CN213091094U - Kovar structure vacuum leak detection tool - Google Patents
Kovar structure vacuum leak detection tool Download PDFInfo
- Publication number
- CN213091094U CN213091094U CN202022478403.0U CN202022478403U CN213091094U CN 213091094 U CN213091094 U CN 213091094U CN 202022478403 U CN202022478403 U CN 202022478403U CN 213091094 U CN213091094 U CN 213091094U
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- Prior art keywords
- kovar
- hole
- leak detection
- joint
- measured
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- 238000001514 detection method Methods 0.000 title claims abstract description 34
- 229910000833 kovar Inorganic materials 0.000 title claims description 74
- 238000007789 sealing Methods 0.000 claims abstract description 23
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 8
- 239000012459 cleaning agent Substances 0.000 abstract description 4
- 239000001307 helium Substances 0.000 description 13
- 229910052734 helium Inorganic materials 0.000 description 13
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 13
- 239000000956 alloy Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000006378 damage Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
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Abstract
The utility model provides a structure vacuum leak hunting frock of felling, this frock include, adapter joint, manual nut, O type sealing washer of screwing. The adapter joint is a revolving body with a through hole, one end of the joint is a flange, the other end of the joint is provided with an external thread, and the length of the thread is greater than the thickness of a manually screwed nut; the through hole is used for inserting a tested piece, and the end face of the external thread side of the through hole is provided with a chamfer; one end of the manual screwing nut is provided with an internal thread matched with the external thread of the joint, the other end of the manual screwing nut is an annular end cover, and the inner diameter of the end cover is equal to that of the inserting connection section in the through hole; the O-shaped sealing ring is positioned in an annular space which is formed by the chamfer angle, the annular end cover and the measured piece and has a triangular section, and a tight fit is formed, so that sealing is realized, and the gap between the joint and the measured piece meets the leakage rate requirement. The tool is simple in structure, convenient to use and free of vacuum mud, the leak detection process is greatly simplified, the leak detection efficiency is greatly improved, and the failure of a tested part caused by a cleaning agent is avoided.
Description
Technical Field
The utility model belongs to felling structure inspection frock, concretely relates to felling structure vacuum leak hunting frock.
Background
The kovar alloy material has the advantages of good thermal matching with ceramic materials, easy processing and the like due to low-temperature fixed expansion, is often combined with the ceramic materials to obtain a ceramic-kovar composite component with the advantages of ceramic and kovar alloy, and is widely applied to various vacuum components.
The Kovar structure is a hollow rotary body structure with one closed end, and the outer layer, the middle ceramic layer and the wiring terminal are sequentially arranged from the outermost layer to the innermost layer, wherein the outer shell is made of Kovar alloy materials, the middle ceramic layer is made of ceramic materials, and the wiring terminal is made of Kovar alloy. The terminal closes one end of the hollow rotary body structure. In order to ensure the usability of the kovar structure, the leakage rate of the combined interface of the kovar alloy and the ceramic material must meet the technical requirements.
The traditional Kovar structure vacuum leak detection is that a Kovar structure is inserted into a leak detection adapter connected with a vacuum unit or a helium mass spectrometer leak detector, a gap between a Kovar structure shell and the adapter is sealed by vacuum mud, then helium is sprayed, and the vacuum unit or the helium mass spectrometer leak detector is started for leak detection. The vacuum mud often is detained on the shell of kovar structure after the leak hunting to and leak hunting adapter inner chamber. Due to the characteristics of the vacuum mud, the small size of the kovar structure and the adapter and the like, the time for cleaning the vacuum mud is very long, and the detection efficiency is extremely low; meanwhile, the cleaning agent is very easy to remain in the cleaning process, so that kovar alloy materials on two sides of the kovar structure ceramic layer are short-circuited, and the failure of kovar structure components is caused.
In order to improve the vacuum leak detection efficiency of the Kovar structure and avoid the failure of the Kovar structure caused by the cleaning of the subsequent vacuum mud and the residual cleaning agent, the vacuum leak detection tool without the vacuum mud is very necessary.
