CN212363548U - Vacuum degree detection device and air exhaust system - Google Patents
Vacuum degree detection device and air exhaust system Download PDFInfo
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- CN212363548U CN212363548U CN202020705987.8U CN202020705987U CN212363548U CN 212363548 U CN212363548 U CN 212363548U CN 202020705987 U CN202020705987 U CN 202020705987U CN 212363548 U CN212363548 U CN 212363548U
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- 238000001514 detection method Methods 0.000 title claims abstract description 50
- 238000004891 communication Methods 0.000 claims abstract description 100
- 238000005086 pumping Methods 0.000 claims description 41
- 238000000605 extraction Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 abstract description 3
- 238000010276 construction Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
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Abstract
The utility model discloses a vacuum detection device and air exhaust system relates to substation equipment technical field, has reached the purpose of the inside vacuum of accurate survey tank circuit breaker air chamber. The utility model discloses a main technical scheme does: the method comprises the following steps: the air exhaust device comprises a communication pipeline, a first communication port and a second communication port are formed at two ends of the communication pipeline respectively, a third communication port is further formed on the communication pipeline, and the second communication port is used for being communicated with equipment to be exhausted; one end of the first valve is connected to the first communication port, and the other end of the first valve is used for connecting a vacuum device; a first vacuum gauge disposed at the third communication port; and in a detection state, the first valve is closed, the communication pipeline is isolated from the vacuum device, and the first vacuum meter is used for detecting the vacuum degree in the communication pipeline. The utility model discloses mainly used detects the inside true vacuum of treating air exhaust equipment.
Description
Technical Field
The utility model relates to a substation equipment technical field especially relates to a vacuum detection device and air exhaust system.
Background
In the project of power failure transformation, often need accomplish 500KV tank circuit breaker installation in limited time, need fill SF6 gas into the air chamber of tank circuit breaker, one of them key link is exactly to tank circuit breaker evacuation, and under the general condition, the vacuum requirement reaches below 50Pa, and different producer vacuum standard slightly differs, just can inject the gas after with tank circuit breaker evacuation. The one-way volume of the tank type breaker air chamber is about 6 cubic meters, if a common vacuum pump is adopted, the pumping rate of the common vacuum pump is 64 cubic meters per hour, according to experience, the requirement that a single air chamber reaches the vacuum degree is about 10 hours, and if three-phase continuous construction is carried out, longer construction operation time is occupied, and the requirement of construction progress is not met. At present, aiming at the installation of a 500kV tank type circuit breaker, a construction unit basically selects a vacuum unit with a higher air extraction rate for vacuum treatment, the air extraction rate is 150-. If the data is to be observed, the vacuum unit is closed, but the risk that the vacuum pump oil is poured into the equipment exists at the moment, and meanwhile, the vacuum meter in the vacuum unit cannot detect the vacuum degree in the breaker. Therefore, how to accurately measure the vacuum degree inside the gas chamber of the tank type circuit breaker is a technical problem which needs to be solved urgently by the technical personnel in the field.
SUMMERY OF THE UTILITY MODEL
In view of this, the embodiment of the utility model provides a vacuum detection device and air exhaust system, the main objective is the inside vacuum of accurate survey tank circuit breaker air chamber.
On the one hand, the embodiment of the utility model provides a vacuum detection device, this vacuum detection device includes:
the air exhaust device comprises a communication pipeline, a first communication port and a second communication port are formed at two ends of the communication pipeline respectively, a third communication port is further formed on the communication pipeline, and the second communication port is used for being communicated with equipment to be exhausted;
one end of the first valve is connected to the first communication port, and the other end of the first valve is used for connecting a vacuum device;
a vacuum gauge disposed at the third communication port;
and in a detection state, the first valve is closed, the communication pipeline is isolated from the vacuum device, and the first vacuum meter is used for detecting the vacuum degree in the communication pipeline.
The purpose of the utility model and the technical problem thereof can be further realized by adopting the following technical measures.
Specifically, the method further comprises the following steps: a second vacuum gauge;
a fourth communication port is also arranged on the communication pipeline;
the second vacuum gauge is arranged at the fourth communication port.
