CN213779157U - Mass flowmeter gas access switching device - Google Patents

Mass flowmeter gas access switching device Download PDF

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Publication number
CN213779157U
CN213779157U CN202023163250.7U CN202023163250U CN213779157U CN 213779157 U CN213779157 U CN 213779157U CN 202023163250 U CN202023163250 U CN 202023163250U CN 213779157 U CN213779157 U CN 213779157U
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China
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air passage
block
block body
flowmeter
gas access
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CN202023163250.7U
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Chinese (zh)
Inventor
何旭
杨强
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Wuxi Muren Technology Co ltd
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Wuxi Muren Technology Co ltd
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Priority to CN202023163250.7U priority Critical patent/CN213779157U/en
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Abstract

The utility model relates to a mass flowmeter gas access switching device, which comprises a first switching block and a second switching block fixed at the bottom of the first switching block by a bolt; the first adapter block comprises a first block body, a first air passage and a second air passage which are vertically arranged in the middle of the first block body, vertical first fixing holes which are arranged at two ends of the first block body in a penetrating way and first threaded holes which are arranged at two ends of the upper surface of the first block body; the second switching block comprises a second block body, a third air passage and a fourth air passage which are arranged in the second block body, and second threaded holes which are arranged at two ends of the upper surface of the second block body, and the first block body is in threaded connection with the upper part of the second block body through bolts which penetrate through the first fixing holes; the utility model discloses can insert the mass flowmeter who has nonstandard interface and bottom air feed into the flowmeter maintenance calbiration system who has standard interface, be convenient for this kind of flowmeter insert flowmeter maintenance calbiration system and maintain, calibrate.

