CN213060658U - Injection pipe device and equipment for vapor phase high-temperature doping rod making - Google Patents
Injection pipe device and equipment for vapor phase high-temperature doping rod making Download PDFInfo
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- CN213060658U CN213060658U CN202020841292.2U CN202020841292U CN213060658U CN 213060658 U CN213060658 U CN 213060658U CN 202020841292 U CN202020841292 U CN 202020841292U CN 213060658 U CN213060658 U CN 213060658U
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Abstract
The utility model discloses an injection pipe device and equipment that is used for vapor phase method high temperature to dope system stick, the injection pipe device places the intraductal gas conveying pipe of heat preservation insulation sleeve and heating temperature measurement stick in including, and heat preservation insulation sleeve sets up intraductally in high-purity quartz cover, and gas conveying pipe is corrosion-resistant stainless steel. The output end of the injection pipe device is configured with the reaction pipe and a lathe rod manufacturing system, and the input end of the injection pipe device is configured with the high-temperature doping system. The utility model provides a heating and temperature probe and many gas delivery pipe direct contact have improved heat conduction efficiency, and peripheral hardware heat preservation insulating tube waits to heat and temperature probe to rise behind the settlement temperature more than 200 ℃, will make gas delivery pipe be heated more evenly, the temperature field is more stable, can not condense because of the heat insulation intraductal temperature inequality of heat preservation and produce crystallization, thereby gas delivery pipe, improved production efficiency, saved maintenance time and cost.
Description
Technical Field
The utility model relates to an optical fiber cable preparation technical field especially relates to an injection pipe device and equipment that is used for vapor phase method high temperature to dope system stick.
Background
Along with the rapid development of global laser technology, the series of various products of the laser is gradually improved, and laser processing penetrates into various fields of manufacturing industry. The laser types include gas lasers, liquid lasers, solid lasers, semiconductor lasers and optical fiber lasers, wherein the optical fiber lasers have obvious advantages in aspects of maintenance cost, maximum output power, electro-optical conversion rate, pumping service life, stability, flexible processing and the like compared with other lasers. The fiber laser machine can be used in microelectronics, printing, automobile, medical equipment, shipbuilding, aviation and other industries, and the machinable materials include micro-machining from heart support and computer memory chip to deep fusion welding of thick pipe wall. The fiber laser is flexible to use and operate, is one of the most revolutionary characteristics of the fiber laser, and can be easily integrated in a multi-axis robot and a galvanometer system.
The fiber laser mainly comprises a pumping source, a coupler, a rare earth element doped fiber, a resonant cavity and the like, wherein the rare earth doped fiber accounts for nearly 12% of the total cost of the fiber laser; most of domestic enterprises purchase imported rare earth element doped optical fibers, and in recent years, domestic substitution import is continuously promoted, so that the investment of domestic enterprises in the field of rare earth element doped optical fibers is also stimulated; wherein import substitution is completed in the low power field, the medium power field accelerates the substitution process, while the localization rate in the high power field is in steady promotion, and the import of domestic substitution is in progress.
The MCVD method for preparing the rare earth doped optical fiber preform is mainly divided into a liquid phase doping method and a gas phase doping method. The liquid phase doping method is the earliest adopted technological method for preparing the rare earth doped optical fiber preform rod, and is characterized in that a deposition layer with a loose structure is deposited on the inner wall of a reaction tube through an MCVD (metal chemical vapor deposition) process, the deposition layer with the loose structure is soaked in a solution containing rare earth ions, the deposition layer adsorbs the rare earth ions in the solution, and then the rare earth ions are doped into the reaction tube through processes of dehydration, vitrification and the like. The gas phase doping method is a technological method developed in recent years, and is characterized by that it utilizes MCVD process to deposit cladding layer, but the rare earth chelate containing rare earth element or rare earth chloride can be introduced into MCVD reaction tube by means of gas mode to make deposition of core region rare earth material produce oxidation reaction together with silicon and phosphorus introduced into MCVD reaction tube under the action of external heat source, and can be transferred and deposited on the inner wall of reaction tube so as to directly form doped core region. Compared with a liquid phase doping method, the gas phase doping method has the advantages that the process is simpler and more convenient, the section of the deposition prefabricated rod is finer, the doping concentration can be flexibly controlled, the uniformity is good, and the core diameter can be larger or smaller.
