CN213591822U

CN213591822U - Special deep hole processing device for semiconductor

Info

Publication number: CN213591822U
Application number: CN202022433954.5U
Authority: CN
Inventors: 胡明星
Original assignee: Dongguan Ai Neng Ju Machinery Co ltd
Current assignee: Dongguan Ai Neng Ju Machinery Co ltd
Priority date: 2020-10-28
Filing date: 2020-10-28
Publication date: 2021-07-02
Anticipated expiration: 2030-10-28

Abstract

The utility model discloses a special deep hole processingequipment of semiconductor, the on-line screen storage device comprises a base, fixed mounting has advancing mechanism, first guide rail, second guide rail and propulsion cylinder on the base, first guide rail fixed mounting is provided with rotary mechanism and awards the oil tank on the one end of base, and be provided with rotary mechanism on the first guide rail, advancing mechanism is connected with the rotary mechanism transmission, awards the oil tank movable mounting and keeps away from advancing mechanism's one end on first guide rail, the one end of first guide rail is kept away from to second guide rail fixed mounting on the base, and is provided with swivel work head on the second guide rail, swivel work head movable mounting is on the second guide rail, the one end of second guide rail is kept away from to propulsion cylinder fixed mounting on the base, and propulsion cylinder is connected with the swivel work head transmission. The utility model has the advantages of high processing precision and convenient use.

Description

Special deep hole processing device for semiconductor

Technical Field

The utility model relates to a deep hole processing technology field specifically is a special deep hole processingequipment of semiconductor.

Background

For example, chinese patent publication No. CN202010394950.2 discloses a semiconductor material deep hole processing device, which comprises a machine body, an installation head, a deep hole drill, a workbench, a base, a nut lifting seat, and a screw, wherein the base is connected with the machine body through the screw, the screw is connected with the nut lifting seat, the nut lifting seat is connected to the workbench, and the deep hole drill is arranged above the workbench. Compared with the prior art, the vibration-absorbing device has the beneficial effects that the vibration-absorbing device has a vibration-absorbing function on the cutter body, can reduce vibration generated during deep hole machining, avoids the influence on the straightness of deep hole machining, is beneficial to improving the precision of deep hole machining, can quickly replace the drill bit, is stably clamped, effectively prevents the cutter body from being loosened due to the rotation influence during deep hole machining, and can also avoid the crack of the base.

However, in practical use, the technical scheme in the comparison document has the following defects: the deep hole processing device in the technical scheme of the comparison document adopts a vertical design, the drilling depth is limited by the lengths of a screw rod and a drill bit, and the specific deep hole cannot be processed; second, deep hole processingequipment among the comparison file technical scheme passes through the workstation fixed work piece, and the deep hole drill bit is located the workstation top, can only follow extremely down during processing, can't effectually carry out multi-angle drilling, and angle of adjustment all can cause off normal, error at every turn, produces badly, seriously influences the product yield, consequently needs to improve to above problem.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a special deep hole processingequipment of semiconductor possesses machining precision height, convenient to use's advantage, has solved the problem of proposing in the above background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a special deep hole processingequipment of semiconductor, includes the base, fixed mounting has advancing mechanism, first guide rail, second guide rail and thrust cylinder on the base, first guide rail fixed mounting is in the one end of base, and is provided with rotary mechanism and awards the oil tank on the first guide rail, advancing mechanism is connected with the rotary mechanism transmission, awards the oil tank movable mounting and keeps away from advancing mechanism's one end on first guide rail, the one end of first guide rail is kept away from to second guide rail fixed mounting on the base, and is provided with swivel work head on the second guide rail, swivel work head movable mounting is on the second guide rail, thrust cylinder fixed mounting keeps away from the one end of first guide rail on the base, and thrust cylinder is connected with the swivel work head transmission.

