CN213957174U - Automatic detection device for large-caliber polyhedral optical surface defects - Google Patents
Automatic detection device for large-caliber polyhedral optical surface defects Download PDFInfo
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- CN213957174U CN213957174U CN202022246436.2U CN202022246436U CN213957174U CN 213957174 U CN213957174 U CN 213957174U CN 202022246436 U CN202022246436 U CN 202022246436U CN 213957174 U CN213957174 U CN 213957174U
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Abstract
The utility model discloses an automatic detection device of heavy-calibre polyhedron optical surface flaw, including the platform base, slide and set up load-in on the platform base and carry out shift table and portable detecting element mounting bracket, lateral sliding sets up the lateral slide on portable detecting element mounting bracket, vertical slide sets up the vertical slide on lateral slide, be fixed in the angle revolving stage on the vertical slide, the modularization detecting element who is connected with the angle revolving stage, fixed connection carries out horizontal revolving stage and the heavy-calibre polyhedron optical element clamping device on the shift table in the load-in. The utility model discloses the longitudinal movement of portable detecting element mounting bracket realizes focusing of the component that awaits measuring, makes modularization detecting element's probe towards the optical surface that awaits measuring through angle revolving stage, horizontal rotating stage, through the removal of transverse sliding plate and vertical slide, realizes modularization detecting element two-dimensional scanning and detects, utilizes the machine to detect and replaces the manual work, increases substantially detection efficiency and detection precision.
Description
Technical Field
The utility model relates to an optical element detection area specifically is a heavy-calibre polyhedron optical surface flaw automatic checkout device.
Background
The traditional detection method for optical elements is mainly a visual method, the defects are observed visually or by means of auxiliary tools, the defects are in bright images or dark images by different methods, the visual method is greatly influenced by the proficiency of detection workers, subjectivity is high, human eye fatigue can be caused by long-term detection, and quantitative evaluation of defect information is not easy to give.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide an automatic detection device of heavy-calibre polyhedron optical surface flaw utilizes the machine to detect and replaces the manual work, increases substantially detection efficiency and detection precision.
The technical scheme of the utility model is that:
an automatic detection device for optical surface defects of large-caliber polyhedrons comprises a platform base, a transverse guide rail and a longitudinal guide rail which are arranged on the upper end surface of the platform base, a loading and unloading movable workbench which is arranged on the transverse guide rail in a sliding manner, a movable detection unit mounting frame which is arranged on the longitudinal guide rail in a sliding manner, a transverse detection guide rail which is arranged on the movable detection unit mounting frame, a transverse sliding plate which is arranged on the transverse detection guide rail in a sliding manner, a vertical guide rail which is arranged on the transverse sliding plate, a vertical sliding plate which is arranged on the vertical guide rail in a sliding manner, an angle rotating table which is fixed on the vertical surface of the vertical sliding plate, a modularized detection unit which is connected with the angle rotating table, a horizontal rotating table which is fixed on the loading and unloading movable workbench, and a large-caliber polyhedral optical element clamping device which is connected on the horizontal rotating table;
one end part of the transverse guide rail is a feeding and discharging station, the other end part of the transverse guide rail is a detection station, the loading and unloading movable workbench circulates between the feeding and discharging station and the detection station, and the inner end of the longitudinal guide rail faces the detection station of the transverse guide rail;
the horizontal detection guide rail and the horizontal guide rail are parallel to each other, the rotating shaft of the angle rotating platform is horizontally and transversely arranged, the modularization detecting unit is fixedly connected to the rotating shaft of the angle rotating platform and driven to rotate by the angle rotating platform, and the probe of the modularization detecting unit faces the direction of the horizontal guide rail.
The horizontal rotating platform is fixedly connected with an optical surface leveling device, and the large-caliber polyhedral optical element clamping device is fixed on the optical surface leveling device.
The platform base is of a marble base structure, and the movable detection unit mounting frame is of a marble gantry structure.
The modularized detection unit comprises a dark field microscopic imaging module and a bright field microscopic imaging module.