Description

Mass flowmeter gas access switching device
Technical Field
The utility model belongs to the technical field of switching device, concretely relates to mass flow meter gas inserts switching device.
Background
Some glass production plants purchase german imported coating equipment which uses a large number of Bronkhorst EL-Flow meters, and metal seal gas mass Flow meters and controllers are characterized by unique and all-metal seal structures which ensure long-term sealing performance and are particularly suitable for the semiconductor industry and high-purity gas application occasions. The flowmeter adopts a bottom air supply scheme, but a non-standard cutting sleeve or a VCR interface is used, and the flowmeter cannot be directly connected into a standard detection system when being maintained and calibrated.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming prior art not enough and providing a mass Flow meter gas access switching device, can insert standard detecting system with Bronkhorst EL-Flow flowmeter after using this switching device.
The technical scheme of the utility model as follows:
a mass flowmeter gas access switching device comprises a first switching block and a second switching block fixed at the bottom of the first switching block through bolts; the first adapter block comprises a first block body, a first air passage and a second air passage which are vertically arranged in the middle of the first block body, vertical first fixing holes which are arranged at two ends of the first block body in a penetrating way and first threaded holes which are arranged at two ends of the upper surface of the first block body; the second switching block comprises a second block body, a third air passage, a fourth air passage and second threaded holes, the third air passage and the fourth air passage are arranged in the second block body, the second threaded holes are formed in the two ends of the upper surface of the second block body, the third air passage and the fourth air passage are L-shaped, openings in the two ends of the third air passage are respectively formed in the upper surface and the left end face of the second block body, openings in the two ends of the fourth air passage are respectively formed in the upper surface and the right end face of the second block body, an opening in the upper end of the third air passage is arranged corresponding to the lower end of the first air passage, and an opening in the upper end of the fourth air passage is arranged corresponding to the lower end of the second air passage; the first block is in threaded connection with the upper part of the second block through a bolt penetrating through the first fixing hole.
Furthermore, the periphery of the upper end opening of the first air passage and the second air passage is provided with a sinking groove, and a sealing ring is arranged in the sinking groove.
Furthermore, the periphery of the upper end opening of the third air passage and the fourth air passage is provided with a sinking groove, and a sealing ring is arranged in the sinking groove.
Furthermore, an outer thread connector is in threaded connection with the left end opening of the third air passage and the right end opening of the fourth air passage.
Further, the first threaded hole and the second threaded hole are both M4 threaded blind holes.
Furthermore, M13 threads are arranged in the left end opening of the third air passage and the right end opening of the fourth air passage.
The utility model discloses applicable to the mass flow meter that the model is FS-201CV-200-ABD-00-V, FS-201CV-200-ABD-00-V mass flow meter includes the flowmeter base, flow probe and flowmeter control valve of setting on the flowmeter base, be provided with the gas circuit that communicates with flow probe and flowmeter control valve on the bottom face of flowmeter base respectively, gas flows through flowmeter probe and flowmeter control valve from the gas circuit opening on the flowmeter base bottom surface in proper order, still be provided with the second fixed orifices at the both ends of flowmeter base, first screw hole corresponds the setting of second fixed orifices, thereby can realize mass flow meter's fixed on first switching piece through the bolt fastening who link up the second fixed orifices with the flowmeter base.
Compared with the prior art, the beneficial effects of the utility model are that:
the mass flowmeter with the nonstandard interface and the bottom gas supply can be connected into a flowmeter maintenance and calibration system with the standard interface, so that the flowmeter can be conveniently connected into the flowmeter maintenance and calibration system for maintenance and calibration; the second fixed orifices on first screw hole and the flowmeter base correspond the setting, guarantee that mass flow meter aligns with first air flue and second air flue on the gas port of flowmeter base bottom and the first switching piece in the installation, guaranteed the precision of examination, calibration.
Drawings
Fig. 1 is a schematic view of the structure of the embodiment of the present invention.
Fig. 2 is a schematic diagram of a right-view structure of an embodiment of the present invention.
Fig. 3 is a schematic top view of a first junction block according to an embodiment of the present invention.
Fig. 4 is a schematic top view of a second transfer block according to an embodiment of the present invention.
In the drawing, a first transfer block (1), a first air passage (11), a second air passage (12), a first fixing hole (13), a first threaded hole (14), a second transfer block (2), a fourth air passage (21), a third air passage (22), a sink groove (23), a second threaded hole (24), an external thread joint (25), a flowmeter base (3) and a second fixing hole (31).
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1 to 4, a gas access adapter device of a mass flowmeter comprises a first adapter block 1 and a second adapter block 2 fixed at the bottom of the first adapter block 1 by bolts; the first transfer block 1 comprises a first block body, a first air passage 11 and a second air passage 12 which are vertically arranged in the middle of the first block body, vertical first fixing holes 13 which are arranged at two ends of the first block body in a penetrating way, and first threaded holes 14 which are arranged at two ends of the upper surface of the first block body; the second switching block 2 comprises a second block body, a third air passage 22 arranged inside the second block body, a fourth air passage 21 and second threaded holes 24 arranged at two ends of the upper surface of the second block body, the third air passage 22 and the fourth air passage 21 are L-shaped, openings at two ends of the third air passage 22 are respectively arranged on the upper surface and the left end surface of the second block body, openings at two ends of the fourth air passage 21 are respectively arranged on the upper surface and the right end surface of the second block body, an upper end opening of the third air passage 22 is arranged corresponding to the lower end of the first air passage 11, and an upper end opening of the fourth air passage 21 is arranged corresponding to the lower end of the second air passage 12; the first block is connected to the upper part of the second block through a bolt thread penetrating through the first fixing hole 13; the first screw hole 14 is provided corresponding to the second fixing hole 31 for fixing the mass flow meter on the first transfer block 1, and the first fixing hole 13 is provided corresponding to the second screw hole 24 for fixing the first transfer block 1 on the second transfer block 2.
As shown in fig. 1, in use, a first transfer block 1 is fixed on a second transfer block 2 through bolts, and then a mass flow meter is fixed on the first transfer block 1; during detection, gas enters from the left end of the third air passage 22, passes through the first air passage 11, the flow meter probe, the flow meter control valve and the second air passage 12, and finally flows out through the fourth air passage 21; the embodiment is used as a special switching device for a non-standard interface mass flowmeter, realizes that the flowmeter with the non-standard interface is accessed into a flowmeter detection system with a standard interface, does not need to transform the interface of the flowmeter detection system, and is convenient and fast.
Preferably, as shown in fig. 1, 3 to 4, the upper ends of the first fixing hole 13 and the second fixing hole 31 are provided with wide portions for accommodating the head of a bolt, so that the upper surface of the bolt after being fixed does not exceed the upper surface of the first body or the second body, which is convenient for the first transfer block 1 and the second transfer block 2 to be tightly attached; preferably, the peripheries of the upper end openings of the first air passage 11 and the second air passage 12 are provided with sinking grooves 23, and sealing rings are arranged in the sinking grooves 23; the upper end opening periphery of third air flue 22 and fourth air flue 21 is provided with heavy groove 23, is provided with the sealing washer in the heavy groove 23, and the sealing washer adopt rubber seal can, prevent that the kneck gas leakage of different air flues from influencing the examination result.
Further, as shown in fig. 1, the left end opening of the third air passage 22 and the right end opening of the fourth air passage 21 are connected with the external screw connector 25 through threads, a pipeline in the flow meter detection system is convenient to connect through the external screw connector 25, and the pipeline with various diameters can be adapted through replacing different external screw connectors 25.
Specifically, as shown in fig. 1 to 4, the number of the first fixing holes 13, the number of the second fixing holes 31, the number of the first threaded holes 14, and the number of the second threaded holes 24 are four, the number of the first threaded holes 14 and the number of the second threaded holes 24 are both M4-4P threaded blind holes, and M13-2P threads are arranged in the left end opening of the third air duct 22 and the right end opening of the fourth air duct 21; the length and width of the first switching block 1 and the flowmeter base 3 are basically consistent, so that the integral vision of the gas access switching device provided with the mass flowmeter is attractive.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.

