CN212916712U

CN212916712U - Surface ash removal device for chip manufacturing

Info

Publication number: CN212916712U
Application number: CN202021214808.7U
Authority: CN
Inventors: 王淑琴
Original assignee: Wuxi Kaicheng Semiconductor Technology Co ltd
Current assignee: Wuxi Kaicheng Semiconductor Technology Co ltd
Priority date: 2020-06-28
Filing date: 2020-06-28
Publication date: 2021-04-09
Anticipated expiration: 2030-06-28

Abstract

The utility model relates to a chip manufacturing technical field just discloses a chip manufacturing uses surface ash removal device, comprising a supporting seat, the platform is placed to the top fixedly connected with of supporting seat, the top fixedly connected with electric putter of placing the platform, electric putter's one end fixedly connected with places the board, the bottom swing joint of placing the board has flexible loop bar, the one end swing joint of flexible loop bar has the movable rod, the one end of movable rod and the top fixed connection of placing the platform. This surface ash removal device for chip manufacture has reached the efficient purpose of surface ash removal device ash removal for chip manufacture, has solved general chip and has needed the manual deashing of people, the lower problem of deashing efficiency, need not staff's handheld tool to carry out the deashing to the chip, and deashing process labour saving and time saving when lightening staff's work burden has also improved people's work efficiency, and the work of giving people brings the facility, has further satisfied people's user demand.

Description

Surface ash removal device for chip manufacturing

Technical Field

The utility model relates to a chip manufacturing technical field specifically is a surface ash removal device for chip manufacturing.

Background

A chip, also known as a microcircuit, a microchip, and an integrated circuit, refers to a silicon wafer containing an integrated circuit, which is a small volume and is often a part of a computer or other electronic devices, and a chip, which is a general name for semiconductor devices, is a carrier of an integrated circuit and is formed by dividing a wafer into a small silicon wafer containing an integrated circuit, which is a part of a computer or other electronic devices.

There are some dusts in the chip manufacture completion rear surface, and generally need the artifical instrument of taking to carry out the deashing to the chip surface at present, when having strengthened people work burden, waste time and energy at the deashing process, also reduced people's work efficiency, the work of giving people brings inconvenience, can't satisfy people's present user demand.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

Not enough to prior art, the utility model provides a chip is surface ash removal device for manufacturing possesses the efficient high advantage of deashing, has solved general chip and needs the manual deashing of people, the lower problem of deashing efficiency.

(II) technical scheme

For the purpose that realizes that above-mentioned this chip makes with surface ash removal device deashing efficient, the utility model provides a following technical scheme: the utility model provides a chip is made and is used surperficial ash removal device, includes the supporting seat, the platform is placed to the top fixedly connected with of supporting seat, the top fixedly connected with electric putter of placing the platform, the board is placed to electric putter's one end fixedly connected with, the bottom swing joint of placing the board has flexible loop bar, the one end swing joint of flexible loop bar has the movable rod, the one end of movable rod and the top fixed connection of placing the platform, the top of placing the board is seted up flutedly, the inner wall swing joint of recess has the chip main part, the top fixedly connected with support of placing the platform, the top fixedly connected with motor of support, the output shaft of motor passes through shaft coupling fixedly connected with pivot, the one end of pivot runs through the top of support and extends to the bottom of support.

The one end swing joint of pivot has the connecting rod, the one end fixedly connected with cleaning brush of connecting rod, the top fixedly connected with dust collection box of supporting seat, the top fixedly connected with dust absorption pipe of dust collection box, the one end of dust absorption pipe runs through the outer wall of support and extends to the inner wall of support, the outer wall swing joint of dust absorption pipe has the dead lever, the outer wall of dust absorption pipe and the top swing joint of placing the board, the other end fixedly connected with air exhauster main part of dust absorption pipe.

Preferably, one end of each dust suction pipe penetrates through the top of the dust collection box and extends to one side of the dust collection box, the number of the dust suction pipes is two, and the two dust suction pipes are symmetrically arranged by taking the perpendicular bisector of the support seat as a symmetry axis.

