CN212119161U

CN212119161U - Waste liquid recovery unit is used in photoresist production

Info

Publication number: CN212119161U
Application number: CN202020671316.4U
Authority: CN
Inventors: 宋里千
Original assignee: Xiamen Hengkun New Material Technology Co ltd
Current assignee: Xiamen Hengkun New Material Technology Co ltd
Priority date: 2020-04-28
Filing date: 2020-04-28
Publication date: 2020-12-11
Anticipated expiration: 2030-04-28

Abstract

The utility model relates to the field of photoresist production, in particular to a waste liquid recovery device for photoresist production, which comprises a recovery tank and a filter box, wherein the filter box is fixed by a fixing frame, and the middle part of the filter box is fixedly provided with a filter screen, the middle part of the filter screen is vertically and rotatably provided with a rotating rod, one side of the rotating rod is positioned above the filter screen and is provided with a brush block, the brush block is in sliding fit with the top end surface of the filter screen, the bottom end of the rotating rod is provided with a rotating paddle, the top end of the rotating rod extends out of an opening at the top end of the filter box, the top end of the rotating rod is fixedly inserted with a driven chain wheel, the driven chain wheel is in transmission connection with a driving chain wheel through a chain, and the middle part of the driving chain wheel is inserted and fixed with an output shaft of a motor, and the motor is arranged and fixed at one side of the fixed frame, and the bottom of rose box is provided with the downcomer, and the downcomer extends to in retrieving the pond to can be convenient quick filter the washing liquid of retrieving.

Description

Waste liquid recovery unit is used in photoresist production

Technical Field

The utility model relates to a photoresist production technical field especially relates to a waste liquid recovery unit is used in photoresist production.

Background

The photoresist production equipment needs to be cleaned after photoresist production, and the cleaning liquid can be recycled, so that impurities exist after the cleaning liquid is washed, and the cleaning liquid needs to be collected for use after being filtered.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a waste liquid recovery device for photoresist production.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a waste liquid recovery unit is used in photoresist production, including recovery pond and rose box, the rose box passes through the mount to be fixed, and the mid-mounting of rose box is fixed with the filter screen, and the vertical rotation in middle part of filter screen installs the bull stick, one side of bull stick is located the top of filter screen and is provided with the brush piece, the top face sliding fit of brush piece and filter screen, and the bottom of bull stick is provided with the rotation oar, the opening on rose box top is stretched out on the top of bull stick, the top of bull stick is inserted and is established and be fixed with driven sprocket, driven sprocket passes through the chain and is connected with the drive sprocket transmission, and the middle part of drive sprocket is inserted and is established the output shaft that is fixed with the motor, and the motor installation is fixed in one side of mount, and the bottom of rose.

Preferably, a diaphragm pump is arranged in the recovery tank, and the output end of the diaphragm pump is connected with a conveying pipe.

Preferably, the bottom end face of the brush block is provided with bristles, and when the bristles are made of metal, the bristles are in sliding fit with the top end face of the filter screen.

Preferably, the bottom of rose box is the back taper type, and the bottom of rose box is provided with the liquid outlet, and rotates the oar and set up directly over the liquid outlet.

Preferably, a through groove is formed in one side of the fixing frame, and a chain penetrates through the through groove.

Preferably, the middle part of the filter screen is provided with a through hole, and the through hole is connected with the rotating rod through a bearing in a rotating manner.

The utility model has the advantages that:

1. the washing waste liquid after using is carried to the rose box in, and the filter screen in the rose box filters the washing waste liquid, and the washing liquid valve after the filtration enters into through the downcomer and retrieves in the pond, and the waste liquid after the filtration passes through the diaphragm pump and carries reuse in retrieving the pond, filters through the washing liquid to recycling to make the quality of washing liquid higher.

2. When filtering the washing liquid, the motor drive bull stick rotates, and the bull stick drives the brush piece and rotates, and the brush hair on the brush piece is scraped the filter screen and is brushed, avoids the filter screen to be blockked up, and the rotation thick liquid of bull stick bottom rotates simultaneously and forms the swirl, can accelerate the whereabouts of the washing liquid after the filtration in the rose box to can be convenient quick filter the washing liquid of retrieving.

Drawings

FIG. 1 is a schematic structural view of a waste liquid recovery device for photoresist production according to the present invention;

FIG. 2 is a schematic view of the internal structure of a filter box of the waste liquid recovery device for photoresist production according to the present invention;

fig. 3 is the utility model provides a structural schematic that overlooks of waste liquid recovery unit's filter screen for photoresist production.

