CN213842019U

CN213842019U - Flatness measuring device and flexible integrated circuit pre-laminating device

Info

Publication number: CN213842019U
Application number: CN202022216753.XU
Authority: CN
Inventors: 陈西俐
Original assignee: Shenzhen Haolitai Technology Co ltd
Current assignee: Shenzhen Haolitai Technology Co ltd
Priority date: 2020-09-29
Filing date: 2020-09-29
Publication date: 2021-07-30
Anticipated expiration: 2030-09-29

Abstract

The utility model discloses a flatness measuring device and a flexible integrated circuit pre-laminating device, belonging to the technical field of integrated circuit processing, which comprises a supporting seat, wherein a fixed frame is arranged at the inner side of the supporting seat, a plurality of groups of conducting columns are arranged at the inner side of the fixed frame, a hollow box is arranged at the bottom of the plurality of groups of conducting columns, a bearing plate is arranged at the bottom of the hollow box, a bearing plate is movably connected at the inner side of the supporting seat, two groups of movable rods are arranged in the bearing plate, compression springs are arranged at the opposite sides of the two groups of movable rods, the front sides of the two groups of movable rods are connected with a poking rod, a sliding groove is arranged at the joint of the supporting seat and the fixed frame, a groove is arranged at the middle position of the sliding groove, a limiting rod is fixed at the left side and the right side of the fixed frame, the utility model adopts a force conducting mode that multiple points are pressed and conducted on other objects which are easy to deform, and the flatness observation effect is visual.

Description

Flatness measuring device and flexible integrated circuit pre-laminating device

Technical Field

The utility model relates to an integrated circuit processing technology field, more specifically say, relate to a flatness measuring device and flexible integrated circuit device of laminating in advance.

Background

In the production process of the liquid crystal display panel, a flexible integrated circuit pre-bonding device is required to perform pre-bonding operation on the chip on film and the substrate. The flatness of the bonding head in the flexible integrated circuit pre-bonding apparatus greatly affects the bonding yield, and thus, strict debugging is required.

At present, the flatness of the pressure head is generally tested by using a pressure-sensitive paper, and the flatness state is judged according to the uniformity of the color development depth of the pressure-sensitive paper after the pressure-sensitive paper is pressed in the test. The color density of the pressure sensing paper deepens along with the increase of the pressure level, but when the pressure is too large or too small, the color of the pressure sensing paper can not accurately reflect the flatness of an object, such as: when the pressure is too high, all parts of the sensing paper are completely colored, and at the moment, the color development concentration reaches the maximum, so that the uniformity of the color of the sensing paper cannot be judged; when the pressure is too small, the color development capsule in the sensing paper is not broken, the color developing agent cannot develop color, and the uniformity of the color of the sensing paper cannot be judged at the moment, so that the flatness observation is not visual enough.

SUMMERY OF THE UTILITY MODEL

1. Technical problem to be solved

To the problem that exists among the prior art, the utility model aims to provide a flatness measuring device and flexible integrated circuit device of laminating in advance, its advantage lies in the utility model discloses a conduction mode of strength utilizes the multiple spot pressurized conduction on the object that warp in addition easily, observes the roughness effect directly perceived.

2. Technical scheme

In order to solve the above problems, the utility model adopts the following technical proposal.

The utility model provides a flatness measuring device, includes the supporting seat, fixed frame is installed to the supporting seat inboard, fixed frame inboard is provided with quantity for the conduction post of multiunit, multiunit conduction column bottom is provided with hollow box, hollow box bottom is provided with the bearing plate, the inboard swing joint of supporting seat has the bearing plate, the bearing plate is inside to be provided with quantity for two sets of movable rod, and is two sets of the movable rod opposite side is provided with compression spring, and is two sets of the movable rod front side is connected with the poker rod.

Furthermore, a sliding groove is formed in the joint of the supporting seat and the fixing frame, a groove is formed in the middle of the sliding groove, limiting rods are fixed on the left side and the right side of the fixing frame, the groove is in clearance fit with the limiting rods, a T-shaped structure is formed by the sliding groove and the groove, and the fixing frame is connected with the supporting seat in a sliding mode through the limiting rods and the sliding groove.

Further, a stirring groove is formed in the joint of the bearing plate and the stirring rod, a movable groove is formed in the joint of the bearing plate and the movable rod and is in clearance fit with the movable rod, the movable groove and the stirring rod form an L-shaped structure, an upright groove is formed in the inner wall of the supporting seat and is in clearance fit with the movable rod, and the thickness of the upright groove is greater than the common thickness of the bearing plate and the hollow box.

