CN213160112U - Waste gas treatment device for plasma cleaning equipment - Google Patents
Waste gas treatment device for plasma cleaning equipment Download PDFInfo
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- CN213160112U CN213160112U CN202021942423.2U CN202021942423U CN213160112U CN 213160112 U CN213160112 U CN 213160112U CN 202021942423 U CN202021942423 U CN 202021942423U CN 213160112 U CN213160112 U CN 213160112U
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- waste gas
- treatment device
- frame
- plasma cleaning
- filter screen
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- Treating Waste Gases (AREA)
Abstract
The utility model discloses a waste gas treatment device for plasma cleaning equipment, which comprises a frame and a waste gas treatment device, wherein the waste gas treatment device is arranged on the upper surface of the frame, the waste gas treatment device comprises a waste gas collecting outer cover, an active carbon filter screen and a corrugated pipe, the waste gas collecting outer cover is fixed on the frame, the active carbon filter screen is arranged inside the waste gas collecting outer cover, the bottom of the waste gas collecting outer cover is provided with an air vent, the upper surface of the frame is provided with a round hole at a position corresponding to the air vent, one end of the corrugated pipe is connected with the air vent through a bottom mounting interface, and the other end of the corrugated pipe is connected with an external fan through a fan interface; the utility model discloses the practicality is high, has improved operational environment's air effectively, has avoided harmful gas harm staff, has good market using value.
Description
Technical Field
The utility model relates to an automatic change purger technical field, especially relate to a exhaust treatment device for plasma cleaning equipment.
Background
The plasma cleaning equipment is widely applied to occasions such as plasma cleaning, plasma etching, plasma photoresist removing, plasma coating, plasma ashing, plasma treatment, plasma surface treatment and the like. Plasma cleaning is usually performed with active gases such as oxygen, nitrogen, argon, carbon dioxide, hydrogen, carbon tetrafluoride, and the like. The plasma cleaning principle is that the plasma generated after gas ionization is utilized to carry out physical bombardment on the surface of an object, a chemical reaction is carried out to form a hydrophilic surface so as to achieve the purpose of activating the surface, and molecular structures such as CO, CO2, H20 and the like are separated from the surface to realize cleaning. Therefore, the plasma cleaning process is accompanied with the generation of waste gas, many plasma cleaning devices do not have a waste gas treatment device at present, the sealing of the devices is not perfect, and the waste gas escapes from the devices and spreads into the factory building in the cleaning process, which causes adverse effects on human bodies and the environment.
Accordingly, the prior art is deficient and needs improvement.
SUMMERY OF THE UTILITY MODEL
In order to solve the defects existing in the prior art, the utility model provides a waste gas treatment device for plasma cleaning equipment.
The utility model provides a technical documentation, including frame and exhaust treatment device, exhaust treatment device installs the upper surface in the frame, exhaust treatment device includes that waste gas collects dustcoat, active carbon filter screen and bellows, waste gas is collected the dustcoat and is fixed in the frame, the active carbon filter screen sets up inside the dustcoat is collected to waste gas, waste gas is collected the dustcoat bottom and has been seted up the air vent, the round hole has been seted up with the air vent corresponding position department to the upper surface of frame, the one end and the air vent of bellows pass through bottom installation interface connection, the other end and the outside fan of bellows pass through fan interface connection.
Preferably, the left end of the activated carbon filter screen is provided with a handle, and the activated carbon filter screen can be directly drawn out when the filter element needs to be replaced.
Preferably, four groups of conveying rails for conveying products to be cleaned are further arranged on the rack, and the waste gas collecting outer cover is located below the conveying rails.
Preferably, a group of meshes are formed in the positions, corresponding to each group of conveying tracks, on the upper surface of the waste gas collecting outer cover, and the meshes absorb waste gas generated after cleaning products.
Compared with the prior art, the utility model has the advantages that the waste gas generated when the plasma cleaning machine works can be adsorbed, and the gas is prevented from diffusing into the air to harm human body or environment; by arranging meshes below the conveying track and adopting a local and positive air draft mode, large-area air draft is avoided, the air draft efficiency is improved, and the energy saving performance is improved; the detachable active carbon filter screen is arranged, so that the filter screen is convenient to replace and clean regularly; the utility model discloses the practicality is high, has improved operational environment's air effectively, has avoided harmful gas harm staff, has good market using value.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic structural view of the waste gas treatment device of the present invention;
FIG. 3 is a schematic diagram of a front view of the exhaust gas treatment device of the present invention;
FIG. 4 is a schematic top view of the activated carbon filter screen of the present invention;
as shown in the figure: 1. a frame; 2. an exhaust gas treatment device; 3. a conveying track; 21. an exhaust gas collection housing; 22. an active carbon filter screen; 23. a bellows; 24. a fan interface; 25. the bottom is provided with an interface.
Detailed Description
In order to facilitate understanding of the present invention, the present invention will be described in more detail with reference to the accompanying drawings and specific embodiments. Preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The use of the terms "fixed," "integrally formed," "left," "right," and the like in this specification is for illustrative purposes only, and elements having similar structures are designated by the same reference numerals in the figures.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
The present invention will be described in detail with reference to the accompanying drawings.
As shown in fig. 1 to 4, including frame 1 and exhaust treatment device 2, exhaust treatment device 2 installs the upper surface in frame 1, exhaust treatment device 2 includes that waste gas collects dustcoat 21, active carbon filter screen 22 and bellows 23, waste gas collects dustcoat 21 and fixes in frame 1, active carbon filter screen 22 sets up inside waste gas collects dustcoat 21, the air vent has been seted up to waste gas collection dustcoat 21 bottom, the round hole has been seted up with the air vent corresponding position department in the upper surface of frame 1, the one end and the air vent of bellows 23 pass through bottom installation interface 25 and are connected, the other end and the outside fan of bellows 23 pass through fan interface 24 and be connected.
