CN212823272U - Welding fixture of alloy sealing cap - Google Patents

Welding fixture of alloy sealing cap Download PDF

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Publication number
CN212823272U
CN212823272U CN202021838609.3U CN202021838609U CN212823272U CN 212823272 U CN212823272 U CN 212823272U CN 202021838609 U CN202021838609 U CN 202021838609U CN 212823272 U CN212823272 U CN 212823272U
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cover plate
positioning
fixture
tube shell
sealing cap
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CN202021838609.3U
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Chinese (zh)
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颜炎洪
徐衡
徐罕
王成迁
李守委
蒋玉齐
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CETC 58 Research Institute
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CETC 58 Research Institute
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Abstract

The utility model discloses a welding jig of alloy sealing cap belongs to the packaging technology field. The welding fixture of the alloy sealing cap comprises a tube shell positioning fixture main body and a fixture pressure cover plate; a ceramic tube shell to be sealed is placed in a tube shell limiting groove formed in the tube shell positioning clamp main body; the clamp pressure cover plate is fixedly connected right above the tube shell positioning clamp main body through positioning pins on two sides; and a fusion sealing cover plate is placed on the front surface of the ceramic tube shell to be sealed, and the fusion sealing cover plate is compressed and fixed through a pre-tightening mechanism which is vertically and fixedly connected with the clamp pressure cover plate. The welding fixture of the alloy sealing cap is used for positioning and fixing the ceramic tube shell to be sealed and the melt-sealing cover plate in a multi-azimuth mode through the limiting of the inner cavity of the tube shell positioning fixture main body, the cover plate positioning fixture and the fixture pressure cover plate, effectively avoids the deviation and rotation operation caused by uncontrollable factors in the bonding of the melt-sealing cover plate, is simple and easy to operate, has reliable effect, and can improve the qualification rate and quality of semiconductor component packaging.

