CN213957609U - On-chip soliton frequency comb-based laser scanning device without mechanical scanning - Google Patents
On-chip soliton frequency comb-based laser scanning device without mechanical scanning Download PDFInfo
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- CN213957609U CN213957609U CN202022636469.8U CN202022636469U CN213957609U CN 213957609 U CN213957609 U CN 213957609U CN 202022636469 U CN202022636469 U CN 202022636469U CN 213957609 U CN213957609 U CN 213957609U
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Abstract
The utility model relates to a laser scanning device and method of no mechanical scanning based on soliton comb frequently on piece. The laser scanning device comprises a broadband laser, an arbitrary signal generator, an electro-optic phase modulator, a core frequency comb chip and a two-dimensional optical phased array chip; the output end of the broadband laser is connected with the light source input port of the electro-optic phase modulator, and the output port of any signal generator is connected with the microwave signal input port of the electro-optic phase modulator; the waveform output port of the electro-optical phase modulator is connected with the input port of the core frequency comb chip, and the output port of the core frequency comb chip is connected with the input port of the two-dimensional optical phased array chip. The utility model discloses utilize frequency modulation continuous wave coherent ranging principle, produce parallel multichannel light source through comb chip frequently, combine optics phased array and grating to realize that two-dimentional is not had mechanical scanning, adopt the mode of area array light scanning, scanning speed is faster, and efficiency is higher, and detection distance is farther.
Description
Technical Field
The utility model belongs to the technical field of photoelectricity, more specifically relates to a laser scanning device of no mechanical scanning based on-chip soliton comb frequently.
Background
At present, the scanning device for the vehicle-mounted laser radar mainly includes Mechanical, Micro-Electro-Mechanical System (MEMS), phase control type and Flash type beam deflection control technologies. The mechanical laser radar scanning device is installed on the roof of a vehicle and rotates at a certain speed, and the scanning speed is slow due to the large mechanical inertia of the method for controlling the light beam by using the rotating polygonal mirror. The MEMS micro-mirror is improved on the basis of mechanical type, all mechanical parts are integrated on a single chip, the MEMS micro-mirror is produced by utilizing a semiconductor process, a mechanical rotating motor is not needed, a light beam is controlled in an electric mode, and the micro-oscillation of the MEMS micro-mirror limits the scanning speed. The phase control type laser radar device has no vibration part, has the advantages of high scanning speed, high precision, good controllability and low cost, and discloses an optical phase control array two-dimensional laser radar scanning chip based on polarization service, for example, patent CN110174661A, published as 2019.08.27. At present, vehicle-mounted laser radars based on mechanical type, micro-electromechanical system micro-mirrors and phase control type scanning devices adopt a time flight ranging principle, and the laser radars based on the time flight principle map distance information to delay of reflected laser pulses in a point-by-point scanning mode. Although the phase-control type vehicle-mounted laser radar realizes no mechanical scanning, the point-by-point scanning mode limits the radar ranging speed, and meanwhile, the laser radar based on flight time is easily interfered under the conditions of low visibility and high background light.
SUMMERY OF THE UTILITY MODEL
The utility model discloses an overcome at least one defect among the above-mentioned prior art, provide a laser scanning device of no mechanical scanning based on-chip soliton comb frequently, effectively improved scanning speed and scanning efficiency.
In order to solve the technical problem, the utility model discloses a technical scheme is: a laser scanning device without mechanical scanning based on-chip soliton frequency comb comprises a broadband laser, an arbitrary signal generator, an electro-optic phase modulator, a core frequency comb chip and a two-dimensional optical phased array chip; the output end of the broadband laser is connected with the light source input port of the electro-optic phase modulator, and the output port of the arbitrary signal generator is connected with the microwave signal input port of the electro-optic phase modulator; the waveform output port of the electro-optical phase modulator is connected with the input port of the core frequency comb chip, and the output port of the core frequency comb chip is connected with the input port of the two-dimensional optical phased array chip. Laser generated by a broadband laser and a triangular wave linear frequency modulation signal generated by an arbitrary signal generator are input to a photoelectric phase modulator to generate a laser signal with frequency chirp; the chirped laser signal modulated by the photoelectric phase modulator is coupled to the core frequency comb chip through the optical coupler; the core frequency comb chip can generate dissipative Kerr solitons, and a series of equally-spaced comb teeth on a frequency domain are generated under the action of nonlinear frequency conversion in the micro-ring resonant cavity to form a plurality of coherent channel optical frequency combs; and then coupling a plurality of coherent channel light sources into the two-dimensional optical phased array chip through the coupler, and realizing the two-dimensional deflection control of the light beam through a grating antenna on the two-dimensional optical phased array chip.
