CN213181440U - Negative pressure type trace moisture analysis appearance prevents suck-back device - Google Patents
Negative pressure type trace moisture analysis appearance prevents suck-back device Download PDFInfo
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- CN213181440U CN213181440U CN202021256272.5U CN202021256272U CN213181440U CN 213181440 U CN213181440 U CN 213181440U CN 202021256272 U CN202021256272 U CN 202021256272U CN 213181440 U CN213181440 U CN 213181440U
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Abstract
The utility model relates to a negative pressure type trace moisture analyzer anti-suck-back device, which comprises a shell; a negative pressure type analyzer; the first valve is filled with purging gas or sample gas and is communicated with the input port of the negative pressure type analyzer through a pipeline; one end of the second valve is communicated with an outlet of the negative pressure type analyzer through a pipeline; a cutting device; one end of the cutting device is communicated with the other end of the second valve through a pipeline; and one end of the vacuum pump is communicated with the other end of the cutting device through a pipeline, and the other end of the vacuum pump is communicated with the outside through a pipeline. The utility model discloses in, damage as the vacuum pump, prevent through cutting device that dirty gas is sucked to negative pressure type moisture meter inside, reach protection negative pressure type moisture meter and not polluted.
Description
Technical Field
The utility model relates to a high-purity special gas technical field especially relates to a negative pressure type trace moisture analyzer prevents suck-back device.
Background
Different from the traditional bulk industrial gas, the electronic gas has small consumption and high purity, the purity is usually required to be 99.999 percent or more, and the electronic gas is developed along with the electronic material and semiconductor industry. Among electronic gases and applications used in common semiconductor process flows, hydrogen, nitrogen, helium, argon and the like are mostly used for carrier gas, purge gas and diluent gas to provide an inert environment or a reducing environment and the like; HF, HCl and HBr are used for the thermal etching process of polysilicon, and fluorocarbon is used for plasma etching, cavity cleaning and the like.
According to different processes, such as polycrystalline silicon growth, silicon nitride and other semiconductor preparation processes, the most important electron source and hole source in the P-N junction growth process are mainly concentrated in phosphine and arsine of a fifth main group, BF3 and B2H6 of a third main group and the like; germane is mainly used for epitaxial growth of silicon germanium semiconductors. Due to the special photoelectric properties, high-purity phosphane, arsane, germane, diborane and the like are important source materials of core devices and are the basis of the development of key technologies of integrated circuits, chips, LED devices, solar cells and the like. Meanwhile, semiconductor lasers such as gallium arsenide and indium phosphide prepared by taking high-purity arsine and phosphine as raw materials restrict the development of sensitive technologies such as national military and national defense, aerospace, satellite remote sensing and the like.
Moisture impurities in the electron gas can cause carrier concentration changes, which in turn affects optical and electrical properties of the device, and the luminous efficiency is drastically reduced, so that high purity electron gases have strict specifications for moisture content, typically less than 100 ppb. The negative pressure type moisture meter has the characteristics of high sensitivity, wide linear range, small sample consumption and the like in the analysis process of moisture in highly toxic gas in electronic gas, but the negative pressure type moisture meter has the defect that the cavity of the moisture meter is required to be in a negative pressure state, so that a vacuum pump has to be used, when the vacuum pump is stopped accidentally, the cavity of the moisture meter is still in the negative pressure state, the air is sucked from the vacuum pump end, the cavity of the moisture meter is polluted, the moisture meter has to be returned to foreign maintenance, and the operation of an enterprise is seriously influenced.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that the vacuum pump end is the body of breathing in, causes the problem of moisture meter cavity pollution.
The utility model discloses a following technical means realizes solving above-mentioned technical problem:
an anti-suck-back device of a negative pressure type trace moisture analyzer comprises a shell;
a negative pressure type analyzer;
the first valve is filled with purging gas or sample gas and is communicated with the input port of the negative pressure type analyzer through a pipeline;
one end of the second valve is communicated with an outlet of the negative pressure type analyzer through a pipeline;
a cutting device; one end of the cutting device is communicated with the other end of the second valve through a pipeline;
and one end of the vacuum pump is communicated with the other end of the cutting device through a pipeline, and the other end of the vacuum pump is communicated with the outside through a pipeline.
