CN212644681U - Ignition device and oxidation annealing equipment - Google Patents

Ignition device and oxidation annealing equipment Download PDF

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Publication number
CN212644681U
CN212644681U CN202020722143.4U CN202020722143U CN212644681U CN 212644681 U CN212644681 U CN 212644681U CN 202020722143 U CN202020722143 U CN 202020722143U CN 212644681 U CN212644681 U CN 212644681U
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China
Prior art keywords
air inlet
intake
branch pipes
ignition
pipe
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CN202020722143.4U
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Inventor
吕立伟
孙妍
刘科学
吴艳华
李元志
周文飞
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Beijing Naura Microelectronics Equipment Co Ltd
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Beijing Naura Microelectronics Equipment Co Ltd
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Abstract

The embodiment of the application provides an ignition and oxidation annealing equipment, this ignition includes ignition chamber, first intake pipe and many second intake branch pipes, wherein: the first air inlet pipe is provided with a first air inlet pipe wall, all the second air inlet branch pipes are positioned inside the first air inlet pipe wall, a certain distance is reserved between each second air inlet branch pipe and the first air inlet pipe wall, and a certain distance is reserved between every two adjacent second air inlet branch pipes; first intake pipe has first intake pipe export, and all second inlet branch pipes all have the port of giving vent to anger, and first intake pipe export sets up with all equal parallel and level of the port of giving vent to anger, and first intake pipe export communicates with the chamber of igniteing each other. Therefore, a large open fire for hydrogen-oxygen reaction in the traditional technology can be dispersed into a plurality of small open fires, so that the sizes of corresponding avoidance spaces and the like can not be too large, and the space utilization efficiency in the reaction device is improved.

