CN212843417U - Precise dynamic length standard machine - Google Patents
Precise dynamic length standard machine Download PDFInfo
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- CN212843417U CN212843417U CN202021744763.4U CN202021744763U CN212843417U CN 212843417 U CN212843417 U CN 212843417U CN 202021744763 U CN202021744763 U CN 202021744763U CN 212843417 U CN212843417 U CN 212843417U
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Abstract
The utility model discloses a precise dynamic length standard machine, which comprises a base, a high-precision grating system, an air-float guide rail, a display device and a control cabinet; the top surface of the base is provided with a U-shaped mounting groove, the air floatation guide rail and the high-precision grating system are arranged in the U-shaped mounting groove, one end part of the U-shaped mounting groove is provided with a movable positioning block, and the movable positioning block is a zero point reference; and the control cabinet is respectively connected with the display device, the high-precision grating system and the air-floatation guide rail, and is used for transmitting signals and data and providing electric energy. The utility model provides a precision dynamic length standard machine, which is automatically operated, reduces the error caused by manual operation, realizes high-speed and high-precision positioning, the positioning precision can reach within 1 μm, and the repeated positioning precision is 0.5 μm; and the stability is high, long service life, can replace traditional length positioner.
Description
Technical Field
The utility model relates to an accurate dynamic length standard machine belongs to detection area technical field, specifically can be applied to fields such as standard length target, automatic machine, semiconductor motion guide rail.
Background
In the conventional technology, the following two methods are commonly used for length reference positioning: one is positioning by gauge blocks, but gauge blocks have the following limitations: (1) the definite value of each gauge block is limited, if the gauge block is positioned in a large size, a plurality of gauge blocks are needed to be spliced, and the error caused by splicing is often times larger than the error of the gauge block per se; (2) the size of the gauge block is influenced by the thermal expansion coefficient of the material, and the ambient temperature greatly influences the fixed value of the gauge block; (3) the precision is not high, taking the highest grade K-grade measuring block in the world at present as an example, in the specification of the daily standard and the American standard, the limit deviation of any point of the measuring block with the size of less than or equal to 150mm is within +/-1 μm, the limit deviation of any point is within +/-2.6 μm when the size is less than or equal to 500mm, and the limit deviation of any point is within +/-4.2 μm when the size is less than or equal to 1000mm, namely, the larger the size is, the poorer the positioning precision of the measuring block is. And secondly, manually positioning by virtue of a microscope, and comparing the high-grade line ruler with the high-grade line ruler. The positioning method is long in time, errors are easy to cause, and the difference of operation results of different personnel is large.
Based on the defects of the two common methods, a new length reference positioning method and a corresponding device need to be developed.
SUMMERY OF THE UTILITY MODEL
The purpose is as follows: in order to overcome the deficiencies in the prior art, the utility model provides a precise dynamic length standard machine.
The technical scheme is as follows: in order to solve the technical problem, the utility model discloses a technical scheme does:
a precise dynamic length standard machine comprises a base, a high-precision grating system, an air floatation guide rail, a display device and a control cabinet;
the top surface of the base is provided with a U-shaped mounting groove, the air floatation guide rail and the high-precision grating system are arranged in the U-shaped mounting groove, one end part of the U-shaped mounting groove is provided with a movable positioning block, and the movable positioning block is a zero point reference; and the control cabinet is respectively connected with the display device, the high-precision grating system and the air-floatation guide rail, and is used for transmitting signals and data and providing electric energy.
Further, the high-precision grating system comprises a high-precision grating ruler and a grating reading head, the high-precision grating ruler is fixed on the inner side wall of the U-shaped mounting groove, the grating reading head is fixedly connected with the air floatation guide rail, and the high-precision grating ruler and the grating reading head form a closed loop.
Further, the air-floating guide rail comprises a guide rail and a sliding block which are matched in a nested mode, and a linear motor for driving the sliding block to move along the guide rail; the guide rail is fixed in the U-shaped mounting groove, and the grating reading head is fixedly connected with the sliding block.
Further, the minimum step amount of the linear motor is 10 nm.
Further, the base is the marble material, and the base cross-section is the L type, U type mounting groove sets up the top surface at the vertical section of L type base.
Furthermore, a positioning groove is formed in the lower surface of the movable positioning block, and the width of the inner side of the positioning groove is equal to the width of the outer side of the U-shaped mounting groove; the movable positioning block is sleeved on the U-shaped mounting groove through the positioning groove.
Further, the display device is a touch screen.
Has the advantages that: the utility model provides a precision dynamic length standard machine, which is automatically operated, reduces the error caused by manual operation, realizes high-speed and high-precision positioning, the positioning precision can reach within 1 μm, and the repeated positioning precision is 0.5 μm; and the stability is high, long service life, can replace traditional length positioner.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
As shown in fig. 1, a precision dynamic length standard machine includes a base 1, a high precision grating system, an air-float guide rail, a display device 6 and a control cabinet 7.
The base 1 is made of marble and has an L-shaped section; the top surface of the vertical section of the L-shaped base is provided with a U-shaped mounting groove 2.
The air-floating guide rail comprises a guide rail and a sliding block 3 which are matched in a nested mode, and a linear motor for driving the sliding block to move along the guide rail; the guide rail is fixed in the U-shaped mounting groove 2. A gap of 0.45mm exists between the sliding block 3 and the guide rail, and compressed air is introduced into the gap to form an air film with ultrahigh rigidity, so that the load is supported to realize stable motion. The linearity and the flatness of the linear motor are within 2 mu m, the minimum stepping distance of the linear motor is 10nm, namely the linear motor can be positioned once every 10nm, and the resolution is obviously higher than that of the prior art; the maximum running speed of the linear motor is 2 m/s; the linear motor is connected with the control cabinet.
