CN212660059U - Drive device and automation equipment - Google Patents

Abstract

The utility model discloses a drive arrangement and automation equipment, include: a driving unit including a rotation shaft; the gas slip ring comprises a stator and a rotor, the rotor is coated on the circumferential surface of the rotating shaft, the rotor is opposite to the rotating shaft and is fixed, the stator is connected with the rotor in a rotating mode, a first air inlet hole is formed in the stator, a first air outlet hole is formed in the rotor, and the first air inlet hole is communicated with the first air outlet hole. The utility model discloses a rotor direct cladding of gas sliding ring is on the circumference face of pivot, and the target pivot is fixed on the rotor, has saved the shaft coupling between pivot and the target pivot, and because of the rotor cladding is on the circumference face of pivot, and the length of rotor is very little to the increase contribution of the length of the axle of transmission rotational motion, and the target pivot is difficult to the vibration when rotatory.

Description

Drive device and automation equipment

Technical Field

The utility model belongs to the technical field of automation equipment and specifically relates to a take drive arrangement and automation equipment of gas slip ring structure is related to.

Background

In prior art devices, a drive unit is usually required to provide the rotational movement; meanwhile, in order to prevent the windup of the air tube, an air slip ring is provided. In this case, the rotating shaft of the drive unit is connected to the rotor of the air slip ring via a coupling, and the target device is mounted on the rotor. The shaft for transmitting the rotary motion is too long, when the gravity center of the target device deviates from the rotating shaft center, the target device is easy to vibrate, and the existing connection structure of the motor and the air slip ring cannot meet the requirements on occasions of limited installation space, limited load weight or limited rotor moment inertia and the like.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. To this end, the utility model provides a drive arrangement can shorten the length of transmission rotational motion's axle.

The utility model also provides an automation equipment.

In a first aspect, an embodiment of the present invention provides a driving device, including: a driving unit including a rotation shaft; the gas slip ring comprises a stator and a rotor, the rotor is coated on the circumferential surface of the rotating shaft, the rotor is opposite to the rotating shaft and is fixed, the stator is connected with the rotor in a rotating mode, a first air inlet hole is formed in the stator, a first air outlet hole is formed in the rotor, and the first air inlet hole is communicated with the first air outlet hole.

The utility model discloses drive arrangement has following beneficial effect at least: in a conventional structure, a rotating shaft is connected with a rotor of an air slip ring through a coupler, and a target rotating shaft is arranged on the rotor, namely the length of a shaft for transmitting rotary motion needs to be calculated; the rotor direct cladding of the gas sliding ring of this embodiment is on the circumference face of pivot, and the target pivot is fixed on the rotor, between pivot and the target pivot, has saved the shaft coupling, and because of the rotor cladding is on the circumference face of pivot, and the length of rotor is very little to the increase contribution of the length of the axle of transmission rotational motion, and the target device is difficult to the vibration when rotatory.

According to the utility model discloses a drive arrangement of other embodiments, the pivot with rotor an organic whole sets up.

According to the utility model discloses a drive arrangement of other embodiments, the rotor has opened the mounting hole along the axial, the pivot is arranged in the mounting hole.

According to other embodiments of the present invention, the rotor is locked to the rotary shaft by a first set screw.

According to other embodiments of the present invention, the rotor and the rotating shaft are connected by a key.

According to the utility model discloses a drive arrangement of other embodiments, be provided with first ring channel on the outer circumferential surface of rotor, first venthole is followed the axial setting of rotor, first inlet port with first venthole all with first ring channel intercommunication.

According to the utility model discloses a drive arrangement of other embodiments, the stator with still be provided with the sealing washer between the rotor, the sealing washer is provided with two, two the sealing washer is located respectively the both sides of first ring channel.

According to the utility model discloses a drive arrangement of other embodiments, still be provided with the second inlet port on the stator, be provided with the second venthole on the rotor, the second inlet port with second venthole intercommunication.

According to other embodiments of the present invention, the driving device is a motor or a rotary cylinder.

In a second aspect, an embodiment of the present invention provides an automation device, including the above-mentioned driving device.

The utility model discloses automation equipment has following beneficial effect at least: by using the driving device, the automatic equipment runs stably, the space occupation of the automatic equipment can be reduced, the use requirements are met, and the competitiveness of the automatic equipment is strong.