Specifically, the UNICOM pipeline includes trunk line and lateral conduit, trunk line one end is provided with first UNICOM opening, the other end is provided with the second UNICOM opening, still be provided with on the trunk line third UNICOM opening and branch interface, the lateral conduit passes through branch interface UNICOM in the trunk line, the lateral conduit is kept away from the one end of branch interface is provided with the fourth UNICOM opening, be provided with the second valve on the lateral conduit, the fifth valve is located the branch interface with between the fourth UNICOM opening.
Specifically, the UNICOM pipeline includes first pipeline, second pipeline and third pipeline, the one end of first pipeline is formed with the second mouth of UNICOM, second pipeline one end UNICOM in first pipeline is kept away from the one end of second mouth of UNICOM, and the other end is formed with first mouth of UNICOM, third pipeline one end UNICOM in first pipeline is kept away from the one end of first mouth of UNICOM, the other end is formed with the fifth mouth of UNICOM, first valve includes first sub-valve and second sub-valve, first sub-valve set up in first mouth of UNICOM, the second sub-valve set up in the fifth mouth of UNICOM, the third mouth of UNICOM set up in first pipeline the second pipeline with any one in the third pipeline.
Specifically, the first valve is a ball valve.
Specifically, the first vacuum gauge is a digital pressure gauge.
On the other hand, the embodiment of the utility model provides a still provide an air exhaust system, this air exhaust system includes: the vacuum degree detection device according to any one of the above;
a vacuum device, wherein an air extraction opening is formed on the vacuum device,
one end of a first valve of the vacuum degree detection device is connected to a first communication port of the vacuum degree detection device, and the other end of the first valve is communicated with the air suction port.
The purpose of the utility model and the technical problem thereof can be further realized by adopting the following technical measures.
Specifically, still include the extension pipeline, extension pipeline one end with the extraction opening can be dismantled and be connected, the other end with first valve deviates from the one end of first intercommunication mouth is connected.
Specifically, the air pumping ports comprise a first air pumping port and a second air pumping port,
the extension pipeline and the vacuum degree detection device form an air exhaust branch,
the number of the air pumping branches is two, the extension pipelines of the two air pumping branches are respectively connected with the first air pumping port and the second air pumping port, and the second connection ports of the two air pumping branches are respectively connected with the two-phase air chambers of the equipment to be vacuumized.
Specifically, the vacuum device comprises an equipment body, an air exhaust pipeline and a third valve, wherein one end of the air exhaust pipeline is communicated with the equipment body, the other end of the air exhaust pipeline is provided with the air exhaust port, and the third valve is arranged on the air exhaust pipeline;
the vacuum device further comprises a third vacuum meter, and the third vacuum meter is arranged on the air exhaust pipeline and is positioned between the third valve and the equipment body.
The embodiment of the utility model provides a vacuum detection device and air exhaust system, vacuum apparatus passes through circuit breaker vacuum detection device and treats that air exhaust equipment is connected, wherein, treat that air exhaust equipment can be tank circuit breaker, the last extraction opening that is provided with of vacuum apparatus, the extraction opening can be through extending pipeline UNICOM in first valve, when vacuum apparatus bleeds to the circuit breaker, vacuum apparatus continuous operation, and first valve is in the open mode, at this moment, vacuum apparatus UNICOM in the intercommunication pipeline, the intercommunication pipeline UNICOM in circuit breaker vacuum detection device, form a route between vacuum apparatus and the tank circuit breaker, because vacuum apparatus's the speed of evacuation is too fast, therefore, the inside vacuum reading of vacuum apparatus is on the small side, can't provide effective foundation for the constructor. In the application, the vacuum degree detection device can be arranged between the vacuum device and the equipment to be pumped, when the constructor needs to read, the first valve can be closed, at the moment, the first valve isolates the vacuum device from the communication pipeline, gas exchange cannot be carried out between the first valve and the communication pipeline, namely, the vacuum device can not really pump air to the equipment to be pumped, at the moment, the first vacuum meter can obtain the vacuum degree in the communicating pipe, and simultaneously, because the communicating pipeline is communicated with the equipment to be pumped, the vacuum degree in the communicating pipeline is the vacuum degree in the equipment to be pumped, therefore, the first vacuum meter can accurately reflect the vacuum degree in the equipment to be pumped, provide accurate data support for constructors, therefore, the vacuum degree detection device can accurately detect the real vacuum degree in the equipment to be pumped, and can also adopt a vacuum device with a high pumping speed, so that the construction progress is ensured.
