CN212988619U - Temperature measuring device of crucible descending method growth furnace - Google Patents
Temperature measuring device of crucible descending method growth furnace Download PDFInfo
- Publication number
- CN212988619U CN212988619U CN202022533749.6U CN202022533749U CN212988619U CN 212988619 U CN212988619 U CN 212988619U CN 202022533749 U CN202022533749 U CN 202022533749U CN 212988619 U CN212988619 U CN 212988619U
- Authority
- CN
- China
- Prior art keywords
- crucible
- sealed
- quartz capsule
- tray
- sealed quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 20
- 239000010453 quartz Substances 0.000 claims abstract description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 25
- 230000001360 synchronised effect Effects 0.000 claims abstract description 21
- 239000002775 capsule Substances 0.000 claims abstract description 18
- 239000013078 crystal Substances 0.000 abstract description 10
- 238000009529 body temperature measurement Methods 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 description 9
- 239000011553 magnetic fluid Substances 0.000 description 5
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to a growth furnace temperature measurement field especially relates to a crucible descent method growth furnace temperature measuring device, and the device can record crucible bottom temperature in real time at the crystal growth in-process, and does not influence equipment vacuum property. Including sealed quartz capsule, the sealed quartz capsule outside is equipped with the heater, the fixed tray bracing piece that is equipped with of sealed quartz capsule inner bottom surface, the fixed crucible tray that is equipped with in tray bracing piece top, be equipped with the crucible on the crucible tray, sealed quartz capsule below be equipped with vertical sealed scalable bellows, sealed scalable bellows top and sealed quartz capsule bottom surface fixed connection, sealed scalable bellows bottom and rotatory magnetic current body top fixed connection, rotatory magnetic current body bottom is equipped with first synchronous pulley, first synchronous pulley is connected with second synchronous pulley through the hold-in range, second synchronous pulley locates on the rotating electrical machines, sealed quartz capsule central point put and inserted the thermocouple. The operation is simple, the use is convenient, and the device is suitable for various places.
Description
Technical Field
The utility model relates to a growth furnace temperature measurement field specifically is a crucible descent method growth furnace temperature measuring device.
Background
Most of the existing vacuum crystal growth furnaces cannot measure the temperature of a temperature field in real time in the growth process, the temperature required in a cavity needs to be measured manually through a thermocouple before growth, but the temperature field measured by the existing vacuum crystal growth furnaces has errors with the temperature field measured by actual growth, and the efficiency is low.
SUMMERY OF THE UTILITY MODEL
The utility model provides a not enough to prior art, the utility model provides a crucible descent method growth furnace temperature measuring device, the device can record crucible bottom temperature in real time at the crystal growth in-process, and do not influence equipment vacuum property, effectively solve the problem that proposes in the background art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a crucible descent method growth furnace temperature measuring device which characterized in that: including sealed quartz capsule, sealed quartz capsule outside of tubes side be equipped with the heater, the fixed tray bracing piece that is equipped with of sealed quartz capsule inner bottom surface, the fixed crucible tray that is equipped with in tray bracing piece top, be equipped with the crucible on the crucible tray, sealed quartz capsule below be equipped with vertical sealed scalable bellows, sealed scalable bellows top and sealed quartz capsule bottom surface fixed connection, sealed scalable bellows bottom and rotatory magnetic current body top fixed connection, rotatory magnetic current body bottom is equipped with first synchronous pulley, first synchronous pulley is connected with second synchronous pulley through the hold-in range, second synchronous pulley locates on the rotating electrical machines, sealed quartz capsule central point put and inserted the thermocouple.
As a preferred technical scheme, the top of the thermocouple is connected with the crucible tray, the lower end of the thermocouple extends downwards to the position below the first synchronous belt pulley, and a conductive slip ring is arranged at the tail end of the thermocouple.
As the preferred technical scheme, a corrugated pipe guide rod is arranged on the outer side of the telescopic corrugated pipe, and a guide wheel is arranged at the bottom of the corrugated pipe guide rod.
Compared with the prior art, the utility model provides a crucible descent method growth furnace temperature measuring device possesses following beneficial effect:
1. the utility model discloses a vacuum crystal growth furnace can record crucible bottom temperature in real time at the crystal growth in-process, and does not influence equipment vacuum performance.
2. The utility model discloses draw the temperature curve according to the temperature that the crucible bottom recorded, improved the long brilliant stove in vacuum work efficiency greatly, and can be according to the temperature curve adjustment heater power that records, improved crystal growth's efficiency.
Drawings
Fig. 1 is a schematic view of the structure of the present invention;
fig. 2 is an enlarged schematic view of a portion a in fig. 1.
The following are marked in the figure: 1. a crucible; 2. a crucible tray; 3. a crucible tray support bar; 4. a bellows guide rod; 5, sealing the telescopic corrugated pipe; 6. rotating the magnetic fluid; 7. a guide wheel; 8. a rotating electric machine; 9. a synchronous belt; 10, a conductive slip ring; 11. a thermocouple; 12. a first timing pulley; 13. sealing the quartz tube; 14. a heater; a second timing pulley.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in figures 1 and 2, the temperature measuring device of the Bridgman-Stockbarge growth furnace comprises a sealed quartz tube 13, the outer side of the sealed quartz tube 13 is provided with a heater 14, the inner bottom surface of the sealed quartz tube 13 is fixedly provided with a tray supporting rod 3, the top of the tray supporting rod 3 is fixedly provided with a crucible tray 2, the crucible tray 2 is provided with a crucible 1, the improved rotary magnetic fluid sealing device is characterized in that a vertical sealing telescopic corrugated pipe 5 is arranged below the sealing quartz pipe 13, the top of the sealing telescopic corrugated pipe 5 is fixedly connected with the bottom surface of the sealing quartz pipe 13, the bottom of the sealing telescopic corrugated pipe 13 is fixedly connected with the top of the rotary magnetic fluid 10, a first synchronous belt pulley 12 is arranged at the bottom of the rotary magnetic fluid 10, the first synchronous belt pulley 12 is connected with a second synchronous belt pulley 15 through a synchronous belt 9, the second synchronous belt pulley 15 is arranged on a motor shaft of a rotary motor 8, and a thermocouple 11 is inserted in the center of the sealing quartz pipe 13.
In the above embodiment, specifically, the top of the thermocouple 11 is fixedly connected to the crucible tray 2, and the lower end of the thermocouple 11 extends downward below the first synchronous pulley 12 and is provided with the conductive slip ring 10 at the end.
In the above embodiment, specifically, the bellows guide rod 4 is disposed on the outer side of the telescopic bellows 5, and the guide wheel 7 is disposed at the bottom of the bellows guide rod 4.
The working principle is as follows: the crucible 1 is filled with raw materials, the temperature of the equipment is slightly higher than the melting point of the materials, the equipment slowly descends while rotating, at the moment, the thermocouple 11 drives the thermocouple 11 to rotate by rotating the magnetic fluid 10 structure, temperature signals of the thermocouple 11 need to be transmitted while the equipment continuously rotates, and the conductive slip ring 10 can avoid spraining to a lead in the rotating process. In the crystal growth process, the temperature at the bottom of the crucible 1 can be measured in real time, and the vacuum performance of the equipment is not influenced. The temperature curve is drawn according to the temperature measured at the bottom of the crucible 1, so that the working efficiency of the vacuum crystal growth furnace is greatly improved, the power of the heater 14 can be adjusted according to the measured temperature curve, and the crystal growth efficiency is improved.
The components used in the present invention are all common standard components or components known to those skilled in the art, and the structure and principle thereof are well known to those skilled in the art.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (3)
1. The utility model provides a crucible descent method growth furnace temperature measuring device which characterized in that: including sealed quartz capsule, sealed quartz capsule outside of tubes side be equipped with the heater, the fixed tray bracing piece that is equipped with of sealed quartz capsule inner bottom surface, the fixed crucible tray that is equipped with in tray bracing piece top, be equipped with the crucible on the crucible tray, sealed quartz capsule below be equipped with vertical sealed scalable bellows, sealed scalable bellows top and sealed quartz capsule bottom surface fixed connection, sealed scalable bellows bottom and rotatory magnetic current body top fixed connection, rotatory magnetic current body bottom is equipped with first synchronous pulley, first synchronous pulley is connected with second synchronous pulley through the hold-in range, second synchronous pulley locates on the rotating electrical machines, sealed quartz capsule central point put and inserted the thermocouple.
2. The temperature measuring device of the crucible descending method growth furnace of claim 1, wherein: the top of the thermocouple is connected with the crucible tray, the lower end of the thermocouple extends downwards to the lower part of the first synchronous belt pulley, and a conductive slip ring is arranged at the tail end of the thermocouple.
3. The temperature measuring device of the crucible descending method growth furnace of claim 1, wherein: the outer side of the telescopic corrugated pipe is provided with a corrugated pipe guide rod, and the bottom of the corrugated pipe guide rod is provided with a guide wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022533749.6U CN212988619U (en) | 2020-11-05 | 2020-11-05 | Temperature measuring device of crucible descending method growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022533749.6U CN212988619U (en) | 2020-11-05 | 2020-11-05 | Temperature measuring device of crucible descending method growth furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212988619U true CN212988619U (en) | 2021-04-16 |
Family
ID=75420171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022533749.6U Active CN212988619U (en) | 2020-11-05 | 2020-11-05 | Temperature measuring device of crucible descending method growth furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212988619U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113355657A (en) * | 2021-05-27 | 2021-09-07 | 天津大学 | Source-dividing positioning vacuum tube furnace device |
-
2020
- 2020-11-05 CN CN202022533749.6U patent/CN212988619U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113355657A (en) * | 2021-05-27 | 2021-09-07 | 天津大学 | Source-dividing positioning vacuum tube furnace device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN212988619U (en) | Temperature measuring device of crucible descending method growth furnace | |
| CN106906515A (en) | A kind of SiC single crystal grower that can realize temperature field real-time adjustment and the method that SiC single crystal is grown using the device | |
| CN203382851U (en) | Testing device for melting thickness of seed crystals of pseudo-single crystal ingot furnace | |
| CN105780111B (en) | Polycrystalline silicon ingot casting furnace superintendent crystalline substance speed self-operated measuring unit | |
| CN211041773U (en) | Vacuum furnace with slide mechanism | |
| CN208029108U (en) | A kind of electric heating tube component | |
| CN203420008U (en) | Vacuum furnace for melt crystal growth | |
| CN215981728U (en) | Displacement mechanism for ceramic capacitor visual detection device | |
| CN212375341U (en) | Oxygen-free copper furnace phosphorus adding and deoxidation device utilizing weight measurement and calculation of weight sensor | |
| CN211436179U (en) | Temperature measuring device of reaction kettle | |
| CN208672182U (en) | The device of real-time measurement LF in-furnace temperature | |
| CN221351094U (en) | Device for measuring viscosity of quartz glass at ultrahigh temperature | |
| CN209589898U (en) | A kind of dedicated gelation time instrument of powdery paints | |
| CN206618267U (en) | A kind of cast member integrated production line | |
| CN212409675U (en) | Device capable of measuring flatness of monocrystalline silicon wafer | |
| CN215746294U (en) | Magnet melt-spun furnace temperature measuring device and magnet alloy smelting device | |
| CN205653538U (en) | Brilliant speed automatic measuring device of polycrystalline silicon ingot casting furnace superintendent | |
| CN110453278A (en) | A kind of meausring apparatus for crystal growth | |
| CN220977039U (en) | Blast furnace iron amount difference measuring device | |
| CN217499499U (en) | Crystal growth measuring device of polycrystal ingot furnace capable of moving elastically | |
| CN211425692U (en) | Plasma lead type platinum thermocouple device | |
| CN220597689U (en) | Special device for flaky gallium oxide single crystal growth | |
| CN212590170U (en) | Melon seed turns over stir-fry device | |
| CN213481570U (en) | Thermocouple with | |
| CN220380791U (en) | Molten iron sampling cup for carbon silicon instrument |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 10-101, Jinan Changqing International Enterprise Port, No. 2222, South Section of Yuqing Road, Changqing District, Jinan City, Shandong Province, 250000 Patentee after: Shandong Jingsheng Electronic Technology Co.,Ltd. Country or region after: China Address before: Room 1120, 49 Lishan Road, Lixia District, Jinan City, Shandong Province Patentee before: Shandong Jingsheng Electronic Technology Co.,Ltd. Country or region before: China |
|
| CP03 | Change of name, title or address |