CN212527546U - Ultrahigh-precision five-dimensional movement adjusting device with high bearing capacity - Google Patents
Ultrahigh-precision five-dimensional movement adjusting device with high bearing capacity Download PDFInfo
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- CN212527546U CN212527546U CN202020651539.4U CN202020651539U CN212527546U CN 212527546 U CN212527546 U CN 212527546U CN 202020651539 U CN202020651539 U CN 202020651539U CN 212527546 U CN212527546 U CN 212527546U
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Abstract
The utility model discloses a five dimension motion adjusting device of super high accuracy with high bearing capacity relates to the precision adjustment technical field. The utility model comprises a front and back translation mechanism based on X direction, a left and right translation mechanism based on Y direction, a rotation mechanism based on theta Z direction, a swing mechanism based on theta X direction or theta Y direction, a lifting mechanism based on Z direction and an integral walking mechanism; the first high-precision ball screw pair transmission mechanism, the second high-precision ball screw pair transmission mechanism, the first high-precision worm gear mechanism, the second high-precision worm gear mechanism and the tank are respectively commanded by a computer to realize the functional control of shaft motion, positioning and feedback. The utility model discloses filled large-scale load mechanism ultrahigh accuracy motion adjusting device's blank, compared in the five dimension motion adjusting device of um magnitude high accuracy on the present market, the load capacity of this device wins far away, and the fine setting precision reaches the um magnitude, can be competent in large-scale device precision measurement's bearing and fine setting work.
Description
Technical Field
The utility model belongs to the technical field of the accurate regulation, especially, relate to a five dimension motion adjusting device of super high accuracy with high bearing capacity.
Background
At present, a five-dimensional movement adjusting device on the market has high adjusting precision of a split type structure but very small load capacity, and generally is less than 1000 kg. If the five-degree-of-freedom motion adjusting device with large load capacity is adopted, the positioning precision of the product is too low and is generally in the mm magnitude, so that the device cannot be used for precision measurement and cannot realize high-precision motion adjustment. Although the resolution of a six-degree-of-freedom high-precision motion adjusting device imported from abroad can reach the um level, the load capacity is only about 1000kg, and no good product can meet the requirement of high-precision positioning when the load exceeds 2000 kg. Therefore, aiming at the problems, the device capable of bearing the ultra-large part and needing precise adjustment movement is provided, and posture adjustment with high precision, high efficiency and high precision is realized by carrying out multi-degree-of-freedom precise adjustment and positioning on the ultra-large part, so that the device has important significance in meeting the requirements of detection, test, space monitoring and the like on ultra-high precision measurement and assembly.
SUMMERY OF THE UTILITY MODEL
The utility model provides a five dimension motion adjusting device of super high accuracy with high bearing capacity has solved above problem.
In order to solve the technical problem, the utility model discloses a realize through following technical scheme:
the utility model discloses an ultra-high precision five-dimensional movement adjusting device with high bearing capacity, which comprises a front and back translation mechanism based on X direction, a left and right translation mechanism based on Y direction, a rotating mechanism based on theta Z direction, a swinging mechanism based on theta X direction or theta Y direction, a lifting mechanism based on Z direction and an integral walking mechanism;
the front and back translation mechanism comprises a base, two X-axis translation guide rails which are arranged on the upper surface of the base and are additionally provided with support ribs, a middle-layer high-strength table top which is in sliding fit with the X-axis translation guide rails through a plurality of high-bearing slide blocks arranged at the bottom, and a first high-precision ball screw pair transmission mechanism which is arranged in a first channel at the upper part of the base and is parallel to the X-axis translation guide rails and is used for transmitting the middle-layer high-strength table top to perform X-axis axial translation; the front and back translation mechanism is used for carrying out high-precision X-axis translation on the middle-layer high-strength table top;
the left-right translation mechanism comprises two Y-axis translation guide rails which are arranged on the upper surface of the middle-layer high-strength table board and are provided with support ribs along the Y axis direction, a Y-axis translation table which is provided with a plurality of high-bearing slide blocks at the bottom and is matched with the Y-axis translation guide rails in a sliding manner and provided with hollow holes inside, and a second high-precision ball screw pair serving as a transmission mechanism which is arranged in a second channel on the upper part of the middle-layer high-strength table board and is parallel to the Y-axis translation guide rails and is used for transmitting the Y-axis translation table to carry out Y-axis translation, and the left-right translation mechanism is used for carrying out high;
the rotating mechanism comprises a plurality of high-precision arc guide rails arranged on the upper surface of the Y-axis translation table, a turntable table top in sliding fit with the high-precision arc guide rails through a plurality of high-bearing slide blocks arranged at the bottom, and a first high-precision worm and gear mechanism arranged at the bottoms of the Y-axis translation table and the turntable table top and used for driving the turntable table top, and is used for performing high-precision rotation adjustment on the turntable table top bearing a heavy sample to be tested;
the swing mechanism and the lifting mechanism are both realized by three second high-precision worm and gear mechanisms which are uniformly arranged at three points and are arranged on the table board of the turntable, and one or two of the second high-precision worm and gear mechanisms are used for adjusting the theta X axis and the theta Y axis of the heavy sample to be measured which is arranged on the table board of the turntable through the sample base support to form the swing mechanism; three second worm and gear mechanisms synchronously and stably push up to realize Z-direction lifting to form a lifting mechanism, and the swinging mechanism is used for carrying out high-precision angle adjustment on the theta X axis and the theta Y axis of the heavy sample to be measured; the lifting mechanism is used for carrying out high-precision Z-direction lifting on the heavy sample to be measured;
the integral travelling mechanism comprises steel support brackets arranged on two sides of the base and a mobile tank vertically arranged through a mobile pushing and lifting screw rod and positioned at the bottom of the steel support brackets, and is used for moving the device integrally;
and the first high-precision ball screw pair transmission mechanism, the second high-precision ball screw pair transmission mechanism, the first high-precision worm gear mechanism, the second high-precision worm gear mechanism and the tank are controlled by a network port or a 485 bus and are instructed by a computer to realize the functional control of shaft motion, positioning and feedback.
