CN212392224U - Clamping jaw device - Google Patents
Clamping jaw device Download PDFInfo
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- CN212392224U CN212392224U CN202021264200.5U CN202021264200U CN212392224U CN 212392224 U CN212392224 U CN 212392224U CN 202021264200 U CN202021264200 U CN 202021264200U CN 212392224 U CN212392224 U CN 212392224U
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Abstract
The application discloses clamping jaw device includes: a support frame; clamping jaw assembly, detection device, the clamping jaw device that this application provided is getting after hanging the basket, because the effect of gravity can make clamping jaw assembly overcome the elasticity downstream of elastic component to trigger detection device, when clamping jaw device will hang the basket and put down, elastic component pulling clamping jaw assembly rises, and detection device resets, thereby can realize whether the purpose of hanging the basket is held to automated inspection clamping jaw device clamp.
Description
Technical Field
The utility model relates to a semiconductor manufacturing field, concretely relates to clamping jaw device.
Background
In the wet processing procedure technology of semiconductor, the slot type board can use the clamping jaw to snatch and hang the basket, and present clamping jaw structure has the risk that hangs the basket and drop after snatching and hang the basket, snatchs the security of hanging the basket in order to improve the clamping jaw, can grasp to hang the basket at the clamping jaw after and carry out the locking to the clamping jaw, but present clamping jaw structure can't automated inspection clamping jaw whether snatch and hang the basket, can't carry out the locking to the clamping jaw automatically.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned deficiencies or inadequacies in the prior art, it would be desirable to provide a jaw apparatus.
In a first aspect, the utility model discloses a clamping jaw device, include:
a support frame;
the clamping jaw assembly comprises a connecting frame, a first clamping jaw and a second clamping jaw, the first clamping jaw and the second clamping jaw are oppositely arranged on the connecting frame and are hinged with the connecting frame, an elastic piece is arranged between the connecting frame and the supporting frame, and the clamping jaw assembly is elastically connected with the supporting frame through the elastic piece;
the power device is fixedly arranged on the support frame, is movably connected with the first clamping jaw and the second clamping jaw respectively, and is at least used for driving the first clamping jaw and the second clamping jaw to be in a clamping state from an opening state;
the detection device is arranged between the support frame and the connecting frame and used for detecting whether the connecting frame resists the elastic force of the elastic piece to generate displacement in the vertical direction so as to determine whether the clamping jaw clamps the material.
Further, the support frame includes the first supporting layer of level setting, power device sets firmly on the first supporting layer, the link is located the below of first supporting layer, first clamping jaw, second clamping jaw all have stretch to power device's stress end and downwardly extending's material end of getting.
Furthermore, the support frame is also provided with a second support layer which is layered with the first support layer, and the second support layer is positioned below the first support layer;
the elastic part is a first pressure spring, the first pressure spring is arranged above the second supporting layer, and the connecting frame is arranged above the first pressure spring;
or the elastic piece is a first tension spring, and the first tension spring is arranged between the first supporting layer and the connecting frame.
Further, the detection device comprises a proximity switch, a microswitch or a travel switch;
the detection device is arranged between the connecting frame and the second supporting layer;
or, the detection device is arranged between the first support layer and the connecting frame.
Further, the clamping device comprises a locking device arranged on the supporting frame, and the locking device can lock the first clamping jaw and the second clamping jaw in a clamping state.
Furthermore, locking device sets up on the second supporting layer, including with first clamping jaw, the two locking units that the second clamping jaw one-to-one set up, locking unit is including setting up the first telescopic link of clamping jaw subassembly one side, the flexible direction of first telescopic link intersect in the activity direction of first clamping jaw or second clamping jaw.
Further, the connecting frame comprises a first layer hinged to the first clamping jaw and the second clamping jaw respectively;
and a second telescopic rod or a second pressure spring is arranged below the first layer, and the second telescopic rod or the second pressure spring is respectively connected with the first clamping jaw and the second clamping jaw and used for resetting the first clamping jaw and the second clamping jaw from a clamping state to an opening state.
