CN213275355U - Laser-induced breakdown spectroscopy scanning analyzer - Google Patents
Laser-induced breakdown spectroscopy scanning analyzer Download PDFInfo
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- CN213275355U CN213275355U CN202021627763.6U CN202021627763U CN213275355U CN 213275355 U CN213275355 U CN 213275355U CN 202021627763 U CN202021627763 U CN 202021627763U CN 213275355 U CN213275355 U CN 213275355U
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Abstract
The embodiment of the application discloses laser-induced breakdown spectroscopy scans analysis appearance includes: pulse laser (1), mechanical shutter (2), beam expander (3), photoelectric detector (4), dichroic mirror (5), fiber coupler (6), optic fibre (7), spectrum appearance (8), beam splitter (9), focusing lens (12), laser locator (16), three-dimensional electronic displacement platform (17), cable (18), this laser-induced breakdown spectroscopy scanning analysis appearance has advantages such as real-time, high flux, many elements are surveyed simultaneously, the functions such as having assembleed element detection, spectrum identification, micro-imaging, auto focus, can realize whole unmanned automatic scanning, it realizes element analysis to survey point by point through the sample surface, visual two-dimensional plane distribution who reappears many components, establish the relation of element and structure, can expect to obtain wide application in the science such as geology, biology, material.
Description
Technical Field
The application relates to the technical field of photoelectric nondestructive testing, in particular to a laser-induced breakdown spectroscopy scanning analyzer.
Background
Laser-induced breakdown spectroscopy (LIBS) is a spectroscopic technique which realizes Laser ablation of a substance by focusing pulsed Laser, generates luminous plasma, and completes substance element component detection and analysis by characteristic radiation of the plasma. After the device is in butt joint with a scanning device, LIBS single-point detection can be promoted to multi-point element component analysis, scanning type component detection of an area array is further realized through points and areas, and qualitative and quantitative analysis of element component distribution of high spatial resolution on the surface of a sample is efficiently completed.
Most of the existing LIBS spectrum scanning analyzers use an independent time sequence control unit to complete operations such as laser trigger emission, spectrometer detection and acquisition, and motion of an electric displacement table, and in order to ensure stability and repeatability of detection results, high-quality active Q-switched lasers are often adopted, so that the cost is high, and the requirement on electronic control is high.
Therefore, there is a need to develop a low-cost laser-induced breakdown spectroscopy scanning analyzer based on a passively Q-switched laser, which can complete LIBS scanning detection and analysis with high stability and high repeatability without a separate timing control unit under the condition of not changing the basic functions of the scanning system.
Disclosure of Invention
The embodiment of the application provides a laser-induced breakdown spectroscopy scanning analyzer, which can realize closed-loop control and complete area array scanning and detection analysis of a designated sample area.
In a first aspect, an embodiment of the present application provides a laser-induced breakdown spectroscopy scanning analyzer, including: the device comprises a pulse laser 1, a mechanical shutter 2, a beam expander 3, a photoelectric detector 4, a dichroic mirror 5, an optical fiber coupler 6, an optical fiber 7, a spectrometer 8, a beam splitter 9, a focusing lens 12, a laser positioner 16, a three-dimensional electric displacement table 17 and a cable 18;
the laser system comprises a pulse laser (1), a mechanical shutter (2), a beam expander (3), a dichroic mirror (5) and a laser processing unit, wherein the pulse laser (1) is used for emitting laser, the mechanical shutter (2) controls the laser emitted by the pulse laser (1) to enter the beam expander (3) through opening and closing, the beam expander (3) is used for expanding the laser, and the dichroic mirror (5) is used for dividing the expanded laser into a first reflected laser beam and a first transmitted laser beam; the first reflected laser beam is focused on the three-dimensional electric displacement table (17) through the beam splitter (9) and the focusing lens (12), the three-dimensional electric displacement table (17) is used for placing an object to be detected, the focusing lens (12) is used for focusing laser on the surface of the object to be detected to generate plasma, the plasma emits LIBS signal light, the LIBS signal light is divided into a second transmitted beam and a second reflected beam through the focusing lens (12) and the beam splitter (9), the signal light of the second transmitted beam after being transmitted by the dichroic mirror (5) is collected by the optical fiber coupler (6), signals collected by the optical fiber coupler (6) are transmitted through an optical fiber (7) and enter the spectrometer (8), and the spectrometer (8) is used for performing spectrum detection; the first transmission laser beam emitted by the dichroic mirror (5) is subjected to signal detection by the photoelectric detector (4) and converted into an electric signal, the electric signal is transmitted to the spectrometer (8) by the cable (18), and the spectrometer (8) is used for performing spectrum detection under the external touch control of the electric signal.