Further, the base adopts granite marble, and bottom both sides fretwork, and surface mounting has a plurality of rings.
Furthermore, the X-axis translation guide rail adopts a high-precision THK-55 square guide rail, the high-bearing sliding blocks adopt a single sliding block with basic rated load of 88.5KN matched with the X-axis translation guide rail, and the high-bearing sliding blocks jointly achieve the bearing load of 7T.
Furthermore, the first high-precision ball screw pair transmission mechanism comprises an X-axis ball screw arranged in a first channel in the middle position of the upper surface of the base and parallel to the X-axis translation guide rail, an X-axis motor arranged at one end of the X-axis ball screw and used for driving, and a ball nut connecting structure arranged at the bottom of the middle-layer high-strength table top and connected with the X-axis ball screw in a driving manner, and the adjusting precision of the first high-precision ball screw pair transmission mechanism reaches 0.03 mm.
Furthermore, the middle-layer high-strength table top is made of a high-strength aviation aluminum alloy material, a hollow area is formed in the middle-layer high-strength table top, supporting ribs are reserved in the middle-layer high-strength table top, and a second hanging ring is installed on the outer side portion of the middle-layer high-strength table top.
Furthermore, the second high-precision ball screw pair transmission mechanism comprises a Y-axis ball screw arranged in a second channel in the middle position of the upper surface of the middle-layer high-strength table top and parallel to the Y-axis translation guide rail, a Y-axis motor arranged at one end of the Y-axis ball screw for driving, and a ball nut connecting structure arranged at the bottom of the Y-axis translation table and connected with the Y-axis ball screw in a driving manner, and the adjusting precision of the second high-precision ball screw pair transmission mechanism reaches 0.04 mm.
Further, the first high-precision worm and gear mechanism comprises a theta Z-axis motor and a circular turbine disc, wherein the theta Z-axis motor is mounted on the upper portion of the Y-axis translation table, the circular turbine disc is arranged at the bottom of the table top of the rotary table, and a first worm structure in transmission fit with the circular turbine disc in a vortex worm mode is mounted at the output shaft end of the theta Z-axis motor.
Further, the second high-precision worm and gear mechanism comprises three worm and gear mounting grooves which are arranged on the upper surface of the turntable in a surrounding mode, a worm gear mounted in the worm and gear mounting grooves, an angle adjusting motor mounted on the peripheral side portion of the turntable, and a pushing and lifting screw rod mounted in the worm gear and used for lifting a heavy sample to be measured, wherein a second worm structure which is in transmission fit with the worm and gear is mounted at the output shaft end of the angle adjusting motor.
Furthermore, an X-axis absolute type inlet linear grating which is arranged in parallel with the X-axis translation guide rail and used for measuring X-axis translation data is arranged on the base; a Y-axis absolute type inlet linear grating which is arranged in parallel with the Y-axis translation guide rail and used for measuring Y-axis translation data is arranged on the middle-layer high-strength table top; and the Y-axis translation table is provided with an inlet type absolute circular grating for measuring rotation angle data, and the X-axis absolute type inlet linear grating, the Y-axis absolute type inlet linear grating and the inlet type absolute circular grating are all Heidenhain gratings with the resolution of 1 mu m.
Compared with the prior art, the utility model following beneficial effect including:
1. the utility model discloses filled large-scale load mechanism ultrahigh accuracy motion adjusting device's blank, compared in the five dimension motion adjusting device of um magnitude high accuracy on the present market, the load capacity of this device wins far away.
2. The utility model discloses compare in the five dimension of present prior art and bear the telecontrol equipment greatly, the fine setting precision reaches the um magnitude, wins far away in the motion adjustment precision, can be competent in the bearing and fine setting work of large-scale device precision measurement.
