CN214252054U

CN214252054U - Optical detection device for curved surface detection

Info

Publication number: CN214252054U
Application number: CN202022865075.XU
Authority: CN
Inventors: 陈泳男; 郑钦源
Original assignee: Best Integration Technology Co ltd
Current assignee: Best Integration Technology Co ltd
Priority date: 2020-07-09
Filing date: 2020-12-03
Publication date: 2021-09-21
Anticipated expiration: 2030-12-03
Also published as: TWM605982U

Abstract

The application provides an optical detection device for curved surface detects, has the camera and is used for detecting the cambered surface of determinand, and optical detection device still contains: at least one light guide part is arc-shaped, and the inner surface of the light guide part defines a detection area; a plurality of partitions disposed at intervals on an outer surface of the light guide; and a plurality of light sources which are far away from the light guide piece and are respectively arranged among the clapboards; the camera receives the reflected light of the object to be detected in the detection area to obtain a detection result.

Description

Optical detection device for curved surface detection

Technical Field

The present application relates to an optical inspection apparatus, and more particularly, to an inspection apparatus for inspecting a curved surface of an object to be inspected.

Background

Automatic Optical Inspection (AOI) plays an important role in semiconductor manufacturing, and in order to avoid defects in subsequent manufactured products, automatic optical inspection is used for preliminary inspection in the semiconductor manufacturing process.

SUMMERY OF THE UTILITY MODEL

The present application is directed to an optical inspection device, and more particularly to an optical inspection device for curved surface inspection.

According to the purpose of the present application, an optical inspection apparatus is provided, which has a camera for inspecting the arc surface of an object to be inspected, and further comprises: at least one light guide part at least partially surrounds the curved surface, and the inner surface of the light guide part defines a detection area; a plurality of partition plates arranged on the outer surface of the light guide member at intervals; and the light sources are far away from the light guide piece and are respectively arranged between the two adjacent partition plates.

At least one part of the object to be detected is arranged in the detection area, the cambered surface to be detected of the object to be detected is provided with an extension shaft and a reference shaft perpendicular to the extension shaft, the camera defines an image taking shaft, and the included angle between the reference shaft and the image taking shaft is an acute angle.

The light source is visible light or invisible light, the light emitting direction of the light source is an optical axis, and the included angle between the optical axis and the image taking axis is between 0 degree and 150 degrees.

Preferably, the number of the at least one light guide member is two, and the open ends of the light guide members are opposite to form two openings.

Preferably, the surface of the partition board can be a light absorbing surface or a reflecting surface, and the light emitted by the light source can be concentrated.

Other features and embodiments of the present application will be described in detail below with reference to the drawings.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 is a schematic view of a first embodiment of the present application;

FIG. 2 is a schematic representation of the use of a first embodiment of the present application;

FIG. 3 is a schematic view of a second embodiment of the present application;

fig. 4 is a schematic diagram of a second embodiment of the present application.

Description of the symbols

A: an image taking axis B: reference axis C: extension shaft

D: light source plane E: imaging plane L: optical axis

10: light guide 11: detection area 20: partition board

30: light source 40: the camera 50: test object

Detailed Description

The positional relationship described in the following embodiments includes: the top, bottom, left and right, unless otherwise indicated, are based on the orientation of the elements in the drawings.

Referring to fig. 1 to 2, an optical inspection apparatus is shown, including a light guide 10, the light guide 10 being arc-shaped, the light guide 10 being C-shaped and having an inner surface defining an inspection area 11, a plurality of partitions 20 being disposed along an outer surface of the light guide 10 at equal angular intervals, a plurality of light sources 30 being far from the light guide 10 and being respectively disposed between two adjacent partitions 20, so that the light sources 30 can emit light toward the light guide 10, and a camera 40 for receiving light reflected by the light sources 30 reaching a surface of an object 50 to be inspected after passing through the light guide 10, so as to obtain an image of the surface of the object 50 to be inspected. Because the light guide member 10 has the function of scattering or diffusing light, the light entering the detection area 11 can be uniformly distributed, and therefore, the light can be uniformly irradiated on the arc curved surface of the object to be detected, the definition of the image shot by the camera 40 is improved, and whether the surface has flaws or not can be known.

The light guide 10 is a single component integrally formed in this embodiment, and may be changed to be formed by assembling a plurality of light guide units, if necessary, and the light guide 10 may be regarded as an equivalent structure regardless of the material or structure as long as the function of light scattering or diffusion can be achieved. The light guide unit may be connected to the connection spacer 20 and the light source 30 to form a lighting module.

In the present embodiment, each light source 30 may be a color light, a white light or an invisible light with different wavelengths, the surface of the partition boards 20 may be a light absorbing surface or a reflecting surface, and the partition boards 20 are arranged two by two at intervals to concentrate the light and enhance the light irradiation intensity, and also to prevent the color lights of the light sources 30 from affecting each other. In addition, a person skilled in the art can turn on the light sources 30 individually, sequentially or all at the same time as required according to the change of the curved surface angle of the object 50. It should be noted that the partition boards 20 have the effect of blocking two adjacent light beams from affecting each other before the light guide 10, and other embodiments are not limited thereto, and any shape, material or method may be adopted.