The utility model has the advantages that:
(1) the transverse guide rail of the utility model is provided with a feeding and discharging station and a detection station, so that the auxiliary power assisting device can be conveniently used for placing the large-caliber polyhedral optical element on the loading and unloading mobile workbench at the feeding and discharging station, the auxiliary power assisting device also has certain requirements on the operation space, and the feeding and discharging station is arranged, thereby providing wider operation space for loading and unloading the large-caliber polyhedral optical element;
(2) the utility model discloses portable detecting element mounting bracket can be close to or keep away from along longitudinal rail and load into and carry out the mobile workbench to provide accurate focus for optical element's surface flaw detection, make optical system's focal plane and the optical surface coincidence that awaits measuring, guarantee the detection precision of surface flaw detection;
(3) the utility model discloses be provided with horizontal detection guide rail and vertical guide rail on the portable detecting element mounting bracket to realize the horizontal and vertical motion of modularization detecting element, thereby make the modularization detecting element realize horizontal scanning detection and vertical scanning detection's purpose relatively heavy-calibre polyhedron optical element;
(4) the utility model discloses be provided with angle revolving stage and horizontal rotary stage, angle revolving stage drives modularization detecting element and rotates, realizes the regulation of modularization detecting element pitch angle, and horizontal rotary stage drives heavy-calibre polyhedron optical element and carries out the horizontal rotation to make and keep specific position relation between the optical path system of modularization detecting element inside and the optical surface that awaits measuring, realize the detection demand to the different optical surfaces of heavy-calibre polyhedron optical element;
(5) the utility model discloses be provided with optical surface levelling device on the load-in load-out mobile workbench, can keep specific position relation back between the optical path system in the modularization detecting element and the optical surface that awaits measuring, through further carrying out the position appearance to heavy-calibre polyhedron optical element and adjusting, so that modularization detecting element in its whole scanning range, the defocusing amount of the optical path system in the modularization detecting element to the optical surface that awaits measuring, in the range that whole detection device can accept;
(6) the utility model discloses be provided with heavy-calibre polyhedron optical element clamping device for load-in carries out the travelling table and drives heavy-calibre polyhedron optical element clamping device and remove the in-process, guarantees the stability of heavy-calibre polyhedron optical element clamping device.
Drawings
Fig. 1 is a perspective view of the present invention.
Fig. 2 is a schematic diagram of the position relationship between the present invention and the optical surface of the large-caliber polyhedron to be measured.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1 and 2, an automatic detection device for optical surface defects of a large-caliber polyhedron comprises a platform base 1, a transverse guide rail 2 and a longitudinal guide rail 3 which are arranged on the upper end surface of the platform base 1, a loading and unloading movable workbench 4 which is arranged on the transverse guide rail 2 in a sliding manner, a movable detection unit mounting frame 5 which is arranged on the longitudinal guide rail 3 in a sliding manner, a transverse detection guide rail 6 which is arranged on the movable detection unit mounting frame 5, a transverse sliding plate 7 which is arranged on the transverse detection guide rail 6 in a sliding manner, a vertical guide rail 8 which is arranged on the transverse sliding plate 7, a vertical sliding plate 9 which is arranged on the vertical guide rail 8 in a sliding manner, an angle rotating platform 10 which is fixed on the vertical surface of the vertical sliding plate 9, a modular detection unit 11 which is connected with the angle rotating platform 10, a horizontal rotating platform 12 which is fixed on the loading and unloading movable workbench 4, an optical surface leveling device 13 which is fixedly connected on the horizontal rotating platform 12, A large-caliber polyhedral optical element clamping device 14 fixedly connected to the optical surface leveling device 13;
one end part of the transverse guide rail 2 is a feeding and discharging station, the other end part of the transverse guide rail 2 is a detection station, the loading and unloading movable workbench 4 circulates between the feeding and discharging station and the detection station, and the inner end of the longitudinal guide rail 3 faces the detection station of the transverse guide rail 2;
the transverse detection guide rail 6 is parallel to the transverse guide rail 2, the rotating shaft of the angle rotating platform 10 is horizontally and transversely arranged, the modularized detection unit 11 is fixedly connected to the rotating shaft of the angle rotating platform 10 and driven by the angle rotating platform 10 to rotate, and the probe of the modularized detection unit 10 faces the direction of the transverse guide rail 2.
Wherein, platform base 1 is marble base structure, and portable detecting element mounting bracket 5 is marble gantry structure.