Of course, it is not necessary for any particular product to achieve all of the above-described advantages at the same time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic overall structure diagram of an ultra-high precision five-dimensional motion adjusting device with high bearing capacity according to an embodiment of the present invention;
FIG. 2 is a schematic view of the structure at view A in FIG. 1;
FIG. 3 is a left side view of the structure of FIG. 1;
FIG. 4 is a top view of the structure of FIG. 1;
FIG. 5 is a rear view of the structure of FIG. 1;
FIG. 6 is a schematic structural view of an X-direction forward-backward translation mechanism formed by the base and the middle-layer high-strength table-board;
FIG. 7 is a top view of the structure of FIG. 6;
FIG. 8 is a front view of the structure of FIG. 6;
FIG. 9 is a bottom view of the structure of FIG. 6;
FIG. 10 is a top view of the structure of the left and right translation mechanism formed by the middle high-strength table and the Y-axis translation table;
FIG. 11 is a front view of the structure of the left and right translation mechanism formed by the middle high-strength table and the Y-axis translation table;
FIG. 12 is a bottom view of the structure of the left and right translation mechanism formed by the middle high strength table and the Y-axis translation table;
FIG. 13 is a schematic structural view of a Y-axis translation stage;
FIG. 14 is a top view of the structure of FIG. 13;
FIG. 15 is a schematic structural diagram of a rotation mechanism formed by the table top of the turntable in cooperation with a θ Z axis motor;
FIG. 16 is a schematic view of a structure formed by the table top of the turntable and an angle adjustment motor;
FIG. 17 is a schematic structural view of the matching structure of the raising screw, the worm wheel and the second worm;
in the drawings, the components represented by the respective reference numerals are listed below:
1-a base, 2-an X-axis translation guide rail, 201-a first lifting ring, 3-an X-axis ball screw, 301-an X-axis motor, 302-a first channel, 4-a middle-layer high-strength table top, 401-a second lifting ring, 402-a second channel, 403-a hollowed-out area, 404-a support rib, 5-a Y-axis translation guide rail, 501-a Y-axis absolute type inlet linear grating, 6-a Y-axis ball screw, 601-a Y-axis motor, 7-a Y-axis translation table, 701-a hollowed-out hole, 702-an inlet absolute circular grating, 8-a high-precision circular arc guide rail, 11-a turntable table top, 12-a turbine installation groove 1201, an angle adjustment motor, 1203-a turbine, 1204-a push-up screw, 1205-a second worm structure, and 13-a steel support bracket, 14-a pushing and lifting screw rod for movement, 15-a tank for movement, a 16-theta Z-axis motor, 1601-a first worm structure, 17-a heavy sample to be measured, 1701-a sample base.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "front and back", "right and left", "bottom", "upper", "middle", "up and down", and the like, indicate positional or positional relationships, are merely for convenience of description and simplicity of description, and do not indicate or imply that the indicated component or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Referring to fig. 1-17, the ultra-high precision five-dimensional motion adjusting device with high bearing capacity of the present invention includes a front-back translation mechanism based on X direction, a left-right translation mechanism based on Y direction, a rotation mechanism based on theta Z direction, a swing mechanism based on theta X direction or theta Y direction, a lifting mechanism based on Z direction, and an integral walking mechanism;
the front and back translation mechanism comprises a base 1, two X-axis translation guide rails 2 which are arranged on the upper surface of the base and are additionally provided with support ribs, a middle-layer high-strength table top 4 which is in sliding fit with the X-axis translation guide rails 2 through three high-bearing slide blocks arranged at the bottom, and a first high-precision ball screw pair transmission mechanism which is arranged in a first channel 302 at the upper part of the base 1 and is parallel to the X-axis translation guide rails 2 and is used for transmitting the middle-layer high-strength table top 4 to perform X-axis axial translation; the front and rear translation mechanism is used for carrying out high-precision X-axis translation on the middle-layer high-strength table top 4; the translation stroke of the front and rear translation mechanism: 750mm, resolution: better than 1 μm, positioning accuracy: better than 10 μm, maximum operating speed: 25mm/s, effective bearing capacity: the control system is characterized in that the control system is more than or equal to 9T, an inlet linear grating (absolute) is used, and a network port or 485 bus is used for controlling and realizing the functional control of shaft movement, positioning, feedback and the like through sending instructions by a computer;
