CN213327824U

CN213327824U - Cooling cover for CVD coating equipment reaction cavity

Info

Publication number: CN213327824U
Application number: CN202022235874.9U
Authority: CN
Inventors: 王彤
Original assignee: Changzhou Ainxi Nano Coating Technology Co ltd
Current assignee: Changzhou Ainxi Nano Coating Technology Co ltd
Priority date: 2020-10-09
Filing date: 2020-10-09
Publication date: 2021-06-01
Anticipated expiration: 2030-10-09

Abstract

The utility model relates to the technical field of metal cutting tools and tool and die coatings, and discloses a cooling cover for a CVD coating equipment reaction cavity, which comprises a barrel body, wherein the outer side of the barrel body is respectively and fixedly provided with an air blowing channel, a bolt rod connecting rod operating handle, an external heat dissipation pore plate, a bolt rod connecting rod operating mechanism and a hoisting pore plate fixed beam, one side of the air blowing channel is fixedly provided with an air blowing inlet port, the cooling cover for the CVD coating equipment reaction cavity can block the external heat radiation of the reaction cavity through the barrel body part of the cooling cover, can prevent the surface heat radiation of the reaction cavity from diffusing to other objects around the external damage, accelerates the cooling of the reaction cavity to a certain extent through the air blowing channel and the air blowing inlet port, and cools the reaction cavity, the reaction cavity is cooled rapidly, and the production efficiency is improved.

Description

Cooling cover for CVD coating equipment reaction cavity

Technical Field

The utility model relates to a metal cutting tool and worker's mould coating technical field specifically are a cooling jacket that is used for CVD coating equipment reaction cavity.

Background

CVD is a method for forming a film, particularly a thin film, on the surface of a workpiece for metal working of other materials (substrates), such as a die, a cutting tool, a wear-resistant, corrosion-resistant part, etc., and chemical vapor deposition is characterized by the progress of a chemical reaction of compounds contained in reaction gases, the main product of the desired chemical reaction being deposited on the surface of the substrate and forming a coating or film thereon, possible reaction by-products being present in gaseous form and having to be removed from the gas mixture to ensure the film properties, which is achieved by means of an exhaust line, the service life of the coated cutting tool, tool and die is greatly increased, and the coated parts are more corrosion-resistant and wear-resistant.

In the prior art, when the couple of workshop driving was all adopted in the hoist and mount of reaction chamber cavity to remove the reaction chamber cavity, the workshop driving can't be accurate remove directly over the reaction chamber cavity, the handling in-process simultaneously, because the driving inertia in workshop is too big, the reaction chamber rocks greatly, and before hanging away the heating mantle, need artificial high temperature resistant thermal-insulated aluminium foil board remove the reaction chamber cavity and block the thermal radiation all around, it is inconvenient to operate.

SUMMERY OF THE UTILITY MODEL

Technical scheme

For realize above-mentioned easy operation is convenient, improve production efficiency purpose, the utility model provides a following technical scheme: a cooling cover for a CVD coating equipment reaction cavity comprises a barrel body, wherein a blowing channel, a plug rod connecting rod operating handle, an external heat dissipation pore plate, a plug rod connecting rod operating mechanism and a hoisting pore plate fixing beam are respectively and fixedly arranged on the outer side of the barrel body, a blowing inlet is fixedly arranged on one side of the blowing channel, a turnover door push rod is fixedly arranged on one side of the inner wall of the blowing inlet, support legs and a guide fixing block are respectively and fixedly arranged at the bottom of the blowing channel, an upper hoisting pore plate and a lower hoisting pore plate are respectively and fixedly arranged at one end of the hoisting pore plate fixing beam, a travel switch induction block is arranged on one side of the upper hoisting pore plate, a plug rod fixing beam is fixedly arranged at the top of the barrel body, a plug rod sleeve fixing block is fixedly arranged at the bottom of the plug rod fixing beam, and a plug, the inside movable mounting of bolt pole cover has the bolt pole, inside movable mounting of bolt pole connecting rod operating device has the knob plunger.

