CN212701057U

CN212701057U - Electronic-grade AHF gas multi-stage filter

Info

Publication number: CN212701057U
Application number: CN202021120992.9U
Authority: CN
Inventors: 刘奕丰; 胡侃中; 吴俊贤; ***; 郑义达; 骆彦成
Original assignee: Fujian Tianfu Electronic Materials Co ltd
Current assignee: Fujian Tianfu Electronic Materials Co ltd
Priority date: 2020-06-17
Filing date: 2020-06-17
Publication date: 2021-03-16
Anticipated expiration: 2030-06-17

Abstract

The utility model discloses a gaseous multistage filter of electronic-grade AHF, including the knockout tower, the first gas-supply pipe of bottom fixedly connected with on knockout tower right side, the mid-mounting of first gas-supply pipe has first seal valve, the left side fixed connection intake pipe of knockout tower bottom, the mid-mounting of intake pipe has the check valve, the left side fixedly connected with second gas-supply pipe at knockout tower top, the mid-mounting of second gas-supply pipe has the second seal valve, the inner chamber of knockout tower is provided with the gathering bowl, the centre at gathering bowl top is provided with the separation membrane, the top of separation membrane is provided with the clamping ring, the dust absorption pipe has been cup jointed at the middle part of gathering bowl, the bilateral symmetry fixedly connected with support frame at dust absorption pipe top. An electronic grade AHF gas multi-stage filter, through first gas-supply pipe for the inside AHF gas of carrying of knockout tower, intercept the gaseous particulate impurity of AHF through the three-layer separation membrane, realize the gaseous clean output of AHF, use for the gaseous storage of AHF and facilitate.

Description

Electronic-grade AHF gas multi-stage filter

Technical Field

The utility model relates to a gaseous purification field of AHF, in particular to gaseous multi-stage filter of electronic grade AHF.

Background

In recent years, the purification method of anhydrous hydrogen fluoride gas mainly comprises the ways of improving the production process and continuously updating equipment, and improving the quality of inorganic fluoride. For example, domestic related enterprises can effectively purify large particle dust with more than micron level in the anhydrous hydrogen fluoride gas by adopting a production process combining a rough washing tower and an absorption tower (or a rectifying tower); there are also methods of using multiple flotation processes or adding various modifiers to remove various impurities in inorganic fluorides; patent CN201180092Y relates to hydrogen fluoride gas's purification technology, and its characteristic is in the reaction equipment of production hydrogen fluoride gas, at the intake pipe end in carrying the sulphuric acid pipe, through installing the shower nozzle, reach the edulcoration effect, and its shortcoming causes the intake pipe frequently to block up easily, and production technology is difficult to control.

SUMMERY OF THE UTILITY MODEL

A primary object of the present invention is to provide an electronic AHF gas multi-stage filter, which can effectively solve the problems of the background art.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

an electronic-grade AHF gas multistage filter comprises a separation tower, wherein a first gas pipe is fixedly connected to the bottom of the right side of the separation tower, a first sealing valve is arranged in the middle of the first gas pipe, a left gas inlet pipe is fixedly connected to the bottom of the separation tower, a one-way valve is arranged in the middle of the gas inlet pipe, a second gas pipe is fixedly connected to the left side of the top of the separation tower, a second sealing valve is arranged in the middle of the second gas pipe, an aggregation bowl is arranged in an inner cavity of the separation tower, a separation membrane is arranged in the middle of the top of the aggregation bowl, a compression ring is arranged at the top of the separation membrane, a dust collection pipe is sleeved in the middle of the aggregation bowl, a support frame is fixedly connected to the two sides of the top of the dust collection pipe, an outlet pipe is fixedly connected to the middle of the right side of the dust collection, and a third sealing valve is arranged in the middle of the flow distribution disc, and an exhaust fan is fixedly connected in the middle of the top of the separation tower.