Preferably, rotary mechanism includes motor cabinet, rotating electrical machines and rotatory axle center, motor cabinet movable mounting is on first guide rail, rotating electrical machines fixed mounting is on the motor cabinet, and rotating electrical machines and rotatory axle center transmission are connected, rotatory axle center movable mounting is on the motor cabinet.

Preferably, the rotary worktable comprises a first base plate, a third guide rail, a first propulsion motor, a first screw rod, a second base plate and a worktable, the first base plate is movably mounted on the second guide rail, the first base plate is in transmission connection with the propulsion oil cylinder, the number of the third guide rails is two, the two third guide rails are fixedly mounted on the first base plate, the first propulsion motor is in transmission connection with the first screw rod, the first screw rod is movably mounted on the first base plate, the first screw rod is in transmission connection with the second base plate, the second base plate is movably mounted on the third guide rail, a plurality of T-shaped grooves are formed in the worktable, the worktable is movably mounted on the second base plate, and the joint is used as a fulcrum for rotary movement.

Preferably, the propelling mechanism comprises a second propelling motor and a second screw rod, the second screw rod is movably mounted on the base and is in transmission connection with the rotating mechanism, the second propelling motor is fixedly mounted on the base and is in transmission connection with the second screw rod.

Preferably, a first follow rest is further arranged on the first guide rail, and the first follow rest is movably mounted on the first guide rail.

Preferably, the base is further provided with two fourth guide rails, and the two fourth guide rails are fixedly mounted on the base.

Preferably, the fourth guide rail is provided with two second follow-up rests, and the two second follow-up rests are movably mounted on the fourth guide rail.

Preferably, the number of the first guide rail and the second guide rail is two.

Preferably, the base below is provided with adjusts the seat, adjust seat and base swing joint, and the quantity of adjusting the seat is eight.

Compared with the prior art, the beneficial effects of the utility model are as follows:

the utility model discloses a set up advancing mechanism and thrust cylinder, advancing mechanism includes second thrust motor and second lead screw, the second lead screw is connected with the rotary mechanism transmission, second thrust motor is connected with second lead screw transmission, thrust cylinder fixed mounting keeps away from the one end of second guide rail on the base, and thrust cylinder is connected with the swivel work head transmission, and the cutting output and the feed output through advancing mechanism and thrust cylinder control deep hole drill bit are compared with adopting the handle control drill bit to feed in the contrast file, can effectively reduce the deviation, and accurate control drilling size has reached the effect that machining precision is high.

Secondly, the utility model arranges a rotary worktable, the rotary worktable comprises a first bottom plate, a third guide rail, a first propulsion motor, a first screw rod, a second bottom plate and a worktable, the first bottom plate is movably arranged on the second guide rail, the first bottom plate is in transmission connection with a propulsion oil cylinder, the number of the third guide rail is two, the two third guide rails are both fixedly arranged on the first bottom plate, the first propulsion motor is in transmission connection with the first screw rod, the first screw rod is movably arranged on the first bottom plate, the first screw rod is in transmission connection with the second bottom plate, the second bottom plate is movably arranged on the third guide rail, a plurality of T-shaped grooves are arranged on the worktable, the worktable is movably arranged on the second bottom plate, the rotary movement is carried out by taking the connection position as a fulcrum, a workpiece is fixed to the rotary worktable, the rotary drilling machine can rotate the workbench to drill holes at random and equal intervals on the circumference, so that the condition that the angle of a workpiece needs to be adjusted repeatedly in a comparison file can be omitted, deviation and errors generated when the angle is adjusted at every time are avoided, and the effect of convenient use is achieved.

Drawings

Fig. 1 is a schematic structural view of the present invention;

fig. 2 is a schematic view of the structure of the present invention;

fig. 3 is a schematic top view of the present invention.