Description

Welding fixture of alloy sealing cap
Technical Field
The utility model relates to the field of packaging technology, in particular to welding jig of alloy sealing cap.
Background
Alloy sealing caps (fusion seals) have found widespread use in highly reliable metal/ceramic package processes due to their good hermeticity and excellent salt spray resistance. The principle is as follows: and (2) installing a cover plate with a solder ring on the seal of the tube shell, stably clamping the cover plate and the tube shell by using a high-temperature-resistant clamp, heating the cover plate and the tube shell to a temperature higher than the melting point of the gold-tin alloy in a nitrogen protective atmosphere to melt the gold-tin alloy solder, infiltrating the welding ring metal layer and the cover plate welding surface of the tube shell with the liquid alloy solder, naturally cooling the alloy solder to a temperature lower than the melting point after reaching the heat preservation time, and welding the base and the cover plate together by the solder and an intermetallic compound to finish the alloy seal cap.
Conventionally, before an alloy sealing cap, a cover plate with a welding material ring and a tube shell sealing ring are accurately aligned and then clamped by a manual clamping method, or the cover plate, the separated welding material ring and the tube shell are accurately aligned one by one and then clamped; in the process, due to the skill level of operators, the operation efficiency is low, and meanwhile, different alignment precision of naked eyes is easy to cause alignment deviation, such as deviation of a cover plate and a solder ring, deviation of the cover plate and a tube shell, deviation of the solder ring and the tube shell, and simultaneous deviation of the cover plate/the solder ring/the tube shell, and in the subsequent capping process, a series of problems of poor flowing of the alloy solder, discontinuous sealing ring, solder overflow, capping leakage and the like are caused. And the clamp may also damage the surface of the metal cover plate, resulting in disqualified appearance or disqualified salt spray test.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a welding jig of alloy sealing cap to solve present manual clamping inefficiency, the problem of counterpoint precision difficult control.
In order to solve the technical problem, the utility model provides a welding fixture of an alloy sealing cap, which comprises a main body of a pipe shell positioning fixture and a pressure cover plate of the fixture;
a shell limiting groove is formed in the shell positioning clamp body, and a ceramic shell to be sealed is placed in the shell limiting groove;
the clamp pressure cover plate is fixedly connected right above the tube shell positioning clamp main body through positioning pins on two sides;
and a fusion sealing cover plate is placed on the front surface of the ceramic tube shell to be sealed, and the fusion sealing cover plate is compressed and fixed through a pre-tightening mechanism which is vertically and fixedly connected with the clamp pressure cover plate.
Optionally, first positioning holes are formed in both sides of the tube shell limiting groove and used for being matched with the positioning pins.
Optionally, the second positioning holes are formed in both sides of the tube shell limiting groove.
Optionally, a cover plate positioning fixture is installed in each second positioning hole in a positioning manner.
Optionally, the cover plate positioning fixtures are oppositely arranged, so that the fusion sealing cover plate is positioned by the cover plate positioning fixtures and then placed on the surface of the to-be-sealed ceramic pipe shell; the contact position of the cover plate positioning clamp and the sealing cover plate is provided with a step, and the height of the step is higher than that of the sealing cover plate.
Optionally, the positioning pin penetrates through and is in threaded connection with the clamp pressure cover plate; the top end of the positioning pin is fixedly connected with a limiting block.
Optionally, the pre-tightening mechanism comprises a return spring and an adjusting nut, and two ends of the return spring are respectively fixedly connected with the clamp pressure cover plate and the adjusting nut.
Optionally, the pre-tightening mechanisms are provided with a plurality of pre-tightening mechanisms, and the pre-tightening mechanisms are uniformly distributed on the clamp pressure cover plate.
Optionally, a plurality of placing holes are uniformly formed in the cover plate positioning fixture and used for simultaneously positioning and placing a plurality of the sealing cover plates.
Optionally, the tube shell positioning fixture body is uniformly provided with a plurality of tube shell limiting grooves for placing a plurality of ceramic tube shells to be sealed at the same time.
The utility model provides a welding fixture of an alloy sealing cap, which comprises a main body of a pipe shell positioning fixture and a pressure cover plate of the fixture; a shell limiting groove is formed in the shell positioning clamp body, and a ceramic shell to be sealed is placed in the shell limiting groove; the clamp pressure cover plate is fixedly connected right above the tube shell positioning clamp main body through positioning pins on two sides; and a fusion sealing cover plate is placed on the front surface of the ceramic tube shell to be sealed, and the fusion sealing cover plate is compressed and fixed through a pre-tightening mechanism which is vertically and fixedly connected with the clamp pressure cover plate. The welding fixture of the alloy sealing cap is used for positioning and fixing the ceramic tube shell to be sealed and the melt-sealing cover plate in a multi-azimuth mode through the limiting of the inner cavity of the tube shell positioning fixture main body, the cover plate positioning fixture and the fixture pressure cover plate, effectively avoids the deviation and rotation operation caused by uncontrollable factors in the bonding of the melt-sealing cover plate, is simple and easy to operate, has reliable effect, and can improve the qualification rate and quality of semiconductor component packaging. The method is suitable for the integrated circuit of which the ceramic shell is bonded and capped, in particular to the semiconductor component with higher requirement on the control precision of the packaging size.
Drawings
FIG. 1 is a whole cross-sectional view of a welding fixture for an alloy sealing cap provided by the present invention;
FIG. 2 is a schematic view of an installation structure of a to-be-sealed ceramic tube shell and a tube shell positioning fixture main body of the welding fixture for the alloy sealing cap provided by the present invention;
FIG. 3 is a schematic view of an installation structure of a positioning fixture main body and a positioning fixture for a cover plate of a welding fixture for an alloy sealing cap according to the present invention;
FIG. 4 is a schematic view of an installation structure of a welding jig sealing cover plate of an alloy sealing cap provided by the present invention;