With reference to the first aspect, in a first possible implementation manner of the first aspect, the laser-induced breakdown spectroscopy scanner further includes: and the nozzle 15 is used for releasing high-pressure gas to blow off sputtering solid particles in the laser focusing process or releasing buffer gas (such as argon, helium and the like) to enhance a plasma signal after the nozzle 15 is butted with a gas injection device.
With reference to the first aspect and the foregoing implementation manner, in a second possible implementation manner of the first aspect, the nozzle 15 is used for extracting sputtered solid particles in a laser focusing process after being docked with an air extracting device.
With reference to the first aspect and the foregoing implementation manner of the first aspect, in a third possible implementation manner of the first aspect, the laser-induced breakdown spectroscopy scanner further includes: the annular light source 13 and the micro camera 14 are used for illuminating the surface of the object on the three-dimensional electric displacement table 17, and the micro camera 14 is used for shooting the illuminated surface of the object on the three-dimensional electric displacement table 17.
With reference to the first aspect and the foregoing implementation manner of the first aspect, in a fourth possible implementation manner of the first aspect, the laser-induced breakdown spectroscopy scanning analyzer further includes: the optical signal emitted by the surface of the object illuminated by the annular light source 13 on the three-dimensional electric displacement table 17 is reflected by the focusing lens 12 and the beam splitter 9 to enter the imaging lens 10 and form an image on the camera 11.
With reference to the first aspect and the foregoing implementation manner of the first aspect, in a fifth possible implementation manner of the first aspect, the laser-induced breakdown spectroscopy scanner further includes: and the laser positioner 16 is used for determining that the surface of the object to be measured placed on the electric displacement table 17 is positioned at the position of a laser focus point.
With reference to the first aspect and the foregoing implementation manner, in a sixth possible implementation manner of the first aspect, the mechanical shutter 2, the spectrometer 8, the camera 11, the micro camera 14, the laser positioner 16, the ring light source 13, and the three-dimensional electric displacement table 17 are all connected by a computer and synchronized in time sequence.
By adopting the technical scheme, the low-cost laser-induced breakdown spectroscopy scanning analyzer based on the passive Q-switched laser is developed, and the LIBS scanning detection and analysis with high stability and high repeatability can be completed without an independent time sequence control unit under the condition that the basic functions of a scanning system are not changed.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 shows a schematic structural diagram of a laser induced breakdown spectroscopy scanning analyzer according to an embodiment of the present application.
Detailed Description
Description of reference numerals: the device comprises a pulse laser 1, a mechanical shutter 2, a beam expander 3, a photoelectric detector 4, a dichroic mirror 5, an optical fiber coupler 6, an optical fiber 7, a spectrometer 8, a light splitting sheet 9, an imaging lens 10, a camera 11, a focusing lens 12, an annular light source 13, a miniature camera 14, a nozzle 15, a laser positioner 16, a three-dimensional electric displacement table 17 and a cable 18.
In order to make those skilled in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
As shown in fig. 1, a laser-induced breakdown spectroscopy scanning analyzer according to an embodiment of the present application is shown, and includes a pulse laser 1, a mechanical shutter 2, a beam expander 3, a photodetector 4, a dichroic mirror 5, an optical fiber coupler 6, an optical fiber 7, a spectrometer 8, a beam splitter 9, an imaging lens 10, a camera 11, a focusing lens 12, an annular light source 13, a micro camera 14, a nozzle 15, a laser positioner 16, a three-dimensional electric displacement stage 17, and a cable 18.
The pulse laser 1 emits laser, the laser beam is expanded through the beam expander 3 through the opened mechanical shutter 2, the expanded laser is reflected by the dichroic mirror 5, penetrates through the light splitting sheet 9, enters the focusing lens 12, and is converged on the surface of an object on the three-dimensional electric displacement table 17 to generate luminous plasma.
