CN212277150U - Sample stage and electron microscope - Google Patents
Sample stage and electron microscope Download PDFInfo
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- CN212277150U CN212277150U CN202021263666.3U CN202021263666U CN212277150U CN 212277150 U CN212277150 U CN 212277150U CN 202021263666 U CN202021263666 U CN 202021263666U CN 212277150 U CN212277150 U CN 212277150U
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Abstract
The utility model relates to a microscope accessory technical field discloses a sample platform and electron microscope. This sample platform includes: the base is provided with a plurality of sample holes which are communicated, the sample holes are used for placing samples to be tested, the positioning holes which extend to the edges of the periphery of the base are formed in the sample holes, the positioning pins can be inserted into the positioning holes, the elastic ring is sleeved on the periphery of the base and the positioning pins and tightened, and the positioning pins are driven to move in the sample holes through the positioning holes and further compress the samples to be tested. This electron microscope includes the utility model discloses a sample platform. The utility model discloses a fixed mode of elastic ring and locating pin has replaced bolt-up and sticky fixed mode, and simple structure lays and takes off the sample that awaits measuring easy and simple to handle, weak point consuming time, and is efficient, saves the cost.
Description
Technical Field
The utility model relates to a microscope accessory technical field especially relates to a sample platform and electron microscope.
Background
An electron microscope is an electron optical instrument which obtains information such as surface appearance, components, structures and the like of a sample by using electron beams and various electronic signals excited by the electron beams. For smaller block samples, particularly where accurate measurement of chemical composition is required, the block is typically first embedded in a resin as a column, usually a cylinder, and occasionally a quadrangular prism, and then the block is polished and coated with a conductive layer. An electron microscope sample stage is a device for supporting and holding a sample to be measured, and is usually made of a solid material with good electrical conductivity.
When the electron microscope works, the sample chamber needs to be kept in a certain vacuum degree range. In order to reduce the time consumption caused by multiple times of vacuum pumping and releasing, a plurality of samples to be detected are placed on the same sample table and are placed in a sample bin simultaneously. And the columnar sample or the resin piece after the polishing treatment ubiquitous highly inconsistent, two lower terminal surface nonparallel scheduling problems, and the sample that awaits measuring generally fixes on the sample platform through bolt fastener or sticky mode: the sample is mounted and taken down in a bolt fastening mode, so that the operation is complicated, the consumed time is long, and the efficiency is low; the glue is not easy to peel off and the colloid is easy to remain on the sample table.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
The embodiment of the utility model provides a sample platform and electron microscope to solve among the prior art sample platform and adopt the sample installation of bolt-up or sticky fixed mode existence to take off complex operation, long consuming time, the technical problem of inefficiency.
(II) technical scheme
In order to solve the technical problem, the embodiment of the utility model provides a sample platform, include: the base is provided with a plurality of through sample holes for placing samples to be tested, the sample holes are internally provided with positioning holes extending to the edges of the periphery of the base, the positioning pins can be inserted into the positioning holes, the elastic ring is sleeved on the base and the periphery of the positioning pins and tightened to drive the positioning pins to move in the sample holes and further compress the samples to be tested.
The sample hole is arranged in the sample hole, and the boss is flush with the upper end face of the base.
The bearing surface of the boss is parallel to the upper end surface of the base and the lower end surface of the base respectively.
The sample hole is an arc-shaped hole, and the boss is continuously arranged around the inner side of the sample hole.
The sample hole positioning device comprises a base, a sample hole and a positioning mark, wherein the sample hole positioning device further comprises a positioning mark, the positioning mark is arranged on the upper end face of the base, and the positioning mark and the sample hole are arranged in a one-to-one correspondence mode.
The number of the sample holes is 2-6, and the sample holes are uniformly arranged along the circumferential direction of the base at intervals.
Wherein, the extending direction of the sample hole is vertical to the upper end surface and the lower end surface of the base.
Wherein, the elastic ring is a fastening strip with elasticity.
The embodiment of the utility model provides an electron microscope is still disclosed, include if the utility model discloses the sample platform of embodiment.
(III) advantageous effects
The embodiment of the utility model provides a pair of sample platform and electron microscope puts into the sample hole with the sample that awaits measuring, through elastic ring to the power that compresses tightly the sample that awaits measuring of locating pin, will await measuring the sample and install in the sample bench, the utility model discloses a fixed mode of elastic ring and locating pin has replaced bolt-up and sticky fixed mode, and simple structure lays and takes off the sample that awaits measuring easy and simple to handle consuming time weak point, and is efficient, saves the cost.
