CN212136397U - Diffusion furnace fire door exhaust device - Google Patents
Diffusion furnace fire door exhaust device Download PDFInfo
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- CN212136397U CN212136397U CN202021200500.7U CN202021200500U CN212136397U CN 212136397 U CN212136397 U CN 212136397U CN 202021200500 U CN202021200500 U CN 202021200500U CN 212136397 U CN212136397 U CN 212136397U
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- waste gas
- diffusion furnace
- fire door
- waste
- exhaust device
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Abstract
The utility model relates to the technical field of diffusion furnaces, and discloses a diffusion furnace fire door exhaust device, which solves the problem that the waste gas leaked in the production and processing process of the current diffusion furnace is easy to condense at a fire door to form corrosive waste liquid, and comprises a fire door insertion pipe, wherein one end of the fire door insertion pipe is fixedly provided with a waste gas collecting cover, the middle part of one side of the waste gas collecting cover is provided with an opening, the inside of the opening is fixedly provided with a sleeve pipe, two ends of the top of the waste gas collecting cover are both fixedly provided with waste gas discharging pipes, one side of each of the two waste gas discharging pipes is provided with an exhaust fan, the middle part of the bottom of the waste gas collecting cover is fixedly provided with a conical waste liquid collecting hopper, and; this diffusion furnace fire door exhaust device can be safe handle leaking waste gas to and can carry out effectual collection and processing to the corrosivity waste liquid of waste gas condensation, thereby can effectually protect the diffusion furnace, avoided revealing that waste gas influences effective and safe use of diffusion furnace.
Description
Technical Field
The utility model belongs to the technical field of the diffusion furnace, specifically be a diffusion furnace fire door exhaust device.
Background
The diffusion furnace is one of important process equipment of a front process of a semiconductor production line, and is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like.
At present, waste gas generated in the production and processing process of the diffusion furnace is easy to leak from a furnace mouth, the leaked waste gas is easy to condense at the furnace mouth to form corrosive waste liquid, and the accumulation of the corrosive waste liquid can corrode and pollute equipment, so that the effective and safe use of the diffusion furnace is influenced; therefore, improvements are now needed in view of the current situation.
SUMMERY OF THE UTILITY MODEL
To the above situation, for overcoming prior art's defect, the utility model provides a diffusion furnace fire door exhaust device, the effectual waste gas of revealing in having solved present diffusion furnace production and processing process is easy in the problem of fire door department condensation formation corrosivity waste liquid.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a diffusion furnace fire door exhaust device, includes the fire door intubate, the one end fixed mounting of fire door intubate has waste gas to collect the cover, and the opening has been seted up at the middle part of waste gas collection cover one side, and open-ended inside fixed mounting has the sleeve pipe, and the equal fixed mounting in both ends at waste gas collection cover top has exhaust gas discharge pipe, and exhaust fan is all installed to one side of two exhaust gas discharge pipes, and the middle part fixed mounting that waste gas was collected the cover bottom has toper waste liquid to collect and fights, and the receiving flask is installed to the bottom that the toper waste liquid was collected and is fought, and.
Preferably, the middle part of the furnace mouth inserting pipe is fixedly provided with a fixing ring, and fixing bolts are arranged in the middle part of the fixing ring at equal intervals.
Preferably, the middle part of the top of the waste gas collecting cover is provided with a through groove, and a V-shaped gas guide plate is fixedly arranged inside the through groove.
Preferably, the bottom of the conical waste liquid collecting hopper is provided with a threaded connection port, the collecting bottle is movably connected to the bottom of the conical waste liquid collecting hopper through the threaded connection port, and the collecting bottle is a transparent glass bottle.
Preferably, the tops of the two liquid guide pipes are respectively provided with a conical hopper, the conical hoppers are positioned right below the waste gas discharge pipe, and the inner diameter of the tops of the conical hoppers is 2 times of the outer diameter of the waste gas discharge pipe.