Disclosure of Invention
In view of this, the utility model provides a structure vacuum leak hunting frock is felled to Kovar.
The utility model discloses a: the utility model provides a Kovar structure vacuum leak hunting frock which characterized in that: the vacuum leak detection tool comprises a switching joint, a manual screwing nut and an O-shaped sealing ring; the adapter joint is a revolving body with a through hole, the through hole is used for inserting the measured kovar structure, and the part, which is overlapped with the measured kovar structure, in the through hole is an inserting section; one end of the adapter joint is provided with a flange, and the other end of the adapter joint is provided with an external thread; the length L of the external thread is greater than the thickness H of the manually screwed nut; a chamfer is arranged on the end face of the external thread side of the through hole; one end of the manual screwing nut is provided with an internal thread matched with the external thread on the adapter coupling; the other end of the manual screwing nut is an annular end cover, and the inner diameter of the annular end cover is equal to that of an insertion section which is used for inserting the measured kovar structure (4) in the through hole (11); the O-shaped sealing ring is positioned in an annular space which is surrounded by the chamfer, the annular end cover and the measured kovar structure and has a triangular cross section, and forms tight fit with the chamfer, the annular end face and the measured kovar structure.
Further, the chamfer angle is 30 ~ 45.
Further, the through hole is a cylindrical through hole.
Further, the through hole is a step-shaped through hole.
Furthermore, for convenient to use, the equipartition has a plurality of twist grip on the manual nut of screwing.
Further, the number of the rotating handles is 2, 3 or 4.
The working principle or the leak detection process of the Kovar structure vacuum leak detection tool is as follows: (1) and carrying out ultrasonic cleaning on the adapter joint and the manually screwed nut of the Kovar structure vacuum leak detection tool to remove grease on the surface of the tool, and then baking at high temperature to remove gas. (2) Connecting the flange end of an adapter coupling of a Kovar structure vacuum leak detection tool with the flange end of a vacuum unit or a helium mass spectrometer leak detector, then inserting a measured Kovar structure into a through hole of the adapter coupling, then installing an O-shaped sealing ring in a V-shaped groove formed by an adapter coupling chamfer and the measured Kovar structure, and finally connecting a manually screwed nut with an external thread on the adapter coupling through the measured Kovar structure; and rotating the manual screwing nut to force the O-shaped sealing ring in the annular space which is surrounded by the chamfer, the annular end cover and the measured kovar structure and has a triangular cross section to elastically deform and form tight fit with the chamfer, the annular end surface and the measured kovar structure. (3) Spraying helium at the gap between the annular end cover of the manually screwed nut and the measured kovar structure, and starting a vacuum unit or a helium mass spectrometer leak detector to detect whether helium exists in the through hole of the adapter connector; if helium exists, the leakage rate between the measured Kovar structure and the through hole of the adapter connector does not reach the standard, the sealing between the measured Kovar structure and the through hole of the adapter connector is unreliable, and the nut is screwed manually or the O-shaped sealing ring is replaced continuously until the sealing between the measured Kovar structure and the adapter connector is reliable. Helium is sprayed on a combination interface in the kovar structure, and a vacuum unit or a helium mass spectrometer leak detector detects whether helium exists in the through hole of the adapter connector. If not, the Kovar structure interface is reliably combined, the product is qualified, the manually screwed nut is disassembled, the measured Kovar structure is taken out, and the next procedure is carried out. If so, the joint at the Kovar structure interface is unreliable, the product is unqualified, and the measured Kovar structure is taken out and directly scrapped.
The utility model has the advantages that: (1) the utility model provides a vacuum leak detection tool for kovar structure inspection, which has simple structure, convenient use, repeated use and economic cost; (2) the leak detection tool is used without a subsequent vacuum mud cleaning process, so that the traditional leak detection process is simplified, and the inspection efficiency is greatly improved; (3) the failure of the short circuit of the inner layer and the outer layer of the kovar structure caused by the cleaning agent is avoided; (4) the whole leakage detection process has no vacuum mud, and the leakage detection flow is cleaner and more environment-friendly.