Claims (6)

1. The utility model provides a mass flow meter gas access switching device which characterized in that: the first transfer block and the second transfer block are fixed at the bottom of the first transfer block through bolts;
the first adapter block comprises a first block body, a first air passage and a second air passage which are vertically arranged in the middle of the first block body, vertical first fixing holes which are arranged at two ends of the first block body in a penetrating way and first threaded holes which are arranged at two ends of the upper surface of the first block body;
the second switching block comprises a second block body, a third air passage, a fourth air passage and second threaded holes, the third air passage and the fourth air passage are arranged in the second block body, the second threaded holes are formed in the two ends of the upper surface of the second block body, the third air passage and the fourth air passage are L-shaped, openings in the two ends of the third air passage are respectively formed in the upper surface and the left end face of the second block body, openings in the two ends of the fourth air passage are respectively formed in the upper surface and the right end face of the second block body, an opening in the upper end of the third air passage is arranged corresponding to the lower end of the first air passage, and an opening in the upper end of the fourth air passage is arranged corresponding to the lower end of the second air passage; the first block is in threaded connection with the upper part of the second block through a bolt penetrating through the first fixing hole.
2. The mass flow meter gas access adapter of claim 1, wherein: the periphery of the upper end opening of the first air passage and the second air passage is provided with a sinking groove, and a sealing ring is arranged in the sinking groove.
3. The mass flow meter gas access adapter of claim 1, wherein: the periphery of the upper end opening of the third air passage and the fourth air passage is provided with a sinking groove, and a sealing ring is arranged in the sinking groove.
4. The mass flow meter gas access adapter of claim 1, wherein: and the left end opening of the third air passage and the right end opening of the fourth air passage are in threaded connection with an external thread connector.
5. The mass flow meter gas access adapter of claim 1, wherein: the first threaded hole and the second threaded hole are both M4 threaded blind holes.
6. The mass flow meter gas access adapter of claim 1, wherein: m13 threads are arranged in the left end opening of the third air passage and the right end opening of the fourth air passage.
CN202023163250.7U 2020-12-24 2020-12-24 Mass flowmeter gas access switching device Active CN213779157U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202023163250.7U CN213779157U (en) 2020-12-24 2020-12-24 Mass flowmeter gas access switching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202023163250.7U CN213779157U (en) 2020-12-24 2020-12-24 Mass flowmeter gas access switching device

Publications (1)

Publication Number Publication Date
CN213779157U true CN213779157U (en) 2021-07-23

Family

ID=76900503

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202023163250.7U Active CN213779157U (en) 2020-12-24 2020-12-24 Mass flowmeter gas access switching device

Country Status (1)

Country Link
CN (1) CN213779157U (en)

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