CN212451629U - Device for improving coating heating uniformity - Google Patents
Device for improving coating heating uniformity Download PDFInfo
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- CN212451629U CN212451629U CN202020849140.7U CN202020849140U CN212451629U CN 212451629 U CN212451629 U CN 212451629U CN 202020849140 U CN202020849140 U CN 202020849140U CN 212451629 U CN212451629 U CN 212451629U
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Abstract
The utility model relates to the technical field of vapor deposition equipment, in particular to a device for improving the heating uniformity of a coating, which solves the defects of poor deposition effect and low production efficiency in the prior art, and comprises a casing and a fixed plate, wherein the casing is of a cavity structure, a bearing plate is arranged inside the casing in a sliding way, a positioning groove and a through hole which are communicated with each other are sequentially arranged inside the bearing plate, an air cylinder is fixedly arranged at the bottom of the fixed plate through a bolt, a piston rod is arranged inside the air cylinder, the other end of the piston rod is fixedly connected with a heating plate through a nut bolt, the movement of the bearing plate is controlled by an automatic machine through the arrangement of the structures such as the bearing plate, the positioning groove and the through hole, a workpiece is correspondingly placed in the positioning groove, the workpiece can be ensured to be positioned, the workpiece can be uniformly heated, thereby improving the deposition effect.
Description
Technical Field
The utility model relates to a vapor deposition equipment technical field especially relates to an improve device of coating heating degree of consistency.
Background
Chemical vapor deposition is a chemical technology, which is a method for generating a thin film by chemical reaction on the surface of a substrate mainly by using one or more gas-phase compounds or simple substances containing thin film elements, the chemical vapor deposition is a new technology for preparing inorganic materials developed in recent decades, and the chemical vapor deposition method is widely used for purifying substances, developing new crystals, and depositing various single-crystal, polycrystalline or glassy inorganic thin film materials, which can be oxides, sulfides, nitrides and carbides, and can also be binary or multi-element intermetallic compounds in III-V, II-IV and IV-VI groups, and the physical functions of the materials can be accurately controlled by a gas-phase doping deposition process.
The prior traditional chemical vapor deposition equipment has the following defects when in use: firstly, the workpiece is not accurately taken and placed, so that the workpiece cannot be uniformly heated, and the deposition effect is influenced; secondly, only a single workpiece can be deposited at one time, and the production efficiency is low.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects of poor deposition effect and low production efficiency in the prior art and providing a device for improving the heating uniformity of a coating.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides an improve device of coating heating degree of consistency, includes casing and fixed plate, the casing is the cavity structure, the inside of casing slides and is provided with the loading board, constant head tank and through-hole that are linked together are seted up in proper order to the inside of loading board, there is the cylinder bottom of fixed plate through bolt fixed mounting, and the inside of cylinder is provided with the piston rod, the other end of piston rod passes through nut bolt fixedly connected with heating plate, and the top fixed mounting of heating plate has the heating unit that is the annular and distributes, and has the connecting rod in the outside of piston rod through the screw fixation, and the other end activity of connecting rod articulates there is the connecting rod, the other end of connecting rod through the round.
Preferably, the top of the casing is fixedly connected with an air inlet pipe, and the end part of the air inlet pipe is provided with a spray head through a screw.
Preferably, the top of fixed plate is fixed with the supporting seat of symmetrical arrangement through countersunk head bolt, and the inside slip of supporting seat is provided with the telescopic link, the other end of telescopic link pass through the screw with the bottom fixed connection of heating plate.
Preferably, the supporting seat is internally provided with a telescopic groove, and the telescopic rod is connected with the inside of the telescopic groove in a sliding manner.
Preferably, a square hole is formed in the casing, and the bearing plate is embedded in the square hole.
Preferably, the spray head is located directly above the heating unit.
The utility model has the advantages that:
1. the utility model discloses in through the setting of loading board, constant head tank and through-hole isotructure, the removal of loading board is by automatic machine control, and the work piece is placed in the constant head tank correspondingly, can both ensure that the work piece is located appointed deposit station when heating the deposit at every turn, and it is higher to place the precision, and the work piece can receive even heating to deposition effect has been promoted.
2. The utility model discloses in through the setting of cylinder, connecting rod, shower nozzle and loading board isotructure, under the effect of cylinder, can make corresponding heating unit rise to the heating station on the one hand, on the other hand can deliver to the deposit station with a plurality of work pieces in step, can once only carry out deposition to a plurality of work pieces, production efficiency is showing and is improving.
Drawings
FIG. 1 is a front view of an apparatus for improving the uniformity of heating a coating in accordance with the present invention;
fig. 2 is a top view of the device for improving the heating uniformity of the coating according to the present invention with the top cover removed.
