CN213779356U

CN213779356U - Connecting unit for pressure sensor and pressure sensor

Info

Publication number: CN213779356U
Application number: CN202022729212.7U
Authority: CN
Inventors: 王小平; 曹万; 杨军; 洪鹏
Original assignee: Wuhan Finemems Inc
Current assignee: Wuhan Finemems Inc
Priority date: 2020-11-23
Filing date: 2020-11-23
Publication date: 2021-07-23
Anticipated expiration: 2030-11-23

Abstract

The utility model relates to a pressure sensor technical field specifically is a coupling unit and pressure sensor for pressure sensor. The connecting unit for the pressure sensor comprises a connector for connecting the sensor, a clamping sleeve for connecting a detection end and a locking assembly for fixing the connector and the clamping sleeve; the connector comprises a drainage cylinder and a conical joint which are connected in sequence; and drainage channels are arranged in the drainage cylinder and the conical joint along the axial direction. This a connection unit for pressure sensor can guide the hydraulic fluid entering in the pipeline through adopting toper water conservancy diversion chamber, has better guidance quality, and hydraulic fluid gets into drainage channel along toper water conservancy diversion chamber stationary flow chamber in proper order to the high temperature high pressure fluid of assurance entering sensor is more steady, avoids instantaneous high temperature high pressure to strike the pressure diaphragm production great impact in the short time can produce the sensor, promotes measuring precision.

Description

Connecting unit for pressure sensor and pressure sensor

Technical Field

The utility model relates to a pressure sensor technical field specifically is a coupling unit and pressure sensor for pressure sensor.

Background

Silicon carbide has a wide application prospect in the field of sensors due to its excellent semiconductor and material properties. The high-temperature pressure sensor prepared from the semiconductor silicon carbide material can show excellent stability in a high-temperature severe environment, and accurate measurement of pressure is realized.

The silicon carbide pressure sensor has the advantages of high sensitivity and small temperature influence coefficient, but when the silicon carbide pressure sensor is used in a high-temperature and high-pressure environment, the instantaneous high-temperature and high-pressure impact in a pipeline can generate large impact on a pressure diaphragm in the sensor in a short time, the measurement precision is influenced, the sealing structure at the installation position of the sensor is easily damaged, and the service life is shortened.

SUMMERY OF THE UTILITY MODEL

The utility model discloses to the technical problem who exists among the prior art, provide a coupling unit and pressure sensor for pressure sensor and solve above-mentioned sensor and use in high temperature high pressure environment, the instantaneous high temperature high pressure impact short time in the pipeline can produce great impact to the pressure diaphragm in the sensor, influences the problem of measuring precision.

The utility model provides an above-mentioned technical problem's technical scheme as follows: a connecting unit for a pressure sensor comprises a connector for connecting the sensor, a ferrule for connecting a detection end and a locking component for fixing the connector and the ferrule;

the connector comprises a drainage cylinder and a conical joint which are connected in sequence; drainage channels are arranged in the drainage cylinder and the conical joint along the axial direction;

a conical sealing groove matched with the conical joint is formed in one end of the clamping sleeve, and a conical flow guide cavity for guiding hydraulic fluid is formed in the other end of the clamping sleeve; the interior of cutting ferrule still sets up the steady flow chamber that is linked together with toper seal groove and toper water conservancy diversion chamber.

Further, a step concave part is arranged on the edge of one end of the conical joint; and a rubber gasket is arranged outside the step concave part.

Further, the locking assembly comprises a limiting ring and a locking nut which are arranged on the drainage tube; the outer wall of one end, close to the conical sealing groove, of the clamping sleeve is provided with a thread groove matched with the locking nut.

Further, the flow stabilizing cavity comprises a flow stabilizing upper cavity communicated with the conical sealing groove and a flow stabilizing lower cavity communicated with the conical flow guide cavity; the inner diameter of the steady flow upper cavity is larger than that of the steady flow lower cavity, and the steady flow upper cavity and the steady flow lower cavity are smoothly connected.

Further, the conical sealing groove, the conical flow guide cavity and the flow stabilizing cavity are coaxially arranged.

The utility model has the advantages that:

1. this a linkage unit for pressure sensor, be used for pressure sensor and wait to detect being connected of pipeline, hydraulic fluid through adopting toper water conservancy diversion chamber can guide in the pipeline gets into, better guidance quality has, the effective reduction of toper face guide is internal stress to the internal seal simultaneously, hydraulic fluid gets into drainage channel along toper water conservancy diversion chamber stationary flow chamber in proper order, thereby it is more steady to guarantee to get into the high temperature high pressure fluid of sensor, avoid instantaneous high temperature high pressure to strike the short time and can produce great impact to the pressure diaphragm in the sensor, promote measuring precision.

2. The connecting unit for the pressure sensor adopts a multilayer sealing flow blocking design, has a long service life and a compact integral structure, and eliminates thermal expansion mismatch between sensor diaphragms.

A pressure sensor comprises a sensor body and the connecting unit for the pressure sensor.