Preferably, the exhaust gas collecting cover is an equilateral trapezoid, and one end of the sleeve extends to the inside of the exhaust gas collecting cover.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) during work, the furnace mouth exhaust device of the diffusion furnace can safely treat leaked waste gas and effectively collect and treat corrosive waste liquid condensed by the waste gas by arranging the furnace mouth insertion tube, the fixing ring, the fixing bolt, the waste gas collecting cover, the through groove, the V-shaped gas guide plate, the opening, the sleeve, the waste gas discharge pipe, the exhaust fan, the conical waste liquid collecting hopper, the collecting bottle, the liquid guide pipe and the conical hopper, so that the diffusion furnace can be effectively protected, and the influence of the leaked waste gas on the effective and safe use of the diffusion furnace is avoided;
(2) when the device works: insert the inside of diffusion furnace fire door with the fire door intubate at first, retainer plate and fixing bolt fix this device on the diffusion furnace after that, during the use, at first open two exhaust fans, make the waste gas of leaking can be effectual through the leading-in both sides at waste gas collection cover top of fire door intubate, thereby discharge through going on of waste gas discharge pipe and exhaust fan, and waste gas condensation is collected in waste gas collection cover inside waste liquid can flow into the inside of collecting bottle through toper waste liquid collection fill, waste gas condensation can drip the inside of toper fill in waste gas discharge inside simultaneously, then the inside of collecting bottle is collected in the inflow through catheter and toper waste liquid collection fill, after the inside of collecting bottle is collected to be full, take off the bottom of collecting bottle from toper waste liquid collection fill and handle can.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention.
In the drawings:
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic cross-sectional view of the present invention shown in FIG. 1;
FIG. 3 is a schematic side sectional view of the waste gas collecting cover of the present invention;
in the figure: 1. inserting a furnace mouth into a pipe; 101. a stationary ring; 102. fixing the bolt; 2. an exhaust gas collection hood; 201. A through groove; 202. a V-shaped air guide plate; 3. an opening; 4. a sleeve; 5. an exhaust gas discharge pipe; 6. an exhaust fan; 7. a conical waste liquid collecting hopper; 8. a collection bottle; 9. a catheter; 901. a conical hopper.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments; based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the first embodiment, as shown in fig. 1, fig. 2 and fig. 3, the present invention comprises a furnace mouth insertion tube 1, which can be effectively installed at the furnace mouth of a diffusion furnace through the installation of the furnace mouth insertion tube 1, one end of the furnace mouth insertion tube 1 is fixedly installed with a waste gas collecting cover 2, which can effectively collect leaked waste gas through the installation of the waste gas collecting cover 2, the middle part of one side of the waste gas collecting cover 2 is provided with an opening 3, the inside of the opening 3 is fixedly installed with a sleeve 4, both ends of the top of the waste gas collecting cover 2 are fixedly installed with waste gas discharge pipes 5, one side of each of the two waste gas discharge pipes 5 is installed with an exhaust fan 6, through the installation of the waste gas discharge pipes 5 and the exhaust fans 6, the waste gas collected inside the waste gas collecting cover 2 can be effectively discharged, the middle part of the bottom of the waste gas collecting cover 2 is fixedly installed with a cone-shaped waste liquid collecting hopper, through the setting of toper waste liquid collection bucket 7 and receiving flask 8, make it can effectually concentrate the collection to the waste liquid, the equal fixed mounting in both sides of 2 inner walls of cover is collected to waste gas has catheter 9, through the setting of catheter 9, can effectually collect the waste liquid of 5 inside condensations of exhaust-gas discharge pipe, avoids waste liquid to spatter and causes the pollution.
In the second embodiment, on the basis of the first embodiment, as shown in fig. 1 and 2, a fixing ring 101 is fixedly installed in the middle of the furnace mouth insertion tube 1, fixing bolts 102 are installed in the middle of the fixing ring 101 at equal intervals, and the device can be stably installed and fixed by the installation of the fixing ring 101 and the fixing bolts 102.
Third embodiment, on the basis of first embodiment, given by fig. 3, logical groove 201 has been seted up at the middle part at waste gas collection cover 2 top, and the inside fixed mounting that leads to groove 201 has V-arrangement air guide plate 202, through the setting of logical groove 201 and V-arrangement air guide plate 202, makes waste gas collection cover 2 inner chamber top waste gas can effectual gathering to the bottom of exhaust stack 5 to can effectually discharge.
In the fourth embodiment, on the basis of the first embodiment, as shown in fig. 1, 2 and 3, the bottom of the conical waste liquid collecting hopper 7 is provided with a threaded connection port, the collecting bottle 8 is movably connected to the bottom of the conical waste liquid collecting hopper 7 through the threaded connection port, and the collecting bottle 8 is a transparent glass bottle, so that the collected waste liquid can be effectively treated.
Fifth embodiment, as shown in fig. 3, a conical hopper 901 is installed on the top of each of the two liquid guiding pipes 9, the conical hopper 901 is located right below the exhaust gas discharging pipe 5, and the inner diameter of the top of the conical hopper 901 is 2 times the outer diameter of the exhaust gas discharging pipe 5, so that the waste liquid dropping from the exhaust gas discharging pipe 5 can be effectively collected.