In the existing injection pipe device for vapor phase high-temperature doping rod making equipment (MCVD equipment), a heating belt is wound outside a metal heat-insulating sleeve for heating, so that the temperature in the metal heat-insulating sleeve is uneven, the metal heat-insulating sleeve is condensed to generate crystals to block a pipeline, and the production efficiency is influenced.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that the not enough that exists to above-mentioned prior art provides a be heated more even a filling tube device and equipment that is used for vapor phase method high temperature doping system stick.
The utility model discloses the technical scheme who adopts does: an injection pipe device for vapor phase high-temperature doping rod manufacturing is characterized in that: the gas conveying pipe and the heating temperature measuring rod are arranged in the heat-insulating sleeve, the heat-insulating sleeve is arranged in the high-purity quartz sleeve, and the gas conveying pipe is made of corrosion-resistant stainless steel.
According to the technical scheme, the heating temperature measuring rod is arranged in the middle of the heat-insulating sleeve, and the number of the gas conveying pipes is at least two and the gas conveying pipes are arranged on the periphery of the heating temperature measuring rod.
According to the technical scheme, the heat-insulating sleeve comprises a metal sleeve and a heat-insulating layer coated outside the metal sleeve.
According to the technical scheme, the thickness of the heat-insulating layer is 1-1.3 mm.
According to the technical scheme, the heat-insulating layer is a high-temperature-resistant adhesive tape.
According to the technical scheme, the output end of the raw material conveying pipe penetrates through the sealing element
The sealing element is introduced into the reaction tube, and the periphery of the sealing element is hermetically arranged with the inner wall of the high-purity quartz sleeve.
According to the technical scheme, the sealing element is a perfluororubber sealing block.
A high-temperature doping rod making equipment for a gas phase method is characterized in that: the device comprises the injection pipe device, wherein the output end of the injection pipe device is configured with the reaction pipe and the lathe rod making system, and the input end of the injection pipe device is configured with the high-temperature doping system.
According to the technical scheme, the injection pipe device is supported and fixed through the gas end rotary sealing device, and the reaction pipe is clamped and rotationally sealed with the chucks at the two ends through the rotary sealing device.
The utility model discloses the beneficial effect who gains does:
1. the utility model provides a heating and temperature probe and many gas delivery pipe direct contact have improved heat conduction efficiency, and peripheral hardware heat preservation insulating tube waits to heat and temperature probe to rise behind the settlement temperature more than 200 ℃, will make gas delivery pipe be heated more evenly, the temperature field is more stable, can not condense because of the heat insulation intraductal temperature inequality of heat preservation and produce crystallization, thereby gas delivery pipe, improved production efficiency, saved maintenance time and cost.
2. The utility model integrates the temperature measuring unit into the heating rod, compared with the prior mode of injecting the temperature measuring meter into the metal sleeve, the temperature measuring thermocouple unit is reduced, so that more installation space is saved, the thickness of the heat preservation layer is increased, and the heat preservation effect is improved;
3. the metal sleeve and the gas conveying pipe of the utility model are made of corrosion-resistant stainless steel, so that the metal sleeve and the gas conveying pipe can bear the corrosivity of reaction gas, and the service life is longer;
4. the utility model discloses a gas delivery pipe has guaranteed the leakproofness of heat preservation insulating tube tail end in putting into the reaction tube through sealing element to prevent at prefabricated excellent preparation in-process, in gaseous pouring back into high-purity quartz capsule, corrode heat preservation insulating tube and gas delivery pipe.
Drawings
Fig. 1 is a structural diagram of an injection pipe device for vapor phase high-temperature doping rod manufacturing according to an embodiment of the present invention.
Fig. 2 is a schematic view of fig. 1 from direction a-a.
Fig. 3 is a schematic structural diagram of a vapor phase high-temperature doping rod making apparatus according to an embodiment of the present invention.
Detailed Description
The present invention will be further explained with reference to the accompanying drawings.
