CN213209897U

CN213209897U - Imaging ellipsometer based on magneto-optical effect for semiconductor detection

Info

Publication number: CN213209897U
Application number: CN202021921283.0U
Authority: CN
Inventors: 黎君玲; 张弓
Original assignee: Individual
Current assignee: Individual
Priority date: 2020-09-07
Filing date: 2020-09-07
Publication date: 2021-05-14
Anticipated expiration: 2030-09-07

Abstract

The utility model discloses a semiconductor detects with formation of image ellipsometer based on magneto-optical effect, the load simulator comprises a case, the top fixedly connected with formation of image ellipsometer body of machine case, the right side fixedly connected with driving motor of machine case, driving motor's output shaft fixedly connected with threaded rod, the surface cover of threaded rod is equipped with the thread bush, the top fixedly connected with mounting panel of thread bush. The utility model discloses a driving motor, the threaded rod, the thread bush, the mounting panel, hydraulic telescoping cylinder, the runner, the connecting rod, micro motor, the cooperation of drive mechanism and standing groove, driving motor's output shaft passes through the threaded rod and drives about the thread bush, drives the runner through the hydraulic telescoping cylinder and reciprocates, height-adjusting, micro motor's output shaft passes through the gear and the rotation of circular tooth dental lamina drive runner, adjusts the angle of the measured object to reach the effect that the measurement precision is high, solved the problem that current device measurement precision is low.

Description

Imaging ellipsometer based on magneto-optical effect for semiconductor detection

Technical Field

The utility model relates to a semiconductor detects technical field, specifically is a semiconductor detects with formation of image ellipsometer based on magneto-optical effect.

Background

An ellipsometer is an optical measurement instrument for detecting the thickness, optical constant and material microstructure of a thin film, and the ellipsometer is an optical measurement technology for measuring the dielectric property (complex refractive index or dielectric function), film thickness and surface morphology of a detection thin film.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a semiconductor detects with formation of image ellipsometer based on magneto-optical effect possesses the advantage that the measurement precision is high, has solved the problem that current device measurement precision is low.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a semiconductor detects with formation of image ellipsometer based on magneto-optical effect, includes quick-witted case, the top fixedly connected with formation of image ellipsometer body of machine case, the right side fixedly connected with driving motor of machine case, driving motor's output shaft fixedly connected with threaded rod, the surface cover of threaded rod is equipped with the thread bush, the top fixedly connected with mounting panel of thread bush, the top fixedly connected with hydraulic telescoping cylinder of mounting panel, there is the runner at the top of hydraulic telescoping cylinder through bearing frame swing joint, the right side fixedly connected with connecting rod of hydraulic telescoping cylinder, the right side fixedly connected with micro motor of connecting rod, micro motor's output shaft fixedly connected with drive mechanism, the top of runner is provided with the standing groove.

Preferably, the bottom fixedly connected with bracing piece of mounting panel, the bottom fixedly connected with pulley of bracing piece, the bottom sliding connection of pulley has the spout.

Preferably, the transmission mechanism comprises a gear and a circular tooth plate, the output shaft of the micro motor is fixedly connected with the gear, the surface of the gear is meshed with the circular tooth plate, and the inner side of the circular tooth plate is fixedly connected with the surface of the rotating wheel.

Preferably, the left side and the right side of the inner cavity of the placing groove are fixedly connected with springs, and the other ends of the springs are fixedly connected with fixing plates.

Preferably, the front of the case is provided with a control box, and the top of the case is provided with a limit groove.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the utility model discloses a driving motor, the threaded rod, the thread bush, the mounting panel, hydraulic telescoping cylinder, the runner, the connecting rod, micro motor, the cooperation of drive mechanism and standing groove, driving motor's output shaft passes through the threaded rod and drives about the thread bush, drives the runner through the hydraulic telescoping cylinder and reciprocates, height-adjusting, micro motor's output shaft passes through the gear and the rotation of circular tooth dental lamina drive runner, adjusts the angle of the measured object to reach the effect that the measurement precision is high, solved the problem that current device measurement precision is low.

2. The utility model discloses a cooperation of bracing piece, pulley and spout is convenient for support the mounting panel, improves the smoothness nature that the mounting panel removed, through the cooperation of spring and fixed plate, is convenient for fix the measured object, avoids the measured object to rock at angle regulation's in-process.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is an enlarged view of a portion A of FIG. 1 according to the present invention;

fig. 3 is a front view of the structure of the present invention.

