CN213457646U - Mercury lamp box structure - Google Patents
Mercury lamp box structure Download PDFInfo
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- CN213457646U CN213457646U CN202022020302.9U CN202022020302U CN213457646U CN 213457646 U CN213457646 U CN 213457646U CN 202022020302 U CN202022020302 U CN 202022020302U CN 213457646 U CN213457646 U CN 213457646U
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- box body
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- mercury lamp
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Abstract
The utility model discloses a mercury lamp case structure, it is used for semiconductor silicon chip edge exposure technology, include: the lamp box body is used for accommodating the mercury lamp, an adjustable aperture is formed on the bottom wall of the lamp box body, and a lamp box door is formed on one side wall of the lamp box body; the mercury lamp is fixed on the top wall of the lamp box body above the adjustable aperture; the illumination sensor is arranged in the lamp box body and used for detecting the illumination of the mercury lamp; the temperature sensor is arranged in the lamp box body and is used for measuring the temperature in the lamp box body; the power supply control panel is arranged on the outer side wall of the lamp box body and is used for controlling the power supply of each electric component; the display device is arranged on the outer side wall of the lamp box body and is used for displaying acquisition parameters of the illumination sensor and/or the temperature sensor. The utility model discloses can real time monitoring mercury lamp life, can avoid the wafer conveying just to discover the not enough condition that produces the unplanned downtime of illuminance behind the photoetching position.
Description
Technical Field
The utility model relates to an integrated circuit production field especially relates to a mercury lamp case structure for semiconductor silicon chip edge exposure technology.
Background
Photolithography is one of the most important process steps in semiconductor manufacturing. The main function of the photoetching process is to copy the patterns on the mask plate onto a silicon wafer to prepare for the next etching or ion implantation process. After the glue application and baking are completed, the wafer is transferred to an edge exposure unit. The edge exposure unit is also part of the track developer. The edge portion of the wafer is exposed to light to activate the photochemical reaction. Thus, the photoresist at the edge is dissolved in the developer simultaneously with the exposure pattern at the time of the final development.
The present TEL Track machine WEE mercury lamp system, as shown in fig. 1, mainly includes: mercury lamp house, optic fibre, waterfall optical head and separation blade. When WEE process operation is executed, the blocking piece is opened, the UV sensor measures whether the illumination reaches a process set value, if the values do not accord with each other, the illumination accords with the process set value by adjusting the aperture of the light box aperture, and the wafer is transmitted to the unit to finish the process operation. In the actual production process, the mercury lamp in the WEE lamp box is gradually attenuated, and at the end of the service life, sufficient light intensity cannot be provided to meet the process requirement, so that the mercury lamp is a fixed consumable. At present, the mercury lamp monitoring is only confirmed by measuring the illumination by a UV sensor of a machine station when the operation starts, and once the illumination of the mercury lamp cannot meet the process requirement, an unplanned downtime can be generated. The fixed life time of the mercury lamp is set, and uncertainty is caused by the performance difference of mercury lamp individuals, so that the uncertainty is brought to photoetching production.
SUMMERY OF THE UTILITY MODEL
In the summary section, a series of simplified form concepts are introduced, which are simplifications of the prior art in this field, and which will be further detailed in the detailed description section. The inventive content does not imply any attempt to define the essential features and essential features of the claimed solution, nor is it implied to be intended to define the scope of the claimed solution.
The to-be-solved technical problem of the utility model is to provide a mercury lamp case structure that is used for semiconductor silicon chip edge exposure technology ability real time monitoring mercury lamp life-span.
In order to solve the technical problem, the utility model provides a mercury lamp case structure, it is used for semiconductor silicon chip edge exposure technology, include:
the lamp box body is used for accommodating the mercury lamp, an adjustable aperture is formed on the bottom wall of the lamp box body, and a lamp box door is formed on one side wall of the lamp box body;
the mercury lamp is fixed on the top wall of the lamp box body above the adjustable aperture;
the illumination sensor is arranged in the lamp box body and used for detecting the illumination of the mercury lamp;
the temperature sensor is arranged in the lamp box body and is used for measuring the temperature in the lamp box body;
the power supply control panel is arranged on the outer side wall of the lamp box body and is used for controlling the power supply of each electric component;
and the display device is arranged on the outer side wall of the lamp box body and is used for displaying acquisition parameters of the illumination sensor and/or the temperature sensor.