In the figure: 1 casing, 2 intake pipes, 3 shower nozzles, 4 fixed plates, 5 cylinders, 6 piston rods, 7 supporting seats, 8 telescopic links, 9 heating plates, 10 heating units, 11 connecting rods, 12 connecting rods, 13 bearing plates, 14 locating grooves and 15 through holes.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-2, a device for improving the heating uniformity of a coating, comprising a housing 1 and a fixing plate 4, wherein the housing 1 is of a cavity structure, a bearing plate 13 is slidably arranged inside the housing 1, a positioning groove 14 and a through hole 15 which are communicated with each other are sequentially arranged inside the bearing plate 13, an air cylinder 5 is fixedly arranged at the bottom of the fixing plate 4 through a bolt, a piston rod 6 is arranged inside the air cylinder 5, a heating plate 9 is fixedly connected with the other end of the piston rod 6 through a nut and bolt, a heating unit 10 which is distributed annularly is fixedly arranged at the top of the heating plate 9, a connecting rod 11 is fixedly arranged at the outer side of the piston rod 6 through a screw, a connecting rod 12 is movably hinged at the other end of the connecting rod 11, the other end of the connecting rod 12 is rotatably connected with one side of the bottom of the bearing plate 13 through a, the workpieces are correspondingly placed in the positioning grooves 14, the workpieces can be ensured to be positioned at a designated deposition station during heating deposition each time, the placement accuracy is high, the workpieces can be uniformly heated, so that the deposition effect is improved, through the arrangement of the structures such as the air cylinder 5, the connecting rod 11, the connecting rod 12, the spray head 3, the bearing plate 13 and the like, under the action of the air cylinder 5, on one hand, the corresponding heating unit 10 can be lifted to the heating station, on the other hand, a plurality of workpieces can be synchronously conveyed to the deposition station, the deposition treatment can be carried out on the plurality of workpieces at one time, the production efficiency is obviously improved, the top of the casing 1 is fixedly connected with the air inlet pipe 2, the end part of the air inlet pipe 2 is provided with the spray head 3 through screws, the top of the fixed plate 4 is fixed with the symmetrically arranged supporting seats 7 through countersunk bolts, the telescopic rods 8 are slidably arranged inside the supporting, telescopic groove has been seted up to the inside of supporting seat 7, telescopic link 8 and telescopic groove's inside sliding connection, has seted up the square hole on the casing 1, and loading board 13 imbeds in the inside in square hole, and shower nozzle 3 is located heating unit 10 directly over.
In this embodiment, referring to fig. 1, firstly, a person places a workpiece to be deposited inside a positioning groove 14, the positioning groove 14 is designed according to the shape and size of the workpiece to position the workpiece, then the cylinder 5 and the heating unit 10 are started to work simultaneously, the piston rod 6 inside the cylinder 5 is jacked up upwards to push the heating plate 9 to move upwards, the heating unit 10 is brought to a designated heating station, the piston rod 6 drives the connecting rod 11 outside to move upwards, the length of the connecting rod 12 in the X-axis direction is changed by pushing the connecting rod 12 to rotate, the bearing plate 13 is pushed and squeezed, the bearing plate 13 drives the workpiece to enter the casing 1, when the cylinder 5 stops working, the workpiece is just above the heating unit 10 and is located right below the corresponding nozzle 3, at this time, the heating unit 10 starts to uniformly heat the workpiece, the through holes 15 can enhance the heating effect, and after heating is finished, gas is pumped in through the gas inlet pipe 2 and deposited on the surface layer of the workpiece through the spray head 3;
it should be noted that, the bottom of the casing 1 is provided with a groove, which provides an upward moving space for the connecting rod 11, the connecting rod 11 will not collide with the casing 1, after the deposition treatment is completed, the cylinder 5 moves the piston rod 6 downward to reset, drives the bearing plate 13 to slide reversely to reset, and then the worker can take down the workpiece after the deposition treatment.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (6)
1. A device for improving the heating uniformity of a coating comprises a machine shell (1) and a fixed plate (4), it is characterized in that the casing (1) is a cavity structure, a bearing plate (13) is arranged inside the casing (1) in a sliding manner, the interior of the bearing plate (13) is sequentially provided with a positioning groove (14) and a through hole (15) which are communicated with each other, the bottom of the fixed plate (4) is fixedly provided with a cylinder (5) through a bolt, a piston rod (6) is arranged inside the cylinder (5), the other end of the piston rod (6) is fixedly connected with a heating plate (9) through a nut bolt, the top of the heating plate (9) is fixedly provided with heating units (10) which are distributed annularly, a connecting rod (11) is fixed on the outer side of the piston rod (6) through a screw, the other end of the connecting rod (11) is movably hinged with a connecting rod (12), the other end of the connecting rod (12) is rotatably connected with one side of the bottom of the bearing plate (13) through a pin shaft.
2. The device for improving the heating uniformity of the coating according to claim 1, wherein the top of the casing (1) is fixedly connected with an air inlet pipe (2), and the end of the air inlet pipe (2) is provided with the spray head (3) through a screw.
3. The device for improving the heating uniformity of the coating according to claim 1, wherein the top of the fixing plate (4) is fixed with symmetrically arranged supporting seats (7) through countersunk bolts, the inside of the supporting seat (7) is slidably provided with a telescopic rod (8), and the other end of the telescopic rod (8) is fixedly connected with the bottom of the heating plate (9) through screws.
4. A device for improving the heating uniformity of a coating according to claim 3, wherein the supporting base (7) is provided with a telescopic slot inside, and the telescopic rod (8) is slidably connected with the inside of the telescopic slot.
5. The apparatus for improving heating uniformity of coating according to claim 1, wherein said housing (1) is formed with a square hole, and said supporting plate (13) is embedded inside said square hole.
6. An arrangement for improving the heating uniformity of a coating according to claim 2, characterized in that said nozzle (3) is located directly above the heating unit (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020849140.7U CN212451629U (en) | 2020-05-20 | 2020-05-20 | Device for improving coating heating uniformity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020849140.7U CN212451629U (en) | 2020-05-20 | 2020-05-20 | Device for improving coating heating uniformity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212451629U true CN212451629U (en) | 2021-02-02 |
Family
ID=74481653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020849140.7U Active CN212451629U (en) | 2020-05-20 | 2020-05-20 | Device for improving coating heating uniformity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212451629U (en) |
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2020
- 2020-05-20 CN CN202020849140.7U patent/CN212451629U/en active Active
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