The utility model discloses utilize frequency modulation continuous wave coherent ranging principle, comb the chip through last soliton frequently and produce parallel multichannel light source, combine optics phased array and grating to realize that two-dimentional does not have mechanical scanning, compare with current on-vehicle laser radar range finding scanning technique, the utility model discloses a mode of area array light scanning, scanning speed is faster, and efficiency is higher, and detection distance is farther.
In one embodiment, the two-dimensional optical phased array chip comprises a coupler, a beam splitter, a two-dimensional optical phased array on a silicon substrate and a grating antenna; the input port of the coupler is connected with the output port of the core frequency comb chip, the output port of the coupler is connected with the input port of the beam splitter, the output port of the beam splitter is connected with the input port of the two-dimensional optical phased array on the silicon substrate, and the output port of the two-dimensional optical phased array on the silicon substrate is connected with the grating antenna. A coherent channel light source generated by the core frequency comb chip is incident to the two-dimensional optical phased array chip through a coupler, and meanwhile, the incident light coupled into the two-dimensional optical phased array chip is divided into multiple paths of input light through a beam splitter and input to the two-dimensional optical phased array on the silicon substrate; the two-dimensional optical phased array on the silicon substrate carries out independent phase modulation on each path of input light through a thermo-optic effect, changes the phase of light in the waveguide, changes the turning direction of light beams, and finally emits emergent light through a plurality of paths of spaced grating antennas which are not uniformly distributed.
In one embodiment, the core frequency comb chip comprises a substrate, a micro-ring resonant cavity and a straight waveguide, wherein the micro-ring resonant cavity and the straight waveguide are arranged on the top of the substrate, and the micro-ring resonant cavity is coupled with the straight waveguide. The chirped laser signal modulated by the photoelectric phase modulator is coupled to the core frequency comb chip through the optical coupler; the core frequency comb chip can generate dissipative Kerr solitons, and a series of equally-spaced comb teeth on a frequency domain are generated under the action of nonlinear frequency conversion in the micro-ring resonant cavity to form a plurality of coherent channel optical frequency combs.
The parallel multichannel light source is generated based on Kerr nonlinear on-chip micro-cavity soliton optical frequency comb of micro-cavity medium. The microcavity optical frequency comb generation process: laser emitted by a beam of continuous light laser is coupled into the microcavity, and a series of equally spaced comb teeth on the frequency domain are generated under the action of nonlinear frequency conversion in the microcavity. In this process, degenerate four-wave mixing first produces some sidebands around the pump frequency, then degenerate and non-degenerate four-wave mixing work together to produce more sidebands, and finally cascade to fill each resonant frequency in a range around the pump frequency to form an optical frequency comb. The dissipative solitons are generated by continuous circulating pulses in the integrated silicon nitride micro-ring resonant cavity through Kerr nonlinear-mediated four-photon interaction, and the dissipative soliton spectral line has good coherence and stable envelope and is suitable for being applied to frequency-modulated continuous wave coherent detection of a vehicle-mounted laser radar. This effect, when used in conjunction with triangular frequency modulation of narrow linewidth pump lasers, produces a massively parallel array of independent FMCW lasers.
In one embodiment, the core layer material of the micro-ring resonant cavity is silicon nitride; the micro-ring radius of the micro-ring resonant cavity is 50 um-200 um; the frequency comb frequency output by the core frequency comb chip is 190THz-200 THz. Thus, the core comb chip can provide at least 90 coherent light source channels.
In one embodiment, the electro-optical phase modulator is coupled with the core comb chip through a coupler.
In one embodiment, the core frequency comb chip can generate dissipative kerr solitons, and a series of equally spaced comb teeth on a frequency domain are generated under the action of nonlinear frequency conversion in the micro-ring resonant cavity to form a plurality of coherent channel optical frequency combs.
In one embodiment, the center wavelength of the laser light generated by the broadband laser is 1100 nm-1600 nm.