Preferably, the left end of first gas-supply pipe runs through the outer wall of separation tower and extends to the inside of separation tower, the inner chamber and the outside of first gas-supply pipe intercommunication separation tower, the top of intake pipe runs through the outer wall of first gas-supply pipe bottom and extends to the inside of first gas-supply pipe, the inner chamber and the outside of the first gas-supply pipe of intake pipe intercommunication, and the intake pipe sets up the left side at first sealing valve, the bottom of second gas-supply pipe runs through the outer wall of separation tower and extends to the inside of separation tower, the inner chamber and the outside of second gas-supply pipe intercommunication separation tower.

Preferably, the number of the gathering bowls is three, the diameter of the bottom end of each gathering bowl is four times of that of the top end of each gathering bowl, wall bodies on four sides of the bottom end of each gathering bowl are closely attached to and fixedly connected with the inner wall of the separation tower, and the inner cavity of each gathering bowl is communicated with the outside through the top and the bottom of each gathering bowl.

Preferably, the outer wall of the bottom of the separation membrane is attached to the outer wall of the top of the separation tower, the outer wall of the bottom of the compression ring is attached to the outer wall of the top of the separation membrane, and the compression ring is fixedly connected to the outer wall of the top of the gathering bowl through bolts.

Preferably, the inner chamber of dust absorption pipe is linked together with the external world by its inner circle and bottom, ninety degrees are buckled to the inner wall of knockout tower on the top of support frame, and the top fixed connection of support frame is on the inner wall of knockout tower, the right-hand member of outlet duct runs through the inner wall of knockout tower and extends to the outside of knockout tower, and the wall body of outlet duct and knockout tower is close to laminating and fixed connection, the right-hand member fixed connection of outlet duct is on the left outer wall of flow distribution disc, and the inner chamber of outlet duct intercommunication dust absorption pipe and the inner chamber of flow distribution disc.

Preferably, the right side of air exhauster extends there is the air inlet end, the right-hand member of exhaust tube encircles to the top of knockout tower, and the right-hand member of exhaust tube is connected with the air inlet end of air exhauster.

Compared with the prior art, the utility model discloses following beneficial effect has:

the utility model discloses in, it is gaseous for the inside AHF that carries of knockout tower through first gas-supply pipe, intercept through the particle impurity in the three-layer separation membrane is gaseous to AHF, realize the gaseous clean output of AHF, use for the gaseous storage of AHF and facilitate, and is further, through the air exhauster via the exhaust tube, the flow distribution plate, the outlet duct, the dust absorption pipe sucks the inner chamber of knockout tower, the inside accumulational dust of discharge knockout tower, the filter effect for keeping the separation membrane provides strong support, the knockout tower inner chamber is under the negative pressure condition simultaneously, the air current passes through the inside that the check valve pours into the knockout tower into by the intake pipe, guarantee is provided for carrying the dust.

Drawings

Fig. 1 is a schematic structural diagram of the present invention;

FIG. 2 is an enlarged view of the present invention at A in FIG. 1;

fig. 3 is an enlarged view of the present invention at B in fig. 1.