According to the utility model discloses an automation equipment of other embodiments: by using the driving device, the target device is not easy to vibrate when rotating, and the automation equipment can stably run.

Drawings

Fig. 1 is an isometric view of a drive device of a first embodiment;

FIG. 2 is an exploded view of the drive assembly of FIG. 1;

FIG. 3 is a top view of the rotor of FIG. 1;

FIG. 4 is a cross-sectional view taken along section A-A of FIG. 3;

FIG. 5 is an isometric view of a suction platform incorporating the drive of the first embodiment;

FIG. 6 is an exploded view of the sorption platform of FIG. 5;

FIG. 7 is a top view of the platform of FIG. 5;

FIG. 8 is a right side view of the platform of FIG. 5;

FIG. 9 is a bottom view of the platform of FIG. 5;

fig. 10 is an isometric view of a drive arrangement of the second embodiment;

FIG. 11 is an exploded view of the drive assembly of FIG. 10;

FIG. 12 is a front view of the stator of FIG. 10;

FIG. 13 is a cross-sectional view of the stator of FIG. 12 taken along section B-B;

FIG. 14 is a front view of the rotor of FIG. 10;

FIG. 15 is a cross-sectional view of the rotor of FIG. 14 taken along section C-C;

fig. 16 is an isometric view of a wafer handling device including a drive arrangement of the second embodiment;

FIG. 17 is an enlarged schematic view of region I of FIG. 16;

fig. 18 is an exploded view of the wafer handling device of fig. 16;

FIG. 19 is an isometric view of the mount of FIG. 16;

FIG. 20 is a top view of the mount of FIG. 16;

FIG. 21 is a cross-sectional view of the mount of FIG. 20 taken along section D-D;

FIG. 22 is an isometric view of the body of FIG. 16;

FIG. 23 is an isometric view of the connection block of FIG. 16.

Detailed Description

The conception and the resulting technical effects of the present invention will be described clearly and completely with reference to the following embodiments, so that the objects, features and effects of the present invention can be fully understood. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and other embodiments obtained by those skilled in the art without inventive labor based on the embodiments of the present invention all belong to the protection scope of the present invention.

In the description of the embodiments of the present invention, if an orientation description is referred to, for example, the directions or positional relationships indicated by "upper", "lower", "front", "rear", "left", "right", etc. are based on the directions or positional relationships shown in the drawings, only for convenience of description and simplification of description, but not for indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

In the description of the embodiments of the present invention, if a feature is referred to as being "disposed", "fixed", "connected", or "mounted" on another feature, it can be directly disposed, fixed, or connected to the other feature or indirectly disposed, fixed, connected, or mounted on the other feature. In the description of the embodiments of the present invention, if "a plurality" is referred to, it means one or more, if "a plurality" is referred to, it means two or more, if "greater than", "less than" or "more than" is referred to, it is understood that the number is not included, and if "more than", "less than" or "within" is referred to, it is understood that the number is included. If reference is made to "first" or "second", this should be understood to distinguish between features and not to indicate or imply relative importance or to implicitly indicate the number of indicated features or to implicitly indicate the precedence of the indicated features.

Referring to fig. 1 and 2, fig. 1 is an isometric view of a drive device of a first embodiment, and fig. 2 is an exploded view of the drive device of fig. 1. The driving device of the first embodiment includes a driving unit and an air slip ring 300, the driving unit is a motor 100, a rotating shaft 110 is provided on the motor 100, and after the motor 100 is energized, the rotating shaft 110 can rotate around a vertical axis. The air slip ring 300 includes a stator 310, a first sealing ring 320, and a rotor 330, wherein the rotor 330 is rotatably connected to the stator 310, and the rotor 330 is fixedly connected to the rotating shaft 110. Specifically, the stator 310 is provided with a first accommodating hole 312 along the vertical direction, the rotor 330 is disposed in the first accommodating hole 312, and a rolling bearing is disposed between the rotor 330 and the stator 310. The inner ring of the rolling bearing is sleeved on the rotor 330, and the outer ring of the rolling bearing is abutted against the inner surface of the first accommodating hole 312. Thus, the rotor 330 can rotate relative to the stator 310.

In another embodiment, the drive unit may also be a rotary cylinder, which also has a shaft for rotation.