Description

Ignition device and oxidation annealing equipment
Technical Field
The utility model relates to a reaction equipment field especially relates to an ignition and oxidation annealing equipment.
Background
In the chemical reaction process, it is often necessary to mix and combust the two gases and then perform the next reaction by using the product generated by combustion, for example, mixing and combusting hydrogen and oxygen, performing the next reaction by using the generated water vapor, or mixing and combusting methane and oxygen, and performing the next reaction by using the generated carbon dioxide and water vapor.
Because the reaction device inevitably has open fire generated by reaction, an avoidance area needs to be arranged in the reaction device so that the open fire can not contact the reaction device, the influence of the open fire on the service life of the reaction device is avoided, when the amount of mixed gas required to be input is large, the flame length of the open fire is increased, the required avoidance area is also large, and the space utilization efficiency in the reaction device is low.
SUMMERY OF THE UTILITY MODEL
The embodiment of the application provides an ignition device and oxidation annealing equipment, so as to solve the problems.
The embodiment of the application adopts the following technical scheme:
the embodiment of the application provides an ignition device, including ignition chamber, first intake pipe and second air intake pipe group, first intake pipe with the entry intercommunication in ignition chamber, the second air intake pipe group includes two piece at least second air intake branch pipes, all the second air intake branch pipe all is located in the first air intake pipe, and arbitrary two have between the second air intake branch pipe and predetermine the interval, all the second air intake branch pipe all has the port of giving vent to anger, the entry in ignition chamber does not exceed the port of giving vent to anger.
Preferably, the second air inlet branch pipes are provided with air outlet ports, and the air outlet ports are aligned with inlets of the ignition cavities.
Preferably, the second intake pipe group further includes a second intake manifold, all the second intake branch pipes further have intake ports, and the second intake branch pipes are communicated with the second intake manifold through respective intake ports.
Preferably, the reaction furnace further comprises a preheating sleeve, the preheating sleeve covers the outside of the first air inlet pipeline, and one end of the preheating sleeve is flush with the inlet of the ignition cavity.
Preferably, the other end of the preheating sleeve is flush with the air inlet port.
Preferably, all of the second intake branch pipes are parallel to the first intake pipe.
Preferably, all of the second intake branch pipes are disposed around a central axis of the first intake pipe.
Preferably, all of said second inlet manifold branches are equally spaced around said central axis.
Preferably, the gas supply device further comprises an oxygen source and a hydrogen source, the first gas inlet pipe is connected with the oxygen source, and the second gas inlet pipe group is connected with the hydrogen source.
The embodiment of the application also provides oxidation annealing equipment, which comprises a reaction chamber and the ignition device, wherein the outlet of the ignition chamber is connected with the reaction chamber.
The embodiment of the application provides an ignition device, which comprises an ignition cavity, a first air inlet pipe and a second air inlet pipe group, wherein the first air inlet pipe is communicated with the ignition cavity, the second air inlet pipe group comprises at least two second air inlet branch pipes, all the second air inlet branch pipes are positioned in the first air inlet pipe, a preset distance is formed between any two second air inlet branch pipes, an inlet of the ignition cavity is not more than an air outlet port of each second air inlet branch pipe, therefore, the plurality of second air inlet branch pipes can be used for dispersing the gas in the second air inlet branch pipes, such as hydrogen or oxygen, into a plurality of smaller air flows to be sprayed out and mixed with the gas in the first air inlet pipe for combustion, therefore, a large open fire for hydrogen-oxygen reaction in the prior art is dispersed into a plurality of small open fires, so that the sizes of corresponding avoidance spaces and the like are not too large, and the space utilization efficiency in the reaction device is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:
FIG. 1 is a schematic diagram of an ignition device provided in an embodiment of the present application;
FIG. 2 is a schematic diagram of a second intake branch and an end of a first intake pipe according to an embodiment of the present disclosure;
fig. 3 is a schematic diagram of a second intake tube group according to an embodiment of the present application.
Reference numerals:
1-a first air inlet pipe, 2-a second air inlet branch pipe, 3-a second air inlet main pipe, 4-an ignition cavity, 5-a preheating sleeve, 10-an outlet of the first air inlet pipe, 12-a wall of the first air inlet pipe, 20-an air outlet port, 22-a wall of the second air inlet branch pipe, 24-an air inlet port, 40-an inlet, 42-an outlet and an a-central shaft.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the technical solutions of the present application will be described in detail and completely with reference to the following specific embodiments of the present application and the accompanying drawings. It should be apparent that the described embodiments are only some of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
As shown in fig. 1, an ignition device provided by the embodiment of the present application includes an ignition chamber 4, a first intake pipe 1 and a second intake pipe group, the first intake pipe 1 is communicated with an inlet of the ignition chamber 4, and as shown in fig. 1, wherein: the second air inlet pipe group comprises at least two second air inlet branch pipes 2, all the second air inlet branch pipes 2 are located in the first air inlet pipe 1, a preset distance is reserved between any two second air inlet branch pipes, and air outlet ports of all the second air inlet branch pipes 2 at least extend to inlets of the ignition cavities 4.