FIG. 5 is a schematic view of an installation structure of a pre-tightening mechanism of a welding fixture for an alloy sealing cap according to the present invention;
FIG. 6 is a schematic layout view of a pre-tightening mechanism of a welding fixture for an alloy sealing cap according to the present invention;
FIG. 7 is a schematic view of the arrangement of the welding jig placing holes of the alloy sealing cap according to the present invention;
fig. 8 is a schematic diagram of the arrangement of the welding fixture tube-shell limiting groove of the alloy sealing cap provided by the utility model.
Detailed Description
The following describes the welding fixture for an alloy sealing cap according to the present invention in further detail with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more fully apparent from the following description and appended claims. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.
Example one
The utility model provides a welding fixture of an alloy sealing cap, the structure of which is shown in figure 1, and the welding fixture comprises a tube shell positioning fixture main body 1 and a fixture pressure cover plate 2; a tube shell limiting groove 11 is formed in the tube shell positioning clamp body 1, a ceramic tube shell 3 to be sealed is placed in the tube shell limiting groove 11, and the size of the tube shell limiting groove 11 is matched with the edge of the ceramic tube shell 3 to be sealed; the clamp pressure cover plate 2 is fixedly connected right above the tube shell positioning clamp main body 1 through positioning pins 4 on two sides, and first positioning holes 12 are formed in two sides of the tube shell limiting groove 11 and used for being matched with the positioning pins 4; and a sealing cover plate 5 is placed on the front surface of the ceramic tube shell 3 to be sealed, and the sealing cover plate 5 is pressed and fixed through a pre-tightening mechanism 6 which is vertically and fixedly connected with the clamp pressure cover plate 2.
Specifically, as shown in fig. 2-4, second positioning holes 13 are formed in both sides of the tube shell limiting groove 11, and a cover plate positioning clamp 7 is positioned and installed in each second positioning hole 13; the cover plate positioning clamps 7 are oppositely arranged, so that the melt-sealing cover plate 5 is positioned by the cover plate positioning clamps 7 and then is placed on the surface of the ceramic tube shell 3 to be sealed; a step is arranged at the contact position of the cover plate positioning clamp 7 and the sealing cover plate 5, and the height of the step is higher than that of the sealing cover plate 5, so that the positioning function of the sealing cover plate 5 is achieved, and the displacement caused by the contact of the sealing cover plate 5 and the step can be effectively avoided; meanwhile, the step can effectively prevent solder from reflowing or overflowing to be welded with the cover plate positioning clamp 7 in the sealing process, so that the cover plate positioning clamp 7 and the ceramic tube shell 3 to be sealed are damaged.
Specifically, as shown in fig. 5, the positioning pin 4 penetrates through and is in threaded connection with the clamp pressure cover plate 2; the top end of the positioning pin 4 is fixedly connected with a limiting block 41; the height of the clamp pressure cover plate 2 can be adjusted by simultaneously screwing the positioning pins 4, and the limiting block 41 can prevent the clamp pressure cover plate 2 from being disengaged; the pre-tightening mechanism 6 is composed of a reset spring and an adjusting nut, two ends of the reset spring are respectively and fixedly connected with the clamp pressure cover plate 2 and the adjusting nut, the pressure acting on the sealing cover plate 5 can be calculated through the stiffness coefficient of the reset spring, the number of the pressing plates and the area of the pressing plates, and a pressure value is marked on the adjusting nut; the adjusting nut is adjusted, the deformation quantity of the reset spring is changed to adjust the pressure applied to the clamp pressure cover plate 2, and one pressure value provided by the utility model is 2 pounds; and (3) heating the welding flux to be above the alloy melting point of the melting seal cover plate 5 in the nitrogen protective atmosphere by adjusting the gap between the clamp pressure cover plate 2 and the melting seal cover plate 5, infiltrating the welding ring metal layer and the cover plate welding surface of the ceramic tube shell 3 to be sealed with the liquid alloy welding flux, naturally cooling to below the melting point after reaching the heat preservation time, and welding the base and the melting seal cover plate 5 together through the welding flux and intermetallic compounds to finish the alloy sealing cap.
Specifically, as shown in fig. 6, the pre-tightening mechanisms 6 are uniformly arranged on the clamp pressure cover plate 2, and the plurality of sealing cover plates 5 are compressed.
Specifically, as shown in fig. 7, a plurality of placing holes 71 are uniformly formed in the cover plate positioning fixture 7, and are used for simultaneously positioning and placing a plurality of the sealing cover plates 5.
Specifically, as shown in fig. 8, a plurality of tube shell limiting grooves 11 are uniformly formed in the tube shell positioning fixture body 1, and are used for placing a plurality of ceramic tube shells 3 to be sealed at the same time.
Specifically, during clamping, the ceramic tube shell 3 to be sealed is sequentially placed in the tube shell limiting groove 11 on the tube shell positioning fixture main body 1, the cover plate positioning fixture 7 is placed corresponding to the second positioning hole 13, the sealing cover plate 5 is positioned along the placing hole 71 and then placed on the surface of the ceramic tube shell 3 to be sealed, then the cover plate positioning fixture 7 is removed, the fixture pressure cover plate 2 is placed corresponding to the first positioning hole 12 through the positioning pin 4, then the adjusting nut of the pre-tightening mechanism 6 is adjusted to tightly press the sealing cover plate 5, the gap between the fixture pressure cover plate 2 and the sealing cover plate 5 is adjusted, so that the sealing cover plate 5 heats the welding flux to be above the alloy melting point in the nitrogen protective atmosphere, and the welding ring metal layer and the cover plate welding surface of the ceramic tube shell 3 to be sealed are infiltrated by the liquid alloy welding flux which is melted into the tube shell, and after the heat preservation time is reached, naturally cooling to a temperature below the melting point, and welding the base and the sealing cover plate 5 together through the solder and the intermetallic compound to complete the alloy sealing cap.
The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and any modification and modification made by those skilled in the art according to the above disclosure are all within the scope of the claims.