The reference numerals and names in the figures are as follows:

1. a base; 2. a first guide rail; 3. a second guide rail; 4. a propulsion cylinder; 5. an oil feeding tank; 6. a motor base; 7. a rotating electric machine; 8. rotating the axis; 9. a first base plate; 10. a third guide rail; 11. a first propulsion motor; 12. a first lead screw; 13. a second base plate; 14. a work table; 15. a T-shaped slot; 15. a second propulsion motor; 16. a second lead screw; 17. a first follower rest; 19. a fourth guide rail; 20. a second follower rest; 21. an adjusting seat.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 to fig. 3, the present invention provides an embodiment: the utility model provides a special deep hole processingequipment of semiconductor, includes base 1, fixed mounting has advancing mechanism, first guide rail 2, second guide rail 3 and propulsion cylinder 4 on the

base

1, 2 fixed mounting in the one end of base 1 of first guide rail, and be provided with rotary mechanism and awards oil case 5 on the first guide rail 2, advancing mechanism is connected with the rotary mechanism transmission, awards the one end that advancing mechanism was kept away from on first guide rail 2 of oil case 5 movable mounting, 3 fixed mounting of second guide rail keep away from the one end of first guide rail 2 on the base 1, and be provided with swivel work head on the second guide rail 3, swivel work head movable mounting is on second guide rail 3, the one end of keeping away from first guide rail 2 on base 1 is kept away from to propulsion cylinder 4 fixed mounting, and propulsion cylinder 4 is connected with the swivel work head transmission.

More specifically, rotary mechanism includes motor cabinet 6, rotating electrical machines 7 and rotatory axle center 8, motor cabinet 6 movable mounting is on first guide rail 2, rotating electrical machines 7 fixed mounting is on motor cabinet 6, and rotating

electrical machines

7 and 8 transmission connection in rotatory axle center, 8 movable mounting in rotatory axle center are on motor cabinet 6.

More specifically, the rotary worktable comprises a first base plate 9, a third guide rail 10, a first propelling motor 11, a first screw rod 12, a second base plate 13 and a worktable 14, the first base plate 9 is movably installed on the second guide rail 3, the first bottom plate 9 is in transmission connection with the propulsion oil cylinder 4, the number of the third guide rails 10 is two, the two third guide rails 10 are both fixedly arranged on the first bottom plate 9, the first propulsion motor 11 is fixedly arranged on the first bottom plate 9, and the first propelling motor 11 is in transmission connection with the first screw rod 12, the first screw rod 12 is movably arranged on the first bottom plate 9, the first screw rod 12 is in transmission connection with a second bottom plate 13, the second bottom plate 13 is movably arranged on a third guide rail 10, a plurality of T-shaped grooves 15 are arranged on the worktable 14, and the workbench 14 is movably installed on the second bottom plate 13 and performs rotary motion by taking the joint as a fulcrum.

More specifically, the propulsion mechanism includes a second propulsion motor 16 and a second lead screw 17, the second lead screw 17 is movably mounted on the base 1, the second lead screw 17 is in transmission connection with the rotating mechanism, the second propulsion motor 16 is fixedly mounted on the base 1, and the second propulsion motor 16 is in transmission connection with the second lead screw 17.

More specifically, a first follower rest 18 is further disposed on the first guide rail 2, and the first follower rest 18 is movably mounted on the first guide rail 2.

More specifically, the base 1 is further provided with two fourth guide rails 19, and the two fourth guide rails 19 are fixedly mounted on the base 1.

More specifically, the fourth guide rail 19 is provided with two second follow-up blocks 20, and the two second follow-up blocks 20 are movably mounted on the fourth guide rail 19.

More specifically, the number of the first guide rail 2 and the second guide rail 3 is two.

More specifically, base 1 below is provided with adjusts seat 21, adjust seat 21 and base swing joint, and the quantity of adjusting seat 21 is eight.

