CN214123834U

CN214123834U - Novel mass spectrum chamber structure of helium mass spectrum leak detector

Info

Publication number: CN214123834U
Application number: CN202023069010.0U
Authority: CN
Inventors: 张冲
Original assignee: Anhui Hangrong Information Technology Co ltd
Current assignee: Anhui Hangrong Information Technology Co ltd
Priority date: 2020-12-18
Filing date: 2020-12-18
Publication date: 2021-09-03
Anticipated expiration: 2030-12-18

Abstract

The utility model discloses a novel mass spectrum room structure of helium mass spectrum leak detector, including cavity, baffle, connecting pipe, the baffle sets up inside the cavity, will ionization chamber and mass spectrum chamber are split into to the cavity, the connecting pipe sets up the cavity is outside, its axial lead with cavity length direction has certain contained angle, the one end of connecting pipe with ionization chamber intercommunication, the other end and molecular pump intercommunication. The utility model adopts a brand new assembly structure to deflect the butt joint interface of the mass spectrum chamber and the molecular pump at a certain angle; the overall length size of the mass spectrum chamber and the connecting pipe is shortened, namely the mechanical force arm of the mass spectrum chamber is shortened, and meanwhile, the mass spectrum process is not negatively influenced; the vibration caused by the molecular pump is effectively reduced by the principle of shortening the mechanical arm of force, the molecular pump is effectively protected, and the service life of the molecular pump is prolonged; and the accuracy of the detected data is improved due to the reduction of the vibration.

Description

Novel mass spectrum chamber structure of helium mass spectrum leak detector

Technical Field

The utility model relates to a vacuum leak hunting technical field, concretely relates to novel mass spectrum room structure of helium mass spectrum leak detector.

Background

The helium mass spectrometer leak detector is a special leak detector which uses helium as leak-indicating gas according to the mass spectrometry principle, and has the characteristics of stable performance, high sensitivity and high accuracy. Helium mass spectrometer leak detection tests are currently the most effective means for leak testing.

The helium mass spectrometer mainly comprises a vacuum system, an ion source, a mass spectrum chamber, an electronic circuit, an electric system and the like. The mass spectrum chamber is used as one of important components of the helium mass spectrum leak detector, and the components of the mass spectrum chamber comprise a cavity, a square flange, a conical cylinder, a partition plate, a connecting pipe, a circular flange, a magnet mounting screw and the like.

And the partition plate welded inside the cavity of the mass spectrum chamber divides the mass spectrum chamber into an ionization cavity and a mass spectrum cavity. When the instrument works, electrons emitted by the ion source oscillate back and forth in the ionization cavity, collide with gas in the mass spectrum chamber and helium gas entering the ionization cavity through the leakage hole of the detected piece to ionize the gas into positive ions, the ions enter a magnetic field under the action of an accelerating electric field, and deflect due to the action of Lorentz force to form an arc-shaped track. Ions of different masses are detected by passing through the magnetic field and the receiving slit to the receiving pole of the mass spectrometry cavity.

The mass spectrum chamber of the existing leak detector is all installed in a linear mode, a connecting pipe device of the mass spectrum chamber is arranged on the side face of the cavity, and the size is long after the mass spectrum chamber is combined. The other end of the mass spectrum chamber connecting pipe needs to be in butt joint with the molecular pump, the molecular pump can generate vibration when in operation, the mass spectrum chamber with a longer size is particularly sensitive to vibration and even can generate a resonance phenomenon, the molecular pump is further damaged, the molecular pump is used as a high-precision component, the cost is high, and once the molecular pump is damaged, great loss is caused. Therefore, a novel mass spectrum chamber structure of the helium mass spectrum leak detector is provided.

SUMMERY OF THE UTILITY MODEL

The utility model discloses the technical problem that will solve lies in: how to solve the very sensitive to vibrations that exists of the installation of current mass spectrum room linear type, can produce resonance phenomenon scheduling problem even, provide a novel mass spectrum room structure of helium mass spectrum leak detector.

The utility model discloses a solve above-mentioned technical problem through following technical scheme, the utility model discloses a cavity, baffle, connecting pipe, the baffle sets up inside the cavity, will ionization chamber and mass spectrum chamber are split into to the cavity, the connecting pipe sets up the cavity is outside, its axial lead with cavity length direction has certain contained angle, the one end of connecting pipe with ionization chamber intercommunication, the other end and molecular pump intercommunication.

Preferably, the partition plate is provided with a reserved hole for communicating the ionization cavity with the mass spectrum cavity.

Preferably, the novel mass spectrometry chamber structure further comprises a square flange disposed on the cavity.

Preferably, the square flange is provided with two mounting holes, and the two mounting holes are respectively connected with the mass spectrum amplifier and the ion source.

Preferably, the novel mass spectrometer chamber structure further comprises a circular flange, and the circular flange is arranged at the end part of the connecting pipe and the molecular pump.

Preferably, an included angle between an axial line of the connecting pipe and the length direction of the cavity is 90 degrees.

Compared with the prior art, the utility model has the following advantages: a brand new assembly structure is adopted, and the mass spectrum chamber and the butt joint interface of the molecular pump are deflected at a certain angle; the overall length size of the mass spectrum chamber and the connecting pipe is shortened, namely the mechanical force arm of the mass spectrum chamber is shortened, and meanwhile, the mass spectrum process is not negatively influenced; the vibration caused by the molecular pump is effectively reduced by the principle of shortening the mechanical arm of force, the molecular pump is effectively protected, and the service life of the molecular pump is prolonged; and the accuracy of the detected data is improved due to the reduction of the vibration.

Drawings

FIG. 1 is a schematic diagram of a conventional linear-mount mass spectrometry chamber;

FIG. 2 is a schematic diagram of an embodiment of the present invention showing the combination of an L-shaped mass spectrometer chamber and a molecular pump;

fig. 3 is a schematic structural diagram of an L-shaped mass spectrometer chamber according to an embodiment of the present invention.

In the figure: 1. a conventional mass spectrometry chamber; 2. a molecular pump, a 3-type mass spectrum chamber; 301. a square flange; 302. a cavity; 303. a partition plate; 304. a connecting pipe; 305. a circular flange.

Detailed Description

The embodiments of the present invention will be described in detail below, and the present embodiment is implemented on the premise of the technical solution of the present invention, and a detailed implementation manner and a specific operation process are given, but the scope of the present invention is not limited to the following embodiments.

As shown in fig. 2 to 3, the present embodiment provides an L-shaped mass spectrometer chamber 3, which includes a square flange 301, a cavity 302, a partition 303, a connecting pipe 304, and a circular flange 305.

The main technical characteristics of the square flange 301 are as follows: the ion source is made of stainless steel, and two mounting holes are reserved for butt joint of the mass spectrum amplifier and the ion source respectively.

The main technical features of the cavity 302 are as follows: the stainless steel is adopted for manufacturing, and is fixedly connected with the square flange 301 through a metal welding process, so that space is provided for a mass spectrum process.

The partition plate 303 is mainly technically characterized in that: the gas ionization detector is made of stainless steel materials, and is fixedly connected with the square flange 301 and the cavity 302 through a metal welding process, the cavity 302 is divided into an ionization cavity and a mass spectrum cavity, a small hole is formed in the partition plate 303, gas molecules are ionized in the ionization cavity and then enter the mass spectrum cavity through the small hole, and ions are detected in the mass spectrum cavity.

The main technical features of the connecting pipe 304 are as follows: the mass spectrometer is made of stainless steel, is fixedly connected with the cavity 303 through a metal welding process, serves as a pipeline through which gas molecules pass, and bears the weight of the mass spectrometer chamber.

The circular flange 305 has the main technical characteristics that: the mass spectrometer is made of stainless steel, is integrally processed and molded with the connecting pipe 304, and is connected with the molecular pump in a screw connection mode to bear the weight of the mass spectrometer chamber.

The working principle is as follows: the total length of the connecting pipe 304 and the cavity 302 is equivalent to the length of a mechanical arm in the vibration process, and the vibration is effectively reduced by utilizing the principle that the length of the arm is inversely proportional to the vibration intensity, so that the expensive molecular pump is protected.

To sum up, the utility model adopts a brand new assembly structure to deflect the butt joint interface of the mass spectrum chamber and the molecular pump at a certain angle; the overall length size of the mass spectrum chamber and the connecting pipe is shortened, namely the mechanical force arm of the mass spectrum chamber is shortened, and meanwhile, the mass spectrum process is not negatively influenced; the vibration caused by the molecular pump is effectively reduced by the principle of shortening the mechanical arm of force, the molecular pump is effectively protected, and the service life of the molecular pump is prolonged; and the accuracy of the detected data is improved due to the reduction of the vibration.

Although embodiments of the present invention have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.

Claims

1. A novel mass spectrum chamber structure of helium mass spectrum leak detector, its characterized in that: including cavity, baffle, connecting pipe, the baffle sets up inside the cavity, will ionization chamber and mass spectrum chamber are cut apart into to the cavity, the connecting pipe sets up the cavity is outside, its axial line with cavity length direction has certain contained angle, the one end of connecting pipe with ionization chamber intercommunication, the other end and molecular pump intercommunication.

2. The novel mass spectrometer chamber structure of a helium mass spectrometer leak detector as claimed in claim 1, wherein: and a preformed hole for communicating the ionization cavity with the mass spectrum cavity is formed in the partition plate.

3. The novel mass spectrometer chamber structure of a helium mass spectrometer leak detector as claimed in claim 2, wherein: the novel mass spectrometry chamber structure further comprises a square flange disposed on the cavity.

4. The novel mass spectrometer chamber structure of a helium mass spectrometer leak detector as claimed in claim 3, wherein: the square flange is provided with two mounting holes, and the two mounting holes are respectively connected with the mass spectrum amplifier and the ion source.

5. The novel mass spectrometer chamber structure of a helium mass spectrometer leak detector as claimed in claim 4, wherein: the novel mass spectrum chamber structure further comprises a circular flange, and the circular flange is arranged at the end part of the connecting pipe and the molecular pump.

6. The novel mass spectrometer chamber structure of a helium mass spectrometer leak detector as claimed in claim 5, wherein: the included angle between the axial line of the connecting pipe and the length direction of the cavity is 90 degrees.