In the figure: 1 recovery pond, 2 rose boxes, 3 mounts, 4 filter screens, 5 downcomer pipes, 6 diaphragm pumps, 7 motors, 8 driving sprocket, 9 bull sticks, 10 driven sprocket, 11 brush blocks, 12 rotation oar.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. A

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

Referring to fig. 1-3, a waste liquid recovery unit is used in photoresist production, includes recovery tank 1 and rose box 2, and rose box 2 is fixed through mount 3, and the mid-mounting of rose box 2 is fixed with filter screen 4, and the vertical rotation in middle part of filter screen 4 installs bull stick 9, and the middle part of filter screen 4 is provided with the through-hole, rotates through bearing and bull stick 9 in the through-hole and is connected.

A brush block 11 is arranged on one side of the rotating rod 9 and above the filter screen 4, and bristles are arranged on the bottom end face of the brush block 11 and are in sliding fit with the top end face of the filter screen 4 when the bristles are made of metal.

And the bottom of bull stick 9 is provided with rotates oar 12, and the bottom of rose box 2 is the back taper type, and the bottom of rose box 2 is provided with the liquid outlet, and rotates oar 12 and set up directly over the liquid outlet.

The opening on 2 tops of rose box is stretched out on the top of bull stick 9, the top of bull stick 9 is inserted and is established and be fixed with driven sprocket 10, driven sprocket 10 passes through the chain and is connected with the transmission of driving sprocket 8, logical groove has been seted up on one side of mount 3, it has alternated the chain to lead to the inslot, and driving sprocket 8's middle part is inserted and is established the output shaft that is fixed with motor 7, and motor 7 installs and fix the one side at mount 3, and the bottom of rose box 2 is provided with down pipe 5, down pipe 5 extends to in the recovery pond 1, be provided with diaphragm pump 6 in the recovery pond 1, the output of diaphragm pump 6 is connected with.

In this embodiment, when rinsing photoresist equipment, the washing waste liquid after the use is carried to rose box 2 in, and filter screen 4 in the rose box 2 filters the washing waste liquid, and the washing liquid valve after the filtration enters into recovery pond 1 through downcomer 5 in, and the waste liquid after the filtration passes through diaphragm pump 6 transport reuse in the recovery pond 1.

When filter screen 4 filters, motor 7 passes through drive sprocket 8 and rotates, and drive sprocket 8 passes through chain drive driven sprocket 10 to drive bull stick 9 rotates, and bull stick 9 drives brush block 11 and rotates, and the brush hair on the brush block 11 scrapes the brush to filter screen 4, avoids filter screen 4 to be blockked up, and the rotation thick liquid 12 of bull stick 9 bottom rotates simultaneously and forms the swirl, can accelerate the whereabouts of the washing liquid after the filtration in rose box 2.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The utility model provides a waste liquid recovery unit is used in photoresist production, including recovery tank (1) and rose box (2), a serial communication port, rose box (2) is fixed through mount (3), and the mid-mounting of rose box (2) is fixed with filter screen (4), and the vertical rotation in middle part of filter screen (4) installs bull stick (9), one side of bull stick (9) is located the top of filter screen (4) and is provided with brush block (11), brush block (11) and the top end sliding fit of filter screen (4), and the bottom of bull stick (9) is provided with rotates oar (12), the top of bull stick (9) stretches out the opening on rose box (2) top, the top of bull stick (9) is inserted and is fixed with driven sprocket (10), driven sprocket (10) are connected with drive sprocket (8) transmission through the chain, and the output shaft that is fixed with motor (7) is inserted in the middle part of drive sprocket (8), and motor (7) installation is fixed in one side of mount (3), and the bottom of rose box (2) is provided with down liquid pipe (5), and down liquid pipe (5) extend to in recovery pond (1).

2. The waste liquid recovery device for photoresist production according to claim 1, wherein a diaphragm pump (6) is arranged in the recovery tank (1), and the output end of the diaphragm pump (6) is connected with a delivery pipe.

3. The apparatus for recycling waste liquid from photoresist production according to claim 1, wherein the bottom end surface of the brush block (11) is provided with bristles, and when the bristles are made of metal, the bristles are in sliding fit with the top end surface of the filter screen (4).

4. The waste liquid recovery device for photoresist production according to claim 1, wherein the bottom of the filter box (2) is in an inverted cone shape, the bottom of the filter box (2) is provided with a liquid outlet, and the rotating paddle (12) is arranged right above the liquid outlet.

5. The waste liquid recovery device for photoresist production according to claim 1, wherein a through groove is formed on one side of the fixing frame (3), and a chain is inserted into the through groove.

6. The waste liquid recovery device for photoresist production according to claim 1, wherein the middle part of the filter screen (4) is provided with a through hole, and the through hole is rotatably connected with the rotating rod (9) through a bearing.