Optionally, the mercury lamp box structure is further improved, and the mercury lamp box structure further comprises:
the first alarm lamp is connected with the illumination sensor and used for receiving a trigger signal of the illumination sensor and sending out a light alarm;
the illumination sensor is provided with an illumination threshold value, and when the acquisition parameters of the illumination sensor are smaller than the illumination threshold value, the illumination sensor sends out a trigger signal.
Optionally, the mercury lamp box structure is further improved, and the mercury lamp box structure further comprises:
the second alarm lamp is connected with the temperature sensor and used for receiving a trigger signal of the temperature sensor and sending out a light alarm;
the temperature sensor is provided with a temperature threshold, and when the acquisition parameter of the temperature sensor is greater than the temperature threshold, the temperature sensor sends out a trigger signal.
Optionally, the mercury lamp box structure is further improved, the illuminance sensor and the temperature sensor are further connected with the semiconductor silicon wafer edge exposure machine controller through a communication cable, and the collected illuminance parameters and temperature parameters are sent to the semiconductor silicon wafer edge exposure machine controller.
Optionally, the mercury lamp box structure is further improved, and the mercury lamp box structure further comprises:
the timer is arranged on the outer side wall of the lamp box body and is used for displaying the working time of the mercury lamp box;
optionally, the mercury lamp box structure is further improved, and the lamp box body is a cuboid.
Alternatively, the mercury lamp case structure is further improved, and the display device is a liquid crystal display panel.
Optionally, the mercury lamp box structure is further improved, and the display device and the lamp box door are arranged on the same outer side wall of the lamp box body.
Optionally, the mercury lamp box structure is further improved, the display device is located beside the door of the lamp box, and the power control panel is located on the outer side wall of the lamp box body below the display device.
Optionally, the mercury lamp box structure is further improved, and the first alarm lamp is arranged beside the display device.
Optionally, the mercury lamp box structure is further improved, and a second alarm lamp is arranged beside the display device.
The utility model discloses set up illuminance and the temperature in the lamp box body of illuminance sensor and the real-time mercury lamp of gathering of temperature sensor in the lamp box body to show on the display device of lamp box body outer wall. Or, the light alarm is realized by setting an illumination threshold value and a temperature threshold value. Or transmitting the collected illuminance value and the temperature value to a controller of the semiconductor silicon wafer edge exposure machine. The illumination sensor and the temperature sensor are arranged in the lamp box body to acquire the illumination of the mercury lamp and the temperature in the lamp box body in real time, so that the condition that the wafer is not enough in illumination and generates non-planned downtime after being transmitted to a photoetching position can be avoided. In addition, the reasonable setting of the illumination threshold value and the temperature threshold value can give out a pre-alarm when the service life of the mercury lamp is close, the production redundancy is improved, and the unplanned downtime is thoroughly avoided.
Drawings
The drawings of the present application are intended to illustrate the general nature of methods, structures and/or materials used in accordance with certain exemplary embodiments of the present application, and to supplement the description presented in the specification. The drawings of the present invention, however, are not to scale and may not accurately reflect the precise structural or performance characteristics of any given embodiment, and should not be construed as limiting or restricting the scope of numerical values or attributes encompassed by exemplary embodiments in accordance with the present invention. The present invention will be described in further detail with reference to the following detailed description and accompanying drawings:
FIG. 1 shows a JIEGOU SHIYITU system of WEE mercury lamp system of existing TEL Track machine.
Fig. 2 is a schematic structural diagram of the present invention.
Description of the reference numerals
Mercury lamp box structure 1
Waterfall head 2
Baffle 3
UV sensor 4
Wafer 5
Lamp housing 6
Mercury lamp 7
Adjustable aperture 8
A lamp box door 9;
A timer 14.
Detailed Description
The following description of the embodiments of the present invention is provided by way of specific examples, and other advantages and technical effects of the present invention will be fully apparent to those skilled in the art from the disclosure of the present invention. The utility model discloses can also implement or use through different embodiment, each item detail in this specification can also be used based on different viewpoints, carries out various decorations or changes under the general design thought that does not deviate from the utility model. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict. The following exemplary embodiments of the present invention may be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. It is to be understood that these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of these exemplary embodiments to those skilled in the art.
It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may be present. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there are no intervening elements present. Like reference numerals refer to like elements throughout the drawings.