Sixth embodiment, on the basis of first embodiment, given by fig. 1, 2 and 3, the waste gas collecting cover 2 is an equilateral trapezoid, and one end of the sleeve 4 extends to the inside of the waste gas collecting cover 2, so that the waste gas does not leak through the sleeve 4, and the waste gas can be effectively gathered at two sides of the top of the inner cavity of the waste gas collecting cover 2, and meanwhile, the dropped waste liquid does not fall onto the surface of the product.
The working principle is as follows: the furnace mouth inserting pipe 1 is firstly inserted into the interior of the furnace mouth of the diffusion furnace, then the fixing ring 101 and the fixing bolt 102 fix the device on the diffusion furnace, when in use, firstly, two exhaust fans 6 are started, so that leaked waste gas can be effectively guided into two sides of the top of a waste gas collecting cover 2 through a furnace mouth insertion pipe 1, so that the waste gas is discharged through the waste gas discharge pipe 5 and the exhaust fan 6, and the waste gas condensed in the waste gas collecting hood 2 flows into the collecting bottle 8 through the conical waste gas collecting hopper 7 to be collected, while the waste liquid in which the exhaust gas condenses inside the exhaust gas discharge pipe 5 drops inside the tapered funnel 901, then flows into the interior of a collecting bottle 8 through a liquid guide pipe 9 and a conical waste liquid collecting hopper 7 for collection, when the interior of the collection bottle 8 is full, the collection bottle 8 is removed from the bottom of the conical waste liquid collection funnel 7 and disposed.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a diffusion furnace fire door exhaust device, includes fire door intubate (1), its characterized in that: the utility model discloses a stove mouth intubate (1) is characterized by its one end fixed mounting has waste gas to collect cover (2), opening (3) have been seted up at the middle part of waste gas collection cover (2) one side, the inside fixed mounting of opening (3) has sleeve pipe (4), the equal fixed mounting in both ends at waste gas collection cover (2) top has exhaust gas discharge pipe (5), exhaust fan (6) are all installed to one side of two exhaust gas discharge pipe (5), the middle part fixed mounting of waste gas collection cover (2) bottom has toper waste liquid to collect and fights (7), collecting bottle (8) are installed to the bottom of toper waste liquid collection fill (7), the equal fixed mounting in both sides of waste gas collection cover (2) inner wall has catheter (.
2. The exhaust device at the furnace mouth of the diffusion furnace according to claim 1, characterized in that: the middle part of the furnace mouth inserting pipe (1) is fixedly provided with a fixing ring (101), and fixing bolts (102) are arranged in the middle part of the fixing ring (101) at equal intervals.
3. The exhaust device at the furnace mouth of the diffusion furnace according to claim 1, characterized in that: a through groove (201) is formed in the middle of the top of the waste gas collecting cover (2), and a V-shaped gas guide plate (202) is fixedly mounted inside the through groove (201).
4. The exhaust device at the furnace mouth of the diffusion furnace according to claim 1, characterized in that: the bottom of toper waste liquid collection fill (7) is equipped with threaded connection port, and receiving flask (8) are through threaded connection port swing joint in the bottom of toper waste liquid collection fill (7), and receiving flask (8) are transparent glass bottle.
5. The exhaust device at the furnace mouth of the diffusion furnace according to claim 1, characterized in that: the tops of the two liquid guide pipes (9) are respectively provided with a conical hopper (901), the conical hoppers (901) are positioned right below the waste gas discharge pipe (5), and the inner diameter of the tops of the conical hoppers (901) is 2 times of the outer diameter of the waste gas discharge pipe (5).
6. The exhaust device at the furnace mouth of the diffusion furnace according to claim 1, characterized in that: the waste gas collecting cover (2) is in an equilateral trapezoid shape, and one end of the sleeve (4) extends to the inside of the waste gas collecting cover (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021200500.7U CN212136397U (en) | 2020-06-26 | 2020-06-26 | Diffusion furnace fire door exhaust device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021200500.7U CN212136397U (en) | 2020-06-26 | 2020-06-26 | Diffusion furnace fire door exhaust device |
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| CN212136397U true CN212136397U (en) | 2020-12-11 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112987804A (en) * | 2021-01-27 | 2021-06-18 | 宁夏隆基乐叶科技有限公司 | Waste liquid discharge method, control device, system and computer readable storage medium |
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2020
- 2020-06-26 CN CN202021200500.7U patent/CN212136397U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112987804A (en) * | 2021-01-27 | 2021-06-18 | 宁夏隆基乐叶科技有限公司 | Waste liquid discharge method, control device, system and computer readable storage medium |
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