In the figure: 1. a chassis; 2. an imaging ellipsometer body; 3. a drive motor; 4. a threaded rod; 5. a threaded sleeve; 6. mounting a plate; 7. a hydraulic telescopic cylinder; 8. a rotating wheel; 9. a micro motor; 10. a transmission mechanism; 101. a gear; 102. a circular tooth plate; 11. a placement groove; 12. a support bar; 13. a pulley; 14. a chute; 15. a spring; 16. a fixing plate; 17. a control box; 18. a limiting groove; 19. a connecting rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, an imaging ellipsometer for semiconductor inspection based on magneto-optical effect comprises a case 1, a control box 17 is disposed on the front surface of the case 1, a limiting groove 18 is disposed on the top of the case 1, the mounting plate 6 is conveniently supported by the cooperation of a supporting rod 12, a pulley 13 and a sliding groove 14, the smoothness of movement of the mounting plate 6 is improved, the object to be inspected is conveniently fixed by the cooperation of a spring 15 and a fixing plate 16, the object to be inspected is prevented from shaking during the angle adjustment process, the imaging ellipsometer body 2 is fixedly connected to the top of the case 1, a driving motor 3 is fixedly connected to the right side of the case 1, a threaded rod 4 is fixedly connected to the output shaft of the driving motor 3, a threaded sleeve 5 is sleeved on the surface of the threaded rod 4, the mounting plate 6 is fixedly connected to the top of the threaded sleeve 5, the bottom fixedly connected with pulley 13 of bracing piece 12, the bottom sliding connection of pulley 13 has spout 14, the top fixedly connected with hydraulic stretching cylinder 7 of mounting panel 6, the top of hydraulic stretching cylinder 7 has runner 8 through bearing frame swing joint, the right side fixedly connected with connecting rod 19 of hydraulic stretching cylinder 7, the right side fixedly connected with micro motor 9 of connecting rod 19, the output shaft fixedly connected with drive mechanism 10 of micro motor 9, drive mechanism 10 includes gear 101 and circular tooth board 102, the output shaft fixedly connected with gear 101 of micro motor 9, the surface meshing of gear 101 has circular tooth board 102, the inboard of circular tooth board 102 is connected with the fixed surface of runner 8, the top of runner 8 is provided with standing groove 11, the equal fixedly connected with spring 15 in both sides in the inner chamber of standing groove 11, the other end fixedly connected with fixed plate 16 of spring 15, through driving motor 3, Threaded rod 4, thread bush 5, mounting panel 6, hydraulic telescoping cylinder 7, runner 8, connecting rod 19, micro motor 9, the cooperation of drive mechanism 10 and standing groove 11, driving motor 3's output shaft passes through threaded rod 4 and drives thread bush 5 and remove, it reciprocates to drive runner 8 through hydraulic telescoping cylinder 7, height-adjusting, micro motor 9's output shaft passes through gear 101 and circular tooth board 102 and drives the runner 8 rotatory, adjust the angle of the testee, thereby reach the high effect of measurement precision, the problem that the measurement precision of current device is low is solved.

During the use, place the testee in standing groove 11, through the effect of spring 15 and fixed plate 16, be convenient for fix the testee, avoid the testee to rock at angle regulation's in-process, driving motor 3's output shaft passes through threaded rod 4 and drives about the thread bush 5, it reciprocates to drive runner 8 through hydraulic telescoping cylinder 7, height-adjusting, micro motor 9's output shaft passes through gear 101 and circular tooth board 102 and drives the runner 8 rotatory, the angle of adjusting the testee, thereby reach the high effect of measurement precision.

In the description of this patent, it is to be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for the convenience of describing the patent and for the simplicity of description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the patent. In the description of this patent, it is noted that unless otherwise specifically stated or limited, the terms "mounted," "connected," and "disposed" are to be construed broadly and can include, for example, fixedly connected, disposed, detachably connected, disposed, or integrally connected and disposed. The specific meaning of the above terms in this patent may be understood by those of ordinary skill in the art as appropriate.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. An imaging ellipsometer based on magneto-optical effect for semiconductor detection comprises a case (1), and is characterized in that: the top of the case (1) is fixedly connected with an imaging ellipsometer body (2), the right side of the case (1) is fixedly connected with a driving motor (3), a threaded rod (4) is fixedly connected with an output shaft of the driving motor (3), a threaded sleeve (5) is sleeved on the surface of the threaded rod (4), the top of the threaded sleeve (5) is fixedly connected with a mounting plate (6), the top of the mounting plate (6) is fixedly connected with a hydraulic telescopic cylinder (7), the top of the hydraulic telescopic cylinder (7) is movably connected with a rotating wheel (8) through a bearing seat, the right side of the hydraulic telescopic cylinder (7) is fixedly connected with a connecting rod (19), the right side of connecting rod (19) fixedly connected with micro motor (9), the output shaft fixedly connected with drive mechanism (10) of micro motor (9), the top of runner (8) is provided with standing groove (11).

2. The imaging ellipsometer for semiconductor inspection based on magneto-optical effect as claimed in claim 1, wherein: the bottom fixedly connected with bracing piece (12) of mounting panel (6), the bottom fixedly connected with pulley (13) of bracing piece (12), the bottom sliding connection of pulley (13) has spout (14).

3. The imaging ellipsometer for semiconductor inspection based on magneto-optical effect as claimed in claim 1, wherein: the transmission mechanism (10) comprises a gear (101) and a circular tooth plate (102), an output shaft of the micro motor (9) is fixedly connected with the gear (101), the circular tooth plate (102) is meshed on the surface of the gear (101), and the inner side of the circular tooth plate (102) is fixedly connected with the surface of the rotating wheel (8).

4. The imaging ellipsometer for semiconductor inspection based on magneto-optical effect as claimed in claim 1, wherein: the left side and the right side of the inner cavity of the placing groove (11) are fixedly connected with springs (15), and the other ends of the springs (15) are fixedly connected with fixing plates (16).

5. The imaging ellipsometer for semiconductor inspection based on magneto-optical effect as claimed in claim 1, wherein: the front of the case (1) is provided with a control box (17), and the top of the case (1) is provided with a limit groove (18).