Specifically, the pulse laser 1 may be a passive Q-switched laser or an active Q-switched laser, the dichroic mirror 5 is designed to be a surface coating film for reflecting a laser band and transmitting a visible light band, the spectrometer 8 is a fiber spectrometer or a grating spectrometer with an out-of-band trigger function, and the beam splitter 9 may be a surface coating film with a ratio of transmission (90%) to reflection (10%).
The expanded laser generates a small amount of transmitted light at the dichroic mirror 5, and the transmitted light is collected by the photodetector 4, converted into an electrical signal, transmitted to the spectrometer 1 through the cable 18, and used as an external trigger to control the spectrometer 1 to complete spectrum detection.
The LIBS signal light emitted by the light-emitting plasma penetrates through the focusing lens 12 and the light splitting sheet 9, penetrates through the dichroic mirror 5, enters the optical fiber coupler 6, is conducted through the optical fiber 7 and enters the spectrometer 8, and the spectrum detection is completed after the spectrometer is triggered.
In the plasma generation process, after the nozzle 15 is in butt joint with the gas injection device, high-pressure gas is released to blow away sputtered solid particles in the laser focusing process, and buffer gas (helium, argon and the like) can be released to enhance an LIBS signal.
In the plasma generation process, after the nozzle 15 is in butt joint with the air extractor, the sputtered solid particles in the laser focusing process are extracted, so that the interference to the excitation process is reduced.
The annular light source 13 illuminates the surface of an object on the three-dimensional electric displacement table 17, an image of the illuminated surface of the object is captured by the micro camera 14, and the obtained image is a wide-field and wide-range image.
The annular light source 13 illuminates the surface of an object on the three-dimensional electric displacement table 17, the illuminated surface of the object passes through the focusing lens 12, is reflected by the beam splitter 9, enters the imaging lens 10, and completes enlarged imaging on the camera 11, and the obtained imaging is an image with a narrow view field and a small range.
Specifically, the laser positioner 16 is configured to determine that the surface of the object to be measured placed on the electric displacement table 17 is at the position of the laser focusing point.
The mechanical shutter 2, the spectrometer 8, the camera 11, the miniature camera 14, the laser positioner 16, the annular light source 13 and the three-dimensional electric displacement table 17 are all connected with a computer to realize synchronous time sequence work and complete closed-loop flow control.
Those skilled in the art will clearly understand that the techniques in the embodiments of the present application may be implemented by way of software plus a required general hardware platform. Based on such understanding, the technical solutions in the embodiments of the present application may be essentially implemented or a part contributing to the prior art may be embodied in the form of a software product, which may be stored in a storage medium, such as a ROM/RAM, a magnetic disk, an optical disk, etc., and includes several instructions for enabling a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the method described in the embodiments or some parts of the embodiments of the present application.
It is noted that, in this document, relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The foregoing are merely exemplary embodiments of the present invention, which enable those skilled in the art to understand or practice the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
The same and similar parts in the various embodiments in this specification may be referred to each other. Especially, for the terminal embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant points can be referred to the description in the method embodiment.
The above-described embodiments of the present application do not limit the scope of the present application.
Claims (7)
1. A laser induced breakdown spectroscopy scanning analyzer, comprising: the device comprises a pulse laser (1), a mechanical shutter (2), a beam expander (3), a photoelectric detector (4), a dichroic mirror (5), an optical fiber coupler (6), an optical fiber (7), a spectrometer (8), a light splitting sheet (9), a focusing lens (12), a laser positioner (16), a three-dimensional electric displacement table (17) and a cable (18);
the laser system comprises a pulse laser (1), a mechanical shutter (2), a beam expander (3), a dichroic mirror (5) and a laser processing unit, wherein the pulse laser (1) is used for emitting laser, the mechanical shutter (2) controls the laser emitted by the pulse laser (1) to enter the beam expander (3) through opening and closing, the beam expander (3) is used for expanding the laser, and the dichroic mirror (5) is used for dividing the expanded laser into a first reflected laser beam and a first transmitted laser beam; the first reflected laser beam is focused on the three-dimensional electric displacement table (17) through the beam splitter (9) and the focusing lens (12), the three-dimensional electric displacement table (17) is used for placing an object to be detected, the focusing lens (12) is used for focusing laser on the surface of the object to be detected to generate plasma, the plasma emits LIBS signal light, the LIBS signal light is divided into a second transmitted beam and a second reflected beam through the focusing lens (12) and the beam splitter (9), the signal light of the second transmitted beam after being transmitted by the dichroic mirror (5) is collected by the optical fiber coupler (6), signals collected by the optical fiber coupler (6) are transmitted through an optical fiber (7) and enter the spectrometer (8), and the spectrometer (8) is used for performing spectrum detection; the first transmission laser beam emitted by the dichroic mirror (5) is subjected to signal detection by the photoelectric detector (4) and converted into an electric signal, the electric signal is transmitted to the spectrometer (8) by the cable (18), and the spectrometer (8) is used for performing spectrum detection under the external touch control of the electric signal.