the left-right translation mechanism comprises two Y-axis translation guide rails 5 which are arranged on the upper surface of the middle-layer high-strength table top 4 and are provided with support ribs along the Y axis direction, a Y-axis translation table 7 which is provided with a hollow hole 701 inside and is arranged on the Y-axis translation guide rails 5 in a sliding fit mode through three high-bearing slide blocks arranged at the bottom, and a second high-precision ball screw pair serving as a transmission mechanism which is arranged in a second channel 402 on the upper portion of the middle-layer high-strength table top 4 and is parallel to the Y-axis translation guide rails 5 and is used for transmitting the Y-axis translation table 7 to perform Y-axis translation, and the left-right translation mechanism is used for performing high-precision; the translation stroke of the left-right translation mechanism is as follows: ± 50mm, resolution: better than 1 μm, positioning accuracy: better than 10 μm, maximum operating speed: 25mm/s, effective bearing capacity: the function control of shaft motion, positioning, feedback and the like is realized by using an inlet linear grating (absolute) and a network port or 485 bus for control and sending instructions through a computer;
the rotating mechanism comprises nine high-precision arc guide rails 8 arranged on the upper surface of the Y-axis translation table 7, a turntable table top 11 in sliding fit with the high-precision arc guide rails 8 through three high-bearing slide blocks arranged at the bottom, and a first high-precision worm gear mechanism arranged at the bottoms of the Y-axis translation table 7 and the turntable table top 11 and used for driving the turntable table top 11, and is used for performing high-precision rotation adjustment on the turntable table top 11 bearing the heavy tested sample 17; rotation range of the rotation mechanism: 360 °, resolution: better than 1", control precision: 35 ", effective load-bearing capacity: the device is more than or equal to 5T, an inlet circular grating (absolute) is used, a network port or 485 bus is used for control, and functional control such as shaft movement, positioning, feedback and the like can be realized by sending instructions through a computer; the high-precision arc guide rail 8 adopts a THK-35 arc guide rail with the radius of R800mm, each guide rail is provided with a high-bearing slide block (a single slide block has the basic rated load of 37.3KN), and the high-precision arc guide rail has the characteristics of small dynamic and static friction coefficient, high positioning precision, realization of high-precision arc motion under the condition of high load, and can be matched with a machining and mounting reference to ensure the reference circle center position of rotary motion. A first square sample base support (clamp) is arranged on a rotary table top to move 360 degrees, a first worm gear mechanism with a transmission ratio of 1:360 is driven by a speed reducing mechanism with a ratio of 1: 5 matched with a 130-step motor, so that the table top can stably rotate and move on a guide rail, and the subdivision resolution of 10 can be achieved:
an absolute type inlet linear grating (system precision +/-1') is arranged in the base, and better and more accurate resolution precision can be fed back. And a conductive slip ring with the inner diameter of 250mm is additionally arranged and is used for swinging the motion wiring of the three motors. And in the finite element analysis of the rotary table top, under the condition of bearing 5T, the variable is approximately equal to 0.017mm, the deformation quantity meeting the index requirement is less than or equal to 0.06mm, and the whole stable and qualitative deformation quantity used under the heavy load condition is smaller.
The swing mechanism and the lifting mechanism are both realized by three second high-precision worm and gear mechanisms which are uniformly arranged at three points and are arranged on the turntable table surface 11, and one or two of the second high-precision worm and gear mechanisms adjusts the theta X axis and the theta Y axis of high precision of a heavy type tested sample 17 which is arranged on the turntable table surface 11 through a sample base support 1701 to form the swing mechanism; three second worm and gear mechanisms synchronously and stably push and lift to realize Z-direction lifting to form the lifterThe swing mechanism is used for carrying out high-precision angle adjustment on the theta X axis and the theta Y axis on the heavy sample 17 to be measured; the lifting mechanism is used for carrying out Z-direction lifting with high precision on the heavy sample 17 to be measured; wherein, the swing range of the swing mechanism: ± 0.15 °, resolution: better than 1", control precision: 0.2 ", effective load-bearing capacity of single lifting mechanism: the distance is more than or equal to 3T, the control is realized by using a network port or a 485 bus, and the functional control of shaft movement, positioning and the like can be realized by sending instructions through a computer; lifting range of the lifting mechanism: 7.5mm, resolution: 2.7 μm, maximum movement speed: 0.027mm/s, when the synchronous operation of three motors that theta X and theta Y axle were adjusted, can satisfy Z axle raising and lowering functions, three strong point moving range can satisfy and rise 0 ~ 15mm from the platform mesa. The swinging mechanism swings back and forth at an angle when a sample to be measured on the first side needs to be horizontally fine-adjusted, three points on the circumference of a rotary table top R950mm are uniformly distributed for adjusting and pushing, a 110 stepping motor and a corresponding speed reducing mechanism are used for driving to rotate a second worm gear mechanism with a transmission ratio of 1:90, so that the pushing and lifting screw 1204 stably pushes and lifts, and high resolution and positioning accuracy can be achieved. The theta X axis and the theta Y axis adopt M40 multiplied by 5 lifting T-shaped lead screws, the speed reducing mechanism adopts 1 to 90 worm gears, the motor step angle is 1.8 degrees (the motor rotates for one circle for 200 steps), and the speed is reduced by 1: 10. The speed is reduced by 1: 10.