The utility model discloses in, damage as the vacuum pump, prevent through cutting device that dirty gas is sucked to negative pressure type moisture meter inside, reach protection negative pressure type moisture meter and not polluted.
As a further aspect of the present invention: the cutting device comprises a third valve, an MPC controller, a fourth valve and a signal controller, wherein one end of the third valve is communicated with the second valve through a pipeline, the other end of the third valve is communicated with the MPC controller through a pipeline, the MPC controller is also communicated with a vacuum pump through a pipeline, the MPC controller is also electrically connected with the signal controller through a wire, and the signal controller is also electrically connected with the fourth valve through a wire; the third valve and the fourth valve are also communicated through a pipeline.
As a further aspect of the present invention: the first valve and the second valve are manual valves.
As a further aspect of the present invention: the third valve is a pneumatic valve, and the driving air pressure of the open state of the third valve is 5-7 atm.
As a further aspect of the present invention: the fourth valve is an electromagnetic valve.
As a further aspect of the present invention: the working mode of the negative pressure type analyzer comprises a purging mode and a measuring mode, and the larger value of the pressure of the outlet pipeline of the negative pressure type analyzer is smaller than the maximum control pressure of the MPC controller by a plurality of Torr in the purging mode and the measuring mode.
The utility model has the advantages that:
1. the utility model discloses in, damage as the vacuum pump, prevent through cutting device that dirty gas is sucked to negative pressure type moisture meter inside, reach protection negative pressure type moisture meter and not polluted.
2. In the utility model, when the vacuum pump is shut down accidentally, dirty gas is sucked back into the outlet pipeline of the negative pressure type moisture meter through the vacuum pump, at the moment, the MPC controller detects that the pressure in the outlet pipeline of the negative pressure type moisture meter is increased instantly, when the maximum control pressure set by the MPC controller is reached, the signal controller transmits the signal command to the fourth valve, the driving gas of the third valve is cut off while the gas in the outlet pipeline of the moisture meter is discharged until the third valve is in a closed state, so that the dirty gas can be cut off, the negative pressure type moisture meter is protected from being polluted, after the vacuum pump is repaired, the vacuum pump is started, at the moment, the MPC controller detects that the pressure in the outlet pipeline of the negative pressure type moisture meter is lower than the maximum control pressure, the signal controller transmits the signal command to the fourth valve and starts the fourth valve, and restoring the driving air pressure of the third valve to 5-7atm, so that the third valve is opened, and the moisture meter is restored to normal operation.
Drawings
Fig. 1 is a schematic structural view of an anti-suck-back device of a negative pressure micro moisture analyzer provided by an embodiment of the present invention.
In the figure, 1-negative pressure type analyzer, 2-first valve, 3-second valve, 4-cut-off device, 401-third valve, 402-MPC controller, 404-signal controller, 403-fourth valve, 5-vacuum pump.
Detailed Description
To make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the embodiments of the present invention are combined to clearly and completely describe the technical solution in the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Example 1
Referring to fig. 1, fig. 1 is a schematic structural diagram of an anti-suck-back device of a negative pressure type micro moisture analyzer according to an embodiment of the present invention, and the anti-suck-back device of the negative pressure type micro moisture analyzer includes;
a negative pressure type analyzer 1;
the first valve 2 is used for introducing purge gas or sample gas, and the first valve 2 is also communicated with the input port of the negative pressure type analyzer 1 through a pipeline;
a second valve 3, one end of the second valve 3 is communicated with the outlet of the negative pressure type analyzer 1 through a pipeline;
a cutting device 4; one end of the cutting device 4 is communicated with the other end of the second valve 3 through a pipeline;
and one end of the vacuum pump 5 is communicated with the other end of the cutting device 4 through a pipeline, and the other end of the vacuum pump 5 is communicated with the outside through a pipeline.
Further, in this embodiment, the first valve 2 may be respectively fed with a purge gas or a sample gas, or may be simultaneously fed with a purge gas or a sample gas, and the purge gas and the sample gas enter the negative pressure type analyzer 1 through the first valve 2.