Referring to fig. 2, 3 and 4, fig. 3 is a plan view of the rotor 330 of fig. 1, and fig. 4 is a sectional view taken along a-a of fig. 3. The stator 310 is provided with a first air inlet hole 311, the rotor 330 is provided with a first air outlet hole 333 (see fig. 4), and the first air inlet hole 311 is communicated with the first air outlet hole 333. Specifically, the first air intake holes 311 are disposed along a radial direction of the stator 310, and the first air intake holes 311 communicate the first receiving hole 312 with an outer circumferential surface of the stator 310. The rotor 330 is provided at an outer circumferential surface thereof with a first annular groove 332, and after the rotor 330 is seated in the first receiving hole 312, the first annular groove 332 is aligned with the first air intake holes 311. The first air outlet hole 333 is arranged along the axial direction of the rotor 330 (the axial direction of the rotor 330 is the up-down direction), the lower end of the first air outlet hole 333 is communicated with the first annular groove 332, and the upper end of the first air outlet hole 333 is communicated with the upper end face of the rotor 330.

Finally, by providing the first annular groove 332, communication between the first air inlet hole 311 and the first air outlet hole 333 is achieved, while communication between the first air inlet hole 311 and the first air outlet hole 333 is not affected even if the rotor 330 rotates relative to the stator 310.

To prevent air leakage from the gap between the stator 310 and the rotor 330, a second annular groove 313 is provided on the surface of the first receiving hole 312. The second annular groove 313 is provided with two passages, and the two passages of the second annular groove 313 are respectively located at the upper and lower sides of the first annular groove 332 after the rotor 330 is seated in the first receiving hole 312. A first sealing ring 320 is disposed in each of the two second annular grooves 313, and the first sealing ring 320 is generally made of rubber capable of elastic deformation. After the first sealing ring 320 is placed in the second annular groove 313, the first sealing ring 320 is pressed, and the first sealing ring 320 simultaneously abuts against the surface of the first receiving hole 312 and the outer circumferential surface of the rotor 330, thereby preventing gas from entering the first annular groove 332 from the gap between the stator 310 and the rotor 330.

In order to make the air outlet more uniform, four first air outlet holes 333 are provided, and the four first air outlet holes 333 are uniformly arranged on the rotor 330 in the circumferential direction.

Referring to fig. 5 and 6, fig. 5 is an isometric view of a suction platform including the drive apparatus of the first embodiment, and fig. 6 is an exploded view of the suction platform of fig. 5. The adsorption platform comprises a driving device, a first frame 200 and a platform assembly 400, wherein the motor 100 is positioned below the first frame 200, and the motor 100 is locked and fixed on the first frame 200. The air slip ring 300 is integrally located above the first frame 200, the stator 310 is locked and fixed to the first frame 200, and the platform assembly 400 is disposed on the rotor 330.

Referring to fig. 6 to 8, fig. 7 is a top view of the platform 410 of fig. 5, and fig. 8 is a right side view of the platform 410 of fig. 5. The platform assembly 400 includes a platform 410 and a cover plate 420, wherein the platform 410 is locked and fixed on the upper end of the rotor 330, the cover plate 420 is located above the platform 410, and the cover plate 420 can be fixed on the upper surface of the platform 410 by gluing. The upper surface of the platform 410 is provided with an air passage which communicates with the first air outlet hole 333. Specifically, the air passage communicates with the first air outlet hole 333 through a connection hole 413 penetrating the platform 410.

Referring to fig. 3, 4, 7 to 9, fig. 9 is a bottom view of the platform 410 of fig. 5. In order to lock and fix the platform 410 on the upper end of the rotor 330, a mounting plate 416 is arranged on the lower side of the platform 410, the mounting plate 416 and the platform 410 are integrally arranged, a mounting groove 418 is formed in the mounting plate 416, a first threaded hole 414 is formed in the platform 410 along the vertical direction, a second threaded hole 417 is formed in the platform 410 along the horizontal direction, and the first threaded hole 414 and the second threaded hole 417 are both communicated with the mounting groove 418. The upper end of the rotor 330 is provided with a blind hole 336 along the vertical direction. During installation, the upper end of the rotor 330 is placed in the mounting groove 418, the blind hole 336 is aligned with the first threaded hole 414, a second set screw is screwed into the first threaded hole 414, and a third set screw is screwed into the second threaded hole 417, thereby achieving the locking fixation of the platform 410 and the rotor 330.