The distance between the lifting point and the fixed point is 1425mm, and the required lifting unilateral distance is converted into: sin0.15 ° × 1425mm — 3.73mm, resolution 1 "distance-in-liters is converted to: sin0.0003 ° (1 ") × 1425mm ═ 7.5 μm. The actual operation full-step resolution of 0.03 mu m is far better than the required resolution of 7.5 mu m, and the rated load of a single plane bearing is supported by 10.5 KN. The single boost mechanism carries the required torque:
and (3) carrying out finite element analysis on three-point push-up positions of the axis theta x and the axis theta Y, wherein the variable is approximately equal to 0.014mm under the condition of bearing 5T, the deformation quantity meeting the index requirement is less than or equal to 0.06mm, and the integral stability and the smaller deformation quantity are used under the heavy load condition. When a sample to be measured on the first side needs to be lifted and finely adjusted, three points on the circumference of the existing rotary table top R950mm are uniformly distributed to adjust synchronous motion to push and lift, and a worm gear mechanism with the transmission ratio of 1:90 is driven to rotate by adopting a 110 stepping motor and a corresponding speed reducing mechanism, so that a lead screw is stably pushed and lifted to move, and high resolution and positioning precision can be achieved. The Z axis is an M40 multiplied by 5 lifting T-shaped screw rod, the speed reducing mechanism is a worm gear and worm with the ratio of 1 to 90, the motor step angle is 1.8 (the motor rotates for one circle for 200 steps), and the speed is reduced by matching 1: 10.
Whole running gear is including installing in the steel support bracket 13 of base 1 both sides, through removing with pushing away the tank 15 for the removal that is located steel support bracket 13 bottom of the vertical installation of lift lead screw 14, whole running gear is used for the device moving as a whole, and base 1 and one-dimensional translation platform are combined into an organic whole, and when whole needs remove, 3 remove with tank 15 are put into to steel support bracket 13 bottom, adjust and remove with pushing away lift lead screw 14, make base 1 platform unsettled. After the platform moves in place, the pushing and lifting screw rod 14 for moving ascends, the tank 15 for moving is withdrawn, 3M 30 horizontal adjustable screws are adjusted, then 2M 30 screw auxiliary supporting points are adjusted, and finally, after the base is adjusted to be horizontal and the ground is suspended, the base and the ground are all filled and supported by epoxy resin materials, so that the whole base is ensured to be in large-area contact with the ground, the temperature difference variable and the deformation generated by gravity center movement are reduced, and the platform can be stably moved to any position;
the first high-precision ball screw pair transmission mechanism, the second high-precision ball screw pair transmission mechanism, the first high-precision worm gear mechanism, the second high-precision worm gear mechanism and the tank 15 are controlled by a network port or a 485 bus and are instructed by a computer to realize the functional control of shaft movement, positioning and feedback.
Wherein, base 1 adopts the granite marble, for reducing weight at marble base both sides fretwork 800X 250mm, guide rail mounted position adds the support bar and increases whole support intensity, and upper surface mounting has four first rings 201, and the marble is as the main part, and the deflection that 2 ℃ produced calculates according to bottom plate maximum length 3000mm, and delta is thermal expansion coefficient X length X temperature variation 4.6X 10-6X 3000X 2 ℃ ═ 0.028 mm.
The X-axis translation guide rail 2 adopts a high-precision THK-55 square guide rail, the high-bearing slide blocks adopt a single slide block matched with the X-axis translation guide rail 2 and basically rated load of 88.5KN, and the high-bearing slide blocks jointly achieve the bearing load of 7T.
The first high-precision ball screw pair transmission mechanism comprises an X-axis ball screw 3, an X-axis motor 301 and a ball nut connecting structure, wherein the X-axis ball screw 3 is arranged in a first channel 302 in the middle position of the upper surface of the base 1 and is parallel to an X-axis translation guide rail 2, the X-axis motor 301 is arranged at one end of the X-axis ball screw 3 and is used for driving, the ball nut connecting structure is arranged at the bottom of a middle-layer high-strength table top 4 and is connected with the X-axis ball screw 3 in a driving mode, the adjusting precision of the first high-precision ball screw pair transmission mechanism reaches 0.03mm, the transmission is realized by the high-precision ball screw pair transmission mechanism, the deformation resistance and the shock resistance are realized, the limit rotating speed and the bearing capacity are good; the screw M50X 10 lead is driven to rotate by a 1: 5 speed reducing mechanism matched with a 130 servo motor, the outer surface of the screw has extremely high hardness and strength, and the core has extremely good toughness, so that the screw pair has good fatigue resistance, deformation resistance and shock resistance, and simultaneously has good limit rotation speed and bearing capacity, the table top can stably move on the guide rail, and the conversion is carried out according to 2500 pulse signals, thereby achieving the purpose of achieving the aim of
An absolute inlet linear grating (resolution is 1 mu m) is arranged inside the base, and better feedback can be realizedAnd more accurate resolution precision is achieved. And 4 slide block position finite element analysis, under the state of bearing 7T, the variable is approximately equal to 0.04mm, the deformation quantity meeting the index requirement is less than or equal to 0.06mm, and the integral stability and the smaller deformation quantity are used under the heavy load condition.
The middle-layer high-strength table top 4 is made of high-strength aviation aluminum alloy materials, a hollow area 403 is formed in the middle of the middle-layer high-strength table top, supporting ribs 404 are reserved in the middle of the middle-layer high-strength table top, the mounting positions of the Y axial translation guide rails 5 are additionally provided with the supporting ribs to increase the overall supporting strength, the Y axial translation guide rails 5 are two high-precision THK-55 square guide rails, and each guide rail is provided with two high-bearing slide blocks (a single slide block basically has a rated load of 88.5 KN). The table top (shared with the rotating main body) is made of aluminum alloy materials, the transmission is carried out by taking a high-precision ball screw pair as a transmission mechanism, and the table top has deformation resistance, shock resistance, good limit rotating speed and bearing capacity. The specific anti-deformation capability is verified by finite element analysis. The screw rod M50 multiplied by 10 lead is driven to rotate by adopting a 1: 5 speed reducing mechanism matched with a 130 servo motor, so that the table top moves smoothly on the guide rail and is converted according to 2500 pulse signals, and the aim of rotating the screw rod M50 multiplied by 10 lead can be achieved
An absolute type inlet linear grating (resolution ratio is 1 mu m) is arranged in the base, so that better and more accurate resolution precision can be fed back. Finite element analysis is carried out on the Y-axis translation table top, a variable is approximately equal to 0.03mm under the state of bearing 6T, the deformation amount meeting the index requirement is less than or equal to 0.06mm, the whole stability and the smaller deformation amount are used under the heavy load condition, and a second hanging ring 401 is installed on the outer side of the middle-layer high-strength table top 4.
The second high-precision ball screw pair transmission mechanism comprises a Y-axis ball screw 6, a Y-axis motor 601 and a ball nut connecting structure, wherein the Y-axis ball screw 6 is arranged in a second channel 402 in the middle position of the upper surface of the middle-layer high-strength table top 4 and is parallel to the Y-axis translation guide rail 5, the Y-axis motor 601 is arranged at one end of the Y-axis ball screw 6 and is used for driving, the ball nut connecting structure is arranged at the bottom of the Y-axis translation table 7 and is connected with the Y-axis ball screw 6 in a driving mode, and the adjusting precision of the second high-precision ball screw pair.
The first high-precision worm and gear mechanism comprises a theta-Z-axis motor 16 mounted on the upper portion of the Y-axis translation table 7 and a circular turbine disc 1101 arranged at the bottom of a turntable table 11, and a first worm structure 1601 in transmission fit with the circular turbine disc 1101 in a scroll worm mode is mounted at an output shaft end of the theta-Z-axis motor 16.
The second high-precision worm and gear mechanism comprises three worm and gear mounting grooves 12 which are arranged on the upper surface of the turntable table 11 in a surrounding manner, a worm gear 1203 mounted in the worm and gear mounting grooves 12, an angle adjusting motor 1201 mounted on the peripheral side part of the turntable table 11, and a pushing and lifting screw 1204 which is mounted in the worm gear 1203 and used for lifting the heavy sample 17 to be tested, wherein a second worm and gear structure 1205 in transmission fit with the worm and gear is mounted at the output shaft end of the angle adjusting motor 1201.
The X-axis absolute type inlet linear grating 101 which is arranged in parallel with the X-axis translation guide rail 2 and used for measuring X-axis translation data is arranged on the base 1; a Y-axis absolute type inlet linear grating 501 which is arranged in parallel with the Y-axis translation guide rail 5 and used for measuring Y-axis translation data is arranged on the middle-layer high-strength table top 4; an inlet type absolute circular grating 702 for measuring rotation angle data is arranged on the Y-axis translation table 7, and the X-axis absolute type inlet linear grating 101, the Y-axis absolute type inlet linear grating 501 and the inlet type absolute circular grating 702 all adopt Heidenhain gratings with the resolution of 1 mu m.
The utility model discloses a five dimension motion adjusting device's of high bearing capacity's super high accuracy system component:
the five-dimensional adjusting frame consists of 2 translation shafts (a front X shaft, a rear X shaft, a left Y shaft and a right Y shaft) and 3 rotating shafts which respectively rotate around the X, the Y and the Z. The 2 translation shafts are respectively driven by 130 servo motors with 2 moments of 10NM and matched with a speed reducing mechanism, an inlet linear absolute grating ruler is configured, the resolution is 1 mu m, and the displacement measurement precision is ensured. 1 rotating shaft is driven by a 130-step motor of 1 50NM matched with a speed reducing mechanism, and is provided with an inlet 360-degree circular grating with the resolution of 1' to ensure the rotating measurement precision. The 2 angular swings are respectively driven by a 3-stage 30NM 110 stepping motor matched with a speed reducing mechanism.