Drawings
Fig. 1 is a schematic front structural diagram of a sample stage according to an embodiment of the present invention;
fig. 2 is a schematic back structural view of a sample stage according to an embodiment of the present invention;
fig. 3 is an assembly schematic diagram of the sample stage according to the embodiment of the present invention.
Reference numerals:
1: a base; 11: an upper end surface; 12: a lower end face; 2: positioning pins; 3: an elastic ring; 4: positioning holes; 5: a boss; 51: bearing surface; 6: position marking; 7: and (4) a sample hole.
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 1 to fig. 3, the embodiment of the utility model discloses a sample platform, include: base 1, elastic ring 3 and locating pin 2, base 1 is constructed with a plurality of sample holes 7 that link up for place the sample that awaits measuring, is constructed with the locating hole 4 that extends to 1 week side edge of base in sample hole 7, and locating pin 2 can insert in locating hole 4, and the week side of base 1 and locating pin 2 is located and is tightened to elastic ring 3 cover to order about locating pin 2 and move and then compress tightly the sample that awaits measuring in sample hole 7 by locating hole 4.
Specifically, the sample stage of this embodiment is mainly composed of three parts, namely a base 1, an elastic ring 3 and a positioning pin 2. The sample hole 7 on the base 1 is used for placing a sample to be tested, the sample hole 7 is provided with a positioning hole 4 extending to the peripheral edge of the base 1, and the positioning hole 4 enables the outer contour of the base 1 to be provided with a notch for placing the positioning pin 2. The thickness of locating pin 2 is greater than the thickness of locating hole 4, when the outside of base 1 was located to the elastic ring 3 cover, also given 2 a power to base 1 center of locating pin for locating pin 2 moves to the center, in order to guarantee when locating pin 2 was used at the exogenic action of elastic ring 3, locating pin 2 can inwards stretch out and compress tightly the sample that awaits measuring in locating hole 4.
The embodiment of the utility model provides a pair of sample platform and electron microscope puts into sample hole 7 with the sample that awaits measuring, through 3 forces that compress tightly the sample that awaits measuring for 2 a locating pin of elastic ring, will await measuring the sample and install in sample bench, the utility model discloses an elastic ring 3 and locating pin 2's fixed mode has replaced bolt-up and sticky fixed mode, and simple structure lays and takes off the sample operation that awaits measuring, weak point consuming time, and is efficient, saves the cost.
The sample testing device further comprises a boss 5, wherein the boss 5 is arranged in the sample hole 7 and is flush with the upper end face 11 of the base 1. The existence of boss 5 has reduced the internal diameter of the sample hole 7 of this position for the sample that awaits measuring can't pass, and boss 5 plays limiting displacement to the sample that awaits measuring. When the sample to be detected is placed in the sample hole 7, the boss 5 can abut against the sample to be detected, the sample to be detected is prevented from exceeding the upper end face 11 of the base 1, the upper end face 11 of each sample to be detected is positioned on the same plane, namely the upper end face 11 of the base 1, and detection personnel do not need to repeatedly adjust the height position of the surface to be detected of the sample to be detected.
Further, the bearing surface 51 of the boss 5 is parallel to the upper end surface 11 of the base 1 and the lower end surface 12 of the base 1, so that the samples to be measured can be stably placed horizontally, and the measurement error is reduced. It should be understood that the receiving surface 51 of the boss 5 refers to its contact surface with the sample to be measured.
Furthermore, since most of the samples to be measured are cylindrical, the sample hole 7 of the present embodiment is a circular arc-shaped hole, and the boss 5 is continuously disposed around the inner side of the sample hole 7. It should be understood that the shape of the sample hole 7 may be a square hole or other shaped hole, and the boss 5 may be designed as a plurality of stuck point bosses or strip bosses, and arranged uniformly according to the inner contour interval of the sample hole 7.
The device also comprises position marks 6, wherein the position marks 6 are arranged on the upper end surface 11 of the base 1, and the position marks 6 and the sample holes 7 are arranged in a one-to-one correspondence manner. In the embodiment, the position marks 6 are adopted to distinguish the sample holes 7, so that the detection personnel can distinguish the samples to be detected conveniently, and the samples to be detected can be distinguished and positioned quickly. Specifically, the position mark 6 may be an english letter mark or a number mark (as shown in fig. 1), and those skilled in the art may select other forms of marks, which the present invention is not limited to.