The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.
Drawings
Fig. 1 is a schematic structural diagram of a vacuum degree detection device according to an embodiment of the present invention;
fig. 2 is another schematic structural diagram of a vacuum detection device according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a vacuum detection device according to an embodiment of the present invention.
The reference numbers illustrate:
1-a communication pipeline, 11-a first communication port, 12-a second communication port, 13-a third communication port, 14-a fourth communication port, 15-a main pipeline, 16-a branch pipeline, 17-a first pipeline, 18-a second pipeline, 19-a third pipeline, 191-a fifth communication port, 2-a first valve, 21-a first sub-valve, 22-a second sub-valve, 3-a first vacuum meter, 4-a second vacuum meter, 5-a second valve, 6-a vacuum device, 61-an equipment body, 62-an air pumping pipeline, 621-an air pumping port, 63-a third valve, 64-a third vacuum meter, 7-an extension pipeline and 8-equipment to be pumped.
Detailed Description
To further illustrate the technical means and effects of the present invention for achieving the objectives of the present invention, the following detailed description will be made in conjunction with the accompanying drawings and preferred embodiments of the present invention with reference to the specific embodiments, structures, features and effects of the vacuum detection device and the air pumping system provided by the present invention.
On the one hand, the embodiment of the utility model provides a vacuum detection device, as shown in fig. 1 to 3, this vacuum detection device includes: the air exhaust device comprises a communication pipeline 1, wherein a first communication port 11 and a second communication port 12 are respectively formed at two ends of the communication pipeline 1, a third communication port 13 is further formed on the communication pipeline 1, and the second communication port 12 is used for being communicated with an air exhaust device 8; one end of the first valve 2 is connected with the first communicating port 11, and the other end of the first valve is connected with the vacuum device 6; a first vacuum gauge 3, wherein the first vacuum gauge 3 is arranged at the third communication port 13; in a detection state, the first valve 2 is closed to isolate the communication pipeline 1 from the vacuum device 6, and the first vacuum gauge 3 is used for detecting the vacuum degree in the communication pipeline 1.
Wherein, the communication pipeline 1 can be a straight pipe, and the both ends of communication pipeline 1 are formed with first communication port 11 and second communication port 12 respectively, and first communication port 11 passes through communication pipeline 1 looks UNICOM with second communication port 12, and wherein, first communication port 11 and 6 UNICOMs of vacuum device, and second communication port 12 with treat that air extraction equipment 8 is linked together, treat that air extraction equipment 8 can be tank circuit breaker. Wherein, the tank circuit breaker has three-phase air chamber in, and three-phase air chamber mutual independence, isolated each other. Be provided with the pipeline in the tank circuit breaker, the pipeline is linked together with the air chamber, and second port 12 that unites can be UNICOM with the pipeline to, be provided with the check valve with the kneck of external equipment on the pipeline, prevent the air reflux. When the communication pipeline 1 is installed in the check valve, the check valve is stressed to be in an open state, and at the moment, the air chamber communicated with the joint can be communicated with the communication pipeline 1. And first valve 2 one end is being connected vacuum device 6, and the other end is connected in first UNICOM port 11, and then can be through controlling whether opening and close control vacuum device 6 of first valve 2 can with tank circuit breaker looks UNICOM. In addition to the first communication port 11 and the second communication port 12, the third communication port 13 is provided in the communication pipe 1, and the first vacuum gauge 3 is provided in the third communication port 13, so that the first vacuum gauge 3 can detect the degree of vacuum inside the communication pipe 1. When vacuum device 6 is to tank circuit breaker evacuation, first valve 2 is in the open mode, and at this moment, UNICOM pipeline 1 and vacuum device 6 between looks UNICOM, at this moment, opens vacuum device 6, and the inside air of tank circuit breaker can flow to vacuum device 6. And when constructor need detect the vacuum of tank circuit breaker air chamber, close first valve 2, vacuum detection device is in the detection state this moment, first valve 2 is isolated mutually with communicating pipe 1 and vacuum apparatus 6, vacuum apparatus 6 can't continue to extract gas from the tank circuit breaker, the vacuum of communicating pipe 1 inside this moment is the same with the inside vacuum of tank circuit breaker, detect the inside vacuum of communicating pipe 1 through first vacuum table 3, can truly reflect the inside real vacuum of tank circuit breaker, therefore, the vacuum detection device that this application provided can provide accurate technical support for constructor. Wherein the vacuum device 6 can be an SF6 bipolar vacuum pumping inflator set.