Specifically, in this embodiment, the cut-off device 4 includes a third valve 401, an MPC controller 402, a fourth valve 403, and a signal controller 404, wherein one end of the third valve 401 is communicated with the second valve 3 through a pipeline, the other end of the third valve 401 is communicated with the MPC controller 402 through a pipeline, the MPC controller 402 is further communicated with the vacuum pump 5 through a pipeline, the MPC controller 402 is further electrically connected with the signal controller 404 through a wire, and the signal controller 404 is further electrically connected with the fourth valve 403 through a wire; the third valve 401 and the fourth valve 403 are also communicated through a pipeline.
In this embodiment, the first valve 2 and the second valve 3 are manual valves, the third valve 401 is a pneumatic valve, the driving air pressure of the open state of the third valve 401 is 5 to 7atm, and the fourth valve 403 is a solenoid valve; the fourth valve 403 can control the opening and closing of the third valve 401, and the MPC (Model predictive control) controller 402 is a pressure controller.
In addition, in the present embodiment, the operation mode of the negative pressure type analyzer 1 includes a purge mode (when purge gas is introduced) and a measurement mode (when sample gas is introduced), and the larger value of the pressure of the outlet pipe in the purge mode and the measurement mode of the negative pressure type analyzer 1 is smaller than the maximum control pressure of the MPC controller 402 by several Torr, preferably 10 Torr.
In this embodiment, the MPC controller 402 monitors the pressure in the outlet pipeline of the negative pressure analyzer 1 on line in real time, the signal controller 404 sets the maximum control pressure of the MPC controller 402, when the vacuum pump 5 is shut down accidentally, the dirty gas is sucked into the outlet pipeline of the moisture meter 1 by the vacuum pump 5, at this time, the MPC controller 402 detects that the pressure in the outlet pipeline of the moisture meter 1 is increased instantaneously, when the maximum control pressure set by the signal controller 404 for the MPC controller 402 is reached, the signal controller 404 transmits an electric signal instruction to the fourth valve 403, and cuts off the driving gas of the third valve 401 and discharges the gas in the outlet pipeline of the moisture meter 1to the third valve 401, so that the dirty gas can be cut off, thereby protecting the moisture meter 1 from being polluted;
when the vacuum pump 5 is maintained, the vacuum pump 5 is started, and at this time, the MPC (pressure controller) detects that the pressure in the outlet pipeline of the negative pressure type moisture meter 1 is lower than the maximum control pressure, the signal controller 403 transmits an electric signal command to the fourth valve 403 and starts the fourth valve 403, the driving air pressure of the third valve 401 is recovered to 5-7atm, so that the third valve 401 is opened, and the moisture meter is recovered to normal operation.
It should be noted that the present invention does not improve software layers such as the MPC controller 402 and the signal controller 404, and preferably, in this embodiment, the MPC controller 402 may be MKS in model, the signal controller 404 may be NATA001 in model, and the negative pressure type moisture meter may be HALO-LP in model.
The working principle is as follows:
firstly, starting the vacuum pump 5 to a working state according to the use instruction of the vacuum pump 5, and then adjusting the driving gas pressure of the three valves 401 to 5-7atm, wherein the three valves 401 are in a full-open state;
secondly, opening the negative pressure type moisture meter 1 according to the use specification of the negative pressure type moisture meter 1, opening a first valve 2 communicated with an inlet of the negative pressure type moisture meter 1, selecting a pressure control mode of the negative pressure type moisture meter 1 as a purging mode, opening a second valve 3 communicated with an outlet of the negative pressure type moisture meter 1 after a plurality of seconds (preferably 15S in the embodiment), monitoring the pressure in an outlet pipeline in real time through an MPC controller 402 in the purging mode of the negative pressure type moisture meter 1, transmitting a monitored pressure signal to a signal controller 404 through the MPC controller 402, and observing and recording a pressure display value through the signal controller 404;
the mode of the negative pressure type moisture meter 1 is adjusted to a measurement mode, in the measurement mode, the pressure in the outlet pipeline of the negative pressure type moisture meter 1 is monitored in real time through the MPC controller 402, the MPC controller 402 transmits a monitored pressure signal to the signal controller 404, and a pressure display value can be observed and recorded through the signal controller 404;