In order to enable the platform assembly 400 to uniformly adsorb the materials, the air passages are divided into a first air passage 411 and a second air passage 412, the first air passages 411 are provided in a plurality, and the plurality of first air passages 411 are arranged in parallel in the front-back direction. The second air passages 412 are also provided in plural, and the plural second air passages 412 are arranged in parallel in the left-right direction. Both ends of the first air passage 411 are respectively communicated with two interleaved coupling grooves 415, both ends of the second air passage 412 are also respectively communicated with two interleaved coupling grooves 415, and a single coupling groove 415 is communicated with two coupling holes 413.

The cover plate 420 is provided with a first through hole 421 and a second through hole 422, and the first through hole 421 and the second through hole 422 penetrate through the cover plate 420 in the up-down direction. The first through hole 421 is provided in plurality, and the second through hole 422 is also provided in plurality. After the cover plate 420 is fixed on the upper surface of the platform 410, the position of the first through hole 421 corresponds to the position of the first air passage 411, and the position of the second through hole 422 corresponds to the position of the second air passage 412.

Therefore, the air channel and the cover plate 420 are arranged, so that the materials can be uniformly adsorbed on the cover plate 420 under stress.

Referring to fig. 3, 4 and 6, in order to reduce the height of the center of gravity of the platform assembly 400, the suction platform of the present embodiment does not use a coupling, and the rotor 330 has a mounting hole 334 along the axial direction, the rotating shaft 110 of the motor 100 is inserted into the mounting hole 334, and then the rotor 330 is locked and fixed on the rotating shaft 110 by a first set screw. When the first set screw is used, the third threaded hole 331 can be radially formed, after the rotor 330 is sleeved on the rotating shaft 110, the first limiting ring 335 at the upper end of the rotor 330 abuts against the upper end of the rotating shaft 110, and the first set screw is screwed into the third threaded hole 331, so that the rotor 330 is locked and fixed on the rotating shaft 110.

In another embodiment, a first key groove may be formed on the surface of the mounting hole 334, a second key groove may be formed on the circumferential surface of the rotating shaft 110 along the axial direction, and the rotor 330 may be fixedly connected to the rotating shaft 110 by a key inserted into the first key groove and the second key groove.

Compared with the conventional structure that the rotating shaft 110 is fixedly connected with the rotor 330 through the coupler, no coupler is arranged between the rotating shaft 110 and the platform 410, and the rotor 330 is wrapped on the circumferential surface of the rotating shaft 110, so that the length of the rotor 330 has little contribution to the increase of the distance between the rotating shaft 110 and the platform 410. When the platform 410 rotates on a horizontal plane, the center of gravity of the platform 410 is low, and when the center of gravity of the platform 410 deviates from the axis of the rotating shaft 110, the vibration of the platform 410 is small, and the platform 410 rotates stably.

In another embodiment, the rotor 330 and the rotating shaft 110 may be integrally formed, that is, when the rotating shaft 110 of the motor 100 is manufactured, the first annular groove 332 and the first air outlet hole 333 may be formed on the rotating shaft 110, and in this case, the height of the center of gravity of the platform assembly 400 may also be reduced.

Referring to fig. 10 and 11, fig. 10 is an isometric view of a drive device of the second embodiment, and fig. 11 is an exploded view of the drive device of fig. 10. The driving device of the second embodiment includes a pneumatic unit and a pneumatic ring 600, the driving unit is a motor 100, a rotating shaft 110 is provided on the motor 100, and after the motor 100 is energized, the rotating shaft 110 can rotate around a vertical axis. The air slip ring 600 includes a rotor 610, a second sealing ring 620 and a stator 630, wherein the rotor 610 is rotatably connected to the stator 630, and the upper end of the rotor 610 is fixedly connected to the rotating shaft 110. Specifically, the stator 630 is provided with a second receiving hole 631 along the up-down direction, the rotor 610 is placed in the second receiving hole 631, and a rolling bearing is disposed between the rotor 610 and the stator 630. The inner ring of the rolling bearing is sleeved on the rotor 610, and the outer ring of the rolling bearing abuts against the inner surface of the second containing hole 631. Thus, by providing the second receiving hole 631 and the rolling bearing, the rotational connection of the rotor 610 and the stator 630 is achieved.