Preferably, the outer wall of the fixing rod is provided with a through hole, the fixing rod is movably connected with the dust collection pipe through the through hole, the protection pad is fixedly connected to the inner portion of the through hole, and the protection pad is a sponge protection pad.

Preferably, the spread groove has been seted up to the one end of pivot, and the inner wall of spread groove is provided with the internal thread, the outer wall of connecting rod is provided with the external screw thread, and the spread groove passes through internal thread and external screw thread and connecting rod threaded connection, the cleaning brush is circular cleaning brush.

Preferably, the diameter of the inner wall of the movable rod is larger than that of the outer wall of the telescopic sleeve rod, and the movable rod is in telescopic connection with the telescopic sleeve rod.

Preferably, the number of the dust collecting boxes and the number of the exhaust fan main bodies are two, each dust collecting box and each exhaust fan main body are a group, and the two groups of dust collecting boxes and the exhaust fan main bodies are symmetrically arranged by taking the perpendicular bisector of the supporting seat as a symmetry axis.

Preferably, the outer wall fixedly connected with protecting crust of motor, and the inside wall of protecting crust is provided with the fixed block, and one side of fixed block and the outer wall fixed connection of motor.

(III) advantageous effects

Compared with the prior art, the utility model provides a chip manufacturing is with surperficial ash removal device possesses following beneficial effect:

1. this surface ash removal device is used in chip manufacturing, through placing the platform, electric putter, the cleaning brush, the connecting rod, the apparatus further comprises a rotating shaft, including a motor, an end cap, a controller, and a cover plate, the support, mutually supporting of recess and chip main part uses, the efficient purpose of surface ash removal device deashing has been reached in chip manufacturing, it needs the manual deashing of people to have solved general chip, the lower problem of deashing efficiency, need not staff's handheld instrument to carry out the deashing to the chip, deashing process labour saving and time saving, when lightening staff's work burden, people's work efficiency has also been improved, the work of giving people brings the facility, people's user demand has further.

2. This surface ash removal device is used in chip manufacturing, through the dead lever, dust absorption pipe, dust collection box, air exhauster main part and the through-hole that sets up, can adsorb the floated dust when the clearance brush carries out the deashing to the chip main part, when improving chip deashing efficiency, also can avoid people too much at the inspiratory dust of during operation, further made things convenient for people's use.

3. This surface ash removal device is used in chip manufacturing through connecting rod, pivot and the spread groove that sets up, can make things convenient for people to install and dismantle between countershaft and the connecting rod to make things convenient for people to clear up or change the clearance brush, make people more save worry when using.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the through hole structure of the present invention;

fig. 3 is a schematic view of the connection structure of the connection rod and the rotation shaft of the present invention.

In the figure: 1. a supporting seat; 2. a placing table; 3. an electric push rod; 4. a movable rod; 5. a telescopic loop bar; 6. cleaning a brush; 7. a connecting rod; 8. a rotating shaft; 9. a motor; 10. fixing the rod; 11. a support; 12. a dust collection pipe; 13. a dust collection box; 14. an exhaust fan main body; 15. connecting grooves; 16. a through hole; 17. a protective pad; 18. a chip body; 19. a groove; 20. placing the plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, a surface ash removing device for chip manufacturing comprises a supporting base 1, a placing table 2 is fixedly connected to the top of the supporting base 1, an electric push rod 3 is fixedly connected to the top of the placing table 2, the electric push rod 3 is of the type NKLA8F, a placing plate 20 is fixedly connected to one end of the electric push rod 3, a telescopic loop bar 5 is movably connected to the bottom of the placing plate 20, a movable rod 4 is movably connected to one end of the telescopic loop bar 5, the diameter of the inner wall of the movable rod 4 is larger than that of the outer wall of the telescopic loop bar 5, the movable rod 4 is telescopically connected to the telescopic loop bar 5, when the placing plate 20 is driven by the electric push rod 3 to move, the movable rod 4 and the telescopic loop bar 5 synchronously move with the placing plate, the placing plate 20 is fixed and supported, so that the placing plate 20 is more stable when moving, one end of the movable rod 4 is fixedly connected, place the top of board 20 and seted up recess 19, the inner wall swing joint of recess 19 has chip main part 18, place the top fixedly connected with support 11 of platform 2, the top fixedly connected with motor 9 of support 11, the outer wall fixedly connected with protecting crust of motor 9, and the inside wall of protecting crust is provided with the fixed block, and one side of fixed block and the outer wall fixed connection of motor 9, through setting up protecting crust and fixed block, can support and fix motor 9, make motor 9 more stable at the during operation, shaft coupling fixedly connected with pivot 8 is passed through to the output shaft of motor 9, the one end of pivot 8 runs through the top of support 11 and extends to the bottom of support 11.