In one embodiment, the arbitrary signal generator emits a triangular wave chirp signal with a bandwidth of 1GHz to 5GHz and a modulation rate of 100kHz to 10 MHz.
In one embodiment, the beam splitter is a star beam splitter; the grating antenna is a multi-path interval grating antenna which is distributed unevenly.
The laser scanning device without mechanical scanning based on the on-chip soliton frequency comb specifically comprises the following steps:
laser generated by a broadband laser and a triangular wave linear frequency modulation signal generated by an arbitrary signal generator are input to a photoelectric phase modulator to generate a laser signal with frequency chirp;
the chirped laser signal modulated by the photoelectric phase modulator is coupled to the core frequency comb chip through the optical coupler;
the core frequency comb chip generates dissipative Kerr solitons, and under the action of nonlinear frequency conversion in the micro-ring resonant cavity, a series of equally spaced comb teeth on a frequency domain are generated to form a plurality of coherent channel optical frequency combs, namely a plurality of coherent channel light sources are generated;
a coherent channel light source is incident to the two-dimensional optical phased array chip through a coupler, and simultaneously, the incident light coupled into the two-dimensional optical phased array chip is divided into multiple paths of input light through a beam splitter and input to the two-dimensional optical phased array on the silicon substrate;
the two-dimensional optical phased array on the silicon substrate carries out independent phase modulation on each path of input light through a thermo-optic effect, and finally, the emergent light is emitted through a plurality of paths of spaced grating antennas which are distributed unevenly.
Compared with the prior art, the beneficial effects are:
1. the utility model provides a laser scanning device who does not have mechanical scanning based on soliton comb frequently on piece has solved the shortcoming that current vehicle-mounted laser radar mechanical scanning system exists mechanical inertia, measuring speed is slow, scanning accuracy is low, can satisfy the actual demand to scanning speed in high-level autopilot vehicle-mounted laser radar application;
2. the utility model provides a pair of laser scanning device that does not have mechanical scanning based on soliton comb frequently on piece, through soliton optical frequency comb chip production parallel multichannel light source on the piece, can generate area array light and carry out two-dimentional no mechanical scanning in practical application, compare in scanning phase control type radar point by point, adopt area array light to carry out the range finding and improved scanning efficiency, can respond quick changeable complex environment more quickly;
3. the utility model provides a pair of laser scanning device of no mechanical scanning based on soliton comb frequently on piece produces parallel multichannel light source through soliton optical frequency comb chip on the piece, compares in adopting vertical cavity surface emitting laser Flash type laser radar, has improved detection distance, can survey the target under the distance far away, increases the reply time to the barrier.
Drawings
Fig. 1 is a schematic view of a connection structure of the laser scanning device of the present invention.
Fig. 2 is the structural schematic diagram of the two-dimensional optical phased array chip of the present invention.
Fig. 3 is a schematic diagram of the core comb chip structure of the present invention.
Fig. 4 is a schematic diagram illustrating the principle of coherent ranging using frequency modulated continuous waves according to the present invention.
Fig. 5 is a schematic diagram of the working principle of the optical phased array adopted by the present invention.
Fig. 6 is a schematic view of the working principle of the diffraction grating adopted by the present invention.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the invention; for the purpose of better illustrating the embodiments, certain features of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted. The positional relationships depicted in the drawings are for illustrative purposes only and are not to be construed as limiting the invention.
As shown in fig. 1, a laser scanning device without mechanical scanning based on-chip soliton frequency comb comprises a broadband laser 1, an arbitrary signal generator 2, an electro-optical phase modulator 3, a core frequency comb chip 4 and a two-dimensional optical phased array chip 5; the output end of the broadband laser 1 is connected with the light source input port of the electro-optic phase modulator 3, and the output port of the arbitrary signal generator 2 is connected with the microwave signal input port of the electro-optic phase modulator 3; the waveform output port of the electro-optical phase modulator 3 is connected with the input port of the core frequency comb chip 4 through a coupler 51; the output port of the core frequency comb chip 4 is coupled with the input port of the two-dimensional optical phased array chip 5. Laser generated by a broadband laser 1 and a triangular wave linear frequency modulation signal generated by an arbitrary signal generator 2 are input to an optoelectronic phase modulator to generate a laser signal with frequency chirp; the chirped laser signal modulated by the electro-optic phase modulator is coupled to the core comb chip 4 through the optical coupler 51; the core frequency comb chip 4 can generate dissipative kerr solitons, and under the action of nonlinear frequency conversion in the micro-ring resonant cavity 42, a series of equally spaced comb teeth on a frequency domain are generated to form a plurality of coherent channel optical frequency combs; and then a plurality of coherent channel light sources are coupled into the two-dimensional optical phased array chip 5 through the coupler 51, and the two-dimensional deflection control of the light beam is realized through the grating antenna 54 on the two-dimensional optical phased array chip 5.