The purpose of the utility model and the technical problem thereof can be further realized by adopting the following technical measures.
Specifically, as shown in fig. 2, the vacuum degree detection device further includes: a second vacuum gauge 4; a fourth communication port 14 is also arranged on the communication pipeline 1; the second vacuum gauge 4 is disposed at the fourth communication port 14.
Wherein, second vacuum table 4 can be for reserve vacuum table, is provided with fourth intercommunication mouth 14 on the communicating pipe 1, and fourth intercommunication mouth 14 and communicating pipe 1 looks UNICOM, when first vacuum table 3 and second vacuum table 4 in arbitrary one became invalid, the inside vacuum degree of tank circuit breaker still can accurately be detected to another one.
Specifically, as shown in fig. 2, the communication pipeline 1 includes trunk line 15 and branch pipeline 16, trunk line 15 one end is provided with first communication port 11, the other end is provided with second communication port 12, still be provided with on the trunk line 15 third communication port 13 and branch interface, branch pipeline 16 passes through branch interface UNICOM in trunk line 15, branch pipeline 16 keeps away from the one end of branch interface is provided with fourth communication port 14, be provided with second valve 5 on the branch pipeline 16, fifth valve 5 is located branch interface with between the fourth communication port 14.
Wherein, main pipeline 15 is linked together with tank circuit breaker all the time, therefore first vacuum meter 3 can detect the inside vacuum value of tank circuit breaker all the time. And trunk line 15 is connected with the bleeder through the branch interface, and be provided with second valve 5 on the bleeder 16, second valve 5 is located between branch interface and the fourth antithetical couplet opening 14, therefore second valve 5 can control whether second vacuum meter 4 inserts in trunk line 15, when second valve 5 is opened, fourth antithetical couplet opening 14 can communicate with trunk line 15 mutually, at this moment, trunk line 15 and 16 inside gaseous looks UNICOM of bleeder, consequently second vacuum meter 4 can detect the vacuum of trunk line 15, simultaneously because trunk line 15 and tank circuit breaker looks UNICOM again, therefore, when second valve 5 is in the open mode, second vacuum meter 4 can detect the inside vacuum value of tank circuit breaker. And when second valve 5 is in the closed condition, at this moment, the branch pipeline 16 that is located the one side that second valve 5 deviates from main pipeline 15 is isolated mutually with main pipeline 15, and second vacuum meter 4 can't detect the inside vacuum degree of main pipeline 15, and second vacuum meter 4 is in idle state this moment. Therefore, the present embodiment can open the second valve 5 when the first vacuum gauge 3 fails, so that the second vacuum gauge 4 detects the vacuum value inside the tank type circuit breaker, and close the second valve 5 when the first vacuum gauge 3 normally works. The second valve 5 is preferably a ball valve. In addition, can also set up the second branch pipeline, be provided with the second branch interface on trunk line 15, the second branch pipeline passes through the second branch interface and connects in trunk line 15, and is provided with third communication port 13 on the second branch pipeline.
Specifically, as shown in fig. 3, the communication pipeline 1 includes a first pipeline 17, a second pipeline 18 and a third pipeline 19, one end of the first pipeline 17 is formed with the second communication port 12, one end of the second pipeline 18 is communicated with the first pipeline 17 away from one end of the second communication port 12, the other end is formed with the first communication port 11, one end of the third pipeline 19 is communicated with the first pipeline 17 away from one end of the first communication port 11, the other end is formed with a fifth communication port 191, the first valve 2 includes a first sub-valve 21 and a second sub-valve 22, the first sub-valve 21 is disposed in the first communication port 11, the second sub-valve 22 is disposed in the fifth communication port 191, and the third communication port 13 is disposed in any one of the first pipeline 17, the second pipeline 18 and the third pipeline 19.