Furthermore, the hollow box is an aluminum alloy component, and the guide pillar is of a hollow structure.

Furthermore, the lowest height of the bearing plate is higher than the bottom height of the supporting seat.

The utility model provides a flexible integrated circuit device of laminating in advance, still includes the upper cover plate, the upper cover plate is fixed at the supporting seat top, upper cover plate upside threaded connection has the lead screw, the lead screw bottom is connected with the rolling bearing, rolling bearing bottom is equipped with the vacuum pump, the vacuum pump bottom is connected with vacuum chuck, vacuum chuck bottom adsorbs there is the pre-laminated board.

3. Advantageous effects

Compared with the prior art, the utility model has the advantages of:

(1) the connecting part of the supporting seat and the fixing frame is provided with the sliding groove, the middle position of the sliding groove is provided with the groove, the left side and the right side of the fixing frame are fixedly provided with the limiting rods, the groove and the limiting rods are in clearance fit, the sliding groove and the groove form a T-shaped structure, the fixing frame is in sliding connection with the supporting seat through the limiting rods and the sliding groove, through the T-shaped structure, after the fixing frame slides into the sliding groove through the limiting rods, the limiting rods are clamped into the groove to be fixed, the fixing frame is prevented from shaking, the mounting and dismounting of the fixing frame are facilitated, the moving range of the guide pillar is conveniently limited, the guide pillar can only move in the vertical direction, the received pressure is further transmitted to the hollow box, the flatness is judged through the deformation degree of the fixing frame and the guide pillar, and the effect is visual;

(2) the connecting part of the bearing plate and the poke rod is provided with a poke groove, the connecting part of the bearing plate and the movable rod is provided with a movable groove, the movable groove is in clearance fit with the movable rod, the movable groove and the poke rod form an L-shaped structure, the inner wall of the support seat is provided with a vertical groove, the vertical groove is in clearance fit with the movable rod, the thickness of the vertical groove is larger than the common thickness of the bearing plate and the hollow box, the poke rod drives the movable rod to move in the movable groove by utilizing the poke groove, after the poke rod drives the movable rod to move in the movable groove, the movable rod is separated from the vertical groove, so that the bearing plate is convenient to draw out, the bearing plate and the hollow box are convenient to disassemble and assemble, so that new bearing plates and hollow boxes are convenient to replace, the drawn out hollow box after use is observed, and the flatness is judged;

(3) the hollow box is the aluminum alloy material component, and the conduction post sets up to hollow structure, and the softer atress of aluminum alloy produces deformation easily, and the mode that adopts the multiple spot conduction is used the hollow box with the pressure that the conduction post received to with the size direct expression of power, hollow structure's conduction post makes things convenient for the bearing plate can also upwards lift when supporting multiunit conduction post.

Drawings

Fig. 1 is a schematic view of the overall structure of a flatness measuring apparatus and a flexible integrated circuit pre-bonding apparatus according to the present invention;

FIG. 2 is an enlarged view of A in FIG. 1;

FIG. 3 is a top sectional view of a bearing plate of the flatness measuring apparatus of the present invention;

fig. 4 is a front sectional view of a support seat of the flatness measuring apparatus of the present invention.

The reference numbers in the figures illustrate:

1. a lead screw; 2. an upper cover plate; 3. a supporting seat; 4. a bearing plate; 5. a guide post; 6. a hollow box; 7. a fixing frame; 8. pre-pasting a plywood; 9. a vacuum chuck; 10. a vacuum pump; 11. a pedestal bearing; 12. a poke rod; 13. a movable rod; 14. a compression spring; 301. a vertical slot; 401. a poking groove; 402. a movable groove; 701. a sliding groove; 702. a limiting rod.

Detailed Description

The technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiment of the present invention; obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by those skilled in the art without any inventive work are within the scope of the present invention based on the embodiments of the present invention.

Example 1

Referring to fig. 1-4, in an embodiment of the present invention, a flatness measuring apparatus includes a supporting base 3, a fixing frame 7 is installed on the inner side of the supporting base 3, the inner side of the fixing frame 7 is provided with a plurality of groups of conducting posts 5, the bottom of the plurality of groups of conducting posts 5 is provided with a hollow box 6, the bottom of the hollow box 6 is provided with a bearing plate 4, the inner side of the supporting base 3 is movably connected with the bearing plate 4, the inner part of the bearing plate 4 is provided with two groups of movable rods 13, the opposite sides of the two groups of movable rods 13 are provided with compression springs 14, and the front sides of the two groups of movable rods 13 are connected with a poking rod 12.