Further, a second tension spring is arranged above the connecting frame, and the second tension spring is respectively connected with the first clamping jaw and the second clamping jaw and used for resetting the first clamping jaw and the second clamping jaw from a clamping state to an opening state.
Further, the connecting frame further comprises a second layer arranged below the first layer, the second telescopic rod or the second pressure spring is arranged between the first layer and the second layer, and the first pressure spring and the detection device are both arranged between the second layer and the second supporting layer.
Furthermore, the support frame still including set up the third supporting layer above the first supporting layer, the clamping jaw device passes through the third supporting layer is connected with extracting device.
Advantageous effects
The utility model discloses a clamping jaw device, include: a support frame; the clamping jaw assembly comprises a connecting frame, a first clamping jaw and a second clamping jaw, the first clamping jaw and the second clamping jaw are oppositely arranged on the connecting frame and are hinged with the connecting frame, an elastic piece is arranged between the connecting frame and the supporting frame, and the clamping jaw assembly is elastically connected with the supporting frame through the elastic piece; the power device is fixedly arranged on the support frame, is movably connected with the first clamping jaw and the second clamping jaw respectively, and is at least used for driving the first clamping jaw and the second clamping jaw to be in a clamping state from an opening state; detection device sets up the support frame with between the link, detection device is used for detecting whether the link is resisted the elasticity of elastic component produces the displacement in vertical direction, in order to confirm whether the centre gripping of clamping jaw has the material, the clamping jaw device that this application provided is pressing from both sides after getting and hang the basket, because the effect of gravity can make clamping jaw assembly overcome the elasticity of elastic component and move down to trigger detection device, when clamping jaw device will hang the basket and put down, elastic component pulling clamping jaw assembly rises, and detection device resets, thereby can realize whether the purpose that whether automated inspection clamping jaw device presss from both sides and has a string basket.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:
fig. 1 is a schematic front view of an embodiment of a clamping jaw apparatus of the present invention;
FIG. 2 is a schematic side view of FIG. 1;
FIG. 3 is a schematic structural view of the supporting frame;
figure 4 is a schematic view of the jaw assembly.
Detailed Description
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and are not limiting of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
In a first aspect, and with reference to fig. 1-4, the present invention discloses a clamping jaw apparatus comprising:
a support frame 10;
the clamping jaw assembly 20 comprises a connecting frame 23, a first clamping jaw 21 and a second clamping jaw 22, the first clamping jaw 21 and the second clamping jaw 22 are oppositely arranged on the connecting frame 23 and are hinged to the connecting frame 23, an elastic part 40 is arranged between the connecting frame 23 and the supporting frame 10, and the clamping jaw assembly 20 is elastically connected with the supporting frame 10 through the elastic part 40;
the power device 30 is fixedly arranged on the support frame 10, is movably connected with the first clamping jaw 21 and the second clamping jaw 22 respectively, and is at least used for driving the first clamping jaw 21 and the second clamping jaw 22 to be switched between an opening state and a clamping state;
the detection device 50 is arranged between the support frame 10 and the connecting frame 23, and the detection device 50 is used for detecting whether the connecting frame 23 is displaced in the vertical direction against the elastic force of the elastic piece 40 so as to determine whether the clamping jaw clamps the material.
Specifically, referring to fig. 1, which is a schematic structural diagram of a clamping jaw device, when the clamping jaw device needs to clamp a basket, the power device 30 is controlled to work, and power is applied to a first clamping jaw 21 and a second clamping jaw 22 through the power device 30, so that the first clamping jaw 21 and the second clamping jaw 22 move in opposite directions to perform a clamping action, the power device 30 is a bidirectional telescopic device, and is a bidirectional telescopic cylinder or a bidirectional telescopic hydraulic cylinder, after the power device 30 completes the clamping action, the material taking device lifts the clamping jaw device, when the clamping device clamps a material, the material pulls a clamping jaw assembly 20 to overcome the elastic force of an elastic member 40 to vertically displace downwards due to the action of gravity, so as to trigger a detection device 50 located between a support frame 10 and a connecting frame 23, and thus identify that the material is clamped by the clamping device at this time; specifically, the detection device 50 may be connected with the locking device 60 to lock the first clamping jaw 21 and the second clamping jaw 22, or the detection device 50 may control the power device 30 to be always in a force application state when the clamping device clamps the material, so that the first clamping jaw 21 and the second clamping jaw are in a clamping state, when the clamping device clamps the material to a placing place, the material taking device controls to place the material at a designated placing point, the weight is reduced, the elastic member 40 pulls the clamping jaw assembly 20 to leave the detection device 50, the detection device resets, so as to control the locking device 60 or the power device 30 to reset, the first clamping jaw 21 and the second clamping jaw 22 reset to an open state, and the resetting manner of the first clamping jaw 21 and the second clamping jaw 22 is described later.