First embodiment, as shown in fig. 2, the present invention provides a mercury lamp box structure for semiconductor silicon wafer edge exposure process, comprising:
a lamp box body 6 for accommodating a mercury lamp 7, an adjustable aperture 8 formed on the bottom wall thereof, and a lamp box door 9 formed on one side wall thereof;
a mercury lamp 7 fixed on the top wall of the lamp box body 6 above the adjustable aperture 8;
an illuminance sensor 10 installed in the lamp housing 6, for detecting illuminance of the mercury lamp;
a temperature sensor 11 installed in the lamp housing 6 for detecting the temperature in the lamp housing;
a power control panel 12 mounted on the outer side wall of the lamp housing 6 for controlling the power of each electric component;
and the display device 13 is arranged on the outer side wall of the lamp box body and is used for displaying the collected parameters of the illumination sensor 9 and/or the temperature sensor 10.
As shown in fig. 2, the display device employs a liquid crystal display panel, which is divided into 2 regions to display temperature and illumination, respectively. The specific installation positions of the illuminance sensor 10 and the temperature sensor 11 in the lamp housing 6 are not particularly limited, and may be any positions as long as they can detect the accurate illuminance and temperature.
A second embodiment, the utility model provides a mercury lamp case structure for semiconductor silicon chip edge exposure technology, include:
a lamp box body 6 for accommodating a mercury lamp 7, an adjustable aperture 8 formed on the bottom wall thereof, and a lamp box door 9 formed on one side wall thereof;
a mercury lamp 7 fixed on the top wall of the lamp box body 6 above the adjustable aperture 8;
an illuminance sensor 10 installed in the lamp housing 6, for detecting illuminance of the mercury lamp;
a temperature sensor 11 installed in the lamp housing 6 for detecting the temperature in the lamp housing;
a power control panel 12 mounted on the outer side wall of the lamp housing 6 for controlling the power of each electric component;
a display device 13 arranged on the outer side wall of the lamp box body and used for displaying the collected parameters of the illumination sensor 9 and/or the temperature sensor 10
The first alarm lamp is connected with the illumination sensor and used for receiving a trigger signal of the illumination sensor and sending out a light alarm;
the second alarm lamp is connected with the temperature sensor and used for receiving a trigger signal of the temperature sensor and sending out a light alarm;
the system comprises an illumination sensor, a first alarm lamp and a second alarm lamp, wherein the illumination sensor is provided with an illumination threshold value, and when the acquisition parameters of the illumination sensor are smaller than the illumination threshold value, the illumination sensor sends a trigger signal to the first alarm lamp to alarm; the temperature sensor is provided with a temperature threshold, and when the acquisition parameter of the temperature sensor is greater than the temperature threshold, the temperature sensor sends a trigger signal to the second alarm lamp to alarm.
The first alarm lamp and the second alarm lamp are preferably mounted beside the display device in parallel, so that an operator can find the alarm conveniently.
A third embodiment, the utility model provides a mercury lamp case structure for semiconductor silicon chip edge exposure technology, include:
a lamp box body 6 for accommodating a mercury lamp 7, an adjustable aperture 8 formed on the bottom wall thereof, and a lamp box door 9 formed on one side wall thereof;
a mercury lamp 7 fixed on the top wall of the lamp box body 6 above the adjustable aperture 8;
an illuminance sensor 10 installed in the lamp housing 6, for detecting illuminance of the mercury lamp;
a temperature sensor 11 installed in the lamp housing 6 for detecting the temperature in the lamp housing;
a power control panel 12 mounted on the outer side wall of the lamp housing 6 for controlling the power of each electric component;
a display device 13 arranged on the outer side wall of the lamp box body and used for displaying the collected parameters of the illumination sensor 9 and/or the temperature sensor 10
The first alarm lamp is connected with the illumination sensor and used for receiving a trigger signal of the illumination sensor and sending out a light alarm;
the second alarm lamp is connected with the temperature sensor and used for receiving a trigger signal of the temperature sensor and sending out a light alarm;
the illumination sensor is provided with an illumination threshold value, and when the acquisition parameter of the illumination sensor is smaller than the illumination threshold value, the illumination sensor sends a trigger signal to the first alarm lamp to alarm; the temperature sensor is provided with a temperature threshold, and when the acquisition parameter of the temperature sensor is greater than the temperature threshold, the temperature sensor sends a trigger signal to the second alarm lamp to alarm. The first alarm lamp and the second alarm lamp are preferably mounted beside the display device in parallel, so that an operator can find the alarm conveniently.