The utility model discloses utilize frequency modulation continuous wave coherent ranging principle, comb the chip through last soliton frequently and produce parallel multichannel light source, combine optics phased array and grating to realize that two-dimentional does not have mechanical scanning, compare with current on-vehicle laser radar range finding scanning technique, the utility model discloses a mode of area array light scanning, scanning speed is faster, and efficiency is higher, and detection distance is farther.
Specifically, the principle of coherent ranging of frequency modulated continuous waves is that a signal is scanned and transmitted, and the time-frequency information of a returned signal is determined by delay homodyne detection. As shown in fig. 4, assuming triangular laser scanning is used, over an offset bandwidth B, a period T; the distance information (i.e., time of flight Δ t) maps to the beat note frequency, i.e.:
f ═ Δ T × 2B/T (for static objects)
Due to the relative velocity v of the object, the returning laser light is detected with a doppler shift:
Δf＝k·v/π
where k is the wavenumber and v is the velocity of the illuminated object. As a result, the homodyne return signal of the moving object consists of two frequencies for the up and down laser scanning, namely:
fu＝F+ΔfD fd＝|-F+ΔfD|
the distance s, velocity v of the measured object is then expressed as:
the reflected signals of the original comb teeth are subjected to zero treatment channel by using a low-bandwidth detector and a digitizer, coherent ranging signals can be recovered and reconstructed simultaneously, so that the offset of each comb line is obtained, and the speed and the distance (s offset and v offset) of each pixel are given.
In one embodiment, as shown in fig. 2, the two-dimensional optical phased array chip 5 includes a coupler 51, a beam splitter 52, a two-dimensional optical phased array 53 on a silicon substrate, and a grating antenna 54; an input port of the coupler 51 is connected with an output port of the core comb chip 4, an output port of the coupler 51 is connected with an input port of the beam splitter 52, an output port of the beam splitter 52 is connected with an input port of the two-dimensional optical phased array 53 on the silicon substrate, and an output port of the two-dimensional optical phased array 53 on the silicon substrate is connected with the grating antenna 54. A coherent channel light source generated by the core frequency comb chip 4 is incident to the two-dimensional optical phased array chip 5 through the coupler 51, and simultaneously, the incident light coupled into the two-dimensional optical phased array chip 5 is divided into multiple paths of input light through the beam splitter 52 and input into the two-dimensional optical phased array 53 on the silicon substrate; the two-dimensional optical phased array 53 on the silicon substrate performs independent phase modulation on each path of input light through a thermo-optic effect, changes the phase of light in the waveguide, changes the turning direction of light beams, and finally emits emergent light through a plurality of paths of interval grating antennas 54 which are non-uniformly distributed.
The optical phased array works on the principle that the phase relation among light waves emitted from all the phased units is adjusted, so that the light waves are subjected to constructive interference in a set direction and destructive interference in other directions, and the final result is that a high-intensity light beam is generated in the direction, and the light intensity is close to zero in other directions, so that the light beam deflection is realized. The schematic diagram is shown in fig. 5, where a beam of parallel light propagates in the positive Z-axis direction and the phase modulator is placed along the X-axis. When the phase modulation effect of the phase modulator on the incident light can be expressed as:
Δφ＝k sin(θ0)x
the incident light is modulated by the phase modulator to generate theta0Angular deflection, where k is the wavenumber. The optical waveguide phased array based on the thermo-optic effect changes the heating power through the thermo-optic effect, so that the effective refractive index of the waveguide is changed, the phase of light in the waveguide is changed, and the angular deflection of the direction is realized.