The X axis (front and rear axis) is used for adjusting the stroke +/-750 mm, and the maximum speed is 25 mm/s; y axis (left and right axis), adjusting stroke +/-50 mm, and maximum speed 25 mm/s; horizontal rotation (theta Z axis), 360 degrees of adjustment range and 1 degree/s of maximum speed. The optical five-axis adjusting frame control system consists of a cabinet, a 10-inch touch screen, a panel power switch button, 5 control cards, 5 switching power supplies and 5 stepping drivers. The left side of the machine cabinet is provided with an aviation socket, a power socket and a network cable socket, wherein the aviation socket and the power socket are used for connecting the five-axis adjusting frame, and the network cable socket is used for connecting a computer.
Compared with the prior art, the method has the advantages that:
1. the utility model discloses filled large-scale load mechanism ultrahigh accuracy motion adjusting device's blank, compared in the five dimension motion adjusting device of um magnitude high accuracy on the present market, the load capacity of this device wins far away.
2. The utility model discloses compare in the five dimension of present prior art and bear the telecontrol equipment greatly, the fine setting precision reaches the um magnitude, wins far away in the motion adjustment precision, can be competent in the bearing and fine setting work of large-scale device precision measurement.
The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.
Claims (9)
1. An ultrahigh-precision five-dimensional motion adjusting device with high bearing capacity is characterized by comprising a front-back translation mechanism based on an X direction, a left-right translation mechanism based on a Y direction, a rotating mechanism based on a theta Z direction, a swinging mechanism based on the theta X direction or the theta Y direction, a lifting mechanism based on the Z direction and an integral walking mechanism;
the front and back translation mechanism comprises a base (1), two X-axis translation guide rails (2) which are arranged on the upper surface of the base and are additionally provided with support ribs, a middle-layer high-strength table top (4) which is arranged on the X-axis translation guide rails (2) in a sliding fit mode through a plurality of high-bearing slide blocks arranged at the bottom, and a first high-precision ball screw pair as a transmission mechanism which is arranged in a first channel (302) at the upper part of the base (1) and is parallel to the X-axis translation guide rails (2) and is used for transmitting the middle-layer high-strength table top (4) to perform X-axis axial; the front and back translation mechanism is used for carrying out high-precision X-axis translation on the middle-layer high-strength table top (4);
the left-right translation mechanism comprises two Y-axis translation guide rails (5) which are arranged on the upper surface of the middle-layer high-strength table top (4) and are provided with support ribs along the Y axis direction, a Y-axis translation table (7) which is provided with a plurality of high-bearing slide blocks at the bottom and is in sliding fit with the Y-axis translation guide rails (5) and internally provided with hollowed holes (701), and a second high-precision ball screw pair serving as a transmission mechanism which is arranged in a second channel (402) on the upper part of the middle-layer high-strength table top (4) and is arranged in parallel with the Y-axis translation guide rails (5) and is used for transmitting the Y-axis translation table (7) to perform Y-axis translation, and the left-right translation mechanism is used for performing high-precision Y-;
the rotating mechanism comprises a plurality of high-precision arc guide rails (8) arranged on the upper surface of a Y-axis translation table (7), a turntable table top (11) which is in sliding fit with the high-precision arc guide rails (8) through a plurality of high-bearing slide blocks arranged at the bottom, and a first high-precision worm gear mechanism which is arranged at the bottoms of the Y-axis translation table (7) and the turntable table top (11) and drives the turntable table top (11), and is used for performing high-precision rotation adjustment on the turntable table top (11) bearing a heavy sample to be measured (17);
the swing mechanism and the lifting mechanism are both realized by three second high-precision worm and gear mechanisms which are uniformly distributed at three points and arranged on a turntable table surface (11), and one or two second worm and gear mechanisms are used for adjusting the theta X axis and the theta Y axis with high precision on a heavy tested sample (17) which is arranged on the turntable table surface (11) through a sample base support (1701) to form the swing mechanism; three second worm and gear mechanisms synchronously and stably push up to realize Z-direction lifting to form a lifting mechanism, and the swinging mechanism is used for carrying out high-precision angle adjustment on the theta X axis and the theta Y axis of the heavy sample (17) to be measured; the lifting mechanism is used for carrying out Z-direction lifting with high precision on a heavy sample (17) to be measured;
the integral travelling mechanism comprises steel support brackets (13) arranged on two sides of the base (1) and a moving tank (15) which is vertically arranged through a moving pushing screw rod (14) and is positioned at the bottom of the steel support brackets (13), and the integral travelling mechanism is used for moving the device integrally;
and the first high-precision ball screw pair transmission mechanism, the second high-precision ball screw pair transmission mechanism, the first high-precision worm gear mechanism, the second high-precision worm gear mechanism and the tank (15) are controlled by a network port or a 485 bus and are sent by a computer to realize the functional control of shaft movement, positioning and feedback.