The illumination sensor and the temperature sensor are also connected with the semiconductor silicon wafer edge exposure machine controller through communication cables, and the collected illumination parameters and temperature parameters are sent to the semiconductor silicon wafer edge exposure machine controller.
Optionally, the first to third embodiments are further modified, the lamp box body is a rectangular parallelepiped, the display device is a liquid crystal display panel, and the display device and the lamp box door are disposed on the same outer sidewall of the lamp box body. The display device is arranged beside the door of the lamp box, and the power control panel is arranged on the outer side wall of the lamp box body below the display device.
Optionally, the first to third embodiments are further modified, and the lamp box further comprises a timer 14 mounted on the outer side wall of the lamp box body and used for displaying the working time of the mercury lamp box;
the timer 14 is preferably mounted adjacent the display on the side of the same housing.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The present invention has been described in detail with reference to the specific embodiments and examples, but these should not be construed as limitations of the present invention. Numerous variations and modifications can be made by those skilled in the art without departing from the principles of the invention, which should also be considered as within the scope of the invention.
Claims (11)
1. A mercury lamp box structure used for an edge exposure process of a semiconductor silicon wafer is characterized by comprising the following components:
the lamp box body is used for accommodating the mercury lamp, an adjustable aperture is formed on the bottom wall of the lamp box body, and a lamp box door is formed on one side wall of the lamp box body;
the mercury lamp is fixed on the top wall of the lamp box body above the adjustable aperture;
the illumination sensor is arranged in the lamp box body and used for detecting the illumination of the mercury lamp;
the temperature sensor is arranged in the lamp box body and is used for measuring the temperature in the lamp box body;
the power supply control panel is arranged on the outer side wall of the lamp box body and is used for controlling the power supply of each electric component;
and the display device is arranged on the outer side wall of the lamp box body and is used for displaying acquisition parameters of the illumination sensor and/or the temperature sensor.
2. The mercury lamp cabinet structure of claim 1, further comprising:
the first alarm lamp is connected with the illumination sensor and used for receiving a trigger signal of the illumination sensor and sending out a light alarm;
the illumination sensor is provided with an illumination threshold value, and when the acquisition parameters of the illumination sensor are smaller than the illumination threshold value, the illumination sensor sends out a trigger signal.
3. The mercury lamp cabinet structure of claim 1, further comprising:
the second alarm lamp is connected with the temperature sensor and used for receiving a trigger signal of the temperature sensor and sending out a light alarm;
the temperature sensor is provided with a temperature threshold, and when the acquisition parameter of the temperature sensor is greater than the temperature threshold, the temperature sensor sends out a trigger signal.
4. A mercury lamp cabinet structure as claimed in claim 1, characterized in that: the illuminance sensor and the temperature sensor are also connected with the semiconductor silicon wafer edge exposure machine controller through a communication cable, and the collected illuminance parameters and the collected temperature parameters are sent to the semiconductor silicon wafer edge exposure machine controller.
5. The mercury lamp cabinet structure of claim 1, further comprising:
and the timer is arranged on the outer side wall of the lamp box body and is used for displaying the working time of the mercury lamp box.
6. A mercury lamp cabinet structure as claimed in claim 1, characterized in that: the lamp box body is a cuboid.
7. A mercury lamp cabinet structure as claimed in claim 1, characterized in that: the display device is a liquid crystal display panel.
8. A mercury lamp cabinet structure as claimed in claim 1, characterized in that: the display device and the lamp box door are arranged on the same outer side wall of the lamp box body.
9. A mercury lamp cabinet structure as claimed in claim 7, characterized in that: the display device is arranged beside the door of the lamp box, and the power control panel is arranged on the outer side wall of the lamp box body below the display device.
10. A mercury lamp cabinet structure as claimed in claim 2, characterized in that: the first alarm lamp is installed at the side of the display device.
11. A mercury lamp cabinet structure as claimed in claim 2, characterized in that: the second alarm lamp is installed at the side of the display device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022020302.9U CN213457646U (en) | 2020-09-16 | 2020-09-16 | Mercury lamp box structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022020302.9U CN213457646U (en) | 2020-09-16 | 2020-09-16 | Mercury lamp box structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213457646U true CN213457646U (en) | 2021-06-15 |
Family
ID=76323929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022020302.9U Active CN213457646U (en) | 2020-09-16 | 2020-09-16 | Mercury lamp box structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213457646U (en) |
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2020
- 2020-09-16 CN CN202022020302.9U patent/CN213457646U/en active Active
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