Preferably, the outlet holes of the blowing channels are evenly distributed on the inner wall of the barrel.

Preferably, the surface of the cylinder is embedded with a screw column.

Preferably, the bolt rod connecting rod operating handle and the bolt rod connecting rod operating mechanism are connected in a welding mode.

Preferably, the guide fixing block is fixedly installed in a nut embedded in the bottom plate of the blowing channel through a screw.

Advantageous effects

Compared with the prior art, the utility model provides a cooling jacket for CVD coating equipment reaction cavity possesses following beneficial effect:

1. this a cooling cover for CVD coating equipment reaction cavity, through with the help of special lift, but cooling cover accurate positioning and remove to the reaction cavity top, can steady removal and lift reaction cavity simultaneously, easy operation is convenient.

2. This a cooling cover for CVD coating equipment reaction chamber, the barrel part through the cooling cover blocks the outside heat radiation of reaction chamber, can prevent that surface heat radiation from diffusing other objects around the outside damage, the outside heat dissipation orifice plate certain degree of cooling cover has accelerated the cooling of reaction chamber, and the cooling cover borrows by outside air-blower, blow cold wind through the passageway of blowing and the inlet port of blowing to the reaction chamber outside, cool down reaction chamber, let reaction chamber cool off fast, the production efficiency is improved.

Drawings

FIG. 1 is a front view of the overall structure of the present invention;

FIG. 2 is a top view of the overall structure of the present invention;

fig. 3 is a left side view of the overall structure of the present invention.

In the figure: the air blowing device comprises a blowing channel 1, a plug rod connecting rod operating handle 2, an external heat dissipation pore plate 3, an upper lifting pore plate 4, a travel switch induction block 5, a lower lifting pore plate 6, support legs 7, guide fixing blocks 8, an air blowing inlet 9, a turnover door push rod 10, a plug rod 11, a plug rod connecting rod operating mechanism 12, a barrel 13, a plug rod fixing beam 14, a lifting pore plate fixing beam 15, a plug rod sleeve 16, a plug rod sleeve fixing block 17 and a knob plunger 18.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, a cooling cover for a reaction chamber of a CVD coating apparatus comprises a cylinder 13, wherein a blowing channel 1, a latch rod operating handle 2, an external heat dissipating orifice plate 3, a latch rod operating mechanism 12 and a lifting orifice plate fixing beam 15 are respectively and fixedly installed at the outer side of the cylinder 13, the latch rod operating handle 2 can adopt other structural modes capable of achieving the same purpose, a blowing inlet 9 is fixedly installed at one side of the blowing channel 1, the bottom of the cylinder 13 can be provided with no blowing channel 1 and no blowing inlet 9, an overturning door push rod 10 is fixedly installed at one side of the inner wall of the blowing inlet 9, support legs 7 and guide fixing blocks 8 are respectively and fixedly installed at the bottom of the blowing channel 1, the number of the support legs 7 and the guide fixing blocks 8 can be multiple, at least three, an upper lifting orifice plate 4 and a lower lifting orifice plate 6 are respectively and fixedly installed at one end of the lifting, the quantity of going up hoist and mount orifice plate 4 and hoist orifice plate 6 down all can be a plurality of, stroke switch response piece 5 is installed to one side of going up hoist and mount orifice plate 4, the top fixed mounting of barrel 13 has bolt pole fixed beam 14, the bottom fixed mounting of bolt pole fixed beam 14 has bolt pole cover fixed block 17, fixed mounting has bolt pole cover 16 on the bolt pole cover fixed block 17, the inside movable mounting of bolt pole cover 16 has bolt pole 11, the inside movable mounting of bolt pole connecting rod operating device 12 has knob plunger 18.

Wherein, preferentially, the outlet hole evenly distributed of the passageway of blowing 1 is on the inner wall of barrel 13, makes things convenient for the inside heat dissipation cooling of barrel 13.