As shown in fig. 1 and 2, the present embodiment provides an injection pipe device for a vapor phase method high temperature doping rod manufacturing, which includes a gas delivery pipe 5 and a heating temperature measurement rod 4, which are disposed inside a heat insulation sleeve, the heat insulation sleeve is disposed inside a high purity quartz sleeve 1, the gas delivery pipe 5 is made of corrosion-resistant stainless steel, specifically, a stainless steel pipe or an alloy pipe, a heating unit of the heating temperature measurement rod is made of a heating wire, a resistance value of the heating wire can be selected according to a required heating temperature, and it is convenient to adjust a voltage and accurately control a temperature of the heating rod when in use; the built-in temperature measuring unit uses a K-type thermocouple. The heating temperature measuring rod 4 is arranged in the middle of the heat-insulating sleeve, the number of the gas conveying pipes 5 is at least two, and the gas conveying pipes are arranged on the periphery of the heating temperature measuring rod, in the embodiment, three gas conveying pipes 5 are taken as an example for explanation, and the three gas conveying pipes 5 are uniformly arranged on the periphery of the heating temperature measuring rod 4. The utility model discloses a set up heating and temperature probe 4 and the 5 direct contact of many gas delivery pipe, improved heat conduction efficiency, peripheral hardware heat preservation insulating tube simultaneously, wait to heat and temperature probe rise to the settlement temperature more than 200 ℃ after, will make gas delivery pipe be heated more evenly, the temperature field is more stable, can not condense because of the temperature inequality in the heat preservation insulating tube produces the crystallization, thereby gas delivery pipe, improved production efficiency, saved maintenance time and cost.
In this embodiment, the heat-insulating sleeve includes a metal sleeve 2 and a heat-insulating layer 3 coated outside the metal sleeve. The thickness of the heat-insulating layer is 1.2 mm. The heat-insulating layer is a high-temperature-resistant adhesive tape. The high temperature resistant adhesive tape plays heat retaining effect to metal sleeve 2, can not make the temperature of the high temperature vapour more than 200 ℃ reduce in passing through gas delivery pipe 5 because of metal sleeve 2 contacts rapid cooling with the air, makes the interior comparatively stable temperature field that forms of metal sleeve 2 simultaneously. During specific implementation, the high-temperature-resistant adhesive tape is uniformly wound on the metal sleeve 2, and the condition that the adhesive tape is not wrinkled is observed in the implementation process, so that the metal sleeve 2 can be conveniently injected into the high-purity quartz sleeve 1. After the metal sleeve 2 is injected into the high-purity quartz tube 1, whether the metal sleeve 2 is loosened or not is observed, and the service life of the high-purity quartz tube 1 is influenced by overlarge gap, wherein the metal sleeve is a stainless steel sleeve.
When the raw material conveying pipe is configured with the reaction pipe 7, the output end of the gas conveying pipe 5 penetrates through the sealing element 6 to be led into the reaction pipe, and the periphery of the sealing element is hermetically configured with the inner wall of the high-purity quartz sleeve 1. In this embodiment, the sealing element 6 is a perfluororubber sealing block. The metal sleeve 2 and the gas delivery pipe 5 are wrapped and sealed by the high-purity quartz tube 1 and the perfluorinated rubber sealing block, so that the metal sleeve 2 and the gas delivery pipe 5 are isolated from the chemical reaction environment in the injected reaction tube 7 and are not back-flowed and corroded by acidic gas in the environment.
Inserting 4 heating temperature measuring rods and 3 gas conveying pipes 5 into the metal sleeve 2 and adjusting the positions of the heating temperature measuring rods and the gas conveying pipes, so as to ensure that the gas conveying pipes 5 are increased by 1.5cm, facilitate the installation of a perfluorinated rubber sealing block and ensure the tightness of the right end of the metal sleeve 2, and prevent gas from flowing backwards into the high-purity quartz tube 1 to corrode the metal sleeve 2 and the gas conveying pipes 5 in the preparation process of the prefabricated rod; in order to facilitate the positioning of the perfluoro rubber block, the clearance between the gas delivery pipe 5 and the metal sleeve 2 is generally 0.1-0.3mm, so that the gas delivery pipe 5 is prevented from shaking in the metal sleeve 2 due to the overlarge clearance. In addition, in actual operation, in order to ensure that the opening of the perfluororubber sealing block can be accurately aligned with the gas delivery pipe 5, a tooling rod is required to adjust the position of the gas delivery pipe 5.