2. The laser induced breakdown spectroscopy scanner of claim 1, further comprising: and the nozzle (15) is used for releasing high-pressure gas to blow away sputtered solid particles in the laser focusing process or releasing buffer gas for enhancing a plasma signal after the nozzle (15) is butted with the gas injection device.
3. Laser induced breakdown spectroscopy analyzer according to claim 2, characterized in that the nozzle (15) is used to extract sputtered solid particles during laser focusing after docking with a gas extraction device.
4. The laser induced breakdown spectroscopy scanner of claim 3, further comprising: the annular light source (13) is used for illuminating the surface of an object on the three-dimensional electric displacement table (17), and the micro camera (14) is used for shooting the illuminated surface of the object on the three-dimensional electric displacement table (17).
5. The laser induced breakdown spectroscopy scanner of claim 4, further comprising: the optical signal emitted by the surface of the object illuminated by the annular light source (13) on the three-dimensional electric displacement table (17) is reflected by the focusing lens (12) and the spectroscope (9) to enter the imaging lens (10) and is imaged on the camera (11), wherein the second reflected light beam is the signal light emitted by the surface of the object illuminated by the annular light source (13) on the three-dimensional electric displacement table (17) and reflected by the focusing lens (12) and the spectroscope (9).
6. The laser induced breakdown spectroscopy scanner of claim 5, further comprising: the laser positioning device (16) is used for determining that the surface of an object to be measured placed on the three-dimensional electric displacement table (17) is located at the position of a laser focusing point.
7. The laser induced breakdown spectroscopy scanner according to claim 5, wherein the mechanical shutter (2), the spectrometer (8), the camera (11), the micro camera (14), the laser positioner (16), the ring light source (13), the three-dimensional motorized displacement stage (17) are connected and timed by a computer.
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| CN202021627763.6U CN213275355U (en) | 2020-08-06 | 2020-08-06 | Laser-induced breakdown spectroscopy scanning analyzer |
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| CN202021627763.6U CN213275355U (en) | 2020-08-06 | 2020-08-06 | Laser-induced breakdown spectroscopy scanning analyzer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114018901A (en) * | 2021-11-18 | 2022-02-08 | 山东东仪光电仪器有限公司 | Laser-induced breakdown spectrometer based on galvanometer scanning analysis and spectrum detection method thereof |
| CN114393313A (en) * | 2021-12-01 | 2022-04-26 | 华中科技大学 | Laser scanning intelligent processing device and method based on coaxial detection |
| CN114660047A (en) * | 2022-03-15 | 2022-06-24 | 中国工程物理研究院材料研究所 | Full-spectrum coaxial optical lens barrel |
-
2020
- 2020-08-06 CN CN202021627763.6U patent/CN213275355U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114018901A (en) * | 2021-11-18 | 2022-02-08 | 山东东仪光电仪器有限公司 | Laser-induced breakdown spectrometer based on galvanometer scanning analysis and spectrum detection method thereof |
| CN114393313A (en) * | 2021-12-01 | 2022-04-26 | 华中科技大学 | Laser scanning intelligent processing device and method based on coaxial detection |
| CN114660047A (en) * | 2022-03-15 | 2022-06-24 | 中国工程物理研究院材料研究所 | Full-spectrum coaxial optical lens barrel |
| CN114660047B (en) * | 2022-03-15 | 2023-10-27 | 中国工程物理研究院材料研究所 | Full spectrum coaxial optical lens cone |
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