Further, the support frame 10 includes the first supporting layer 11 that the level set up, power device 30 sets firmly on the first supporting layer 13, the link 23 is located the below of first supporting layer 11, first clamping jaw 21, second clamping jaw 22 all have stretch to power device 30 's stress end 210, 220 and downwardly extending's material fetching end 211, 221.
Further, the supporting frame 10 further has a second supporting layer 12 layered with the first supporting layer 11, the second supporting layer 12 is located below the first supporting layer 11, as an implementable manner, the elastic member 40 is a first pressure spring, the first pressure spring is disposed above the second supporting layer 12, and the connecting frame 23 is disposed above the first pressure spring; specifically, when first clamping jaw 21 and second clamping jaw 22 centre gripping have the material, because the effect of gravity can compress first pressure spring and vertical downstream to trigger detection device 50, after placing the material in appointed place, gravity disappears, the jacking of first pressure spring link 23 rises, and detection device 50 resets.
As another real-time mode, the elastic member 40 is a first tension spring, the first tension spring is disposed between the first support layer 11 and the connecting frame 23, and the specific working principle is the same as described above, which is not described in detail herein.
Further, the detection device 50 includes a proximity switch, a micro switch or a travel switch;
the detection means 50 are arranged between the connection frame 23 and the second supporting layer 12;
alternatively, the detecting device 50 is disposed between the first support layer 11 and the connecting frame 23.
Specifically, the detection device 50 may be any one of a proximity switch, a micro switch, or a travel switch, and as a real-time mode, the detection device 50 may be disposed between the connecting frame 23 and the second supporting layer 12, the detection device 50 may be fixed by disposing a mounting groove on the connecting frame 23 and the second supporting layer 12, when the clamping jaw device does not clamp the material, the connecting frame 23 has a certain gap with the second supporting layer 12, at this time, the detection device 50 is not pressed against the detection device 50, at this time, the detection device 50 may detect a state that the material is not clamped, when the clamping jaw device clamps the material, the connecting frame 23 moves downward to press the detection device 50, and at this time, the detection device detects a state that the material is clamped.
As another way to realize this, the detecting device 50 may be installed between the connecting frame 23 and the first supporting layer 11, when the clamping jaw device does not clamp the material, the connecting frame 23 and the first supporting layer 11 are in a state of pressing against the detecting device 50, and at this time, the detecting device 50 works, and this state is regarded as that the clamping device does not clamp the material, and when the clamping device clamps the material, the connecting frame 23 moves down, and at this time, the detecting device 50 is not pressed, and the detecting device 50 is disconnected, this state is regarded as that the clamping device clamps the material.
Further, the clamping jaw device further comprises a locking device 60 arranged on the support frame 10, and the locking device 60 can lock the first clamping jaw 21 and the second clamping jaw 22 in a clamping state.
Specifically, the detection device 50 is connected with the locking device 60, the detection device 50 controls the locking device 60 to open and close, when the detection device 50 detects that the clamping jaw device clamps the material, the locking device 60 is controlled to work to lock the first clamping jaw 21 and the second clamping jaw 22, and when the detection device 50 detects that the clamping jaw device does not clamp the material or places the material in place, the locking device 60 is controlled to loosen the first clamping jaw 21 and the second clamping jaw 22.
Further, the locking device 60 is disposed on the second supporting layer 12, and includes two locking units disposed in one-to-one correspondence with the first clamping jaw 21 and the second clamping jaw 22, where the locking unit includes a first telescopic rod 61 disposed on one side of the clamping jaw assembly, and a telescopic direction of the first telescopic rod 61 intersects with a moving direction of the first clamping jaw 21 or the second clamping jaw 22.