then, according to the pressure data in the outlet pipeline of the negative pressure type moisture meter 1 in the purging and measuring modes, the maximum pressure is selected as a reference value, and the maximum control pressure set by the MPC controller 402 is 10Torr (1Torr, 1mmHg) greater than the reference value;
finally, when the vacuum pump 5 is shut down accidentally, dirty gas is sucked back into the outlet pipeline of the negative pressure type moisture meter 1 through the vacuum pump 5, at the moment, the MPC controller 402 detects that the pressure in the outlet pipeline of the negative pressure type moisture meter 1 is increased instantly, when the maximum control pressure set by the MPC controller 402 by the signal controller 404 is reached, the signal controller 404 transmits the maximum control pressure to the fourth valve 403 through an electric signal instruction, the driving gas of the third valve 401 is cut off, and meanwhile, the gas in the outlet pipeline of the moisture meter 1 is discharged to the third valve 401 to be in a closed state, so that the dirty gas can be cut off, and the negative pressure type moisture meter 1 is protected from being polluted;
when the vacuum pump 5 is maintained, the vacuum pump 5 is started, and at this time, the MPC controller detects that the pressure in the outlet pipeline of the negative pressure type moisture meter 1 is lower than the maximum control pressure, the signal controller 403 transmits an electric signal command to the fourth valve 403 and starts the fourth valve 403, and the driving air pressure of the third valve 401 is recovered to 5-7atm, so that the third valve 401 is opened, and the moisture meter is recovered to normal operation.
The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.
Claims (6)
1. An anti-suck-back device of a negative pressure type trace moisture analyzer is characterized by comprising;
a negative pressure type analyzer (1);
the first valve (2), the first valve (2) is introduced with purging gas or sample gas, and the first valve (2) is also communicated with the input port of the negative pressure type analyzer (1) through a pipeline;
one end of the second valve (3) is communicated with an outlet of the negative pressure type analyzer (1) through a pipeline;
a cutting device (4); one end of the cutting device (4) is communicated with the other end of the second valve (3) through a pipeline;
and one end of the vacuum pump (5) is communicated with the other end of the cutting device (4) through a pipeline, and the other end of the vacuum pump (5) is communicated with the outside through a pipeline.
2. The negative pressure type trace moisture analyzer suck-back prevention device as claimed in claim 1, wherein the cut-off device (4) comprises a third valve (401), an MPC controller (402), a fourth valve (403) and a signal controller (404), wherein one end of the third valve (401) is communicated with the second valve (3) through a pipeline, the other end of the third valve (401) is communicated with the MPC controller (402) through a pipeline, the MPC controller (402) is further communicated with the vacuum pump (5) through a pipeline, the MPC controller (402) is further electrically connected with the signal controller (404) through a wire, and the signal controller (404) is further electrically connected with the fourth valve (403) through a wire; the third valve (401) and the fourth valve (403) are also communicated through a pipeline.
3. The negative pressure type trace moisture analyzer suck-back prevention device according to claim 1, wherein the first valve (2) and the second valve (3) are manual valves.
4. The anti-suck-back device of the negative pressure type micro moisture analyzer as claimed in claim 2, wherein the third valve (401) is a pneumatic valve, and the driving air pressure of the open state of the third valve (401) is 5-7 atm.
5. The anti-suck-back device of the negative pressure type micro moisture analyzer as claimed in claim 2, wherein the fourth valve (403) is an electromagnetic valve.
6. The negative pressure type trace moisture analyzer anti-back suction device according to any one of claims 2 to 5, wherein the working modes of the negative pressure type analyzer (1) comprise a purging mode and a measuring mode, and the larger value of the pressure of the outlet pipeline of the negative pressure type analyzer (1) in the purging mode and the measuring mode is smaller than the maximum control pressure of the MPC controller (402).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021256272.5U CN213181440U (en) | 2020-07-01 | 2020-07-01 | Negative pressure type trace moisture analysis appearance prevents suck-back device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021256272.5U CN213181440U (en) | 2020-07-01 | 2020-07-01 | Negative pressure type trace moisture analysis appearance prevents suck-back device |
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| CN213181440U true CN213181440U (en) | 2021-05-11 |
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| CN202021256272.5U Active CN213181440U (en) | 2020-07-01 | 2020-07-01 | Negative pressure type trace moisture analysis appearance prevents suck-back device |
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