Further, an external fan installed at the fan interface 24 rotates to serve as an air draft power source; a certain negative pressure is generated inside the corrugated pipe 23 and inside the exhaust gas collecting cover 21, so that air above the exhaust gas collecting cover 21 is sucked, and the airflow passes through the surface meshes of the exhaust gas collecting cover 21 and the activated carbon filter screen 22 in sequence and then is led out by the corrugated pipe 23.
Preferably, the left end of the activated carbon filter screen 22 is provided with a handle, so that the activated carbon filter screen can be directly drawn out when the filter element needs to be replaced.
Further, the activated carbon filter screen 22 can adsorb the waste gas or the cleaned impurities, thereby achieving the purpose of purification treatment.
Preferably, four sets of conveying rails 3 for conveying products to be cleaned are further arranged on the machine frame 1, and the waste gas collecting outer cover 21 is positioned below the conveying rails 3.
Preferably, a group of meshes is arranged on the upper surface of the waste gas collecting outer cover 21 corresponding to each group of conveying tracks 3, and each group of meshes absorbs waste gas generated after cleaning products.
Further, when the external fan has a constant wind speed, the gas flow rate of the exhaust gas collecting cover 21 is proportional to the mesh area, and thus, different numbers of holes, sizes of holes, or positions of holes may be designed for different cleaning schemes.
The working principle is as follows: when the plasma cleaning equipment works, an external fan arranged on the fan interface 24 rotates to be used as an air draft power source; a certain negative pressure is generated inside the corrugated pipe 23 and inside the waste gas collecting cover 21, so that air above the waste gas collecting cover 21 is sucked, and air flow passes through the surface meshes of the waste gas collecting cover 21 and the activated carbon filter screen 22 in sequence and then is led out by the corrugated pipe 23.
Has the advantages that: the utility model can adsorb the waste gas generated when the plasma cleaning machine works, and avoid the gas from diffusing into the air to harm human body or environment; by arranging meshes below the conveying track and adopting a local and positive air draft mode, large-area air draft is avoided, the air draft efficiency is improved, and the energy saving performance is improved; the detachable active carbon filter screen is arranged, so that the filter screen is convenient to replace and clean regularly; the utility model discloses the practicality is high, has improved operational environment's air effectively, has avoided harmful gas harm staff, has good market using value.
It should be noted that the above technical features are continuously combined with each other to form various embodiments which are not listed above, and all the embodiments are regarded as the scope of the present invention described in the specification; moreover, modifications and variations will occur to those skilled in the art in light of the foregoing description, and it is intended to cover all such modifications and variations as fall within the true spirit and scope of the invention as defined by the appended claims.
Claims (4)
1. The utility model provides an exhaust treatment device for plasma cleaning equipment, includes frame and exhaust treatment device, exhaust treatment device installs the upper surface in the frame, its characterized in that: waste gas treatment device includes that waste gas collects dustcoat, active carbon filter screen and bellows, waste gas is collected the dustcoat and is fixed in the frame, the active carbon filter screen sets up inside waste gas collects the dustcoat, waste gas is collected the dustcoat bottom and has been seted up the air vent, the upper surface of frame corresponds position department with the air vent and has seted up the round hole, the one end and the air vent of bellows pass through bottom installation interface connection, the other end and the outside fan of bellows pass through fan interface connection.
2. An exhaust gas treatment device for a plasma cleaning apparatus according to claim 1, characterized in that: the left end of the active carbon filter screen is provided with a handle which can be directly drawn out when the filter element needs to be replaced.
3. An exhaust gas treatment device for a plasma cleaning apparatus according to claim 1, characterized in that: the frame is also provided with four groups of conveying tracks for conveying products to be cleaned, and the waste gas collecting outer cover is positioned below the conveying tracks.
4. An exhaust gas treatment device for a plasma cleaning apparatus according to claim 3, characterized in that: a set of meshes are formed in the positions, corresponding to each set of conveying tracks, of the upper surface of the waste gas collecting outer cover, and the meshes of each set absorb waste gas generated after cleaning of products.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021942423.2U CN213160112U (en) | 2020-09-08 | 2020-09-08 | Waste gas treatment device for plasma cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021942423.2U CN213160112U (en) | 2020-09-08 | 2020-09-08 | Waste gas treatment device for plasma cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213160112U true CN213160112U (en) | 2021-05-11 |
Family
ID=75771986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021942423.2U Active CN213160112U (en) | 2020-09-08 | 2020-09-08 | Waste gas treatment device for plasma cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213160112U (en) |
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2020
- 2020-09-08 CN CN202021942423.2U patent/CN213160112U/en active Active
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| GR01 | Patent grant | ||
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| CP02 | Change in the address of a patent holder |
Address after: 518000 building 101, 201 and A14, building A15, silicon valley power automotive electronics Pioneer Park, 334 Guiyue Road, Dafu community, Guanlan street, Longhua District, Shenzhen City, Guangdong Province Patentee after: SHENZHEN AXXON AUTOMATION Co.,Ltd. Address before: 518000 building A14, silicon valley power automotive electronics Pioneer Park, 334 Guiyue Road, Guanlan street, Longhua District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN AXXON AUTOMATION Co.,Ltd. |