Referring to fig. 12 to 16, fig. 12 is a front view of the stator 630 of fig. 10, fig. 13 is a sectional view of the stator 630 of fig. 12 taken along a section B-B, fig. 14 is a front view of the rotor 610 of fig. 10, and fig. 15 is a sectional view of the rotor 610 of fig. 14 taken along a section C-C. The stator 630 is provided with a first air inlet hole 633 and a second air inlet hole 636 (refer to fig. 13), the rotor 610 is provided with a first air outlet hole 613 and a second air outlet hole 614 (refer to fig. 15), the first air inlet hole 633 is communicated with the first air outlet hole 613, and the second air inlet hole 636 is communicated with the second air outlet hole 614.

Specifically, the first air intake holes 633 and the second air intake holes 636 are both arranged along the radial direction of the stator 630, the first air intake holes 633 communicate the second containing holes 631 with the outer circumferential surface of the stator 630, and the second air intake holes 636 also communicate the second containing holes 631 with the outer circumferential surface of the stator 630. The first and second outlet holes 613 and 614 are provided in the axial direction of the rotor 610. The upper end of the first outlet port 613 is communicated with the first inlet port 633, and the lower end of the first outlet port 613 extends to the lower end surface of the rotor 610. The upper end of the second air outlet hole 614 is communicated with the second air inlet hole 636, and the lower end of the second air outlet hole 614 extends to the lower end surface of the rotor 610.

In order to communicate the upper end of the first discharge hole 613 with the first suction hole 633, a first annular groove 611 is provided on the outer circumferential surface of the rotor 610, and the upper end of the first discharge hole 613 communicates with the first annular groove 611. After the rotor 610 is seated in the second receiving hole 631, the first annular groove 611 is aligned with the first intake holes 633, thereby achieving communication of the upper end of the first outlet hole 613 with the first intake holes 633. In addition, during the rotation of the rotor 610 with respect to the stator 630, since the first intake holes 633 can be always aligned with the first annular groove 611, the first intake holes 633 can always communicate with the first annular groove 611, eventually enabling the upper end of the first discharge hole 613 to always communicate with the first intake holes 633.

In order to communicate the upper end of the second outlet hole 614 with the second inlet hole 636, a third annular groove 612 is further provided on the outer circumferential surface of the rotor 610. The upper end of the second outlet hole 614 communicates with the third annular groove 612. After the rotor 610 is seated in the second receiving hole 631, the third annular groove 612 is aligned with the second air intake holes 636. Therefore, the upper end of the second air outlet hole 614 can be always communicated with the second air inlet hole 636, and the second suction nozzle 920 can also work normally in the process that the rotor 610 rotates relative to the stator 630.

The first annular groove 611 is located above the third annular groove 612, and the first annular groove 611 and the third annular groove 612 do not communicate with each other. Thus, when the negative pressure gas passes through the rotor 610, no cross-ventilation occurs.

To prevent air leakage from the gap between the stator 630 and the rotor 610, a fourth annular groove 632, a fifth annular groove 634, and a sixth annular groove 635 are provided on the surface of the second receiving hole 631 (refer to fig. 13). After the rotor 610 is seated in the second receiving hole 631, the first annular groove 611 is located between the fourth annular groove 632 and the fifth annular groove 634, and the third annular groove 612 is located between the fifth annular groove 634 and the sixth annular groove 635. A second seal 620 is disposed in each of the fourth, fifth and sixth annular grooves 632, 634, 635.

The second sealing ring 620 is made of rubber capable of elastic deformation, after the three second sealing rings 620 are respectively arranged in the fourth annular groove 632, the fifth annular groove 634 and the sixth annular groove 635, the second sealing ring 620 is pressed and deformed, so that the second sealing ring 620 simultaneously abuts against the surface of the second containing hole 631 and the outer circumferential surface of the rotor 610, thereby preventing gas from entering the first annular groove 611 and the third annular groove 612 from a gap between the stator 630 and the rotor 610,

in this embodiment, in order to fixedly connect the rotor 610 to the rotating shaft 110, the rotor 610 is provided with a mounting hole 616 along the axial direction. After the rotating shaft 110 of the motor 100 is inserted into the mounting hole 616, the lower end of the rotating shaft 110 abuts against the second position-limiting ring 615. The rotor 610 is further provided with a fourth threaded hole 617 in the radial direction, and the first set screw is screwed into the fourth threaded hole 617 to fix the rotating shaft 110 in the mounting hole 616, thereby achieving the fixed connection of the rotor 610 and the rotating shaft 110.