Further, the sensor body is formed by assembling a shell, a diaphragm, a pressure transmission rod, a silicon stress sheet, a cantilever beam and a lead; a magnetic pole iron core connected with the drainage cylinder is arranged outside the shell; a magnetic pole iron core connected with the drainage cylinder is arranged outside the shell; the diaphragm and the cantilever beam are sequentially arranged in the shell, one end face of the diaphragm is opposite to the magnetic pole iron core, and the other end face of the diaphragm is connected with the cantilever beam through a pressure transmission rod; the silicon stress sheet is arranged on the cantilever beam and connected with the lead.

Further, the magnetic pole iron core and the drainage cylinder are of an integrally formed structure.

The utility model has the advantages that: this pressure sensor can be applicable to in the highly compressed environment of high temperature, can not produce great impact to the pressure diaphragm in the sensor because of the instantaneous high temperature high pressure impact short time in the pipeline in the use, has guaranteed measuring precision, is difficult for producing the injury to the seal structure of sensor installation department in addition yet, has promoted life.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a partial sectional view of the internal structure of the present invention;

fig. 3 is a partial structure sectional view of the connector, the ferrule and the locking assembly of the present invention.

In the drawings, the components represented by the respective reference numerals are listed below:

1. the connector comprises a connector 101, a drainage tube 102, a conical joint 102a, a step concave part 2, a clamping sleeve 201, a conical sealing groove 202, a conical flow guide cavity 203, a flow stabilizing cavity 3, a locking assembly 301, a limiting ring 302, a locking nut 4, a sensor body 401, a shell 402, a diaphragm 403, a pressure transmission rod 404, a silicon stress sheet 405, a cantilever beam 406 and a lead wire.

Detailed Description

The principles and features of the present invention are described below in conjunction with the following drawings, the examples given are only intended to illustrate the present invention and are not intended to limit the scope of the present invention.

The traditional silicon-based piezoresistive pressure sensor has wide application in the field of industrial process control. However, when the temperature exceeds 400 ℃, the silicon-based pressure sensor cannot accurately measure the pressure due to the characteristics of the silicon material. To solve this problem, some solutions have been proposed, such as adding water jackets, cooling fins, or pressure tube cooling. These solutions have a certain effect, but at the same time, problems such as lag and distortion of the measurement signal, increase of manufacturing cost, etc. are also brought, and the problem of pressure measurement in a high temperature environment cannot be fundamentally solved. Therefore, the development of a pressure sensor suitable for accurately acquiring pressure parameters under high-temperature conditions is urgently needed. Silicon carbide, which is a third-generation semiconductor material, has high thermal conductivity, wide band gap, excellent chemical inertness and excellent radiation resistance, and is undoubtedly an excellent material for manufacturing high-temperature pressure sensors.

The silicon carbide pressure sensor has the advantages of high sensitivity and small temperature influence coefficient, but when the silicon carbide pressure sensor is used in a high-temperature and high-pressure environment, the instantaneous high-temperature and high-pressure impact in a pipeline can generate large impact on a pressure diaphragm in the sensor in a short time, the measurement precision is influenced, the sealing structure at the installation position of the sensor is easily damaged, and the service life is shortened. Therefore the utility model provides a coupling unit and pressure sensor for pressure sensor solve above-mentioned problem.

The utility model also provides an preferred embodiment

Example one

As shown in fig. 1-3, a connection unit for a pressure sensor comprises a connector 1 for connecting the sensor, a ferrule 2 for connecting a sensing end, and a locking assembly 3 for fixing the connector 1 and the ferrule 2.

The connector 1 comprises a drainage cylinder 101 and a conical joint 102 which are connected in sequence; drainage channels are arranged in the drainage cylinder 101 and the conical joint 102 along the axial direction.

A conical sealing groove 201 matched with the conical joint 102 is formed in one end of the cutting sleeve 2, and a conical flow guide cavity 202 for guiding hydraulic fluid is formed in the other end of the cutting sleeve; a flow stabilizing cavity 203 communicated with the conical sealing groove 201 and the conical flow guide cavity 202 is further formed in the clamping sleeve 2; the conical sealing groove 201, the conical diversion cavity 202 and the flow stabilizing cavity 203 are coaxially arranged.

In this embodiment, in order to improve the sealing performance of the connection between the taper joint 102 and the ferrule 2, a stepped recess 102a is further provided at an edge of one end of the taper joint 102; the rubber gasket is arranged outside the step concave part 102a, and the gap inside the conical sealing groove 201 is further filled by the rubber gasket, so that the situation that the hydraulic fluid overflows after flowing in is ensured.

In this embodiment, the locking assembly 3 includes a limiting ring 301 and a locking nut 302 arranged on the drainage tube 101; the outer wall of the end, close to the conical sealing groove 201, of the cutting ferrule 2 is provided with a thread groove matched with the locking nut 302. After the tapered connector 102 is butted with the ferrule 2, the locking nut 302 is screwed to be in threaded connection with the thread groove on the ferrule 2, so that the locking connection between the connector 1 and the ferrule 2 is realized.

