CN212915174U - CVD equipment tail gas processing apparatus - Google Patents
CVD equipment tail gas processing apparatus Download PDFInfo
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- CN212915174U CN212915174U CN202021215366.8U CN202021215366U CN212915174U CN 212915174 U CN212915174 U CN 212915174U CN 202021215366 U CN202021215366 U CN 202021215366U CN 212915174 U CN212915174 U CN 212915174U
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Abstract
The utility model provides a CVD equipment tail gas treatment device, which comprises an outer shell and an inner layer filtering device; the outer shell is of a cylindrical structure and comprises a cover body and tank bodies, and the cover body and the tank bodies are movably connected; the inner-layer filtering device is annular, is coaxially sleeved in the outer shell, and sequentially comprises an adsorption filtering layer and a precision filtering layer from inside to outside on the side wall of the inner-layer filtering device; according to the invention, tail gas treatment is performed in a preposed manner, so that ammonium chloride particles entering a vacuum pump are reduced, the blocking probability of the vacuum pump is reduced, and the production stop loss caused by faults is avoided; the double filtration mode of firstly catalyzing, adsorbing and then filtering is utilized, the formation of ammonium chloride particles and the amount of impurities entering a vacuum pump are effectively reduced, the filter is conveniently taken out and replaced, and the cleaning period and the cleaning workload are greatly prolonged; because this device is effectual to be handled tail gas, can effectively reduce rear end tail gas processing apparatus's handling capacity, practice thrift tail gas treatment facility running cost.
Description
Technical Field
The utility model relates to a CVD equipment tail gas processing apparatus of production pyrolysis boron nitride belongs to tail gas treatment device field.
Background
At present, the tail gas that produces in the production of the CVD equipment of production pyrolytic boron nitride is extracted through the vacuum pump, tail gas after taking out adsorbs the emission through spray set to tail gas, but this mode belongs to rear end processing, tail gas reactant ammonium chloride (NH4CL) can be attached to affiliated pipeline and pump chamber inner wall when the vacuum pump, very easily cause the emergence of faults such as vacuum pump card dies, make production interrupt, cause the product to scrap, the work load of clearance has also greatly increased, so need redesign a anterior segment tail gas treatment, after tail gas goes out CVD equipment, handle before getting into the vacuum pump, reduce tail gas generation particle impurity, reduce vacuum pump trouble and clearance frequency.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects of the existing tail gas adsorption device, the invention provides a front-section tail gas adsorption device which can adsorb tail gas before the tail gas enters a vacuum pump, so that the faults of the vacuum pump are reduced.
The technical scheme of the utility model as follows:
a CVD equipment tail gas processing device for producing pyrolytic boron nitride comprises an outer shell and an inner layer filtering device; the outer shell is of a cylindrical structure and comprises a cover body and a tank body, and the cover body and the tank body are detachably connected; the inner-layer filtering device is annular, is coaxially sleeved in the outer shell, and sequentially comprises an adsorption filtering layer and a precision filtering layer from inside to outside on the side wall of the inner-layer filtering device; an air inlet flue is arranged at the upper end of the cover body; an air outlet flue is arranged on the tank body.
According to the utility model, preferably, the outer casing diameter is 500-.
According to the utility model discloses, it is preferable, adsorption and filtration layer diameter is 200-.
According to the present invention, preferably, the diameter of the fine filter layer is 400-450 mm.
According to the utility model discloses, it is preferred, contain impregnated type active carbon and catalyst in the adsorption and filtration layer.
Tail gas firstly enters an inner layer filtering device from an air inlet pipeline, the inner layer filtering device is of an annular structure, the tail gas enters an inner ring of the annular structure and enters an adsorption filtering layer, impregnated activated carbon and a catalyst are contained in the adsorption filtering layer, and the catalyst catalyzes and adsorbs hydrogen chloride (HCl) and ammonia (NH3) in the tail gas to reduce the content of the HCl and the ammonia; combining the two residual gases to generate ammonium chloride particles (NH3+ HCI ═ NH4Cl), and using the impregnated activated carbon for adsorbing the particles, wherein the catalyst is a catalyst commonly used in chemical reaction, preferably ZH 09 type catalyst produced by Shanxi Xinhua chemical industry Co., Ltd.)
According to the utility model discloses, preferably, the precision filter layer is polyester 5 micron precision filter.
Then the mixture enters a precision filter layer, wherein the precision filter layer is a cylindrical polyester 5-micron precision filter, and the polyester 5-micron precision filter is an existing device available in the market, can perform high-precision particle filtration and block ammonium chloride particles; the tail gas after adsorption and particle blocking is discharged from the filter device through the gas outlet pipeline and enters a vacuum pump for subsequent treatment.
According to the utility model discloses, it is preferred, jar internal bottom is provided with the fixed slot, and inlayer filter equipment sets up in the fixed slot. Through opening jar body and lid, can conveniently replace inlayer filter equipment, inlayer filter equipment passes through the fixed placement of fixed slot simultaneously, makes its rigidity.
The beneficial effects of the utility model reside in that:
1. according to the invention, tail gas treatment is performed in a preposed manner, so that ammonium chloride particles entering a vacuum pump are reduced, the blocking probability of the vacuum pump is reduced, and the production stop loss caused by faults is avoided;
2. the double filtration mode of firstly catalyzing, adsorbing and then filtering is utilized, the formation of ammonium chloride particles and the amount of impurities entering a vacuum pump are effectively reduced, the filter is conveniently taken out and replaced, and the cleaning period and the cleaning workload are greatly prolonged;
3. because this device is effectual to be handled tail gas, can effectively reduce rear end tail gas processing apparatus's handling capacity, practice thrift tail gas treatment facility running cost.
Description of the drawings:
FIG. 1 is a schematic structural view of the present invention;
wherein 1, an air outlet flue; 2. a tank body; 3. a cover body; 4. an air intake flue; 5. a precision filter layer; 6. an adsorption filtration layer; 7. and fixing the grooves.
Detailed Description
The present invention will be further described, but not limited to, by the following examples in conjunction with the accompanying drawings.
Example 1:
as shown in figure 1, the tail gas treatment device of the CVD equipment for producing pyrolytic boron nitride comprises an outer shell, wherein the diameter of the outer shell is 500mm, and the height of the outer shell is 1500 mm; the shell body is of a cylindrical structure and comprises a cover body 3 and a tank body 2, the cover body 3 is movably connected with the tank body 2, and the inner layer filtering device can be conveniently opened and replaced. The inner-layer filtering device is coaxially sleeved in the outer shell and is fixed through a fixing groove 7 arranged at the bottom in the outer shell, the inner-layer filtering device is annular, and the side wall of the inner-layer filtering device is sequentially provided with an adsorption filtering layer 6 and a precision filtering layer 5 from inside to outside; the diameter of the adsorption and filtration layer 6 is 300mm, the adsorption and filtration layer 6 is a fine mesh shell, the interior of the adsorption and filtration layer contains impregnated activated carbon and a catalyst, and the diameter of the precision filter layer 5 is 400 mm. The precision filter layer 5 is polyester 5 micron precision filter, and Japanese wiso brand polyester 5 micron precision filter is selected; an air inlet flue 4 is arranged on the upper side surface of the cover body 3; an air outlet flue 1 is arranged on the tank body 2.
The gas inlet flue of the tail gas treatment device is connected with a gas outlet pipeline of the CVD production equipment, and the gas outlet flue of the tail gas treatment device is connected with a gas inlet pipeline of a vacuum pump. Tail gas firstly enters an inner layer filtering device through an air inlet flue 4, the inner layer filtering device is of an annular structure, the tail gas enters an inner ring of the annular structure and enters an adsorption filtering layer 6, impregnated activated carbon and a catalyst are contained in the adsorption filtering layer 6, and the catalyst catalyzes and adsorbs hydrogen chloride (HCl) and ammonia (NH3) in the tail gas to reduce the content of the HCl and the ammonia; the residual two gases are combined to generate ammonium chloride particles (NH3+ HCI ═ NH4Cl), the impregnated activated carbon is used for adsorbing the particles, wherein the catalyst is a common catalyst for chemical reaction, a ZH 09 type catalyst produced by Shanxi Xinhua chemical industry Co., Ltd can be selected, and then the catalyst enters a precision filter layer 5, the precision filter 5 is a cylindrical polyester 5 micron precision filter, the polyester 5 micron precision filter is an existing device commercially available on the market, the high-precision particle filtration can be carried out, and the ammonium chloride particles are blocked; the tail gas after adsorption and particle blocking is discharged from the filter device through the gas outlet pipeline 4 and enters a vacuum pump for subsequent treatment. Example 2:
the structure of the tail gas treatment device of the CVD equipment for producing pyrolytic boron nitride is the same as that of the tail gas treatment device in the embodiment 1, except that the height of the outer shell is 1200mm, the diameter of the adsorption filter layer 6 is 350mm, and the diameter of the precision filter layer 5 is 450 mm.
Example 3:
the tail gas treatment device of the CVD equipment for producing pyrolytic boron nitride has the same structure as that of the tail gas treatment device in the embodiment 1, except that the height of the outer shell is 1800mm, and the diameter of the adsorption filter layer 6 is 200 mm.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a CVD equipment tail gas processing apparatus which characterized in that: comprises an outer shell and an inner layer filtering device; the outer shell is of a cylindrical structure and comprises a cover body and a tank body, and the cover body and the tank body are detachably connected; the inner-layer filtering device is annular, is coaxially sleeved in the outer shell, and sequentially comprises an adsorption filtering layer and a precision filtering layer from inside to outside on the side wall of the inner-layer filtering device; an air inlet flue is arranged at the upper end of the cover body; an air outlet flue is arranged on the tank body.
2. The CVD apparatus off-gas processing apparatus according to claim 1, wherein: the diameter of the outer shell is 500-1000mm, and the height is 1200-1800 mm.
3. The CVD apparatus off-gas processing apparatus according to claim 1, wherein: the diameter of the adsorption filtration layer is 200-350 mm.
4. The CVD apparatus off-gas processing apparatus according to claim 1, wherein: the diameter of the precision filter layer is 400-450 mm.
5. The CVD apparatus off-gas processing apparatus according to claim 1, wherein: the adsorption filter layer contains impregnated activated carbon and a catalyst.
6. The CVD apparatus off-gas processing apparatus according to claim 1, wherein: the precision filter layer is a polyester 5 micron precision filter.
7. The CVD apparatus off-gas processing apparatus according to claim 1, wherein: the internal bottom of jar is provided with the fixed slot, and inlayer filter equipment sets up in the fixed slot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021215366.8U CN212915174U (en) | 2020-06-28 | 2020-06-28 | CVD equipment tail gas processing apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021215366.8U CN212915174U (en) | 2020-06-28 | 2020-06-28 | CVD equipment tail gas processing apparatus |
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| Publication Number | Publication Date |
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| CN212915174U true CN212915174U (en) | 2021-04-09 |
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| CN202021215366.8U Active CN212915174U (en) | 2020-06-28 | 2020-06-28 | CVD equipment tail gas processing apparatus |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117504540A (en) * | 2023-11-08 | 2024-02-06 | 南京华瑞微集成电路有限公司 | CVD tail gas treatment equipment |
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2020
- 2020-06-28 CN CN202021215366.8U patent/CN212915174U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117504540A (en) * | 2023-11-08 | 2024-02-06 | 南京华瑞微集成电路有限公司 | CVD tail gas treatment equipment |
| CN117504540B (en) * | 2023-11-08 | 2024-05-07 | 南京华瑞微集成电路有限公司 | CVD tail gas treatment equipment |
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