Wherein, the second port 12 that connects on the first pipeline 17 wherein connects the check valve on the tank circuit breaker, and the check valve sets up in the pipeline of UNICOM in the air chamber. When the vacuum device 6 is used for vacuumizing the tank type circuit breaker, gas firstly passes through the first pipeline 17 and then is divided into two branches which respectively enter the second pipeline 18 and the third pipeline 19. Wherein, the end of the second pipe 18 far away from the first pipe 17 is formed with a first communicating port 11 and is provided with a first sub-valve 21, the end of the first sub-valve 21 far away from the first communicating port 11 can be connected to the first vacuum device 6, and the end of the third pipe 19 far away from the first pipe 17 is formed with a fifth communicating port 191 and is provided with a second sub-valve 22, the end of the second sub-valve 22 far away from the fifth communicating port 191 can be connected to the second vacuum device 6, so that the same tank circuit breaker can be simultaneously vacuumized by two vacuum devices 6. Therefore, two vacuum pumps with smaller pumping rates can be adopted to pump vacuum to the tank circuit breaker, namely the vacuum device 6 is two vacuum pumps. The first pipe 17, the second pipe 18, and the third pipe 19 may be provided with the third communication port 13, that is, the first vacuum gauge 3 may be provided on any one of the first pipe 17, the second pipe 18, and the third pipe 19. When the constructor needs to detect the vacuum degree of the tank type circuit breaker, the first sub-valve 21 and the second sub-valve 22 are closed.
In particular, the first valve 2 is a ball valve.
Wherein, the ball valve is the best valve of leakproofness, consequently, the utility model discloses well adoption ball valve is as first valve 2, can effectively guarantee the leakproofness of intercommunication pipeline 1 under the detection state, avoids vacuum apparatus 6 still can with intercommunication pipeline 1 looks UNICOM.
Specifically, the first vacuum gauge 3 is a digital pressure gauge.
Wherein, adopt digital manometer to be convenient for the reading, and the data is stable, and further, this digital manometer can be resistance-type vacuum gauge. Similarly, the second vacuum gauge 4 is also a digital vacuum gauge. Of course, it is possible if a pointer vacuum gauge is used based on other considerations.
On the other hand, the embodiment of the utility model provides a still provide an air exhaust system, this air exhaust system includes: the vacuum degree detection device according to any one of the above; the vacuum degree detection device comprises a vacuum device 6, wherein an air suction port 621 is formed in the vacuum device 6, one end of a first valve 2 of the vacuum degree detection device is connected to a first communicating port 11 of the vacuum degree detection device, and the other end of the first valve is communicated with the air suction port 621.
The vacuum degree detection device provided in any one of the above embodiments is provided in this embodiment, and thus the present embodiment has all the beneficial effects of the vacuum degree detection device provided in any one of the above embodiments, and details are not described here. Wherein, wherein vacuum apparatus 6 can select for use the bipolar evacuation inflation unit of SF6, carries out the evacuation to the tank circuit breaker, is formed with extraction opening 621 on vacuum apparatus 6, and vacuum degree detection device's first UNICOM mouth 11 and extraction opening 621 looks UNICOM, and gas in the tank circuit breaker enters into vacuum apparatus 6 through extraction opening 621. The vacuum device 6 comprises a vacuum pump and a roots pump, and before the vacuum pump is used, whether the oil level of the vacuum pump is normal or not should be carefully checked. When bleeding, the vacuum pump among the vacuum device 6 carries out the evacuation earlier, and when the vacuum degree reached 4500Pa, open the lobe pump and carry out quick evacuation, when constructor detected the vacuum degree that first vacuum meter 3 detected and reached the requirement, shut down.
The purpose of the utility model and the technical problem thereof can be further realized by adopting the following technical measures.
Specifically, as shown in fig. 1 and fig. 2, the exhaust device further includes an extension pipe 7, one end of the extension pipe 7 is detachably connected to the exhaust opening 621, and the other end of the extension pipe is connected to an end of the first valve 2 away from the first communication opening 11.