In this embodiment, the detection region 11 is substantially cylindrical, the to-be-detected portion of the object 50 is disposed in the detection region 11, and the light guide 10 can receive the light from the light source 30 and transmit the light to the detection region 11, so that the light can be uniformly distributed on the surface of the object 50. Therefore, the object 50 can be in a shape of a circular tube, a circular disk, or any shape with a circular edge. The camera 40 is arranged to receive light reflected from the test object 50.

Referring to fig. 2, the specific positions of the object 50 to be measured, the light guide 10 and the camera 40 are determined, the object 50 to be measured is cylindrical, so that the arc surface to be measured has an extension axis C (i.e. the axis of the cylinder), a reference axis B is defined to be perpendicular to the extension axis C, and the lens direction of the camera 40 is defined as an imaging axis a, so that an included angle θ 2 between the reference axis B and the imaging axis a is an acute angle. The light-emitting directions of the light sources 30 are coplanar and define a light source plane D intersecting the extension axis C, and an included angle θ 1 between the light source plane D and the reference axis B is an acute angle. A person skilled in the art can set the extension axis C and the reference axis B according to the appearance or the side to be tested of the object 50, and fine-tune θ 1 and θ 2 to make the lens direction of the camera 40 fine-tune the arc surface facing the object.

Referring to fig. 3 to 4, a second embodiment of the present application is shown, wherein an inner surface of two light guide members 10 defines a detection area 11, an open end of the light guide members 10 is far away from the detection area to form two openings, the openings are located on the same axis (image capturing axis a), and the camera 40 is disposed at one side of one of the openings, furthermore, a person skilled in the art can adjust the number and the disposition position of the light guide members 10 as required, when the light source 30 blocks the viewing angle of the camera 40, the light source 30 can be removed, at this time, the light emitting directions of the camera 40 and the light sources 30 are substantially located on the same plane, the image capturing axis a of the camera 40 faces the surface of the object 50 to be tested, and an image capturing plane E perpendicular to the image capturing axis a is defined, wherein the light emitting direction of each light source 30 is an optical axis L, and an included angle between 0 degree and 150 degrees is formed between the optical axis L and the image capturing axis a, furthermore, the optical axis L and the image capturing axis a may be between 80 degrees and 150 degrees to detect the arc curved surface of the object to be detected, so as to know whether the surface has defects. In other embodiments, the number of the light guide members 10 is two or more, but the implementation is not limited thereto, and any shape, material or method may be used.

In the second embodiment, the included angles between the optical axes of all the light sources 30 and the image capturing axis a are between 0 degree and 150 degrees.

The above-described embodiments and/or implementations are only for illustrating the preferred embodiments and/or implementations of the technology of the present application, and are not intended to limit the implementations of the technology of the present application in any way, and those skilled in the art can make modifications or changes to other equivalent embodiments without departing from the scope of the technology disclosed in the present application, but should be construed as technology or implementations substantially the same as the present application.

Claims

1. An optical inspection apparatus for inspecting a curved surface, having a camera for inspecting a curved surface of an object to be inspected, the optical inspection apparatus further comprising:

at least one light guide part at least partially surrounds the curved surface, has the function of scattering or diffusing light, and has an inner surface defining a detection area;

a plurality of partition plates arranged on the outer surface of the light guide member at intervals; and

and the light sources are far away from the light guide piece and are respectively arranged between the two adjacent partition plates.

2. The optical inspection apparatus of claim 1, wherein the inspection area houses at least a portion of the object, the curved surface of the object has an extension axis and a reference axis perpendicular to the extension axis, the camera defines an imaging axis, and an included angle between the reference axis and the imaging axis is an acute angle.

3. The optical inspection apparatus according to claim 1, wherein the camera defines an image capturing axis, the light sources emit light in a plurality of directions, and the included angles between the light axes and the image capturing axis are between 0 degree and 150 degrees.

4. The optical inspection device of claim 1, wherein the light sources define a light source plane, the curved surface of the object has an extending axis and a reference axis perpendicular to the extending axis, and the reference axis forms an acute angle with the light source plane.

5. The optical inspection device for curved surface inspection according to any one of claims 1 to 4, wherein the light sources are visible light or invisible light.

6. The optical inspection device for curved surface inspection according to any one of claims 1 to 4, wherein the partition surfaces are light-absorbing surfaces or reflecting surfaces.

7. An optical inspection apparatus according to any one of claims 1 to 4, wherein at least one of the light sources is illuminated during inspection.

8. The apparatus according to any one of claims 1 to 4, wherein the at least one light guide member is formed by assembling a plurality of light guide units.

9. The optical inspection device according to claim 8, wherein each light guiding unit is connected to one of the partitions and one of the light sources to form an illumination module.