Wherein, the number of the sample holes 7 is 2-6, and the sample holes are uniformly arranged along the circumferential direction of the base 1 at intervals. Specifically, as shown in fig. 1, the sample stage of the present embodiment is configured with four sample holes 7, so that four samples to be tested can be placed simultaneously, and the number of times of vacuum pumping and vacuum venting can be reduced. It is understood that any number of sample wells 7 may be designed by one skilled in the art according to actual needs, and the position mark 6 may be provided in the same number, which is not intended to limit the present invention.
The extending direction of the sample hole 7 is perpendicular to the end faces (namely the upper end face 11 and the lower end face 12) of the base 1, so that a sample to be measured placed in the sample hole 7 is perpendicular to the upper end face 11 and the lower end face 12 of the base 1, the sample to be measured is guaranteed to be placed horizontally and stably, and measuring errors are reduced.
Wherein, the elastic ring 3 is a fastening strip with elasticity, and a fastening strip with proper length can be correspondingly selected according to the outer diameter of the base 1, or a fastening strip with adjustable length is adopted.
The use method of the sample stage based on the embodiment comprises the following steps:
s1, before placing the sample, placing the upper end face 11 of the base 1 on a table top downwards;
s2, placing the polished sample to be detected meeting the observation requirement in the sample hole 7, and ensuring that the surface to be detected is stably contacted with the bearing surface 51 of the boss 5;
s3, placing the positioning pin 2 into the positioning hole 4, surrounding the periphery of the base 1 and the positioning pin 2 by using the elastic ring 3, and adjusting the fastening strip to drive the positioning pin 2 to press the sample to be measured;
s4, taking up and turning over the base 1 from the desktop to enable the upper end face 11 of the base 1 to face upwards, and reading and recording the position mark 6 according to the position of the sample to be detected;
s5, placing the sample platform in the sample chamber with the upper end face 11 of the base 1 facing upwards, and observing by adopting an electron microscope.
The embodiment of the utility model provides a microscope is still disclosed, include the sample platform as above-mentioned embodiment.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A sample stage, comprising: the base is provided with a plurality of through sample holes for placing samples to be tested, the sample holes are internally provided with positioning holes extending to the edges of the periphery of the base, the positioning pins can be inserted into the positioning holes, the elastic ring is sleeved on the base and the periphery of the positioning pins and tightened to drive the positioning pins to move in the sample holes and further compress the samples to be tested.
2. The sample stage of claim 1, further comprising a boss disposed within the sample well and flush with the upper end surface of the base.
3. Sample stage according to claim 2, wherein the receiving surfaces of the projection are parallel to the upper end surface of the base and the lower end surface of the base, respectively.
4. The sample stage according to claim 2, wherein the sample hole is a circular arc hole, and the boss is continuously provided around the inside of the sample hole.
5. The sample stage according to claim 1, further comprising position marks, wherein the position marks are disposed on the upper end surface of the base, and the position marks are disposed in one-to-one correspondence with the sample wells.
6. The sample stage according to claim 1, wherein the number of the sample wells is 2-6 and the sample wells are uniformly spaced along the circumferential direction of the base.
7. Sample stage according to claim 1, wherein the sample wells extend in a direction perpendicular to the upper and lower end faces of the base.
8. Sample stage according to claim 1, characterized in that the elastic ring is a fastening strip having elasticity.
9. An electron microscope comprising a sample stage according to any one of claims 1 to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021263666.3U CN212277150U (en) | 2020-07-01 | 2020-07-01 | Sample stage and electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021263666.3U CN212277150U (en) | 2020-07-01 | 2020-07-01 | Sample stage and electron microscope |
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| Publication Number | Publication Date |
|---|---|
| CN212277150U true CN212277150U (en) | 2021-01-01 |
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| CN202021263666.3U Active CN212277150U (en) | 2020-07-01 | 2020-07-01 | Sample stage and electron microscope |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111725041A (en) * | 2020-07-01 | 2020-09-29 | 中国科学院自然科学史研究所 | Sample stage and electron microscope |
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2020
- 2020-07-01 CN CN202021263666.3U patent/CN212277150U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111725041A (en) * | 2020-07-01 | 2020-09-29 | 中国科学院自然科学史研究所 | Sample stage and electron microscope |
| CN111725041B (en) * | 2020-07-01 | 2024-05-28 | 中国科学院自然科学史研究所 | Sample stage and electron microscope |
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