Referring to fig. 16 and 18, fig. 16 is an isometric view of a wafer handling device including a drive apparatus of a second embodiment, and fig. 18 is an exploded view of the wafer handling device of fig. 1. The wafer picking and placing device of the present embodiment includes a driving device, a second frame 500, a mounting base 700, a swing arm assembly 800, a first suction nozzle 910 and a second suction nozzle 920. The driving device comprises a motor 100 and an air slip ring 600, the motor 100 is locked and fixed on the second frame 500, and the mounting seat 700 is connected with the driving unit through the air slip ring 600. The mount 700 can rotate about the vertical axis by the motor 100. The swing arm assembly 800 is provided with two, the first suction nozzle 910 is connected with the mount 700 through one swing arm assembly 800, and the first suction nozzle 910 is located at the front side of the mount 700, the second suction nozzle 920 is connected with the mount 700 through another swing arm assembly 800, and the second suction nozzle 920 is located at the rear side of the mount 700. The first suction nozzle 910 and the second suction nozzle 920 are both communicated with a negative pressure air source through the air slip ring 600.

Specifically, the stator 630 of the air slip ring 600 is locked and fixed on the second frame 500, and the lower end of the rotor 610 of the air slip ring 600 is fixedly connected with the mounting seat 700. Thus, the rotation shaft 110 can rotate the mounting base 700 about the vertical axis by the driving of the motor 100, and the first suction nozzle 910 and the second suction nozzle 920 can rotate on the horizontal plane.

In order to enable the first suction nozzle 910 and the second suction nozzle 920 to be respectively communicated with a negative pressure air source, the first air inlet hole 633 and the second air inlet hole 636 are respectively communicated with the negative pressure air source through an air pipe, the first suction nozzle 910 is communicated with the lower end of the first air outlet hole 613, and the second suction nozzle 920 is communicated with the lower end of the second air outlet hole 614, so that the communication between the first suction nozzle 910 and the negative pressure air source and the communication between the second suction nozzle 920 and the negative pressure air source are respectively realized. In addition, the air intake action of the first air intake hole 633 and the air intake action of the second air intake hole 636 can be controlled by electromagnetic valves, and the first suction nozzle 910 and the second suction nozzle 920 can work independently.

Compared with the conventional structure that the rotating shaft 110 is fixedly connected with the rotor 610 through the coupler, in the driving device of the second embodiment, no coupler is arranged between the rotating shaft 110 and the mounting seat 700, and the rotor 610 covers the circumferential surface of the rotating shaft 110, so that the length of the rotor 610 has little contribution to the increase of the distance between the rotating shaft 110 and the mounting seat 700. When the first suction nozzle 910 rotates on the horizontal plane, the swing arm 820 does not easily vibrate, the positioning accuracy of the first suction nozzle 910 is high, and the positioning time is short.

Referring to fig. 18 and 20, fig. 20 is a top view of mount 700 of fig. 16. In order to realize the installation and fixation of the first suction nozzle 910 and the second suction nozzle 920, a mounting seat 700 and a swing arm assembly 800 are provided, and the mounting seat 700 is locked and fixed at the lower end of the rotor 610. Specifically, a third through hole 710 is formed in the middle of the mounting seat 700, and a screw is screwed to the lower end of the rotor 610 after passing through the third through hole 710, thereby locking and fixing the mounting seat 700 to the rotor 610.

In order to conduct the first air outlet 613 of the rotor 610 through the mounting base 700, the mounting base 700 is provided with air vents, which include a first air vent 720 and a second air vent 730. The first vent hole 720 is disposed along the up-down direction, and the first vent hole 720 is aligned with the first vent hole 613. The second ventilation hole 730 is disposed in the front-rear direction, and the lower end of the first ventilation hole 720 communicates with the rear end of the second ventilation hole 730. Thus, the first suction nozzle 910 communicates with the front end of the second venting hole 730 through the air tube, thereby achieving communication with the first air outlet 613. The structure in which the second outlet hole 614 communicates with the second outlet hole 614 through the mount 700 is the same as the above structure, and a description thereof will not be repeated.

Taking the first suction nozzle 910 as an example, a structure in which the first suction nozzle 910 is connected to the mount 700 by the swing arm assembly 800 will be described.

