frames 4 respectively disposed at both sides of the developing tank 3 are connected by a connecting plate at the top end to integrally form a gantry.

In another alternative embodiment of the present invention, the supporting frame 4 is further provided with a positioning mechanism 40 for movably positioning the supporting arm 52 at the assembling position a. In this embodiment, a positioning mechanism 40 is further provided, and in specific implementation, after the supporting arm 52 is movably positioned at the assembling position a by the positioning mechanism 40, an operator can conveniently operate the developing mask 1 or the developing mask on the fixture 6.

In another optional embodiment of the present invention, a pin hole 40a is provided on the supporting frame 4, when the supporting arm 52 rotates to the assembling position a, a movable pin 40b is inserted into the pin hole 40a to support and limit the supporting arm 52, and the movable pin 40b and the pin hole 40a constitute the positioning mechanism 40. In this embodiment, the positioning mechanism 40 is formed by the movable pin 40a and the pin hole 40b, and in specific implementation, the movable pin 40a can be flexibly inserted and pulled, so that the support arm 52 can be simply and reasonably selected to be positioned and positioned. In addition, as can be understood from the embodiment of fig. 1, the movable bolt 40b and the operating member 501 are disposed on the same support frame 4, so as to facilitate the operation.

In yet another alternative embodiment of the present invention, the surfaces of the support arm 52 and the clamp 6 that are both in contact with the developer are provided with a protective material layer that is not reactive with the developer. Usually, the developer is strong acid or strong alkaline solution, and this embodiment can effectively protect the support arm 52 and the clamp 6 by providing the protective material layer, thereby avoiding corrosion. In specific implementation, the protective material layer can be formed by spraying or electroplating.

The embodiments of the present invention have been described with reference to the accompanying drawings, but the present invention is not limited to the above-mentioned embodiments, which are only illustrative and not restrictive, and those skilled in the art can make many forms without departing from the spirit and scope of the present invention, and these forms are within the scope of the present invention.

Claims (9)

1. The utility model provides a light shield development auxiliary device for will treat that the development light shield is arranged in the developing bath implementation development of splendid attire developer solution, a serial communication port, the device is including locating other support frame, the pin joint in of developing bath side on and hang and locate the rotating member of the notch top of developing bath and be fixed in on the rotating member and skew the anchor clamps of the rotatory axis of rotation of rotating member, the rotating member is rotatory and drive by the fixed light shield of treating of anchor clamps centre gripping treats the assembly position of development light shield and treats the development light shield submergence round trip movement between the development position under the developer solution liquid level at the dismouting.

2. The apparatus of claim 1, wherein the rotating member comprises a shaft pivotally connected to the supporting frame and a supporting arm having one end fixed to the shaft and the other end offset from a central axis of rotation of the shaft, and the clamp is fixed to a free end of the supporting arm.

3. The mask development aid of claim 2, wherein the support arm is a telescoping arm.

4. The apparatus of claim 2 or 3, wherein at least two of the supporting arms are assembled on the shaft, the end of each supporting arm is assembled with the clamp, and the clamps on the at least two supporting arms clamp and fix the mask to be developed from two symmetrical sides of the mask to be developed respectively.

5. The apparatus of claim 2, wherein an operating member is disposed at one end of the shaft for rotating the shaft.

6. The mask developing aid of claim 2, wherein one of the supports is disposed beside each of two opposite sides of the developing tank, and two opposite ends of the shaft are pivotally connected to a corresponding support.

7. The apparatus of claim 2, wherein the support frame further comprises a positioning mechanism for movably positioning the support arm at the assembling position.

8. The apparatus of claim 7, wherein the supporting arm has a pin hole, and when the supporting arm is rotated to the assembling position, a movable pin is inserted into the pin hole and supports and limits the supporting arm, and the movable pin and the pin hole form the positioning mechanism.

9. The apparatus of claim 2, wherein the surface of the support arm and the surface of the fixture that contact the developer are provided with a protective material layer that is not reactive with the developer.

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