Wherein, extension pipeline 7 detachable connects in extraction opening 621, and extraction opening 621 department is provided with interface flange 65, and extension pipeline 7 passes through interface flange 65 detachable to be connected to extraction opening 621. The tank type circuit breaker is disposed to have a certain distance from the vacuum device 6, and the disposed position of the tank type circuit breaker has a certain height, so that it is necessary to set the extension pipe 7 to connect the vacuum device 6 and the tank type circuit breaker. Wherein the extension pipe 7 is preferably a hose. And the other end of the extension pipe 7 may be detachably connected to the first valve 2. When constructor detected the inside vacuum of tank circuit breaker, need stand for a period of time, at this moment, can locate extension pipeline 7 and the disconnection of vacuum device 6 at extraction opening 621 for this vacuum device 6 carries out the evacuation to other tank circuit breakers.
Specifically, the pumping holes 621 include a first pumping hole and a second pumping hole, the extension pipe 7 and the vacuum degree detection device form two pumping branches, the number of the pumping branches is two, the extension pipe 7 of each of the two pumping branches is respectively connected to the first pumping hole and the second pumping hole, and the second connection port 12 of each of the two pumping branches is respectively connected to the two-phase air chamber of the device to be pumped.
Wherein, each vacuum apparatus 6 can be configured with two air exhaust branches, and each air exhaust branch is respectively connected to the first air exhaust port and the second air exhaust port of the vacuum apparatus 6. Each air pumping branch comprises an extension pipeline 7 and a vacuum degree detection device, the second connection port 12 of each air pumping branch is respectively connected with the two-phase air chamber of the tank type circuit breaker, wherein the three-phase air chamber is arranged in each tank type circuit breaker, so that one vacuum device 6 can simultaneously vacuumize the two-phase air chambers of the tank type circuit breaker, the vacuum device 6 with the air pumping speed of 150 and 300 cubic meters per hour is usually selected by a construction unit at present, when two phases are simultaneously vacuumized, the vacuum processing time of the three-phase tank type circuit breaker only occupies about one third of the processing time required by adopting a common vacuum pump, and the construction process is greatly accelerated.
Specifically, as shown in fig. 1 and fig. 2, the vacuum device 6 includes an apparatus body, an air pumping pipeline 62 and a third valve 63, one end of the air pumping pipeline 62 is communicated with the apparatus body, the other end is provided with the air pumping port 621, and the air pumping pipeline 62 is provided with the third valve 63.
Wherein, the equipment body is used for carrying out the evacuation to tank circuit breaker for functional part, and air exhaust pipeline 62 belongs to the UNICOM part, through the extraction opening 621 on the air exhaust pipeline 62 with treat air exhaust equipment 8 looks UNICOM, and then can treat air exhaust equipment 8 and carry out the evacuation. The third valve 63 can isolate the extension pipe 7 from the vacuum device 6, and in the prior art, the third valve 63 is directly connected to the device 8 to be pumped through the pumping hole 621, so that when the vacuum degree inside the device 8 to be pumped is detected, the true vacuum degree of the device 8 to be pumped can be detected only by closing the third valve 63.
Specifically, as shown in fig. 1 and 2, the vacuum device 6 further includes a third vacuum gauge 64, and the third vacuum gauge 64 is disposed in the suction pipe 62 and between the third valve 63 and the apparatus body.
Wherein, still include the third vacuum table 64 in the vacuum apparatus 6, the vacuum degree that the vacuum apparatus 6 is close to extraction opening 621 department can be detected to the third vacuum table 64, and when vacuum apparatus 6 was carrying out the evacuation to the tank circuit breaker, the vacuum degree that the third vacuum table 64 detected was wanting much less than the inside real vacuum degree of tank circuit breaker. However, when the first vacuum gauge 3 fails, the third vacuum gauge 64 can provide data support to the constructor to a certain extent, and the constructor is prevented from blindly guessing the vacuum degree.
Besides, the vacuum device 6 may include two vacuum pumps, and the communication pipe 1 includes a first pipe 17, a second pipe 18 and a third pipe 19, and the two vacuum pumps are respectively connected to the first communication port 11 of the second pipe 18 and the fifth communication port 191 of the third pipe 19 through respective pumping ports.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A vacuum detection device, comprising:
the air exhaust device comprises a communication pipeline, a first communication port and a second communication port are formed at two ends of the communication pipeline respectively, a third communication port is further formed on the communication pipeline, and the second communication port is used for being communicated with equipment to be exhausted;
one end of the first valve is connected to the first communication port, and the other end of the first valve is used for connecting a vacuum device;
a first vacuum gauge disposed at the third communication port;
and in a detection state, the first valve is closed, the communication pipeline is isolated from the vacuum device, and the first vacuum meter is used for detecting the vacuum degree in the communication pipeline.