2. The ultra-high precision five-dimensional motion adjusting device with high bearing capacity is characterized in that the base (1) is made of granite marble, the two sides of the bottom of the base are hollowed out, and a plurality of first hanging rings (201) are installed on the upper surface of the base.
3. The ultra-high precision five-dimensional motion adjusting device with high bearing capacity is characterized in that the X-axis translation guide rail (2) adopts a high-precision THK-55 square guide rail, the high-bearing slide block adopts a slide block with a basic rated load of 88.5KN of a single slide block matched with the X-axis translation guide rail (2), and the high-bearing slide blocks jointly achieve the bearing load of 7T.
4. The ultra-high precision five-dimensional motion adjusting device with high bearing capacity is characterized in that the first high precision ball screw pair transmission mechanism comprises an X-axis ball screw (3) which is arranged in a first groove channel (302) in the middle position of the upper surface of the base (1) and is parallel to the X-axis translation guide rail (2), an X-axis motor (301) which is arranged at one end of the X-axis ball screw (3) for driving, and a ball nut connecting structure which is arranged at the bottom of the middle-layer high-strength table top (4) and is connected with the X-axis ball screw (3) in a driving mode, and the adjusting precision of the first high precision ball screw pair transmission mechanism reaches 0.03 mm.
5. The five-dimensional motion adjusting device with the high bearing capacity and the ultrahigh precision is characterized in that the middle-layer high-strength table top (4) is made of high-strength aviation aluminum alloy materials, a hollow area (403) is formed in the middle-layer high-strength table top, supporting ribs (404) are reserved in the middle-layer high-strength table top, and a second hanging ring (401) is installed on the outer side of the middle-layer high-strength table top.
6. The ultra-high precision five-dimensional motion adjusting device with high bearing capacity is characterized in that the second high-precision ball screw pair transmission mechanism comprises a Y-axis ball screw (6) which is arranged in a second groove (402) in the middle position of the upper surface of the middle-layer high-strength table top (4) and is parallel to the Y-axis translation guide rail (5), a Y-axis motor (601) which is arranged at one end of the Y-axis ball screw (6) for driving, and a ball nut connecting structure which is arranged at the bottom of the Y-axis translation table (7) and is connected with the Y-axis ball screw (6) in a driving mode, and the adjusting precision of the second high-precision ball screw pair transmission mechanism reaches 0.04 mm.
7. The ultra-high precision five-dimensional motion adjusting device with high bearing capacity is characterized in that the first high precision worm and gear mechanism comprises a theta-Z shaft motor (16) mounted on the upper part of a Y-axis translation table (7) and a circular turbine disc (1101) arranged at the bottom of a turntable table top (11), and the output shaft end of the theta-Z shaft motor (16) is provided with a first worm structure (1601) in transmission fit with the circular turbine disc (1101) in a scroll worm mode.
8. The ultra-high precision five-dimensional motion adjusting device with high bearing capacity is characterized in that the second high precision worm gear mechanism comprises three points surrounding three worm gear installation grooves (12) arranged on the upper surface of the turntable table top (11), a worm gear (1203) arranged in the worm gear installation grooves (12), an angle adjusting motor (1201) arranged on the peripheral side part of the turntable table top (11), and a pushing and lifting screw rod (1204) arranged in the worm gear (1203) and used for lifting a heavy tested sample (17), wherein a second worm gear structure (1205) in transmission fit with the worm gear in a worm gear manner is arranged at the output shaft end of the angle adjusting motor (1201).
9. The ultra-high precision five-dimensional motion adjusting device with high bearing capacity according to claim 1, characterized in that the base (1) is provided with an X-axis absolute type inlet linear grating (101) which is arranged in parallel with the X-axis translation guide rail (2) and is used for measuring X-axis translation data; a Y-axis absolute type inlet linear grating (501) which is arranged in parallel with the Y-axis translation guide rail (5) and used for measuring Y-axis translation data is arranged on the middle-layer high-strength table top (4); and an inlet type absolute circular grating (702) for measuring rotation angle data is arranged on the Y-axis translation table (7), and the X-axis absolute type inlet linear grating (101), the Y-axis absolute type inlet linear grating (501) and the inlet type absolute circular grating (702) all adopt Heidenhain gratings with the resolution of 1 mu m.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111421497A (en) * | 2020-04-26 | 2020-07-17 | 上海联谊光纤激光器械有限公司 | Ultrahigh-precision five-dimensional movement adjusting device with high bearing capacity |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111421497A (en) * | 2020-04-26 | 2020-07-17 | 上海联谊光纤激光器械有限公司 | Ultrahigh-precision five-dimensional movement adjusting device with high bearing capacity |
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