As shown in fig. 1, a plurality of second air inlet branch pipes 2 may be arranged in parallel, so that the turbulence degree when the air in the first air inlet pipe 1 and the second air inlet branch pipes 2 is blown out can be reduced, or the second air inlet branch pipes 2 may be curved, arranged in the straight first air inlet pipe 1, etc.; the plurality of second air inlet branch pipes 2 can be connected with the second air inlet main pipe 3 as shown in fig. 1, so that air supply is convenient, or the plurality of second air inlet branch pipes 2 can supply air independently.
In this embodiment, a preset distance is provided between any two second intake branch pipes 2, where the preset distance is provided in this embodiment, an equal distance may be provided between any two second intake branch pipes 2, as shown in fig. 2, that is, an equal structure is provided for the distance between any two of the three second intake branch pipes 2, the first intake pipe 1 has a central axis a, the second intake branch pipes 2 are equidistantly disposed around the central axis a, or the distance between different second intake branch pipes 2 is unequal, for example, the distance is arranged according to a certain rule, the distance may still be provided around the central axis a, for example, four of the five second intake branch pipes 2 are disposed on four vertexes of a square, the fifth intake branch pipe is disposed in the center of the square, and the center of the square is the central axis a. The preset distance is mainly used for describing that a certain distance exists between any two second air inlet branch pipes, and the phenomenon that the flame is too long due to remixing of ejected gas caused by too short distance between the second air inlet branch pipes 2 is avoided.
As shown in fig. 1, one end of the first air inlet pipe 1 has a first air inlet pipe outlet 10, one end of the second air inlet branch pipe 2 has an air outlet port 20, as shown in the embodiment shown in fig. 1, the first air inlet pipe outlet 10 is connected with an inlet 40 of the ignition cavity 4, all the air outlet ports 20 of the second air inlet branch pipes 2 extend at least to the inlet 40 of the ignition cavity 4, and the air outlet port 20 in the embodiment of the present application extends at least to the inlet 40, that is, the air outlet port 20 may be flush with the inlet 40 as shown in fig. 1, or the air outlet port 20 exceeds the inlet 40, that is, the second air inlet branch pipe 2 extends into the ignition cavity 4, but the inlet 40 does not exceed the air outlet port 20.
The gas outlet ports 20 of all the second gas inlet branch pipes 2 extend at least to the inlets 40 of the ignition cavities 4, so that when the same amount of gas such as hydrogen and oxygen is blown out, the gas in the second gas inlet branch pipes 2 is divided into a plurality of smaller gas flows to be blown out, and the gas can be contacted with the gas in the first gas inlet pipe 1, so that the oxidation combustion reaction is facilitated, therefore, in order to ensure that the hydrogen and oxygen mixed combustion process is completed through a plurality of smaller flames, the inlets 40 are arranged not to exceed the gas outlet ports 20, so that the blown small gas flows can be immediately mixed with the corresponding combustion gas, and the length of the whole flame is shorter.
In order to avoid the air flow in the smaller second inlet branch pipes 2 that have been separated from each other from mixing again, the second inlet branch pipes 2 have a certain distance therebetween, as shown in fig. 2, the second inlet branch pipes 2 have a second inlet pipe wall 22 that circumferentially surrounds the outlet ports 20, and a plurality of second inlet branch pipes 2 have a certain distance therebetween, as shown in fig. 2, the plurality of outlet ports 20 are symmetrically arranged, as shown in fig. 1, three outlet ports 20 are arranged on three vertices of an equilateral triangle, and have a certain distance therebetween and have an equal distance therebetween, and of course, the plurality of outlet ports 20 may have different distances therebetween, and may be arranged according to specific requirements.
The second inlet branch pipes 2 may be spaced apart from each other as shown in fig. 2, or the main portions may abut against each other, but the outlet ports 20 are spaced apart from each other, so that the outlet ports 20 are prevented from abutting against each other and the hydrogen gas flows are mixed. Meanwhile, a certain distance is reserved between the second air inlet branch pipe 2 and the first air inlet pipe wall 12, so that the second air inlet branch pipe 2 is prevented from being excessively close to the first air inlet pipe wall 12, sufficient air can be blown out from the air outlet port 20 and the first air inlet pipe wall 12 to be mixed with the air blown out from the air outlet port 20, and the problem of insufficient combustion is avoided.
In this way, after the gas in each smaller second air inlet branch pipe 2 is respectively contacted with the gas in the first air inlet pipe 1, the gas can be ignited or combustion oxidation reaction can be generated due to the reason that the reaction temperature in the reaction cavity is higher, and the like, and because the amount of the gas in each second air inlet branch pipe 2 is smaller, when the same amount of the gas is introduced, the generated flame is smaller, and the avoidance space required to be arranged in the reaction cavity and the like is smaller.