Referring to fig. 1 and 4, a sliding groove 701 is formed at the joint of the supporting seat 3 and the fixing frame 7, a groove is formed in the middle of the sliding groove 701, a limiting rod 702 is fixed on the left side and the right side of the fixing frame 7, the groove is in clearance fit with the limiting rod 702, the sliding groove 701 and the groove form a T-shaped structure, the fixing frame 7 is in sliding connection with the supporting seat 3 through the limiting rod 702 and the sliding groove 701, the fixing frame 7 can slide into the sliding groove 701 by utilizing the limiting rod 702 through the T-shaped structure, the limiting rod 702 is clamped into the groove to be fixed, the fixing frame 7 is prevented from shaking, the fixing frame 7 is convenient to mount and dismount, the moving range of the transmission column 5 is convenient to limit, the transmission column 5 can only move in the vertical direction, the received pressure is transmitted to the hollow box 6, the flatness is judged through the deformation degree of the two, and the effect is visual.

Referring to fig. 1, 2 and 3, a toggle groove 401 is formed at the joint of a bearing plate 4 and a toggle rod 12, a movable groove 402 is formed at the joint of the bearing plate 4 and a movable rod 13, the movable groove 402 is in clearance fit with the movable rod 13, the movable groove 402 and the toggle groove 401 form an L-shaped structure, a vertical groove 301 is formed in the inner wall of a support seat 3, the vertical groove 301 is in clearance fit with the movable rod 13, the thickness of the vertical groove 301 is larger than the common thickness of the bearing plate 4 and a hollow box 6, the toggle rod 12 drives the movable rod 13 to move in the movable groove 402 by utilizing the toggle groove 401, after the toggle rod 12 drives the movable rod 13 to move inside the movable groove 402, the movable rod 13 is separated from the vertical groove 301, so that the bearing plate 4 can be conveniently drawn out, the bearing plate 4 and the hollow box 6 can be conveniently disassembled, the bearing plate 4 and the hollow box 6 can be conveniently replaced, the hollow box 6 after being drawn out is observed, and the flatness can be judged.

Referring to fig. 1, the hollow box 6 is an aluminum alloy member, the conducting columns 5 are arranged in a hollow structure, the aluminum alloy is easy to deform under the action of soft stress, the pressure applied to the conducting columns 5 is applied to the hollow box 6 in a multipoint conducting mode, the force is directly expressed, and the bearing plates 4 can be lifted upwards by the aid of the conducting columns 5 in the hollow structure when supporting the multiple groups of conducting columns 5.

Referring to fig. 1, the lowest height of the bearing plate 4 is higher than the bottom height of the supporting seat 3, so that the bearing plate 4 is used as a plane of the final bearing capacity, the hollow box 6 is conveniently stressed to deform, and the bearing plate 4 is conveniently replaced.

The utility model discloses a theory of operation is: the pre-bonding plate 8 is placed on the lower side of a vacuum chuck 9, so that the vacuum pump 10 works to evacuate air in the vacuum chuck 9, the vacuum chuck 9 firmly adsorbs the pre-bonding plate 8, a screw rod 1 is rotated clockwise, the screw rod 1 moves downwards by utilizing an upper cover plate 2 connected with threads, the screw rod 1 drives the vacuum pump 10 and the vacuum chuck 9 to move downwards by utilizing a bearing 11 with a seat, the vacuum chuck 9 drives the pre-bonding plate 8 to move downwards until the pre-bonding plate 8 is attached to the upper surface of a guide pillar 5 downwards, the screw rod 1 is continuously rotated to drive the pre-bonding plate 8 to move downwards for a short distance, at the moment, the pre-bonding plate 8 applies external force to the guide pillar 5, the guide pillar 5 is forced to move downwards, the guide pillar 5 pressurizes a hollow box 6, the hollow box 6 made of aluminum alloy material is deformed by pressure, at the moment, if the pre-bonding plate 8 is smooth, namely, the heights of the upper surfaces of a plurality of groups of guide pillars 5 are the same, the depth of a round hole formed by pressing the surface of the hollow box 6 is the same, if the pre-laminated plate 8 is uneven, namely the heights of the upper surfaces of a plurality of groups of transmission columns 5 are uneven, the depths of the round holes formed by pressing the surface of the hollow box 6 are different, the heights of the plurality of groups of transmission columns 5 are observed firstly, then the bearing plate 4 is pulled upwards, the poke rod 12 is retracted inwards, the poke rod 12 drives the movable rod 13 to separate from the vertical groove 301 and extrude the compression spring 14, the compression spring 14 is stressed to generate the shape change and the inner side of the movable groove 402 to retract, a group of new hollow box 6 and bearing plate 4 are placed below the bearing plate 4 again to support the transmission columns 5, the used hollow box 6 and bearing plate 4 are pulled outwards, the depth of the round hole left on the surface of the used hollow box 6 is observed and the height of the surface of the transmission column 5 observed firstly is combined, and the flatness of the pre-laminated plate 8 is judged.