One end swing joint of pivot 8 has connecting rod 7, spread groove 15 has been seted up to the one end of pivot 8, and the inner wall of spread groove 15 is provided with the internal thread, the outer wall of connecting rod 7 is provided with the external screw thread, and spread groove 15 passes through internal thread and external screw thread and connecting rod 7 threaded connection, cleaning brush 6 is circular cleaning brush, through the threaded connection of spread groove 15 and connecting rod 7, conveniently connect and dismantle between pivot 8 and cleaning brush 6, through the connecting rod 7 that sets up, pivot 8 and spread groove 15, can make things convenient for people to install and dismantle between pivot 8 and connecting rod 7, thereby make things convenient for people to clear up cleaning brush 6 or change, make people save worry more when using, the one end fixedly connected with cleaning brush 6 of connecting rod 7, through placing platform 2, electric putter 3, cleaning brush 6, connecting rod 7, pivot 8, motor 9, The support 11, the groove 19 and the chip main body 18 are mutually matched for use, the purpose of high dust cleaning efficiency of the surface dust cleaning device for chip manufacturing is achieved, the problem that a common chip needs manual dust cleaning by people and is low in dust cleaning efficiency is solved, dust cleaning is carried out on the chip without a tool held by a worker, the dust cleaning process is time-saving and labor-saving, the work load of the worker is relieved, the work efficiency of people is improved, convenience is brought to the work of people, the use requirements of people are further met, the top of the support seat 1 is fixedly connected with the dust collection box 13, the top of the dust collection box 13 is fixedly connected with the dust collection pipes 12, one ends of the dust collection pipes 12 penetrate through the top of the dust collection box 13 and extend to one side of the dust collection box 13, the number of the dust collection pipes 12 is two, the two dust collection pipes 12 are symmetrically arranged by taking the perpendicular bisector of the support seat 1 as a symmetry axis, one, the outer wall of the dust collection pipe 12 is movably connected with a fixed rod 10, the outer wall of the fixed rod 10 is provided with a through hole 16, the fixed rod 10 is movably connected with the dust collection pipe 12 through the through hole 16, the inside of the through hole 16 is fixedly connected with a protective pad 17, the protective pad 17 is a sponge protective pad, the dust collection pipe 12 can be fixed and supported by arranging the fixed rod 10, common sponge for people is made of wood cellulose fiber or foamed plastic polymer, the dust collection pipe 12 can be protected by arranging the protective pad 17, the outer wall of the dust collection pipe 12 is movably connected with the top of a placing plate 20, the other end of the dust collection pipe 12 is fixedly connected with an exhaust fan main body 14, the number of the dust collection boxes 13 and the number of the exhaust fan main bodies 14 are two, each dust collection box 13 and each exhaust fan main body 14 are a group, and the two groups of dust collection boxes 13 and the exhaust fan main, through the dead lever 10, the dust absorption pipe 12, the dust collection box 13, the air exhauster main body 14 and the through hole 16 that set up, can adsorb levitate dust when the cleaning brush 6 carries out the deashing to chip main body 18, when improving chip deashing efficiency, also can avoid people too much at the inspiratory dust of during operation, further made things convenient for people's use.

The electrical components presented in the document are all electrically connected with an external master controller and 220V mains, and the master controller can be a conventional known device controlled by a computer or the like.