The working principle of the diffraction grating is shown in fig. 6. The grooves on the grating diffract the light beams, the light beams with different wavelengths are diffracted along different directions after passing through the grating due to the diffraction of the light, and the light diffracted by each groove generates mutual interference, so that the directions of the maximum values of the light interference with different wavelengths are different, and the spatial dispersion is generated. The distance between two adjacent grooves on the grating is d, an incident beam with the wavelength of lambda and the normal of the grating form an alpha angle for incidence, and a certain diffracted light and the normal form a beta angle. Before the incident light ray1 and ray2 of two adjacent grooves reaches the grating, the light ray2 has an optical path distance d sin alpha more, and the light ray1 has an optical path distance d sin beta more after being diffracted by the grating, so that the optical path difference of the diffracted light ray1 and ray2 is d (sin alpha-sin beta) after being diffracted by the grating. The diffracted light generates interference, and according to the interference principle, when the optical path difference is integral multiple of the wavelength, the enhancement effect is achieved. Therefore, the diffraction direction for light with wavelength λ should satisfy the equation:
d (sin α ± sin β) ═ m λ (m is a positive integer)
Wherein m is the diffraction order. If the diffracted light and the incident light are on the same side of the normal, the above formula takes the positive sign
In one embodiment, as shown in fig. 3, the core comb chip 4 includes a substrate 41, a micro-ring resonator 42 and a straight waveguide 43, the micro-ring resonator 42 and the straight waveguide 43 are disposed on the top of the substrate 41, and the micro-ring resonator 42 is coupled to the straight waveguide 43. The core frequency comb chip 4 can generate dissipative kerr solitons, and under the action of nonlinear frequency conversion in the micro-ring resonant cavity 42, a series of equally spaced comb teeth on a frequency domain are generated to form a plurality of coherent channel optical frequency combs. The core layer material of the micro-ring resonant cavity 42 is silicon nitride; the micro-ring radius of the micro-ring resonant cavity 42 is 50um to 200 um; the radius is taken to be 100um in this embodiment; the frequency comb output by the core frequency comb chip 4 is 190THz-200 THz. Thus, the core comb chip 4 can provide at least 90 coherent light source channels.
In another embodiment, the broadband laser 1 generates laser light having a center wavelength of 1100nm to 1600 nm. Any signal generator 2 sends out triangular wave linear frequency modulation signals, the bandwidth is 1GHz-5GHz, the modulation rate is 100kHz-10MHz, the bandwidth is 1.5GHz in the embodiment, and the modulation rate is 100 kHz.
In one embodiment, the beam splitter 52 is a star beam splitter 52 and is divided into 128 paths, the two-dimensional optical phased array 53 on the silicon substrate used in the method adopts 0.4um wide ridge waveguides, the grating antennas 54 used in the method are 128 paths of non-uniform distribution, weak coupling shallow grating etching is adopted to obtain smaller beam width, and the etching depth is 16 nm.
In another embodiment, the laser scanning device without mechanical scanning based on the on-chip soliton frequency comb is used, and the specific scanning method thereof comprises the following steps:
the broadband laser 1 generates laser with the central wavelength of 1100 nm-1600 nm and triangular wave linear frequency modulation signals generated by the arbitrary signal generator 2, and the laser and the triangular wave linear frequency modulation signals are input into the photoelectric phase modulator to generate laser signals with frequency chirp;
the chirped laser signal modulated by the electro-optic phase modulator is coupled to the core comb chip 4 through the optical coupler 51;
the core frequency comb chip 4 generates dissipative kerr solitons, and under the action of nonlinear frequency conversion in the micro-ring resonant cavity 42, a series of equally spaced comb teeth on a frequency domain are generated to form a plurality of coherent channel optical frequency combs, namely at least 90 coherent channel light sources are generated;
a coherent channel light source is incident to the two-dimensional optical phased array chip 5 through the coupler 51, and simultaneously, the incident light coupled into the two-dimensional optical phased array chip 5 is divided into 128 paths of input light through the beam splitter 52 and input to the two-dimensional optical phased array 53 on the silicon substrate;
the two-dimensional optical phased array 53 on the silicon substrate performs independent phase modulation on each path of input light through a thermo-optic effect, and finally emits emergent light through 128 paths of interval grating antennas 54 which are distributed unevenly.
The scanning range of 80 degrees is realized in the direction vertical to the waveguide 43, the scanning range of 17 degrees is realized in the direction along the waveguide, 500 multiplied by 90 distinguishable scanning points can be realized in a far-field two-dimensional plane by the light beam width of 0.14 degrees multiplied by 0.14 degrees, and the scanning device can be applied to the ranging work of the vehicle-mounted laser radar to realize two-dimensional mechanical-free scanning.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.