In this embodiment, the flow stabilizing cavity 203 includes a flow stabilizing upper cavity communicated with the conical sealing groove 201 and a flow stabilizing lower cavity communicated with the conical diversion cavity 202; the inner diameter of the steady flow upper cavity is larger than that of the steady flow lower cavity, and the steady flow upper cavity and the steady flow lower cavity are smoothly connected. The hydraulic fluid flows through the conical flow guide cavity 202, the flow stabilizing lower cavity and the flow stabilizing upper cavity in sequence until reaching the drainage channel, and is conveyed in a multi-gradient mode, so that the phenomenon that liquid in a pipeline generates large impact on a pressure diaphragm in a sensor in an instant high-temperature high-pressure short time is avoided, and the instant damage to an internal sealing structure can be effectively reduced.

Example two

As shown in fig. 1 and 2, the present invention also provides a pressure sensor, which includes a sensor body 4 and the connection unit for the pressure sensor. The sensor body 4 is assembled by a shell 401, a diaphragm 402, a pressure transmission rod 403, a silicon stress sheet 404, a cantilever beam 405 and a lead 406; a magnetic pole iron core connected with the drainage cylinder 101 is arranged outside the shell 401; a magnetic pole iron core connected with the drainage cylinder 101 is arranged outside the shell 401; the diaphragm 402 and the cantilever beam 405 are sequentially arranged in the shell 401, one end face of the diaphragm 402 is opposite to the magnetic pole core, and the other end face of the diaphragm 402 is connected with the cantilever beam 405 through the pressure transmission rod 403; the silicon stressor 404 is mounted on a cantilever beam 405 and connected to a lead 406. The magnetic pole iron core and the drainage cylinder 101 are of an integrally formed structure. Hydraulic fluid is led into the magnetic pole iron core through the connecting unit, high-temperature and high-pressure fluid is led into the shell 401 through the magnetic pole iron core, the high-pressure and high-temperature fluid acts on the diaphragm 402, the diaphragm 402 deforms and acts on the cantilever beam 405 through the pressure transmission rod 403, and the silicon stress sheet 404 on the cantilever beam 405 generates a signal proportional to the pressure signal.

This pressure sensor can be applicable to in the highly compressed environment of high temperature, can not produce great impact to the pressure diaphragm in the sensor because of the instantaneous high temperature high pressure impact short time in the pipeline in the use, has guaranteed measuring precision, is difficult for producing the injury to the seal structure of sensor installation department in addition yet, has promoted life.

The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. A connection unit for a pressure sensor, characterized by comprising a connector (1) for connecting the sensor, a ferrule (2) for connecting a detection end, and a locking assembly (3) for fixing the connector (1) and the ferrule (2);

the connector (1) comprises a drainage cylinder (101) and a conical joint (102) which are connected in sequence; drainage channels are arranged in the drainage cylinder (101) and the conical joint (102) along the axial direction;

a conical sealing groove (201) matched with the conical joint (102) is formed in one end of the clamping sleeve (2), and a conical flow guide cavity (202) used for guiding hydraulic fluid is formed in the other end of the clamping sleeve; the interior of the cutting sleeve (2) is also provided with a flow stabilizing cavity (203) communicated with the conical sealing groove (201) and the conical flow guide cavity (202).

2. The connection unit for a pressure sensor according to claim 1, characterized in that one end edge of the conical joint (102) is further provided with a stepped recess (102 a); and a rubber gasket is arranged outside the step concave part (102 a).

3. The connection unit for a pressure sensor according to claim 1, characterized in that the locking assembly (3) comprises a stop ring (301) and a locking nut (302) arranged on the drainage cartridge (101); the outer wall of one end, close to the conical sealing groove (201), of the clamping sleeve (2) is provided with a thread groove matched with the locking nut (302).

4. The connection unit for a pressure sensor according to claim 1, wherein the flow stabilizing cavity (203) comprises a flow stabilizing upper cavity communicating with the conical sealing groove (201) and a flow stabilizing lower cavity communicating with the conical flow guiding cavity (202); the inner diameter of the steady flow upper cavity is larger than that of the steady flow lower cavity, and the steady flow upper cavity and the steady flow lower cavity are smoothly connected.

5. The connection unit for a pressure sensor according to claim 1, characterized in that the conical seal groove (201), the conical flow guide cavity (202) and the flow stabilizing cavity (203) are coaxially arranged.

6. A pressure sensor, characterized by comprising a sensor body (4) and a connection unit for a pressure sensor according to any one of claims 1-5.

7. The pressure sensor according to claim 6, wherein the sensor body (4) is a beam film sensor assembled by a shell (401), a diaphragm (402), a pressure transmission rod (403), a silicon stress sheet (404), a cantilever beam (405) and a lead (406); a magnetic pole iron core connected with the drainage cylinder (101) is arranged outside the shell (401); the diaphragm (402) and the cantilever beam (405) are sequentially arranged in the shell (401), one end face of the diaphragm (402) is opposite to the magnetic pole core, and the other end face of the diaphragm is connected with the cantilever beam (405) through a pressure transmission rod (403); the silicon stressor (404) is mounted on a cantilever beam (405) and connected to a lead (406).

8. The pressure sensor of claim 7, wherein the pole core is of unitary construction with the flow-inducing cartridge (101).