CN212451626U - Steady flow ALD heating furnace - Google Patents
Steady flow ALD heating furnace Download PDFInfo
- Publication number
- CN212451626U CN212451626U CN202020392304.8U CN202020392304U CN212451626U CN 212451626 U CN212451626 U CN 212451626U CN 202020392304 U CN202020392304 U CN 202020392304U CN 212451626 U CN212451626 U CN 212451626U
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- China
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- water conservancy
- conservancy diversion
- flow
- exhaust pipe
- furnace
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Abstract
The utility model discloses a stationary flow ALD heating furnace, including the tube-shape cavity, the both ends of tube-shape cavity are provided with the furnace gate, and its inside water conservancy diversion chamber that is provided with, the outer wall in water conservancy diversion chamber are provided with heating element and heat water conservancy diversion intracavity portion, and the bottom in water conservancy diversion chamber sets up the support component and supports the water conservancy diversion chamber, and the water conservancy diversion intracavity is provided with the boat body and is used for placing the silicon chip, the toper inner cover that bore reduces gradually is connected to the trailing end of the boat body, and first exhaust pipe is connected to toper inner cover, and first exhaust pipe passes the furnace gate of tail end, sets up one between toper inner cover and the boat body tip and flow equalizer, and the. The flow equalizing plate effectively ensures that gas can stably and uniformly flow out during vacuumizing, the turbulent flow is not easy to occur, and the uniformity of the thickness of a coated film is ensured.
Description
Technical Field
The utility model relates to an atomic deposition technical field, concretely relates to stationary flow ALD heating furnace.
Background
In ALD atomic deposition equipment, the chemical reaction that takes place that corresponding reaction gas can be abundant carries out the coating film, and the problem of guaranteeing the even thickness of coating film layer is more important, and current ALD heating furnace directly takes out at the furnace body afterbody and extracts gas, can cause the turbulent flow in the cavity is inside, and then can influence the thickness of coating film, influences final product quality.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to solve the not enough of above-mentioned prior art, provide a reducible turbulent ALD heating furnace.
In order to solve the technical problem, the utility model discloses a technical scheme be: the utility model provides a stationary flow ALD heating furnace, includes the tube-shape cavity, and the both ends of tube-shape cavity are provided with the furnace gate, and its inside water conservancy diversion chamber that is provided with, and the outer wall in water conservancy diversion chamber is provided with heating element and heats water conservancy diversion intracavity portion, and the bottom in water conservancy diversion chamber sets up the supporting component and supports the water conservancy diversion chamber, is provided with the boat body in the water conservancy diversion chamber and is used for placing the silicon chip, the toper inner cover that a tail end connection bore of the boat body reduces gradually, first exhaust pipe is connected to the toper inner cover, and first exhaust pipe passes the furnace gate of tail end, sets up one between toper inner cover and the boat body tip and.
Furthermore, the tail end of the diversion cavity is connected with a conical outer cover with the caliber gradually reduced, the conical outer cover is connected with a second exhaust pipe, the second exhaust pipe penetrates through a furnace door at the tail end, the first exhaust pipe is located on the inner side of the second exhaust pipe, and the conical inner cover is located on the inner side of the conical outer cover.
Further, gaps are arranged between the top and the side walls of the boat body and between the side walls and the inner wall of the flow guide cavity to form an airflow channel.
Furthermore, an adjusting nut is arranged below the front end of the flow guide cavity and used for adjusting the upper position and the lower position of the front end of the flow guide cavity.
Furthermore, adjusting nuts are also arranged on two sides of the front end of the flow guide cavity and used for adjusting the left and right positions of the front end of the flow guide cavity.
Furthermore, the guide plate is perpendicular to the axis of the boat body.
According to the above technical scheme, the utility model has the advantages of it is following: the flow equalizing plate effectively ensures that gas can stably and uniformly flow out during vacuum pumping, the turbulent flow is not easy to occur, and the uniformity of the thickness of a coated film is ensured; in addition, the inside and the outside of the boat body form an air flow channel, when the same negative pressure is extracted, the pressure in the boat body is larger than the pressure between the boat and the flow guide cavity, so that the pressure in the boat is diffused to the gap between the boat and the flow guide cavity, dust particles formed in the gap between the boat body and the flow guide cavity cannot be diffused to the space in the boat, but are extracted through the tail part of the double-layer conical cover body most directly, and the pollution to the battery piece is reduced.
Drawings
Fig. 1 is a cross-sectional view of the present invention;
fig. 2 is a middle elevation view of the present invention.
Detailed Description
The following description will specifically explain embodiments of the present invention with reference to the accompanying drawings.