Preferably, a screw column is embedded in the surface of the cylinder 13, so that the external heat dissipation pore plate 3 can be conveniently and fixedly mounted.

Preferably, the latch rod operating handle 2 and the latch rod operating mechanism 12 are connected by welding.

Preferably, the guide fixing block 8 is fixedly installed in a nut embedded in a bottom plate of the blowing channel 1 through a screw.

The utility model discloses a theory of operation and use flow: a lift of a special form hoists the cooling jacket and moves to the top of the reaction cavity through the upper hoisting pore plate 4 and the lower hoisting pore plate 6 of the cooling jacket itself, cooperates with this lift, and the cooling jacket can be accurately positioned right above the reaction cavity, and the lift falls the cooling jacket outside the reaction cavity. Through the barrel 13 of cooling jacket and outside heat dissipation orifice plate, the cooling jacket can stop the heat of reaction chamber body, prevent thermal radiation outdiffusion, after the reaction chamber body cools off completely, through bolt pole connecting rod operating handle 2 and bolt pole connecting rod operating device 12, insert on the top couple of reaction chamber cavity with bolt pole 11, through knob plunger 18 with the connecting rod locking, prevent that the couple from droing from the connecting rod, thereby reach the lift through remove with lift cooling jacket remove with the purpose of lift reaction chamber body. Bottom stabilizer blade 7 plays the supporting role to the cooling cover, direction fixed block 8 can play fixed and guide effect to the reaction chamber body at the in-process that removes and go up and down the reaction chamber body, after the cooling cover falls on the outside of reaction chamber body completely, upset door push rod 10 can be opened near the outside air-blower of reaction chamber body and blow the pipeline, through the inlet port 9 of blowing, with the outside pipeline of blowing and the cooling cover 1 connection of blowing, on the reaction chamber body is blown to by the exit hole of the passageway 1 of blowing again, carry out the forced air cooling to the reaction chamber body.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A cooling cover for a CVD coating equipment reaction cavity comprises a cylinder body (13), and is characterized in that: the outer side of the barrel body (13) is respectively and fixedly provided with an air blowing channel (1), a bolt rod connecting rod operating handle (2), an external heat dissipation pore plate (3), a bolt rod connecting rod operating mechanism (12) and a hoisting pore plate fixing beam (15), one side of the air blowing channel (1) is fixedly provided with an air blowing inlet (9), one side of the inner wall of the air blowing inlet (9) is fixedly provided with a turnover door push rod (10), the bottom of the air blowing channel (1) is respectively and fixedly provided with a support leg (7) and a guide fixing block (8), one end of the hoisting pore plate fixing beam (15) is respectively and fixedly provided with an upper hoisting pore plate (4) and a lower hoisting pore plate (6), one side of the upper hoisting pore plate (4) is provided with a travel switch induction block (5), the top of the barrel body (13) is fixedly provided with a bolt rod fixing beam (14), and the bottom of the bolt rod fixing beam (14, the novel bolt is characterized in that a bolt sleeve (16) is fixedly mounted on the bolt sleeve fixing block (17), a bolt rod (11) is movably mounted inside the bolt sleeve (16), and a knob plunger (18) is movably mounted inside the bolt rod connecting rod operating mechanism (12).

2. The cooling shield for the reaction chamber of the CVD coating apparatus according to claim 1, wherein: the outlet holes of the blowing channel (1) are uniformly distributed on the inner wall of the cylinder body (13).

3. The cooling shield for the reaction chamber of the CVD coating apparatus according to claim 1, wherein: and a screw column is embedded in the surface of the cylinder (13).

4. The cooling shield for the reaction chamber of the CVD coating apparatus according to claim 1, wherein: the bolt rod connecting rod operating handle (2) and the bolt rod connecting rod operating mechanism (12) are connected in a welding mode.

5. The cooling shield for the reaction chamber of the CVD coating apparatus according to claim 1, wherein: the guide fixing block (8) is fixedly installed in a nut pre-embedded in a bottom plate of the blowing channel (1) through a screw.