In the figure: 1. a separation column; 2. a first gas delivery pipe; 3. a first sealing valve; 4. an air inlet pipe; 5. a one-way valve; 6. a second gas delivery pipe; 7. a second sealing valve; 8. an accumulation bowl; 9. a separation membrane; 10. pressing a ring; 11. a dust collection pipe; 12. a support frame; 13. an air outlet pipe; 14. a diverter tray; 15. an air exhaust pipe; 16. an exhaust fan; 17. a third sealing valve.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to which the reference is made must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected or detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1-3, an electronic-grade AHF gas multistage filter comprises a separation tower 1, a sealing door is installed at the bottom of the left side of the separation tower 1 to facilitate cleaning of dust at the bottom of the separation tower 1, a first gas pipe 2 is fixedly connected to the bottom of the right side of the separation tower 1, a first sealing valve 3 is installed in the middle of the first gas pipe 2, a gas inlet pipe 4 is fixedly connected to the left side of the bottom of the separation tower 1, a check valve 5 is installed in the middle of the gas inlet pipe 4, a second gas pipe 6 is fixedly connected to the left side of the top of the separation tower 1, the left end of the first gas pipe 2 penetrates through the outer wall of the separation tower 1 and extends into the separation tower 1, the first gas pipe 2 communicates with the inner cavity and the outer portion of the separation tower 1, the top end of the gas inlet pipe 4 penetrates through the outer wall of the bottom of the first gas pipe 2 and extends into the first sealing valve 2, the gas inlet pipe 4 is installed at the, the bottom end of the second gas pipe 6 penetrates through the outer wall of the separation tower 1 and extends to the inside of the separation tower 1, the second gas pipe 6 is communicated with the inner cavity and the outside of the separation tower 1, a second sealing valve 7 is installed in the middle of the second gas pipe 6, an aggregation bowl 8 is arranged in the inner cavity of the separation tower 1, a separation membrane 9 is arranged in the middle of the top of the aggregation bowl 8, a pressing ring 10 is arranged at the top of the separation membrane 9, a dust suction pipe 11 is sleeved in the middle of the aggregation bowl 8, support frames 12 are symmetrically and fixedly connected to two sides of the top of the dust suction pipe 11, an air outlet pipe 13 is fixedly connected to the middle of the right side of the dust suction pipe 11, a splitter plate 14 is arranged in the middle of the right side of the separation tower 1, an air suction pipe 15 is fixedly connected to the middle of the right.

The number of the gathering bowls 8 is three, the diameter of the bottom end of the gathering bowl 8 is four times of the diameter of the top end of the gathering bowl, wall bodies on four sides of the bottom end of the gathering bowl 8 are tightly attached and fixedly connected with the inner wall of the separation tower 1, the inner cavity of the gathering bowl 8 is communicated with the outside through the top and the bottom of the gathering bowl, the outer wall of the bottom of the separation membrane 9 is attached to the outer wall of the top of the separation tower 1, the outer wall of the bottom of the pressing ring 10 is attached to the outer wall of the top of the separation membrane 9, the pressing ring 10 is fixedly connected to the outer wall of the top of the gathering bowl 8 through bolts, the inner cavity of the dust suction pipe 11 is communicated with the outside through the inner ring and the bottom of the dust suction pipe 11, the top end of the support frame 12 is bent ninety degrees towards the inner wall of the separation tower 1, the top end of the support frame 12 is, the right end of outlet duct 13 is fixed connection on the outer wall on the left of diverter plate 14, and outlet duct 13 intercommunication dust absorption pipe 11's inner chamber and diverter plate 14's inner chamber, and the right side of air exhauster 16 extends there is the air inlet end, and the right-hand member of exhaust duct 15 encircles to the top of knockout tower 1, and the right-hand member of exhaust duct 15 is connected with the air inlet end of air exhauster 16.

