CN213455433U - Target roughness test fixture - Google Patents
Target roughness test fixture Download PDFInfo
- Publication number
- CN213455433U CN213455433U CN202022542730.8U CN202022542730U CN213455433U CN 213455433 U CN213455433 U CN 213455433U CN 202022542730 U CN202022542730 U CN 202022542730U CN 213455433 U CN213455433 U CN 213455433U
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- moving device
- driving motor
- lead screw
- workbench
- screw rod
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Abstract
The utility model discloses a target flatness testing tool, which comprises a workbench, wherein a fixing mechanism and a detection mechanism are arranged on the workbench, the fixing mechanism comprises a first driving motor and a first moving device, one end of the first driving motor is connected with a bidirectional lead screw through a coupler, two ends of the bidirectional lead screw are both provided with fixing plates, and a track corresponding to the fixing plates is arranged on the workbench; the detection mechanism comprises a second driving motor and a second moving device, the second driving motor is connected with a one-way lead screw through a coupler, the second moving device is arranged on the one-way lead screw and can move along the one-way lead screw, and a detector is arranged at the bottom end of the second moving device. The utility model discloses simple structure can realize the roughness of target optional position through the cooperation that removes first mobile device and second mobile device and detect, need not artifical range estimation and can realize measuring, and the accuracy is high, convenient and fast.
Description
Technical Field
The utility model relates to a target detection area, concretely relates to target roughness test fixture.
Background
The coating target is a sputtering source which forms various functional films on a substrate by sputtering through magnetron sputtering, multi-arc ion plating or other types of coating systems under proper process conditions. In short, the target material is a target material bombarded by high-speed charged energy particles, and when the target material is used in a high-energy laser weapon, lasers with different power densities, different output waveforms and different wavelengths interact with different target materials, different killing and damaging effects can be generated.
The upper plane and the lower plane of the target material are easy to bend upwards in the use process, and the use effect can be influenced by some planes even the bending radian reaches 0.5mm, so that the flatness test of the target material before use is a necessary step before the target material is used, the existing detection generally adopts manual measurement, the efficiency is low, and the accuracy of detection data is poor.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide a target roughness test fixture, simple structure can realize the roughness of target optional position through the cooperation that removes first mobile device and second mobile device and detect, need not artifical range estimation and can realize measuring, and the accuracy is high, convenient and fast.
In order to solve the technical problem, the utility model provides a target flatness testing tool, which comprises a workbench, wherein a fixing mechanism and a detection mechanism are arranged on the workbench, the fixing mechanism comprises a first driving motor and a first moving device, one end of the first driving motor is connected with a bidirectional lead screw through a coupling, two ends of the bidirectional lead screw are respectively provided with a fixing plate, the workbench is provided with a track corresponding to the fixing plate, the first moving device is arranged at the center of the workbench and is provided with a through hole for the bidirectional lead screw to pass through; the detection mechanism comprises a second driving motor and a second moving device, the second driving motor is connected with an one-way lead screw through a coupler, the second moving device is arranged on the one-way lead screw and can move along the one-way lead screw, and a detector is arranged at the bottom end of the second moving device.
Further, the through hole of the first moving device is far larger than the diameter of the bidirectional screw rod, so that the bidirectional screw rod cannot move to drive the first moving device to move.
Furthermore, a threaded hole corresponding to the one-way screw rod is formed in the second moving device.
Further, the first moving device and the second moving device are identical in structure and comprise lifting shafts, a lifting cylinder is arranged at one end of each lifting shaft, and a plane plate is arranged at the other end of each lifting shaft.
Further, a rubber layer is arranged on one surface, opposite to the two fixing plates, of each fixing plate.
Further, one side of the two fixing plates opposite to each other is provided with a pressure sensor.
Further, the first driving motor and the second driving motor are stepping motors.
The utility model has the advantages that: this device is put the target on first mobile device, it is rotatory to utilize first driving motor to drive two-way lead screw, two-way lead screw drives the horizontal position that the fixed plate at both ends fixed the target, later utilize second driving motor to drive one-way lead screw rotatory, make the second mobile device remove, treat that the second mobile device removes directly over first mobile device, start the lift axle, drive the detector and move down until contacting the target, alright obtain the roughness of whole target this moment, full automation sets up, it is high to measure the accuracy.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic structural diagram of a first mobile device according to the present invention.
The reference numbers in the figures illustrate: 1. a work table; 2. a fixing mechanism; 3. a detection mechanism; 4. a first drive motor; 5. a first mobile device; 51. a lifting shaft; 52. a lifting cylinder; 53. a flat plate; 6. a bidirectional screw rod; 7. a fixing plate; 8. a support; 9. a second drive motor; 10. a second mobile device; 11. a one-way screw rod; 12. a detector; 13. a rubber layer; 14. a pressure sensor.
Detailed Description
The present invention is further described with reference to the following drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not to be construed as limiting the present invention.
Referring to fig. 1 to 2, an embodiment of a target flatness testing tool of the present invention includes a workbench 1, the workbench 1 is provided with a fixing mechanism 2 and a detecting mechanism 3, the fixing mechanism 2 includes a first driving motor 4 and a first moving device 5, one end of the first driving motor 4 is connected to a bidirectional lead screw 6 through a coupling, two ends of the bidirectional lead screw 6 are both provided with a fixing plate 7, the workbench 1 is provided with a track corresponding to the fixing plate 7, the first moving device 5 is arranged at the center of the workbench 1 and is provided with a through hole for the bidirectional lead screw 6 to pass through; the detection mechanism 3 comprises a second driving motor 9 and a second moving device 10, the second driving motor 9 is connected with a one-way screw rod 11 through a coupler, the second moving device 10 is arranged on the one-way screw rod 11 and can move along the one-way screw rod 11, and a detector 12 is arranged at the bottom end of the second moving device 10.
When the target material detection device is used, firstly, a target material is placed on the first moving device 5, the first driving motor 4 is used for driving the two-way screw rod 6 to rotate, the two-way screw rod 6 is used for driving the fixing plates 7 at two ends to fix the horizontal position of the target material, then the second driving motor 9 is used for driving the one-way screw rod 11 to rotate, so that the second moving device 10 moves, when the second moving device 10 moves right above the first moving device 5, the lifting shaft 51 is started, the detector 12 is driven to move downwards until the target material is contacted, and at the moment, the flatness of the whole target material can be obtained.
The through hole of the first moving device 5 is far larger than the diameter of the bidirectional screw rod 6, so that the bidirectional screw rod 6 can not drive the first moving device 5 to move, the first moving device 5 can be placed at any position of the workbench 1 at will, the fixing mechanisms 2 on the workbench 1 can also be provided with a plurality of fixing mechanisms, and the detection mechanisms 3 can also be provided with a plurality of fixing mechanisms, so that the positions can be corrected conveniently.
The first moving device 5 and the second moving device 10 have the same structure, and both include a lifting shaft 51, one end of the lifting shaft 51 is provided with a lifting cylinder 52, the other end of the lifting shaft 51 is provided with a flat plate 53, the flat plate 53 on the first moving device 5 is used for placing a target, and the flat plate 53 on the second moving device 10 is used for fixing the detection mechanism 3.
The rubber layer 13 and the pressure sensor 14 are arranged on the opposite surfaces of the two fixing plates 7, so that the fixing plates 7 are prevented from rubbing and damaging the edges of the target in the process of fixing the target.
The first driving motor 4 and the second driving motor 9 adopt stepping motors, and the control precision is high.
The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutes or changes made by the technical personnel in the technical field on the basis of the utility model are all within the protection scope of the utility model. The protection scope of the present invention is subject to the claims.
Claims (7)
1. A target flatness testing tool is characterized by comprising a workbench, wherein a fixing mechanism and a detection mechanism are arranged on the workbench, the fixing mechanism comprises a first driving motor and a first moving device, one end of the first driving motor is connected with a bidirectional screw rod through a coupler, fixing plates are arranged at two ends of the bidirectional screw rod, a track corresponding to the fixing plates is arranged on the workbench, and the first moving device is arranged in the center of the workbench and is provided with a through hole for the bidirectional screw rod to pass through;
the detection mechanism comprises a second driving motor and a second moving device, the second driving motor is connected with an one-way lead screw through a coupler, the second moving device is arranged on the one-way lead screw and can move along the one-way lead screw, and a detector is arranged at the bottom end of the second moving device.
2. The target flatness testing fixture of claim 1 wherein the through hole of the first moving device is much larger than the diameter of the bidirectional screw rod, so that the bidirectional screw rod cannot move to drive the first moving device to move.
3. The target flatness testing fixture of claim 1, wherein the second moving device is provided with a threaded hole corresponding to the one-way screw rod.
4. The target flatness testing tool of claim 1, wherein the first moving device and the second moving device have the same structure and each comprise a lifting shaft, one end of the lifting shaft is provided with a lifting cylinder, and the other end of the lifting shaft is provided with a plane plate.
5. The target flatness testing fixture of claim 1, wherein a rubber layer is disposed on one surface of each of the two fixing plates opposite to each other.
6. The target flatness testing fixture of claim 1, wherein pressure sensors are arranged on opposite surfaces of the two fixing plates.
7. The target flatness testing fixture of claim 1 wherein the first and second drive motors are stepper motors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022542730.8U CN213455433U (en) | 2020-11-06 | 2020-11-06 | Target roughness test fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022542730.8U CN213455433U (en) | 2020-11-06 | 2020-11-06 | Target roughness test fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213455433U true CN213455433U (en) | 2021-06-15 |
Family
ID=76299362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022542730.8U Active CN213455433U (en) | 2020-11-06 | 2020-11-06 | Target roughness test fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213455433U (en) |
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2020
- 2020-11-06 CN CN202022542730.8U patent/CN213455433U/en active Active
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