The working principle is as follows: the utility model discloses the during operation at first with deep hole drill bit fixed mounting on rotatory axle center 8, is fixed to the rotary worktable with the work piece afterwards, and the deep hole drill bit cuts drilling to the work piece under advancing mechanism's drive, and first follower rest 18 and second follower rest 20 carry out the shock attenuation to the deep hole drill bit simultaneously, prevent the drill bit skew.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides a special deep hole processingequipment of semiconductor, includes base (1), its characterized in that: the base (1) is fixedly provided with a propelling mechanism, a first guide rail (2), a second guide rail (3) and a propelling oil cylinder (4), the first guide rail (2) is fixedly arranged at one end of the base (1), and the first guide rail (2) is provided with a rotating mechanism and an oil feeding tank (5), the propelling mechanism is in transmission connection with the rotating mechanism, the oil supply tank (5) is movably arranged at one end of the first guide rail (2) far away from the propelling mechanism, the second guide rail (3) is fixedly arranged at one end of the base (1) far away from the first guide rail (2), and a rotary worktable is arranged on the second guide rail (3), the rotary worktable is movably arranged on the second guide rail (3), the propelling oil cylinder (4) is fixedly arranged at one end, far away from the first guide rail (2), of the base (1), and the propelling oil cylinder (4) is in transmission connection with the rotary workbench.

2. The deep hole processing device special for the semiconductor according to claim 1, wherein: rotary mechanism includes motor cabinet (6), rotating electrical machines (7) and rotatory axle center (8), motor cabinet (6) movable mounting is on first guide rail (2), rotating electrical machines (7) fixed mounting is on motor cabinet (6), and rotating electrical machines (7) and rotatory axle center (8) transmission are connected, rotatory axle center (8) movable mounting is on motor cabinet (6).

3. The deep hole processing device special for the semiconductor according to claim 1, wherein: the rotary workbench comprises a first bottom plate (9), a third guide rail (10), a first propulsion motor (11), a first screw rod (12), a second bottom plate (13) and a workbench (14), wherein the first bottom plate (9) is movably arranged on the second guide rail (3), the first bottom plate (9) is in transmission connection with a propulsion oil cylinder (4), the number of the third guide rails (10) is two, the two third guide rails (10) are fixedly arranged on the first bottom plate (9), the first propulsion motor (11) is in transmission connection with the first screw rod (12), the first screw rod (12) is movably arranged on the first bottom plate (9), the first screw rod (12) is in transmission connection with the second bottom plate (13), the second bottom plate (13) is movably arranged on the third guide rail (10), a plurality of T-shaped grooves (15) are formed in the workbench (14), and the workbench (14) is movably mounted on the second bottom plate (13) and rotates around the connecting position serving as a fulcrum.

4. The deep hole processing device special for the semiconductor according to claim 1, wherein: the propelling mechanism comprises a second propelling motor (16) and a second screw rod (17), the second screw rod (17) is movably mounted on the base (1), the second screw rod (17) is in transmission connection with the rotating mechanism, the second propelling motor (16) is fixedly mounted on the base (1), and the second propelling motor (16) is in transmission connection with the second screw rod (17).

5. The deep hole processing device special for the semiconductor according to claim 1, wherein: still be provided with first follow rest (18) on first guide rail (2), first follow rest (18) movable mounting is on first guide rail (2).

6. The deep hole processing device special for the semiconductor according to claim 1, wherein: the base (1) is further provided with four guide rails (19), the number of the four guide rails (19) is two, and the two fourth guide rails (19) are fixedly installed on the base (1).

7. The deep hole processing device special for the semiconductor according to claim 6, wherein: and a second follow rest (20) is arranged on the fourth guide rail (19), the number of the second follow rests (20) is two, and the second follow rests (20) are movably arranged on the fourth guide rail (19).

8. The deep hole processing device special for the semiconductor according to claim 1, wherein: the number of the first guide rail (2) and the second guide rail (3) is two.

9. The deep hole processing device special for the semiconductor according to claim 1, wherein: base (1) below is provided with adjusts seat (21), adjust seat (21) and base swing joint, and the quantity of adjusting seat (21) is eight.