Referring to fig. 18 and 23, fig. 22 is an isometric view of the body of fig. 16, and fig. 23 is an isometric view of the connector block 822 of fig. 16. The swing arm assembly 800 comprises an adjusting screw 810, a swing arm 820, a spring plate 830, a first pressing plate 840, a second pressing plate 850, a positioning screw 860 and an elastic element, the swing arm 820 comprises a main body 821 and a connecting block 822, the rear end of the connecting block 822 is connected with the mounting seat 700, the front end of the connecting block 822 is fixedly connected with the rear end of the main body 821 (fixedly locked through a screw), and the first suction nozzle 910 is fixed at the rear end of the main body 821.

In order to fix the first suction nozzle 910 to the end of the main body 821 far from the connecting block 822, a second through hole 871 (see fig. 22) and a separating slit 873 communicating with the second through hole 871 are formed in the front end of the main body 821, and the separating slit 873 separates the front end of the main body 821 into a first clamping block 872 and a second clamping block 874. After the first suction nozzle 910 is inserted into the second through hole 871, one end of a screw passes through the first clamping block 872 and the second clamping block 874 and then a nut is screwed, and the screw and the nut make the first clamping block 872 and the second clamping block 874 close to each other, so that the first suction nozzle 910 is clamped in the second through hole 871.

Referring to fig. 20, 21 and 23, fig. 21 is a sectional view of mount 700 taken along section D-D of fig. 20. In order to provide a buffer from moving to stationary when the first suction nozzle 910 approaches the wafer, a spring plate 830 and an elastic member are provided. Specifically, an insert block 882 (see fig. 23) is disposed at the rear end of the connecting block 822, an accommodating cavity 790 is disposed in the mounting seat 700, a fifth through hole 760 is disposed at the front end of the mounting seat 700 along the front-rear direction, the rear end of the fifth through hole 760 is communicated with the accommodating cavity 790, and the front end of the fifth through hole 760 extends to the front end surface of the mounting seat 700. The insert 882 passes through the fifth through hole 760, and the rear end of the insert 882 is disposed in the receiving cavity 790, and the insert 882 is in clearance fit with the fifth through hole 760.

Referring to fig. 16, 17, 12, 19 and 23, fig. 17 is an enlarged schematic view of region i in fig. 16. In order to achieve flexible connection between the swing arm 820 and the mount 700, a first notch 770 (see fig. 19) is provided on the lower surface of the front end of the mount 700, and a second notch 881 (see fig. 23) is provided on the rear end of the connection block 822. The elastic piece 830 comprises a first section 831, a second section 832 and a third section 833, wherein the second section 832 is positioned between the first section 831 and the third section 833, the first section 831 is arranged in the first notch 770 and fixedly connected with the mounting seat 700, and the third section 833 is arranged in the second notch 881 and fixedly connected with the connecting block 822. Accordingly, the swing arm 820 is swung by a small amount about the axis in the left-right direction with respect to the mount 700 by the bending deformation of the second segment 832, and the swing arm 820 does not come off the fifth through hole 760.

To achieve a fixed connection of the first cutout 831 with the mounting base 700, a first pressure plate 840 is provided. The first pressing plate 840 is located on the lower side of the elastic piece 830, and one end of the screw penetrates through the first pressing plate 840 and the elastic piece 830 in sequence and is in threaded fit with the mounting seat 700, so that the first pressing plate 840 is locked and fixed on the mounting seat 700. Similarly, the second section 832 is fixedly connected to the connecting block 822 by the second pressing plate 850, and the description thereof is not repeated here.

In this embodiment, the elastic element is a compression spring. The insert 882 has a sixth through hole 884 (see fig. 23) formed in the vertical direction, the mount 700 has a stepped hole 740 (see fig. 21) formed in the vertical direction, the set screw 860 passes through the sixth through hole 884 and the stepped hole 740 in sequence, the compression spring is fitted over the set screw 860, and the set nut 870 is then screwed on. Meanwhile, the insert block 882 is provided with a fifth screw hole 883 (see fig. 23) in the left-right direction, the fifth screw hole 883 is communicated with the sixth through hole 884, and a fourth set screw is screwed into the fifth screw hole 883, so that the set screw 860 is locked and fixed to the attachment block 822.