The high-precision grating system comprises a high-precision grating ruler 4 and a grating reading head, wherein the high-precision grating ruler 4 is fixed on the inner side wall of the U-shaped mounting groove 2, the grating reading head is fixedly connected with a sliding block 3 of the air-floating guide rail, the high-precision grating ruler 4 and the grating reading head form a closed loop, and the resolution of the high-precision grating ruler 4 is 0.5 mu m.
The one end tip of U type mounting groove 2 is equipped with portable locating piece 5, 5 lower surfaces of portable locating piece are equipped with positioning groove, positioning groove's inboard width equals with the outside width of U type mounting groove 2, can just can the joint on U type mounting groove 2 through positioning groove by portable locating piece 5, and when no exogenic action, portable locating piece 5 is stabilized on predetermineeing the position.
A controller and a power supply are arranged in the control cabinet 7, and the controller is connected with the display device 6, the grating reading head and the linear motor on-off switch to transmit data and signals; the power supply supplies electric energy to parts needing electricity in the controller, the display device 6, the high-precision grating system and the air floatation guide rail.
The display device 6 is a touch screen and is used as an input device and an output device, an operator inputs parameters of operation of the linear motor through the touch screen, and a result tested by the grating reading head is displayed through the touch screen.
The display device 6 and the control cabinet 7 may be fixed to one side of the base 1 or may be provided separately from the base 1.
Utilize the utility model provides a dynamic length standard machine carries out the process as follows that length location and detection:
first, zero point is confirmed: and moving the movable positioning block to the side of the sliding block and tightly attaching the movable positioning block to the sliding block, wherein the position of the movable positioning block is the zero point. And inputting a length value to be positioned through a touch screen, starting a linear motor switch, driving a sliding block to move along a guide rail by the linear motor, monitoring the moving distance of the sliding block in real time by a grating reading head in the process, controlling the linear motor to stop running by a controller when the moving distance of the sliding block is monitored to be equal to a set length value, determining the distance between a movable positioning block and the edge of the sliding block to be a standard length required by the detection, and reading and calibrating the caliper to be detected at a specified position.
The maximum length that the length standard machine of the invention can calibrate is 2000mm, and the positioning accuracy of the whole measuring range can be controlled within 1 μm. The traditional positioning gauge block can only achieve 1000mm, and the highest precision can only achieve 4 mu m.
The above description is only a preferred embodiment of the present invention, and it should be noted that: for those skilled in the art, without departing from the principle of the present invention, several improvements and modifications can be made, and these improvements and modifications should also be considered as the protection scope of the present invention.
Claims (7)
1. A precision dynamic length standard machine is characterized in that: the air floatation device comprises a base, a high-precision grating system, an air floatation guide rail, a display device and a control cabinet;
the top surface of the base is provided with a U-shaped mounting groove, the air floatation guide rail and the high-precision grating system are arranged in the U-shaped mounting groove, one end part of the U-shaped mounting groove is provided with a movable positioning block, and the movable positioning block is a zero point reference; and the control cabinet is respectively connected with the display device, the high-precision grating system and the air-floatation guide rail, and is used for transmitting signals and data and providing electric energy.
2. A precision dynamic length calibrator as recited in claim 1, wherein: the high-precision grating system comprises a high-precision grating ruler and a grating reading head, the high-precision grating ruler is fixed on the inner side wall of the U-shaped mounting groove, the grating reading head is fixedly connected with the air-floatation guide rail, and the high-precision grating ruler and the grating reading head form a closed loop.
3. A precision dynamic length calibrator as recited in claim 2, wherein: the air-floating guide rail comprises a guide rail and a sliding block which are matched in a nested mode, and a linear motor for driving the sliding block to move along the guide rail; the guide rail is fixed in the U-shaped mounting groove, and the grating reading head is fixedly connected with the sliding block.
4. A precision dynamic length calibrator as recited in claim 3, wherein: the minimum stepping amount of the linear motor is 10 nm.
5. A precision dynamic length calibrator as recited in claim 1, wherein: the base is the marble material, and the base cross-section is the L type, U type mounting groove sets up the top surface at the vertical section of L type base.
6. A precision dynamic length calibrator as recited in claim 1, wherein: the lower surface of the movable positioning block is provided with a positioning groove, and the width of the inner side of the positioning groove is equal to the width of the outer side of the U-shaped mounting groove; the movable positioning block is sleeved on the U-shaped mounting groove through the positioning groove.
7. A precision dynamic length calibrator as recited in claim 1, wherein: the display device is a touch screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021744763.4U CN212843417U (en) | 2020-08-20 | 2020-08-20 | Precise dynamic length standard machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021744763.4U CN212843417U (en) | 2020-08-20 | 2020-08-20 | Precise dynamic length standard machine |
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| Publication Number | Publication Date |
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| CN212843417U true CN212843417U (en) | 2021-03-30 |
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| CN202021744763.4U Active CN212843417U (en) | 2020-08-20 | 2020-08-20 | Precise dynamic length standard machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115325984A (en) * | 2022-07-21 | 2022-11-11 | 中国航发航空科技股份有限公司 | Universal simulation measuring device and method for measuring sizes of casings with different linear expansion coefficients |
-
2020
- 2020-08-20 CN CN202021744763.4U patent/CN212843417U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115325984A (en) * | 2022-07-21 | 2022-11-11 | 中国航发航空科技股份有限公司 | Universal simulation measuring device and method for measuring sizes of casings with different linear expansion coefficients |
| CN115325984B (en) * | 2022-07-21 | 2023-09-15 | 中国航发航空科技股份有限公司 | Universal simulation measuring device and method for measuring sizes of casings with different linear expansion coefficients |
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