2. The vacuum detection apparatus of claim 1,
further comprising: a second vacuum gauge;
a fourth communication port is also arranged on the communication pipeline;
the second vacuum gauge is arranged at the fourth communication port.
3. The vacuum degree detection apparatus according to claim 2,
the UNICOM pipeline includes trunk line and lateral conduit, trunk line one end is provided with first UNICOM opening, the other end is provided with the second UNICOM opening, still be provided with on the trunk line third UNICOM opening and branch interface, the lateral conduit passes through branch interface UNICOM in the trunk line, the lateral conduit is kept away from the one end of branch interface is provided with the fourth UNICOM opening, be provided with the second valve on the lateral conduit, the second valve is located branch interface with between the fourth UNICOM opening.
4. The vacuum detection apparatus of claim 1,
the utility model discloses a first pipeline of UNICOM's pipeline, including first pipeline, second pipeline and third pipeline, the one end of first pipeline is formed with the second mouth of UNICOM, second pipeline one end UNICOM in first pipeline is kept away from the one end of second mouth of UNICOM, the other end is formed with first mouth of UNICOM, third pipeline one end UNICOM in first pipeline is kept away from the one end of first mouth of UNICOM, the other end is formed with the fifth mouth of UNICOM, first valve includes first sub-valve and second sub-valve, first sub-valve set up in first mouth of UNICOM, the second sub-valve set up in the fifth mouth of UNICOM, the third mouth of UNICOM set up in first pipeline the second pipeline with any one in the third pipeline.
5. The vacuum detection apparatus of claim 1,
the first valve is a ball valve.
6. The vacuum detection apparatus of claim 1,
the first vacuum gauge is a digital pressure gauge.
7. An air extraction system, comprising:
the vacuum degree detection apparatus according to any one of claims 1 to 6;
a vacuum device, wherein an air extraction opening is formed on the vacuum device,
one end of a first valve of the vacuum degree detection device is connected to a first communication port of the vacuum degree detection device, and the other end of the first valve is communicated with the air suction port.
8. The gas evacuation system of claim 7,
still include the extension pipeline, extension pipeline one end with the connection can be dismantled to the extraction opening, the other end with first valve deviates from the one end of first intercommunication mouth is connected.
9. The gas evacuation system of claim 8,
the air pumping port comprises a first air pumping port and a second air pumping port,
the extension pipeline and the vacuum degree detection device form an air exhaust branch,
the number of the air pumping branches is two, the extension pipelines of the two air pumping branches are respectively connected with the first air pumping port and the second air pumping port, and the second connection ports of the two air pumping branches are respectively connected with the two-phase air chambers of the equipment to be vacuumized.
10. The gas evacuation system of claim 7,
the vacuum device comprises an equipment body, an air exhaust pipeline and a third valve, wherein one end of the air exhaust pipeline is communicated with the equipment body, the other end of the air exhaust pipeline is provided with the air exhaust port, and the third valve is arranged on the air exhaust pipeline;
the vacuum device further comprises a third vacuum meter, and the third vacuum meter is arranged on the air exhaust pipeline and is positioned between the third valve and the equipment body.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020705987.8U CN212363548U (en) | 2020-04-30 | 2020-04-30 | Vacuum degree detection device and air exhaust system |
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| CN202020705987.8U CN212363548U (en) | 2020-04-30 | 2020-04-30 | Vacuum degree detection device and air exhaust system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114636511A (en) * | 2022-02-14 | 2022-06-17 | 陈辉 | Vacuum pressure instrument |
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2020
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114636511A (en) * | 2022-02-14 | 2022-06-17 | 陈辉 | Vacuum pressure instrument |
| CN114636511B (en) * | 2022-02-14 | 2024-03-01 | 四川川府仪表有限公司 | Vacuum pressure instrument |
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