It is obvious that the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not limitations to the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A laser scanning device without mechanical scanning based on-chip soliton frequency comb is characterized by comprising a broadband laser (1), an arbitrary signal generator (2), an electro-optical phase modulator (3), a core frequency comb chip (4) and a two-dimensional optical phased array chip (5); the output end of the broadband laser (1) is connected with the light source input port of the electro-optic phase modulator (3), and the output port of the arbitrary signal generator (2) is connected with the microwave signal input port of the electro-optic phase modulator (3); the waveform output port of the electro-optic phase modulator (3) is connected with the input port of the core frequency comb chip (4), and the output port of the core frequency comb chip (4) is connected with the input port of the two-dimensional optical phased array chip (5).
2. The on-chip soliton frequency comb based mechanical scanning free laser scanning device according to claim 1, wherein the two-dimensional optical phased array chip (5) comprises a coupler (51), a beam splitter (52), a two-dimensional optical phased array (53) on a silicon substrate, and a grating antenna (54); the input port of the coupler (51) is connected with the output port of the core frequency comb chip (4), the output port of the coupler (51) is connected with the input port of the beam splitter (52), the output port of the beam splitter (52) is connected with the input port of the two-dimensional optical phased array (53) on the silicon substrate, and the output port of the two-dimensional optical phased array (53) on the silicon substrate is connected with the grating antenna (54).
3. The on-chip soliton frequency comb-based mechanical scanning-free laser scanning device according to claim 2, wherein the core frequency comb chip (4) comprises a substrate (41), a micro-ring resonator (42) and a straight waveguide (43), the micro-ring resonator (42) and the straight waveguide (43) are disposed on the top of the substrate (41), and the micro-ring resonator (42) is coupled to the straight waveguide (43).
4. The on-chip soliton frequency comb-based mechanical scanning-free laser scanning device according to claim 3, wherein the core material of the micro-ring resonator (42) is silicon nitride.
5. The on-chip soliton frequency comb-based mechanical scanning-free laser scanning device according to claim 4, wherein the micro-ring radius of the micro-ring resonant cavity (42) is 50um to 200 um; the frequency of the output frequency comb of the core frequency comb chip (4) is 190THz-200 THz.
6. The on-chip soliton frequency comb based laser scanning device without mechanical scanning according to any of claims 3 to 5, characterized in that the electro-optical phase modulator (3) is coupled to the core frequency comb chip (4) through a coupler (51).
7. The on-chip soliton frequency comb-based mechanical scanning-free laser scanning device according to claim 6, wherein the core frequency comb chip (4) is capable of generating dissipative kerr solitons to generate a series of equally spaced comb teeth in a frequency domain under the action of nonlinear frequency conversion in the micro-ring resonator (42) to form a plurality of coherent channel optical frequency combs.
8. The on-chip soliton frequency comb-based mechanical scanning-free laser scanning device according to claim 6, wherein the center wavelength of the laser generated by the broadband laser (1) is 1100nm to 1600 nm.
9. The on-chip soliton frequency comb based laser scanning device without mechanical scanning according to claim 6, wherein the arbitrary signal generator (2) emits triangular wave chirp signal with bandwidth of 1GHz-5GHz and modulation rate of 100kHz-10 MHz.
10. The on-chip soliton frequency comb based laser scanning device without mechanical scanning according to claim 6, wherein the beam splitter (52) is a star beam splitter (52); the grating antenna (54) is a multi-path interval grating antenna (54) which is distributed unevenly.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114609724A (en) * | 2022-02-25 | 2022-06-10 | 浙江大学 | Multi-beam parallel scanning chip based on integrated optical frequency comb |
| WO2023027104A1 (en) * | 2021-08-25 | 2023-03-02 | 国立大学法人電気通信大学 | Wavefront control device and adaptive optics device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023027104A1 (en) * | 2021-08-25 | 2023-03-02 | 国立大学法人電気通信大学 | Wavefront control device and adaptive optics device |
| CN114609724A (en) * | 2022-02-25 | 2022-06-10 | 浙江大学 | Multi-beam parallel scanning chip based on integrated optical frequency comb |
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