Therefore, the lower end of the compression spring abuts against the mounting seat 700, the upper end of the compression spring abuts against the positioning nut 870, and the compression spring provides an upward acting force to the positioning nut 870, that is, the compression spring provides an upward acting force to the connecting block 822.

When the first nozzle 910 does not contact the wafer, the compression spring provides an upward force to the second end of the swing arm 820 (the rear end of the swing arm 820 is the second end thereof), the first nozzle 910 is fixed to the first end of the swing arm 820, and the spring plate 830 is located between the first end of the swing arm 820 and the second end of the swing arm 820. The entire swing arm 820 has a lever structure, wherein the elastic piece 830 playing a role of fixed connection is a fulcrum, the first end of the swing arm 820 tilts upwards under the action of the compression spring, and the first suction nozzle 910 at the first end of the swing arm 820 falls downwards.

After the first nozzle 910 contacts the wafer, the first nozzle 910 at the first end of the swing arm 820 is acted by an upward force, the second end of the swing arm 820 overcomes the pressure of the compression spring and swings downward, the first nozzle 910 moves upward to be buffered, and the first nozzle 910 and the wafer are not easy to be damaged.

In order to conveniently adjust the fifth set screw for fixing the set screw 860, an avoiding hole 780 (refer to fig. 19) is formed in the mounting seat 700 in the left-right direction, the avoiding hole 780 is communicated with the accommodating cavity 790, and the avoiding hole 780 and the fifth threaded hole 883 are coaxially arranged. Thus, the fifth set screw may be adjusted through the relief hole 780 to secure or release the set screw 860.

In other embodiments, the elastic element may be a bellows or a rubber column, which is mounted in the same manner as the compression spring.

To adjust the initial angle of the swing arm 820, to facilitate the first suction nozzle 910 to suck the wafer, an adjustment screw 810 is provided. The mounting seat 700 is provided with a sixth screw hole 750 (see fig. 19), and the sixth screw hole 750 communicates with the accommodating cavity 790. After being screwed into the sixth threaded hole 750, one end of the adjusting screw 810 extends out of the lower end of the sixth threaded hole 750 and abuts against the insert block 882 of the connecting block 822 extending into the accommodating cavity 790. Because the insert 882 will tilt upwards under the action of the compression spring, the tilt will engage with the adjusting screw 810, thereby positioning the connecting block 822. By rotating the adjusting screw 810, the initial angle of the swing arm 820 can be adjusted by adjusting the length of the adjusting screw 810 extending from the lower end of the sixth threaded hole 750.

The utility model discloses still relate to an automation equipment, including foretell drive arrangement, this drive arrangement is used for the drive suction nozzle rotatory to realize the material loading of wafer. The automated equipment may be a die bonder or a wafer aligner.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art. Furthermore, the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.

Claims (10)

1. A drive device, comprising:

a driving unit including a rotation shaft;

the gas slip ring comprises a stator and a rotor, the rotor is coated on the circumferential surface of the rotating shaft, the rotor is opposite to the rotating shaft and is fixed, the stator is connected with the rotor in a rotating mode, a first air inlet hole is formed in the stator, a first air outlet hole is formed in the rotor, and the first air inlet hole is communicated with the first air outlet hole.

2. The drive of claim 1, wherein the shaft is integral with the rotor.

3. The drive of claim 1, wherein the rotor has a mounting hole formed therein in an axial direction, and the rotating shaft is disposed in the mounting hole.

4. The drive of claim 3, wherein the rotor is locked to the shaft by a first set screw.

5. The drive of claim 3, wherein the rotor and the shaft are keyed.

6. The drive device according to any one of claims 1 to 5, wherein a first annular groove is provided on an outer circumferential surface of the rotor, the first air outlet hole is provided in an axial direction of the rotor, and both the first air inlet hole and the first air outlet hole communicate with the first annular groove.

7. The drive device according to claim 6, wherein two sealing rings are further arranged between the stator and the rotor, and the two sealing rings are respectively positioned at two sides of the first annular groove.

8. The driving device as claimed in any one of claims 1 to 5, wherein a second air inlet hole is further formed on the stator, and a second air outlet hole is formed on the rotor, and the second air inlet hole is communicated with the second air outlet hole.

9. The drive of any one of claims 1 to 5, wherein the drive is an electric motor or a rotary cylinder.

10. An automated device, characterized by comprising a drive device according to any one of claims 1 to 9.

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