The modularized detection unit 11 comprises a dark field microscopic imaging module and a bright field microscopic imaging module, can respectively perform high-definition imaging, and can realize rapid defect discovery and further detailed defect evaluation on an optical surface; the defect is quickly discovered by a low-magnification scattering imaging detection technology of a dark field microscopic imaging module, and the technology gives consideration to both detection efficiency and defect detection sensitivity; the defect evaluation is realized by a high-power microscopic dark field/bright field imaging detection technology of a dark field microscopic imaging module and a bright field microscopic imaging module; the defect evaluation mode is entered according to needs on the basis of 'quick discovery' and calibration of defects, any selected area can be evaluated, and the requirements of high detection efficiency, high detection sensitivity and high detection resolution can be well met. The modularization detecting unit is matched with the movable detecting unit mounting frame to move in a polarity mode to achieve an automatic focusing function, when surface defects are detected on the optical surface, the corresponding detecting function is needed to be used for identifying and confirming the position relation between the optical path system inside the modularization detecting unit and the optical surface, therefore, corresponding position and angle adjustment is carried out, the state that defect scanning detection can be carried out can be achieved quickly, and the detecting efficiency is improved.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. The utility model provides an automatic detection device of heavy-calibre polyhedron optical surface flaw which characterized in that: the device comprises a platform base, a transverse guide rail and a longitudinal guide rail which are arranged on the upper end surface of the platform base, a loading and unloading mobile workbench which is arranged on the transverse guide rail in a sliding manner, a movable detection unit mounting frame which is arranged on the longitudinal guide rail in a sliding manner, a transverse detection guide rail which is arranged on the movable detection unit mounting frame in a sliding manner, a transverse sliding plate which is arranged on the transverse detection guide rail in a sliding manner, a vertical guide rail which is arranged on the transverse sliding plate, a vertical sliding plate which is arranged on the vertical guide rail in a sliding manner, an angle rotating platform which is fixed on the vertical surface of the vertical sliding plate, a modularized detection unit which is connected with the angle rotating platform, a horizontal rotating platform which is fixed on the loading and unloading mobile workbench, and a large-caliber polyhedral optical element clamping device which is connected on the horizontal rotating platform;
one end part of the transverse guide rail is a feeding and discharging station, the other end part of the transverse guide rail is a detection station, the loading and unloading movable workbench circulates between the feeding and discharging station and the detection station, and the inner end of the longitudinal guide rail faces the detection station of the transverse guide rail;
the horizontal detection guide rail and the horizontal guide rail are parallel to each other, the rotating shaft of the angle rotating platform is horizontally and transversely arranged, the modularization detecting unit is fixedly connected to the rotating shaft of the angle rotating platform and driven to rotate by the angle rotating platform, and the probe of the modularization detecting unit faces the direction of the horizontal guide rail.
2. An automatic large caliber polyhedral optical surface defect detection device according to claim 1, wherein: the horizontal rotating platform is fixedly connected with an optical surface leveling device, and the large-caliber polyhedral optical element clamping device is fixed on the optical surface leveling device.
3. An automatic large caliber polyhedral optical surface defect detection device according to claim 1, wherein: the platform base is of a marble base structure, and the movable detection unit mounting frame is of a marble gantry structure.
4. An automatic large caliber polyhedral optical surface defect detection device according to claim 1, wherein: the modularized detection unit comprises a dark field microscopic imaging module and a bright field microscopic imaging module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022246436.2U CN213957174U (en) | 2020-10-09 | 2020-10-09 | Automatic detection device for large-caliber polyhedral optical surface defects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022246436.2U CN213957174U (en) | 2020-10-09 | 2020-10-09 | Automatic detection device for large-caliber polyhedral optical surface defects |
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| Publication Number | Publication Date |
|---|---|
| CN213957174U true CN213957174U (en) | 2021-08-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022246436.2U Active CN213957174U (en) | 2020-10-09 | 2020-10-09 | Automatic detection device for large-caliber polyhedral optical surface defects |
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| Country | Link |
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| CN (1) | CN213957174U (en) |
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- 2020-10-09 CN CN202022246436.2U patent/CN213957174U/en active Active
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