It should be noted that, when the present invention is used, the first sealing valve 3 and the second sealing valve 7 are opened, the third sealing valve 17 is closed, the first air pipe 2 is used to convey the AHF gas to the inside of the separation tower 1, and the three layers of separation membranes 9 are used to intercept particulate impurities in the AHF gas, so as to realize clean output of the AHF gas, and facilitate storage and use of the AHF gas, further, the first sealing valve 3 and the second sealing valve 7 are closed, the third sealing valve 17 is opened, the inner cavity of the separation tower 1 is sucked by the exhaust fan 16 through the exhaust pipe 15, the splitter disc 14, the air outlet pipe 13 and the dust suction pipe 11, so as to discharge dust accumulated inside the separation tower 1, and provide a powerful support for maintaining the filtering effect of the separation membranes 9, and at the same time, the air flow is injected into the inside of the separation tower 1 through the check valve 5 by the air inlet pipe 4, and provides guarantee for conveying dust.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. An electronic grade AHF gas multistage filter comprising a separation column (1), characterized in that: the bottom fixedly connected with first gas-supply pipe (2) on separation tower (1) right side, the mid-mounting of first gas-supply pipe (2) has first seal valve (3), the left side fixedly connected with intake pipe (4) of separation tower (1) bottom, the mid-mounting of intake pipe (4) has check valve (5), the left side fixedly connected with second gas-supply pipe (6) at separation tower (1) top, the mid-mounting of second gas-supply pipe (6) has second seal valve (7), the inner chamber of separation tower (1) is provided with gathering bowl (8), the centre at gathering bowl (8) top is provided with separating membrane (9), the top of separating membrane (9) is provided with clamping ring (10), the middle part of gathering bowl (8) has cup jointed dust absorption pipe (11), the bilateral symmetry fixedly connected with support frame (12) at dust absorption pipe (11) top, middle part fixedly connected with outlet duct (13) on dust absorption pipe (11) right side, the middle part on separating tower (1) right side is provided with reposition of redundant personnel dish (14), middle part fixedly connected with exhaust tube (15) on reposition of redundant personnel dish (14) right side, the mid-mounting of reposition of redundant personnel dish (14) has third seal valve (17), the centre fixedly connected with air exhauster (16) at separating tower (1) top.

2. The electronic-grade AHF gas multistage filter of claim 1, wherein: the left end of first gas-supply pipe (2) runs through the outer wall of separation tower (1) and extends to the inside of separation tower (1), the inner chamber and the outside of first gas-supply pipe (2) intercommunication separation tower (1), the top of intake pipe (4) runs through the outer wall of first gas-supply pipe (2) bottom and extends to the inside of first gas-supply pipe (2), the inner chamber and the outside of intake pipe (4) first gas-supply pipe (2) of intercommunication, intake pipe (4) set up the left side at first sealing valve (3), the bottom of second gas-supply pipe (6) runs through the outer wall of separation tower (1) and extends to the inside of separation tower (1), the inner chamber and the outside of second gas-supply pipe (6) intercommunication separation tower (1).

3. The electronic-grade AHF gas multistage filter of claim 1, wherein: the collecting bowls (8) are three in number, the diameter of the bottom ends of the collecting bowls (8) is four times of that of the top ends of the collecting bowls, wall bodies on four sides of the bottom ends of the collecting bowls (8) are closely attached to and fixedly connected with the inner wall of the separation tower (1), and the inner cavities of the collecting bowls (8) are communicated with the outside through the tops and the bottoms of the collecting bowls.

4. The electronic-grade AHF gas multistage filter of claim 1, wherein: the outer wall of the bottom of the separation membrane (9) is attached to the outer wall of the top of the separation tower (1), the outer wall of the bottom of the pressing ring (10) is attached to the outer wall of the top of the separation membrane (9), and the pressing ring (10) is fixedly connected to the outer wall of the top of the gathering bowl (8) through bolts.

5. The electronic-grade AHF gas multistage filter of claim 1, wherein: the inner chamber of dust absorption pipe (11) is linked together with the external world by its inner circle and bottom, the top of support frame (12) is to ninety degrees of buckling of the inner wall of knockout tower (1), and the top fixed connection of support frame (12) is on the inner wall of knockout tower (1), the right-hand member of outlet duct (13) runs through the inner wall of knockout tower (1) and extends to the outside of knockout tower (1), and the wall body of outlet duct (13) and knockout tower (1) is close to laminating and fixed connection, the right-hand member fixed connection of outlet duct (13) is on the left outer wall of flow distribution plate (14), and the inner chamber of outlet duct (13) intercommunication dust absorption pipe (11) and the inner chamber of flow distribution plate (14).

6. The electronic-grade AHF gas multistage filter of claim 1, wherein: the right side of air exhauster (16) extends there is the air inlet end, the right-hand member of exhaust tube (15) encircles to the top of knockout tower (1), and the right-hand member of exhaust tube (15) is connected with the air inlet end of air exhauster (16).