Specifically, as an embodiment, the locking device 60 is disposed on the second supporting layer 12, the locking device 60 includes two first telescopic rods 61 disposed corresponding to the first clamping jaw 21 and the second clamping jaw 22, the first telescopic rods 61 are located in the opening direction of the first clamping jaw 21 and the second clamping jaw 22 in the clamping state, when the first telescopic rods 61 receive the locking signal sent by the detection device 50, the telescopic rods 60 extend out to be located in the opening direction of the first clamping jaw 21 and the second clamping jaw 22 to lock the first clamping jaw 21 and the second clamping jaw 22, as a preferred embodiment, the locking device 60 further includes a fixing sleeve 62 disposed corresponding to the telescopic rods, and when the first telescopic rods 61 extend out, the fixing sleeve 62 can extend into the fixing sleeve 62 to ensure the working reliability of the locking device 60, as a more careless embodiment, the extending direction of the first telescopic rods 61 is perpendicular to the first clamping jaw 21, And in the moving direction of the second clamping jaw 22, the first telescopic rod 61 is a pneumatic cylinder or a hydraulic cylinder.
Further, the jaw device further comprises a resetting device 70, wherein the resetting device 70 is arranged between the first jaw 21 and the second jaw 22 and is used for resetting the first jaw 21 and the second jaw 22 from the clamping state to the opening state; the first clamping jaw 21 and the second clamping jaw 22 are timely reset to the opening state through the resetting device 70 when the clamping jaw device does not clamp the materials, so that the materials can be clamped next time conveniently.
Further, the connecting frame 23 comprises a first layer 231 hinged to the first jaw 21 and the second jaw 22, respectively; when the material is clamped by the adding device, the power device 30 applies force to the force bearing ends 210 and 220, the first clamping jaw 21 and the second clamping jaw 22 rotate around the joint part of the first layer 231, so that the clamping ends 211 and 221 move oppositely to realize the material adding;
in an implementation manner, the reset device 70 is a second telescopic rod or a second compression spring, and the reset device is disposed below the first layer 231; it can be understood that when the first clamping jaw 21 and the second clamping jaw 22 are used for clamping materials, the second telescopic rod or the second compression spring is compressed, when the first clamping jaw 21 and the second clamping jaw 22 need to be opened, the locking device 60 is opened, the second telescopic rod or the second compression spring pushes the first clamping jaw 21 and the second clamping jaw 22 towards the opening direction, and the second extending rod can be selected from air supporting rods, preferably two-way air supporting rods.
Alternatively, as another realizable manner, the reset device 70 is a second tension spring, and the reset device 70 is disposed above the first layer 231.
Further, as a preferred embodiment, the connecting frame 23 further includes a second layer 232 disposed below the first layer 231, the first layer 231 and the second layer 232 are connected by a connecting rod 233, the connecting rod 233 is a rigid rod, the resetting device 70 is disposed between the first layer 231 and the second layer 22, the first compression spring is disposed between the second layer 232 and the second supporting layer 12, and the detecting device 50 is disposed between the second layer 232 and the second supporting layer 12.
Further, the support frame 10 further includes a third support layer 13 disposed above the first support layer 11, and the jaw device is connected to the material taking device through the third support layer 13.
The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be appreciated by those skilled in the art that the scope of the invention herein disclosed is not limited to the particular combination of features described above, but also encompasses other arrangements formed by any combination of features described above or equivalents thereof without departing from the inventive concept. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.
Claims (10)
1. A clamping jaw device is characterized by comprising
A support frame;
the clamping jaw assembly comprises a connecting frame, a first clamping jaw and a second clamping jaw, the first clamping jaw and the second clamping jaw are oppositely arranged on the connecting frame and are hinged with the connecting frame, an elastic piece is arranged between the connecting frame and the supporting frame, and the clamping jaw assembly is elastically connected with the supporting frame through the elastic piece;
the power device is fixedly arranged on the support frame, is movably connected with the first clamping jaw and the second clamping jaw respectively, and is at least used for driving the first clamping jaw and the second clamping jaw to be in a clamping state from an opening state;
the detection device is arranged between the support frame and the connecting frame and used for detecting whether the connecting frame resists the elastic force of the elastic piece to generate displacement in the vertical direction so as to determine whether the clamping jaw clamps the material.