Claims (10)

1. A welding fixture for an alloy sealing cap is characterized by comprising a tube shell positioning fixture main body (1) and a fixture pressure cover plate (2);
a shell limiting groove (11) is formed in the shell positioning clamp body (1), and a ceramic shell (3) to be sealed is placed in the shell limiting groove (11);
the clamp pressure cover plate (2) is fixedly connected right above the tube shell positioning clamp main body (1) through positioning pins (4) on two sides;
the front surface of the ceramic tube shell (3) to be sealed is provided with a melt-sealing cover plate (5), and the melt-sealing cover plate (5) is pressed and fixed through a pre-tightening mechanism (6) which is vertically and fixedly connected with the clamp pressure cover plate (2).
2. The welding fixture of the alloy sealing cap as claimed in claim 1, wherein both sides of the tube shell limiting groove (11) are provided with first positioning holes (12) for matching with the positioning pins (4).
3. The welding fixture of alloy sealing cap according to claim 1, wherein the second positioning holes (13) are opened on both sides of the tube shell limiting groove (11).
4. A welding fixture for alloy sealing caps as claimed in claim 3, characterized in that a cover plate positioning fixture (7) is positioned and installed in each second positioning hole (13).
5. The welding fixture of the alloy sealing cap according to claim 4, characterized in that the cover plate positioning fixtures (7) are oppositely arranged, so that the sealing cover plate (5) is positioned by the cover plate positioning fixtures (7) and then placed on the surface of the ceramic tube shell (3) to be sealed; the contact position of the cover plate positioning clamp (7) and the melt-sealed cover plate (5) is provided with a step, and the height of the step is higher than that of the melt-sealed cover plate (5).
6. The welding fixture of an alloy sealing cap as claimed in claim 1, characterized in that the positioning pin (4) passes through and is in threaded connection with the fixture pressure cover plate (2); and the top end of the positioning pin (4) is fixedly connected with a limiting block (41).
7. The welding fixture of the alloy sealing cap as claimed in claim 1, characterized in that the pre-tightening mechanism (6) is composed of a return spring and an adjusting nut, and two ends of the return spring are respectively and fixedly connected with the fixture pressure cover plate (2) and the adjusting nut.
8. The welding fixture for the alloy sealing cap as claimed in claim 1, wherein a plurality of pre-tightening mechanisms (6) are arranged on the fixture pressure cover plate (2) uniformly.
9. The welding fixture for the alloy sealing cap as claimed in claim 4, wherein a plurality of placing holes (71) are uniformly formed on the cover plate positioning fixture (7) for simultaneously positioning and placing a plurality of the sealing cover plates (5).
10. The welding fixture of an alloy sealing cap according to claim 1, characterized in that a plurality of the tube shell limiting grooves (11) are uniformly formed on the tube shell positioning fixture body (1) for simultaneously placing a plurality of the ceramic tube shells (3) to be sealed.
CN202021838609.3U 2020-08-28 2020-08-28 Welding fixture of alloy sealing cap Active CN212823272U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021838609.3U CN212823272U (en) 2020-08-28 2020-08-28 Welding fixture of alloy sealing cap

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021838609.3U CN212823272U (en) 2020-08-28 2020-08-28 Welding fixture of alloy sealing cap

Publications (1)

Publication Number Publication Date
CN212823272U true CN212823272U (en) 2021-03-30

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111889845A (en) * 2020-08-28 2020-11-06 中国电子科技集团公司第五十八研究所 Clamping fixture for alloy sealing cap and use method
CN115338495A (en) * 2022-07-25 2022-11-15 中国电子科技集团公司第十研究所 Ceramic tube shell airtight packaging method
CN115424960A (en) * 2022-09-28 2022-12-02 成都友芯微电子有限公司 Eutectic welding and tube shell cover sealing clamp for radio frequency power amplifier chip
CN115458416A (en) * 2022-07-21 2022-12-09 河北博威集成电路有限公司 Automatic operation method for sealing cap of metal ceramic packaged power device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111889845A (en) * 2020-08-28 2020-11-06 中国电子科技集团公司第五十八研究所 Clamping fixture for alloy sealing cap and use method
CN115458416A (en) * 2022-07-21 2022-12-09 河北博威集成电路有限公司 Automatic operation method for sealing cap of metal ceramic packaged power device
CN115458416B (en) * 2022-07-21 2024-06-04 河北博威集成电路有限公司 Automatic operation method for sealing cap of metal ceramic packaging power device
CN115338495A (en) * 2022-07-25 2022-11-15 中国电子科技集团公司第十研究所 Ceramic tube shell airtight packaging method
CN115424960A (en) * 2022-09-28 2022-12-02 成都友芯微电子有限公司 Eutectic welding and tube shell cover sealing clamp for radio frequency power amplifier chip

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