Drawings
FIG. 1 is a schematic view of an assembly of a leak detection tool for a Kovar structure;
FIG. 2 is a stepped adapter coupling with a through hole;
FIG. 3 is a cylindrical adapter with a through hole;
FIG. 4 is a view of manually tightening a nut;
FIG. 5 is a kovar configuration;
FIG. 6 is a partially enlarged schematic view of the sealing structure;
in the figure: 1. the adapter connector 2, a nut 3 screwed by hand, an O-shaped sealing ring 4, a kovar structure 5, an annular space 11, a through hole 12, a flange 13, an external thread 14, a chamfer 15, a step 21, an internal thread 22, an annular end cover 23, a rotary handle 41, a shell 42, an intermediate ceramic layer 43 and a terminal.
Detailed Description
It will be appreciated by those of ordinary skill in the art that the embodiments described herein are intended to assist the reader in understanding the principles of the invention, and it is to be understood that the scope of the invention is not limited to such specific statements and embodiments. Those skilled in the art can make various other specific modifications and combinations based on the teachings of the present invention without departing from the spirit of the invention, and such modifications and combinations are still within the scope of the invention.
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
Example 1:
referring to fig. 1, a leak detection tool for vacuum leak detection of a kovar structure comprises a switching joint 1, a manually screwed nut 2 and an O-shaped sealing ring 3; the adapter joint 1 is a revolving body with a through hole 11, the through hole 11 is used for inserting the measured kovar structure 4 and providing a detection channel for a vacuum unit or a helium mass spectrometer leak detector, and the part in the through hole, which is overlapped with the measured kovar structure, is an insertion section; one end of the adapter joint 1 is provided with a flange 12 for connecting with a flange of a vacuum unit or a helium mass spectrometer leak detector, and the other end of the joint is provided with an external thread 13; the length of the external thread 13 is set as L, the distance between the left end surface and the right end surface of the manually-screwed nut is set as a thickness H (as shown in figure 4), and the length L is greater than the thickness H2 and is greater than the thickness H of the manually-screwed nut 2; the end face of the external thread side of the through hole 11 is provided with a chamfer 14, and the included angle between the chamfer and the axis of the adapter joint is 30 degrees; one end of the manual screwing nut 2 is provided with an internal thread 21 matched with the external thread 13 on the adapter connector 1, the other end of the manual screwing nut 2 is an annular end cover 22, and the inner diameter of the annular end cover 22 is equal to that of the through hole 11; the O-shaped sealing ring 3 is positioned in an annular space 5 which is surrounded by the chamfer 14, the annular end cover 22 and the measured kovar structure 4 and has a triangular cross section, and forms tight fit with the chamfer 14, the annular end cover 22 and the measured kovar structure 4.
In order to facilitate quick installation, the through hole 11 is designed to be a step-shaped through hole (as shown in fig. 2), the distance from the step 15 to the end face of the external thread side of the adapter connector is smaller than a certain length of the measured kovar structure shell, for example, the distance is one half of the length of the shell.
During leakage detection, the measured Kovar structure is installed as shown in figure 1, the leakage rate of the gap between the manually screwed nut annular end cover and the measured Kovar structure is detected firstly, and then the leakage rate of the Kovar alloy and the ceramic interface of the measured Kovar structure is detected.
Example 2:
the difference from the first embodiment: the stepped through-hole 11 is designed as a cylindrical through-hole without a step. Compared with the first embodiment, when the measured kovar structure is installed and plugged, the O-shaped sealing ring is firstly suggested to be sleeved on the measured kovar structure, so that the situation that the whole measured piece is plugged into the adapter connector due to negligence of an operator is avoided.
Example 3:
the difference from the previous embodiment: the angle of the chamfer is designed to be 35 °.
Example 4:
the difference from the previous embodiment: the angle of the chamfer is designed to be 40 °.
Example 5:
the difference from the previous embodiment: the angle of the chamfer was designed to be 45 °.
Example 6:
the difference from the previous embodiment: the angle of the chamfer is designed to be 50 °.