The application embodiment provides an ignition device, which comprises an ignition cavity, a first air inlet pipe and a second air inlet pipe group, wherein the first air inlet pipe is communicated with the ignition cavity, the second air inlet pipe group comprises at least two second air inlet branch pipes, all the second air inlet branch pipes are positioned in the first air inlet pipe, a preset distance is formed between any two second air inlet branch pipes, an inlet of the ignition cavity does not exceed an air outlet port of each second air inlet branch pipe, therefore, the plurality of second air inlet branch pipes can be used for dispersing the gas in the second air inlet branch pipes, such as hydrogen or oxygen, into a plurality of smaller air flows to be sprayed out and mixed with the gas in the first air inlet pipe for combustion, therefore, a large hydrogen-oxygen reaction open fire in the prior art is dispersed into a plurality of small open fires, so that the sizes of corresponding avoidance spaces and the like are not too large, the space utilization efficiency in the reaction device is improved, and in addition, the loss of flame to the performance and the service life of the ignition device can be reduced.
For convenience of manufacture, as shown in fig. 3, the inlet port 24 of the second inlet manifold 2 is disposed away from the outlet port 20 and at both ends of the second inlet manifold 2, and the second inlet manifold 3 is connected to the inlet port 24, thereby forming a structure in which a plurality of second inlet manifolds 2 are branched at the end of the second inlet manifold 3. The second intake branch pipe 2 and the second intake manifold 3 jointly form a second intake pipe group as shown in fig. 3, and the second intake pipe group may be formed by integrally manufacturing the second intake branch pipe 2 and the second intake manifold 3, or may be formed by splicing the second intake branch pipe 2 and the second intake manifold 3 through a connecting valve or other structures. In the embodiment of the present application, the first air inlet pipe 1 is connected to an oxygen source, the second air inlet pipe group is connected to a hydrogen source, the hydrogen source can be a hydrogen tank, a hydrogen generator, or the like, and the oxygen source can be an oxygen tank, or an oxygen generator.
Preferably, the second intake manifold 3 has a length of 169 mm and an internal diameter of 8 mm. The second intake branch pipe 2 has a length of 53 mm and an inner diameter of 2.3 mm. The pipe diameter of the first air inlet pipe 1 may be 13.5 mm to 15 mm, preferably 14 mm, and the distance between the second air inlet branch pipes 2 is 3mm to 8.68 mm.
Because the gas in the first air inlet pipe 1 is blown out from the gaps among the plurality of second air inlet branch pipes 2, in order to improve the stability of the blown air flow and avoid unstable flame caused by excessive turbulence, as shown in fig. 2, the first air inlet pipe outlet 10 can be a circular port, a plurality of air outlet ports 20 are arranged around the center of the first air inlet pipe outlet 10, the air outlet ports can be uniformly arranged in the circumferential direction, or can be arranged in a certain non-uniform manner according to specific aerodynamics, and the air outlet ports 20 can also be circular ports as shown in fig. 1.
The number of the outlet ports 20 shown in fig. 2 is 3, and the distance between the second inlet branch pipes 2 is not less than 3mm, which is not less than that described here, it may be that the second inlet branch pipes 2 have second inlet pipe walls 22 as shown in fig. 2, and the shortest distance between adjacent second inlet pipe walls 22 is not less than 3mm, at this time, the diameter of the first inlet pipe outlet 20 may be preferably set to 14 mm to 20 mm, so as to obtain better gas mixing effect.
In order to further increase the mixing effect of the gases, as shown in fig. 2, the first gas inlet tube 1 further has a first gas inlet tube wall 12 circumferentially surrounding the first gas inlet tube outlet 10, and the first gas inlet tube wall 12 is also spaced apart from the second gas inlet tube wall 22, so that the gases in the first gas inlet tube 1 can be blown out from between the second gas inlet tube wall 22 and the first gas inlet tube wall 12, forming a gas flow enclosure effect, which leads to a better mixing effect.
As shown in fig. 2, the outlet ports 20 of the second inlet branch pipes 2 are located at the vertexes of an equilateral triangle, i.e., arranged in a delta shape, or arranged in a field shape or an equilateral hexagon, depending on the number of the second inlet branch pipes 2 and the specific requirements.
In order to avoid flame burning of the reaction device, as shown in fig. 1, the ignition device provided by the embodiment of the present application further includes an ignition cavity 4, the ignition cavity 4 has an inlet 40, the first air inlet pipe outlet 10 is connected to the inlet 40 and enables the first air inlet pipe 1 and the ignition cavity 4 to communicate with each other, or the first air inlet pipe outlet 10 extends into the ignition cavity 4 through the inlet 40; meanwhile, because the first air inlet pipe outlet 10 and the air outlet port 20 are arranged in parallel and level, the second air inlet branch pipe 2 is also communicated with the ignition cavity 4, so that flame ignited by hydrogen and oxygen can be combusted in the ignition cavity 4, and the interference of a reaction device is avoided. In order to conduct the water vapour produced by ignition out of the ignition chamber 4, the ignition chamber 4 also has an outlet 42, the outlet 42 and the inlet 40 facing away from each other, as shown in fig. 1.
In order to increase the reaction degree of hydrogen and oxygen, as shown in fig. 1, the ignition device provided in the embodiment of the present application further includes a preheating jacket 5, where the preheating jacket 5 may be an electric jacket or a sleeve through which high-temperature exhaust gas passes, and the preheating jacket 5 is wrapped around the outside of the first intake pipe 1, so as to heat oxygen in the first intake pipe 1 and indirectly heat hydrogen in the second intake branch pipe 2, and in order to improve the preheating efficiency, the preheating jacket 5 may be flush with an end of the second intake branch pipe 2 located at the outlet port 20 and flush with the inlet port 24, or exceed an end of the second intake branch pipe 2 away from the outlet port 20, as shown in fig. 1, so as to increase the preheating range, and as a gap is formed between the second intake branch pipes 2, the contact area between the heated oxygen and the second intake branch pipes 2 is large, so that the reaction gases are mixed more uniformly, the reaction is more complete.