Example 2

The utility model provides a flexible integrated circuit device of laminating in advance, still include upper cover plate 2, upper cover plate 2 is fixed at 3 tops of supporting seat, 2 upside threaded connection of upper cover plate have lead screw 1, lead screw 1 bottom is connected with pedestal bearing 11, 11 bottoms in pedestal bearing are equipped with vacuum pump 10, vacuum pump 10 bottom is connected with vacuum chuck 9, vacuum chuck 9 bottom adsorbs has pre-laminated board 8, adsorb pre-laminated board 8 through vacuum pump 10 and vacuum chuck 9, rotate lead screw 1 again and can adjust the height of pre-laminated board 8, can carry out the laminating in advance of roughness test and flexible circuit board.

It should be noted that, in the above description, the vacuum pump and the like are all devices that are mature in application in the prior art, and a specific model can be selected according to actual needs, and meanwhile, the power supply of the vacuum pump can be supplied to the internal power supply or the commercial power, and a specific power supply mode is selected according to circumstances, which is not described herein again.

The above description is only the preferred embodiment of the present invention; the scope of the present invention is not limited thereto. Any person skilled in the art should also be able to cover the technical scope of the present invention by replacing or changing the technical solution and the improvement concept of the present invention with equivalents and modifications within the technical scope of the present invention.

Claims

1. The utility model provides a flatness measuring device, includes supporting seat (3), its characterized in that, fixed frame (7) are installed to supporting seat (3) inboard, fixed frame (7) inboard is provided with quantity for multiunit conduction post (5), multiunit conduction post (5) bottom is provided with hollow box (6), hollow box (6) bottom is provided with bearing plate (4), supporting seat (3) inboard swing joint has bearing plate (4), bearing plate (4) inside be provided with quantity for two sets of movable rod (13), two sets of movable rod (13) opposite side is provided with compression spring (14), and is two sets of movable rod (13) front side is connected with poker rod (12).

2. A flatness measuring device according to claim 1, wherein: sliding tray (701) have been seted up with fixed frame (7) junction to supporting seat (3), sliding tray (701) intermediate position is seted up flutedly, fixed frame (7) left and right sides is fixed with gag lever post (702), and recess and gag lever post (702) clearance fit, sliding tray (701) and recess form T font structure, fixed frame (7) are through gag lever post (702) and sliding tray (701) and supporting seat (3) sliding connection.

3. A flatness measuring device according to claim 1, wherein: stirring groove (401) has been seted up with stirring pole (12) junction in bearing plate (4), movable groove (402) have been seted up with movable rod (13) junction in bearing plate (4), movable groove (402) and movable rod (13) clearance fit, movable groove (402) and stirring groove (401) form L shape structure, supporting seat (3) inner wall has been seted up and has been erected groove (301), erect groove (301) and movable rod (13) clearance fit, it is greater than the common thickness of bearing plate (4) and hollow box (6) to erect groove (301) thickness.

4. A flatness measuring device according to claim 1, wherein: the hollow box (6) is an aluminum alloy component, and the guide pillar (5) is of a hollow structure.

5. A flatness measuring device according to claim 1, wherein: the lowest height of the bearing plate (4) is higher than the bottom height of the supporting seat (3).

6. The flexible integrated circuit pre-laminating device comprises the flatness measuring device as claimed in any one of claims 1 to 5, and is characterized by further comprising an upper cover plate (2), wherein the upper cover plate (2) is fixed to the top of the supporting seat (3), a lead screw (1) is in threaded connection with the upper side of the upper cover plate (2), a bearing (11) with a seat is connected to the bottom of the lead screw (1), a vacuum pump (10) is assembled at the bottom of the bearing (11) with the seat, a vacuum sucker (9) is connected to the bottom of the vacuum pump (10), and a pre-laminating plate (8) is adsorbed at the bottom of the vacuum sucker (9).