Example 7:
the difference from the previous embodiment: the angle of the chamfer is designed to be 25 °.
In the above embodiments, in embodiments 1 to 5, in the whole leak detection process, the leak rate between the measured kovar structure and the through hole of the adapter connector reaches the standard, and the seal between the measured kovar structure and the through hole of the adapter connector is reliable. And after leakage detection is finished, observing that the appearance shape of the O-shaped sealing ring is normal and the surface is not damaged.
In embodiments 6 and 7, in the leak detection process, the manual screwed nut is adjusted for many times or the sealing ring is replaced, and the leak rate between the Kovar structure and the through hole of the adapter connector cannot reach the standard. After leak hunting is accomplished, O type sealing washer because the compression O type sealing washer by a wide margin of the nut of manual screwing for its appearance shape has taken place deformation, and sealing washer surface indentation is obvious, has the damage, and sealing interface suffers destruction, can't continue to use.
In summary, the chamfer angle is preferably 30 to 45 °. The above embodiments 1 to 5 are only preferred embodiments of the present invention, and should not be construed as limiting the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides a Kovar structure vacuum leak hunting frock which characterized in that: the vacuum leak detection tool comprises a switching joint (1), a manual screwing nut (2) and an O-shaped sealing ring (3); the adapter joint (1) is a revolving body with a through hole (11), and the through hole (11) is used for being inserted into the measured kovar structure (4); one end of the adapter joint (1) is provided with a flange (12), and the other end of the adapter joint is provided with an external thread (13); the length L of the external thread (13) is greater than the thickness H of the manually screwed nut (2); a chamfer (14) is arranged on the end face of the external thread side of the through hole (11); one end of the manual screwing nut (2) is provided with an internal thread (21) matched with the external thread (13) on the adapter connector (1); the other end of the manual screwing nut (2) is an annular end cover (22), and the inner diameter of the annular end cover (22) is equal to that of an insertion section which is used for inserting the measured kovar structure (4) in the through hole (11); the O-shaped sealing ring (3) is positioned in an annular space (5) which is surrounded by the chamfer (14), the annular end cover (22) and the measured kovar structure (4) and has a triangular cross section, and forms tight fit with the chamfer (14), the annular end cover (22) and the measured kovar structure (4).
2. The kovar structure vacuum leak detection tool according to claim 1, wherein: the angle of the chamfer (14) is 30-45 degrees.
3. The kovar structure vacuum leak detection tool according to claim 1, wherein: the through hole (11) is a cylindrical through hole.
4. The kovar structure vacuum leak detection tool according to claim 1, wherein: the through hole (11) is a step-shaped through hole.
5. The kovar structure vacuum leak detection tool according to claim 1, wherein: and a plurality of rotating handles (23) are uniformly distributed on the manual screwing nut (2).
6. The Kovar structure vacuum leak detection tool according to claim 5, wherein: the number of the rotating handles (23) is 2, 3 or 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022478403.0U CN213091094U (en) | 2020-10-30 | 2020-10-30 | Kovar structure vacuum leak detection tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022478403.0U CN213091094U (en) | 2020-10-30 | 2020-10-30 | Kovar structure vacuum leak detection tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213091094U true CN213091094U (en) | 2021-04-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022478403.0U Expired - Fee Related CN213091094U (en) | 2020-10-30 | 2020-10-30 | Kovar structure vacuum leak detection tool |
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| Country | Link |
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| CN (1) | CN213091094U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114252209A (en) * | 2021-12-29 | 2022-03-29 | 中国电子科技集团公司第二十六研究所 | Device and method for testing leak rate of hemispherical resonator gyroscope kovar |
-
2020
- 2020-10-30 CN CN202022478403.0U patent/CN213091094U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114252209A (en) * | 2021-12-29 | 2022-03-29 | 中国电子科技集团公司第二十六研究所 | Device and method for testing leak rate of hemispherical resonator gyroscope kovar |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210430 |
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| CF01 | Termination of patent right due to non-payment of annual fee |