In addition, because the pipe diameter of traditional first intake pipe 1 is 13mm, and the pipe diameter of the first intake pipe 1 that adopts in this application suitably increases for the pipe diameter of preheating jacket 5 also increases, can improve reactant gas's preheating efficiency.
The embodiment of the present application further provides a thermal oxidation annealing apparatus, which includes a reaction chamber and the above-mentioned ignition device, where the ignition device is connected to the reaction chamber through an outlet 42, and the reaction chamber may be used to contain a silicon source, and may also be used to contain other materials that need thermal oxidation annealing, such as a titanium source.
The ignition device in the embodiment of the application can meet the requirements of customers on mixed combustion of gases in different proportions, such as wet oxygen processes in different gas proportions. The ignition device does not need to artificially replace ignition cavities with different cavity sizes along with different gas proportions, so that the production cost can be saved, and the productivity can be improved.
The embodiment of the application provides an ignition device, including the ignition chamber, first intake pipe and second intake pipe group, first intake pipe and ignition chamber intercommunication, second intake pipe group includes two piece at least second air inlet branch pipes, all second air inlet branch pipes all are located first air inlet pipe, have preset interval between two arbitrary second air inlet branch pipes, the entry of ignition chamber is no longer than the port of giving vent to anger of second air inlet branch pipe, can utilize many second air inlet branch pipes like this with the gas in the second air inlet branch pipe, like hydrogen or oxygen, the dispersion is the gas mixture burning in a plurality of less air current blowout and the first intake pipe, thereby disperse a great oxyhydrogen reaction naked light in the conventional art into a plurality of less naked lights, thereby can make the corresponding equidimension of dodging the space be unlikely to setting too big, space utilization efficiency in the reaction unit has been improved.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. The utility model provides an ignition, its characterized in that includes ignition chamber, first intake pipe and second intake pipe group, first intake pipe with the entry intercommunication in ignition chamber, wherein:
the second air inlet pipe group comprises at least two second air inlet branch pipes, all the second air inlet branch pipes are located in the first air inlet pipe, any two of the second air inlet branch pipes are arranged at a preset interval, and all the air outlet ports of the second air inlet branch pipes at least extend to the inlets of the ignition cavities.
2. The ignition device of claim 1, wherein said outlet ports are each aligned with an inlet of said ignition chamber.
3. The ignition device according to claim 1, wherein said second intake tube group further comprises a second intake manifold, and said second intake branch tubes each communicate with said second intake manifold through a respective intake port.
4. The ignition device of claim 3, further comprising a pre-heat jacket surrounding an exterior of the first air intake conduit, one end of the pre-heat jacket being flush with an inlet of the ignition chamber.
5. The ignition device of claim 4, wherein the other end of the preheating jacket is flush with the intake port.
6. The ignition device according to claim 1, wherein all of said second intake branch pipes are parallel to said first intake pipe.
7. The ignition device according to claim 6, wherein all of said second intake branch pipes are disposed around a central axis of the first intake pipe.
8. The ignition device according to claim 7, wherein all of said second intake branch pipes are arranged at equal intervals around said central axis.
9. The ignition device of any one of claims 1-8, further comprising a source of oxygen and a source of hydrogen, said first intake manifold being connected to said source of oxygen and said second intake manifold being connected to said source of hydrogen.
10. An oxidizing annealing apparatus comprising a reaction chamber and the ignition device according to any one of claims 1 to 9, wherein an outlet of the ignition chamber is connected to the reaction chamber.
CN202020722143.4U 2020-05-06 2020-05-06 Ignition device and oxidation annealing equipment Active CN212644681U (en)

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CN202020722143.4U CN212644681U (en) 2020-05-06 2020-05-06 Ignition device and oxidation annealing equipment

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Application Number Priority Date Filing Date Title
CN202020722143.4U CN212644681U (en) 2020-05-06 2020-05-06 Ignition device and oxidation annealing equipment

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113091055A (en) * 2021-03-18 2021-07-09 北京北方华创微电子装备有限公司 Ignition device and semiconductor device
CN113566234A (en) * 2021-08-30 2021-10-29 北京北方华创微电子装备有限公司 Ignition device of semiconductor device and semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113091055A (en) * 2021-03-18 2021-07-09 北京北方华创微电子装备有限公司 Ignition device and semiconductor device
CN113566234A (en) * 2021-08-30 2021-10-29 北京北方华创微电子装备有限公司 Ignition device of semiconductor device and semiconductor device
CN113566234B (en) * 2021-08-30 2023-01-17 北京北方华创微电子装备有限公司 Ignition device of semiconductor device and semiconductor device

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