2. The clamping jaw device as claimed in claim 1, wherein the support frame comprises a first support layer arranged horizontally, the power device is fixedly arranged on the first support layer, the connecting frame is located below the first support layer, and the first clamping jaw and the second clamping jaw are both provided with a stressed end extending to the power device and a material taking end extending downwards.
3. The jaw apparatus of claim 2, wherein said support frame further has a second support layer layered with said first support layer, said second support layer being positioned below said first support layer;
the elastic part is a first pressure spring, the first pressure spring is arranged above the second supporting layer, and the connecting frame is arranged above the first pressure spring;
or the elastic piece is a first tension spring, and the first tension spring is arranged between the first supporting layer and the connecting frame.
4. A jaw arrangement according to claim 3, wherein said detection means comprises a proximity switch, a micro switch or a travel switch;
the detection device is arranged between the connecting frame and the second supporting layer;
or, the detection device is arranged between the first support layer and the connecting frame.
5. The jaw apparatus of claim 3 or 4, further comprising a locking device disposed on said support frame, said locking device being operable to lock said first and second jaws in a clamped condition.
6. The clamping jaw device as claimed in claim 5, wherein the locking device is arranged on the second supporting layer and comprises two locking units which are arranged corresponding to the first clamping jaw and the second clamping jaw in a one-to-one correspondence manner, the locking units comprise first telescopic rods arranged on one side of the clamping jaw assembly, and the telescopic direction of the first telescopic rods intersects with the moving direction of the first clamping jaw or the second clamping jaw.
7. Gripper device according to claim 3 or 4, characterized in that the connecting frame comprises a first layer hinged to the first jaw, respectively the second jaw;
and a second telescopic rod or a second pressure spring is arranged below the first layer, and the second telescopic rod or the second pressure spring is respectively connected with the first clamping jaw and the second clamping jaw and used for resetting the first clamping jaw and the second clamping jaw from a clamping state to an opening state.
8. The clamping jaw device as claimed in claim 3 or 4, wherein a second tension spring is arranged above the connecting frame, and the second tension spring is respectively connected with the first clamping jaw and the second clamping jaw and used for resetting the first clamping jaw and the second clamping jaw from a clamping state to an opening state.
9. A jaw apparatus as claimed in claim 7, wherein said connecting frame further comprises a second layer disposed below said first layer, said second telescopic rod or second compression spring being disposed between said first layer and said second layer, said first compression spring, said detection means being disposed between said second layer and said second support layer.
10. Gripper device according to any one of claims 2 to 4, characterized in that the support frame further comprises a third support layer arranged above the first support layer, the gripper device being connected to the material extracting device via the third support layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202021264200.5U CN212392224U (en) | 2020-07-01 | 2020-07-01 | Clamping jaw device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202021264200.5U CN212392224U (en) | 2020-07-01 | 2020-07-01 | Clamping jaw device |
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CN212392224U true CN212392224U (en) | 2021-01-22 |
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CN202021264200.5U Active CN212392224U (en) | 2020-07-01 | 2020-07-01 | Clamping jaw device |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113520230A (en) * | 2021-06-03 | 2021-10-22 | 深圳原子动力科技有限公司 | Snatch workstation that mechanism and change rolled cloth mechanism |
CN113770679A (en) * | 2021-09-29 | 2021-12-10 | 广东皓耘科技有限公司 | Filter element replacing device and maintenance robot |
-
2020
- 2020-07-01 CN CN202021264200.5U patent/CN212392224U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113520230A (en) * | 2021-06-03 | 2021-10-22 | 深圳原子动力科技有限公司 | Snatch workstation that mechanism and change rolled cloth mechanism |
CN113770679A (en) * | 2021-09-29 | 2021-12-10 | 广东皓耘科技有限公司 | Filter element replacing device and maintenance robot |
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