CN212953024U - 一种晶圆搬运机械手 - Google Patents
一种晶圆搬运机械手 Download PDFInfo
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- CN212953024U CN212953024U CN202021624610.6U CN202021624610U CN212953024U CN 212953024 U CN212953024 U CN 212953024U CN 202021624610 U CN202021624610 U CN 202021624610U CN 212953024 U CN212953024 U CN 212953024U
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- 230000007246 mechanism Effects 0.000 claims abstract description 50
- 239000012636 effector Substances 0.000 claims abstract description 18
- 238000007789 sealing Methods 0.000 claims abstract description 6
- 230000001360 synchronised effect Effects 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 8
- 239000002245 particle Substances 0.000 abstract description 4
- 230000033001 locomotion Effects 0.000 abstract description 3
- 230000032683 aging Effects 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 17
- 230000009194 climbing Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 210000003857 wrist joint Anatomy 0.000 description 1
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CN202021624610.6U CN212953024U (zh) | 2020-08-07 | 2020-08-07 | 一种晶圆搬运机械手 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113478497A (zh) * | 2021-06-22 | 2021-10-08 | 天津理工大学 | 立柱维护机器人 |
CN113620064A (zh) * | 2021-07-21 | 2021-11-09 | 佛山市金博特机械有限公司 | 一种瓷砖加工打跺机械设备 |
CN115312437A (zh) * | 2022-10-10 | 2022-11-08 | 智程半导体设备科技(昆山)有限公司 | 一种晶圆传输装置以及搬运方法 |
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2020
- 2020-08-07 CN CN202021624610.6U patent/CN212953024U/zh active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113478497A (zh) * | 2021-06-22 | 2021-10-08 | 天津理工大学 | 立柱维护机器人 |
CN113620064A (zh) * | 2021-07-21 | 2021-11-09 | 佛山市金博特机械有限公司 | 一种瓷砖加工打跺机械设备 |
CN115312437A (zh) * | 2022-10-10 | 2022-11-08 | 智程半导体设备科技(昆山)有限公司 | 一种晶圆传输装置以及搬运方法 |
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Address after: Room 3, no.299, Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Address before: Room 3, no.299, Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Zhicheng semiconductor equipment technology (Kunshan) Co.,Ltd. |
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Address after: No. 889 Zhonghua Road, Bacheng Town, Kunshan City, Suzhou City, Jiangsu Province, 215300 Patentee after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region after: China Address before: Room 3, no.299, Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region before: China |