As shown in fig. 3, the present embodiment further provides a high-temperature doping rod making apparatus for a vapor phase method, which includes the injection pipe device 10 as described above, an output end of the injection pipe device 10 is configured with the reaction pipe 7 and the lathe rod making system 11, and an input end of the injection pipe device is configured with the high-temperature doping system 9, wherein the injection pipe device 10 is supported and fixed by the gas-end rotary sealing device 12, and the reaction pipe 7 is clamped and rotationally sealed with the two end chucks by the rotary sealing device 12. Wherein, the high-temperature doping system, the gas end rotary sealing device 12 and the lathe rod making system 11 are all the prior art. When a preform doped with a rare earth element is to be produced, a mixed gas doped with a rare earth element is introduced into the reaction tube 7 through the injection tube device 10, and a deposition reaction is generated in the heating zone. During production, production process personnel can control the gas flow of the mass flow meter MFC in the high-temperature doping system 9, the running speed of a burner in the lathe rod making system 11, the rotating speed of the reaction tube 7 and the like according to the formula according to the prefabricated rod doped with the rare earth element to be produced.
In summary, the above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. An injection pipe device for vapor phase high-temperature doping rod manufacturing is characterized in that: the gas conveying pipe and the heating temperature measuring rod are arranged in the heat-insulating sleeve, the heat-insulating sleeve is arranged in the high-purity quartz sleeve, and the gas conveying pipe is made of corrosion-resistant stainless steel.
2. The injection pipe apparatus for vapor phase high temperature doping rod fabrication according to claim 1, wherein: the heating temperature measuring rod is arranged in the middle of the heat-insulating sleeve, and at least two gas conveying pipes are arranged on the periphery of the heating temperature measuring rod.
3. The injection pipe apparatus for vapor phase high temperature doping rod fabrication according to claim 1 or 2, wherein: the heat-insulating sleeve comprises a metal sleeve and a heat-insulating layer coated outside the metal sleeve.
4. The injection pipe apparatus for vapor phase high temperature doping rod manufacturing according to claim 3, wherein: the thickness of the heat preservation layer is 1-1.3 mm.
5. The injection pipe apparatus for vapor phase high temperature doping rod manufacturing according to claim 3, wherein: the heat-insulating layer is a high-temperature-resistant adhesive tape.
6. The injection pipe apparatus for vapor phase high temperature doping rod fabrication according to claim 1 or 2, wherein: the output end of the gas conveying pipe penetrates through the sealing element and is led into the reaction pipe, and the periphery of the sealing element is hermetically arranged with the inner wall of the high-purity quartz sleeve.
7. The injection pipe apparatus for vapor phase high temperature doping rod manufacturing according to claim 6, wherein: the sealing element is a perfluororubber sealing block.
8. An apparatus for preparing rod by gas phase high temperature doping, which is characterized in that: the injector tube assembly of any one of claims 1 to 7, wherein the output end of the injector tube assembly is configured with a reactor tube and lathe rod system and the input end of the injector tube assembly is configured with a high temperature doping system.
9. The apparatus for vapor phase process high temperature doping rod according to claim 8, characterized in that: the injection pipe device is supported and fixed through a gas end rotary sealing device, and the reaction pipe is clamped and rotationally sealed with the chucks at the two ends through the rotary sealing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020841292.2U CN213060658U (en) | 2020-05-19 | 2020-05-19 | Injection pipe device and equipment for vapor phase high-temperature doping rod making |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020841292.2U CN213060658U (en) | 2020-05-19 | 2020-05-19 | Injection pipe device and equipment for vapor phase high-temperature doping rod making |
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| CN213060658U true CN213060658U (en) | 2021-04-27 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111499180A (en) * | 2020-05-19 | 2020-08-07 | 武汉光盛通光电科技有限公司 | Injection pipe device and equipment for vapor phase high-temperature doping rod making |
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2020
- 2020-05-19 CN CN202020841292.2U patent/CN213060658U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111499180A (en) * | 2020-05-19 | 2020-08-07 | 武汉光盛通光电科技有限公司 | Injection pipe device and equipment for vapor phase high-temperature doping rod making |
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