When using, put into recess 19 with chip main part 18 in, open electric putter 3 and drive and place board 20 and rise, make the surface and the cleaning brush 6 contact of chip main part 18, open motor 9 after that and make pivot 8 drive connecting rod 7 and rotate, connecting rod 7 drives cleaning brush 6 and rotates and carries out the deashing to the surface of chip main part 18, carry out the in-process of deashing at cleaning brush 6 to chip main part 18, open air exhauster main part 14, make dust absorption pipe 12 inhale the dust collection box 13 with the dust of raiseing in, thereby accomplish work.

To sum up, this surface ash removal device for chip manufacture has reached the efficient purpose of deashing, and deashing process labour saving and time saving has also improved people's work efficiency when lightening staff's work burden, and the work of giving people brings the facility.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a chip is made and is used surface ash removal device, includes supporting seat (1), its characterized in that: the top of the supporting seat (1) is fixedly connected with a placing table (2), the top of the placing table (2) is fixedly connected with an electric push rod (3), one end of the electric push rod (3) is fixedly connected with a placing plate (20), the bottom of the placing plate (20) is movably connected with a telescopic loop bar (5), one end of the telescopic loop bar (5) is movably connected with a movable bar (4), one end of the movable bar (4) is fixedly connected with the top of the placing table (2), the top of the placing plate (20) is provided with a groove (19), the inner wall of the groove (19) is movably connected with a chip main body (18), the top of the placing table (2) is fixedly connected with a support (11), the top of the support (11) is fixedly connected with a motor (9), and an output shaft of the motor (9) is fixedly connected with a rotating shaft (8) through a, one end of the rotating shaft (8) penetrates through the top of the bracket (11) and extends to the bottom of the bracket (11);

the one end swing joint of pivot (8) has connecting rod (7), the one end fixedly connected with cleaning brush (6) of connecting rod (7), the top fixedly connected with dust collection box (13) of supporting seat (1), the top fixedly connected with dust absorption pipe (12) of dust collection box (13), the one end of dust absorption pipe (12) runs through the outer wall of support (11) and extends to the inner wall of support (11), the outer wall swing joint of dust absorption pipe (12) has dead lever (10), the outer wall of dust absorption pipe (12) and the top swing joint of placing board (20), the other end fixedly connected with air exhauster main part (14) of dust absorption pipe (12).

2. The surface ash removal device for chip manufacturing according to claim 1, wherein: one end of each dust suction pipe (12) penetrates through the top of the dust collection box (13) and extends to one side of the dust collection box (13), the number of the dust suction pipes (12) is two, and the two dust suction pipes (12) are symmetrically arranged by taking the perpendicular bisector of the support seat (1) as a symmetry axis.

3. The surface ash removal device for chip manufacturing according to claim 1, wherein: through-hole (16) have been seted up to the outer wall of dead lever (10), and dead lever (10) pass through-hole (16) and dust absorption pipe (12) swing joint, and the inside fixedly connected with protection pad (17) of through-hole (16), and protection pad (17) are sponge protection pad.

4. The surface ash removal device for chip manufacturing according to claim 1, wherein: spread groove (15) have been seted up to the one end of pivot (8), and the inner wall of spread groove (15) is provided with the internal thread, the outer wall of connecting rod (7) is provided with the external screw thread, and spread groove (15) are through internal thread and external screw thread and connecting rod (7) threaded connection, cleaning brush (6) are circular cleaning brush.

5. The surface ash removal device for chip manufacturing according to claim 1, wherein: the diameter of the inner wall of the movable rod (4) is larger than that of the outer wall of the telescopic sleeve rod (5), and the movable rod (4) is in telescopic connection with the telescopic sleeve rod (5).

6. The surface ash removal device for chip manufacturing according to claim 1, wherein: the number of the dust collection boxes (13) and the number of the exhaust fan main bodies (14) are two, each dust collection box (13) and each exhaust fan main body (14) are a group, and the two groups of dust collection boxes (13) and the exhaust fan main bodies (14) are symmetrically arranged by taking the perpendicular bisector of the supporting seat (1) as a symmetry axis.

7. The surface ash removal device for chip manufacturing according to claim 1, wherein: the outer wall fixedly connected with protecting crust of motor (9), and the inside wall of protecting crust is provided with the fixed block, and one side of fixed block and the outer wall fixed connection of motor (9).