As shown in fig. 1 and 2, utility model's stationary flow ALD heating furnace itself includes tube-shape cavity 42, and tube-shape cavity 42's both ends are provided with the furnace gate, and its inside water conservancy diversion chamber 33 that is provided with, water conservancy diversion chamber 33's outer wall are provided with heating element 31 and heat water conservancy diversion intracavity portion, and water conservancy diversion chamber's bottom sets up supporting component 41 and supports water conservancy diversion chamber, and water conservancy diversion intracavity is provided with the boat body 32 and is used for placing the silicon chip, the toper inner cover 35 that a tail end of the tail end connection bore of the boat body 32 reduces gradually, first exhaust pipe 36 is connected to toper inner cover 35, and first exhaust pipe 36 passes the furnace gate 43 of tail end, sets up between toper inner cover 35 and the boat body tip one with flow equalizer 34, and flow equalizer. The flow equalizing plate effectively ensures that gas can stably and uniformly flow out during vacuumizing, the turbulent flow is not easy to occur, and the uniformity of the thickness of a coated film is ensured.
The tail end of the flow guide cavity is connected with a conical outer cover 36 with the caliber gradually reduced, the conical outer cover 36 is connected with a second exhaust pipe 38, the second exhaust pipe 38 penetrates through a furnace door at the tail end, the first exhaust pipe is located on the inner side of the second exhaust pipe, and the conical inner cover 35 is located on the inner side of the conical outer cover. A main exhaust pipe 39 is provided on the oven door 43, in which a first exhaust pipe and a second exhaust pipe are located.
Gaps are arranged between the top and the side walls of the boat body 32 and between the inner walls of the flow guide cavities to form airflow channels. And an adjusting nut 40 is arranged below the front end part of the flow guide cavity, and the adjusting nut 40 is used for adjusting the upper and lower positions of the front end of the flow guide cavity. Adjusting nuts are also arranged on two sides of the front end of the diversion cavity and used for adjusting the left and right positions of the front end of the diversion cavity. The guide plate is perpendicular to the axis of the boat body.
Claims (5)
1. The utility model provides a stationary flow ALD heating furnace, includes the tube-shape cavity, and the both ends of tube-shape cavity are provided with the furnace gate, and its inside water conservancy diversion chamber that is provided with, and the outer wall in water conservancy diversion chamber is provided with heating element and heats water conservancy diversion intracavity portion, and the bottom in water conservancy diversion chamber sets up the supporting component and supports the water conservancy diversion chamber, is provided with the boat body in the water conservancy diversion chamber and is used for placing silicon chip, its characterized in that: the tail end of the boat body is connected with a conical inner cover with the caliber gradually reduced, the conical inner cover is connected with a first exhaust pipe, the first exhaust pipe penetrates through a furnace door at the tail end, a flow equalizing plate is arranged between the conical inner cover and the end part of the boat body, and a matrix is arranged on the flow equalizing plate and provided with a plurality of air holes.
2. A flow-stabilized ALD furnace as set forth in claim 1, wherein: the tail end of the flow guide cavity is connected with a conical outer cover with the caliber gradually reduced, the conical outer cover is connected with a second exhaust pipe, the second exhaust pipe penetrates through a furnace door at the tail end, the first exhaust pipe is located on the inner side of the second exhaust pipe, and the conical inner cover is located on the inner side of the conical outer cover.
3. A flow-stabilized ALD furnace as set forth in claim 2, characterized in that: gaps are arranged between the top and the side walls of the boat body and between the inner walls of the flow guide cavities to form airflow channels.
4. A flow-stabilized ALD furnace as claimed in claim 1, 2 or 3, characterized in that: and an adjusting nut is arranged below the front end of the flow guide cavity and used for adjusting the upper and lower positions of the front end of the flow guide cavity.
5. A flow-stabilized ALD heater according to claim 4, characterized in that: adjusting nuts are also arranged on two sides of the front end of the diversion cavity and used for adjusting the left and right positions of the front end of the diversion cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020392304.8U CN212451626U (en) | 2020-03-24 | 2020-03-24 | Steady flow ALD heating furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020392304.8U CN212451626U (en) | 2020-03-24 | 2020-03-24 | Steady flow ALD heating furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212451626U true CN212451626U (en) | 2021-02-02 |
Family
ID=74467285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020392304.8U Expired - Fee Related CN212451626U (en) | 2020-03-24 | 2020-03-24 | Steady flow ALD heating furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212451626U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116516317A (en) * | 2023-04-12 | 2023-08-01 | 江苏微导纳米科技股份有限公司 | Carrier boat, treatment equipment and method for controlling pressure drop in carrier boat |
-
2020
- 2020-03-24 CN CN202020392304.8U patent/CN212451626U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116516317A (en) * | 2023-04-12 | 2023-08-01 | 江苏微导纳米科技股份有限公司 | Carrier boat, treatment equipment and method for controlling pressure drop in carrier boat |
| CN116516317B (en) * | 2023-04-12 | 2023-12-15 | 江苏微导纳米科技股份有限公司 | Carrier boat, treatment equipment and method for controlling pressure drop in carrier boat |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210202 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |