CN211928231U - Tunable filter, vernier filter and tunable laser - Google Patents
Tunable filter, vernier filter and tunable laser Download PDFInfo
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- CN211928231U CN211928231U CN202020257596.4U CN202020257596U CN211928231U CN 211928231 U CN211928231 U CN 211928231U CN 202020257596 U CN202020257596 U CN 202020257596U CN 211928231 U CN211928231 U CN 211928231U
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Abstract
The application discloses a tunable filter, which comprises an optical flat plate with a thermo-optic effect, wherein the optical flat plate is provided with two opposite optical planes, and the two optical planes are both provided with partial reflecting films; the optical flat plate is provided with a light-transmitting area, a patterned heating resistance wire and a temperature measuring resistance wire, heating electrodes are arranged at two ends of the heating resistance wire, and temperature measuring electrodes are arranged at two ends of the temperature measuring resistance wire. The patterned heating resistance wire and the temperature measuring resistance wire are directly plated on the filter plate made of the thermo-optic material, so that the filter plate can be rapidly and uniformly heated and accurately controlled in temperature, rapid filtering is realized, and the filter plate has the advantages of low power consumption, high bandwidth and the like; and the heating resistance wire and the temperature measuring resistance wire are directly plated on the filter plate, so that the overall size of the filter is reduced, and the miniaturization of the optical module is facilitated.
Description
Technical Field
The application relates to the technical field of optical communication, in particular to a tunable filter, a vernier filter and a tunable laser.
Background
With the rapid development of big data, internet of things and 5G services, the demand for network capacity is rapidly increasing, and in order to meet the requirement of realizing long-distance transmission of larger data volume in a limited frequency band, a high-order modulation mode and DWDM become the first choice. By using coherent optical modules in high-order Modulation modes such as QPSK (Quadrature Phase Shift Keying), 16QAM (Quadrature Amplitude Modulation) and the like, the data volume of a single channel can be multiplied, and meanwhile, the DWDM technology can realize multi-channel compounding and effectively reduce the cost of optical fibers.
One key technology of a narrow linewidth tunable laser at the transmitting end of a coherent optical module is wavelength selection, and a tunable optical filter is required. The tunable optical filter is mainly of an acousto-optic tunable type, a diffraction grating type, and a fabry-perot interference type. The fabry-perot interference type has great advantages in terms of optical loss and tuning range. In order to realize narrow linewidth output, a filter with vernier effect is generally formed by using paired interference type tunable filters. At present, the interference type tunable filter mainly realizes the tuning function by edge contact heating or liquid crystal refractive index change. The liquid crystal scheme has a large volume, is not beneficial to the miniaturization of an optical module, and can only change the position of an E light peak and the position of an O light peak in tuning, so that the insertion loss is large. The edge heating type generally has a filter attached to a TEC, and tuning of the filter is realized by controlling the temperature of the TEC, and the edge heating type has a slow conduction heating speed and is not uniformly heated.
Disclosure of Invention
The application aims to provide a tunable filter, a vernier filter and a tunable laser, which can realize rapid and uniform heating and accurate temperature control and have the advantages of small volume, low loss, high bandwidth and the like.
In order to achieve one of the above objects, the present application provides a tunable filter comprising an optical flat plate having a thermo-optic effect, the optical flat plate having two opposing optical planes, each of the two optical planes being provided with a partially reflective film; the optical flat plate is provided with a light-transmitting area, a patterned heating resistance wire and a temperature measuring resistance wire, heating electrodes are arranged at two ends of the heating resistance wire, and temperature measuring electrodes are arranged at two ends of the temperature measuring resistance wire.
As a further improvement of the embodiment, the heating resistance wire and/or the temperature measuring resistance wire is plated on the optical plane or embedded in the optical flat plate.
As a further improvement of the embodiment, the heating resistance wire and the temperature measuring resistance wire are respectively plated on different optical planes; or the heating resistance wire and the temperature measuring resistance wire are arranged on the two optical planes.
As a further improvement of the embodiment, the heating electrode and/or the temperature measuring electrode are disposed on a side surface of the optical flat plate.
As a further improvement of an embodiment, the reflectance of the partially reflective film is 70% to 95%.
As a further improvement of the embodiment, the optical flat plate is a silicon flat plate.
As a further improvement of the embodiment, the thickness of the silicon flat plate is within the range of 100-150 μm.
The present application further provides a vernier filter, comprising at least two tunable filters according to any of the above embodiments, wherein the two tunable filters have different free spectral ranges.
As a further improvement of the embodiment, the vernier filter further comprises a mounting table, wherein the mounting table is provided with an upper surface, and the upper surface is provided with a conductive circuit; the tunable filter is arranged on the upper surface of the mounting table, and the heating electrode and the temperature measuring electrode are respectively and electrically connected with the corresponding conductive circuits.
As a further improvement of the embodiment, the mounting table comprises a mounting plate and a supporting frame arranged below the mounting plate.
The application further provides a tunable laser, which comprises a shell, a laser resonant cavity arranged in the shell, a gain chip arranged in the laser resonant cavity, a tunable filter component and an external cavity reflector; the tunable filter assembly comprises a vernier filter as described in any of the above embodiments.
The beneficial effect of this application: the patterned heating resistance wire and the temperature measuring resistance wire are directly plated on the filter plate made of the thermo-optic material, so that the filter plate can be rapidly and uniformly heated and accurately controlled in temperature, rapid filtering is realized, and the filter plate has the advantages of low power consumption, high bandwidth and the like; and the heating resistance wire and the temperature measuring resistance wire are directly plated on the filter plate, so that the overall size of the filter is reduced, and the miniaturization of the optical module is facilitated.
Drawings
Fig. 1 is a schematic structural diagram of a tunable filter according to embodiment 1 of the present application;
FIG. 2 is a schematic diagram of a filter curve of a tunable filter according to the present application;
fig. 3 is a schematic diagram of another variation of the tunable filter according to embodiment 1 of the present application;
fig. 4 is a schematic structural diagram of a tunable filter according to embodiment 2 of the present application;
FIG. 5 is a schematic diagram of the back side of the tunable filter of FIG. 4;
fig. 6 is a schematic perspective view of a tunable filter structure according to embodiment 3 of the present application;
FIG. 7 is a partially exploded schematic diagram of the tunable filter of FIG. 6;
FIG. 8 is a schematic view of a vernier filter according to embodiment 4 of the present application;
FIG. 9 is a schematic diagram of a filter curve of the vernier effect;
FIG. 10 is a schematic view of a mounting stage of a tunable filter according to embodiment 4 of the present application;
fig. 11 is a schematic diagram of an in-cavity structure of a tunable laser according to embodiment 5 of the present application.
Detailed Description
The present application will now be described in detail with reference to specific embodiments thereof as illustrated in the accompanying drawings. These embodiments are not intended to limit the present application, and structural, methodological, or functional changes made by those skilled in the art according to these embodiments are included in the scope of the present application.
In the various illustrations of the present application, certain dimensions of structures or portions may be exaggerated relative to other structures or portions for ease of illustration and, thus, are provided to illustrate only the basic structure of the subject matter of the present application.
Also, terms used herein such as "upper," "above," "lower," "below," and the like, denote relative spatial positions of one element or feature with respect to another element or feature as illustrated in the figures for ease of description. The spatially relative positional terms may be intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "below" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly. When an element or layer is referred to as being "on," or "connected" to another element or layer, it can be directly on, connected to, or intervening elements or layers may be present.
Example 1
The tunable filter 100 shown in fig. 1 includes an optical flat 10 with thermo-optic effect, the optical flat 10 has two opposite optical planes 11, and both optical planes 11 are provided with partially reflective films. The optical flat plate 10 is provided with a light-transmitting area 12, a patterned heating resistance wire 20 and a temperature measuring resistance wire 30, two ends of the heating resistance wire 20 are provided with heating electrodes 21, and two ends of the temperature measuring resistance wire 30 are provided with temperature measuring electrodes 31. The patterned heating resistance wire 20 and the temperature measuring resistance wire 30 are formed by leaving the light-transmitting area 12 on the optical plane 11, and the whole plane does not cover the heating resistance wire and the temperature measuring resistance wire. In this embodiment, the light-passing region 12 is a square region located in the middle of the optical plane 11, and in other embodiments, the light-passing region may also be a region with a geometric shape such as a circle or other polygon. The heating resistance wire 20 is plated on the periphery of the light transmission area 12 of one of the optical planes 11, and the temperature measuring resistance wire 30 is plated on the periphery of the heating resistance wire 20.
The optical flat plate with the thermo-optical effect is made of an optically transparent material with the thermo-optical effect, such as gallium arsenide, silicon oxide or silicon. In this embodiment, the optical flat plate 10 is a silicon flat plate made of silicon material with a larger thermo-optic coefficient, and has a faster tuning speed and a wider tuning range. In other embodiments, the optical flat may be made of other thermo-optic materials. During manufacturing, a silicon flat plate with specific thickness can be manufactured through processes such as grinding and polishing, the target reflectivity is achieved on the silicon flat plate through optical coating, and the comb filter meeting the requirements, such as an optical etalon, is manufactured. As shown in FIG. 2, the comb filter of the optical communication band generally requires that the FSR (free spectral range) is within 200-400GHz and the FWHM (Full width at half maximum) is narrow, and correspondingly, the thickness of the silicon flat plate is within 100-150 μm and the reflectivity of the partial reflection film is within 70% -95%.
After the partial reflecting film is plated, a patterned metal film can be plated on the silicon flat plate through an MEMS (micro-electromechanical systems) process to form a heating resistance wire and a temperature measuring resistance wire, heating electrodes are plated at two ends of the heating resistance wire, and temperature measuring electrodes are plated at two ends of the temperature measuring resistance wire. The heating electrode and the temperature measuring electrode are respectively connected with an external circuit for power supply, the silicon flat plate can be heated by controlling the current of the heating resistance wire, meanwhile, the resistance value of the temperature measuring resistance wire is monitored in real time, feedback adjustment is realized, and the tunable function of the filter can be realized.
Because the heating resistance wire of the annular light-passing area is plated on the periphery of the light-passing area, the heating is faster, and the filter plate is heated more uniformly. Meanwhile, the temperature measuring resistance wire of the ring heating resistance wire is plated on the periphery of the heating resistance wire, so that the temperature of each point on the periphery of the ring light-passing area can be sensed simultaneously, and the temperature measuring precision is higher. Therefore, the structure directly plates the patterned heating resistance wire and the temperature measuring resistance wire on the filter plate of the thermo-optic material, so that the filter plate can be rapidly and uniformly heated and accurately controlled in temperature, and rapid tuning filtering is realized; and the heating resistance wire and the temperature measuring resistance wire are directly plated on the filter plate, so that the overall size of the filter is reduced, and the miniaturization of devices is facilitated.
As shown in fig. 3, the heating electrode 21 of the heating resistance wire 20 and the temperature measuring electrode 31 of the temperature measuring resistance wire 30 can also be led out to the side surface 13 of the optical flat plate 10, where the side surface 13 refers to a surface connecting the two optical planes 11, that is, the heating electrode 21 and the temperature measuring resistance wire 30 are arranged on the side surface 13 of the optical flat plate 10. When the temperature measuring device is used, the side faces plated with the heating electrode 21 and the temperature measuring electrode 31 can be arranged on an external element, the heating electrode 21 and the temperature measuring electrode 21 can be welded with a circuit pad of the external element, the electrical connection with the external element is realized, and a link is simpler. Of course, in other embodiments, the heating electrode and the temperature measuring electrode may be electrically connected to the external circuit by other methods such as gold wire or silver paste/gold-tin solder sintering.
Example 2
The tunable filter 100 shown in fig. 4 and 5 is different from embodiment 1 in that the heating resistance wire 20 and the temperature measuring resistance wire 30 are respectively plated on different optical planes 11 of the optical flat plate 10. That is, after the two optical planes 11 of the optical flat plate 10 are plated with partial reflective films, a patterned metal film is plated on one optical plane 11 of the optical flat plate 10 by using the MEMS process to form a heating resistance wire 20, a patterned metal film is plated on the other optical plane 11 to form a temperature measurement resistance wire 30, two ends of the heating resistance wire 20 are plated with heating electrodes 21, and two ends of the temperature measurement resistance wire 30 are plated with temperature measurement electrodes 31. The middle area of the two optical planes 11 is a light-transmitting area 12, and the heating resistance wire 20 and the temperature measuring resistance wire 30 are arranged around the light-transmitting area 12. The heating resistance wire 20 and the temperature measuring resistance wire 30 are respectively plated on different optical planes 11, so that the interference of the heating resistance wire 20 on the temperature measuring resistance wire 30 is reduced, the temperature measuring accuracy can be further improved, and faster and more accurate tuning filtering is realized.
In this embodiment, the heating electrode 21 of the heating resistance wire 20 and the temperature measuring electrode 31 of the temperature measuring resistance wire 30 are led out to the side surface 13 of the optical flat plate 10. When the circuit board is used, the side surface plated with the electrode is arranged at the bottom and is directly welded with an external circuit pad, so that the circuit board is electrically connected with an external circuit, and a link is simpler.
Of course, in other embodiments, the heating resistance wire and the temperature measuring resistance wire may be plated on both optical planes of the optical flat plate, that is, the heating resistance wire and the temperature measuring resistance wire are disposed on both optical planes. The heating resistance wires on the two optical planes are respectively connected to the heating electrodes with the same side surface of the optical flat plate, and the temperature measuring resistance wires are respectively connected to the temperature measuring electrodes with the same side surface of the optical flat plate. The two heating resistance wires simultaneously heat the optical flat plate from the two optical planes, the heating speed is faster and more uniform, the tuning speed of the filter can be further improved, and the fast tuning filtering is realized. The temperature measuring resistance wires are arranged on the two optical planes, and the temperature of the two optical planes is monitored simultaneously, so that the speed and the precision of temperature measurement can be further improved, and the tuning speed and the precision of tuning filtering are further improved. Or, in other embodiments, the heating resistance wire can be plated on both optical planes, and the temperature measuring resistance wire is plated on one of the optical planes; or the two optical planes are both plated with temperature measuring resistance wires, and one of the optical planes is plated with a heating resistance wire.
Example 3
The tunable filter 100 shown in fig. 6 and 7 is different from the tunable filter of embodiment 1 in that the heating resistance wire 20 and the temperature measuring resistance wire 30 are embedded in the optical flat plate 10, and in fig. 6, parts of the optical flat plate on the heating resistance wire and the temperature measuring resistance wire are subjected to transparentization treatment for clarity. In this embodiment, the optical flat plate 10 is a silicon flat plate, when the silicon flat plate is manufactured, the patterned heating resistance wire 20 and the temperature measuring resistance wire 30 are embedded in the silicon flat plate, the heating electrode 21 of the heating resistance wire 20 and the temperature measuring electrode 31 of the temperature measuring resistance wire 30 are led out to the side surface of the silicon flat plate, the middle area is used as a light transmission area 12, and partial reflecting films are plated on two optical planes 11 opposite to the silicon flat plate to form the filter.
As shown in fig. 7, during the manufacturing process, a thin silicon wafer 10a may be manufactured first, a patterned metal film is plated on the silicon wafer 10a to form a heating resistance wire 20 and a temperature measurement resistance wire 30, a heating electrode 21 and a temperature measurement electrode 31 at two ends of the heating resistance wire 20 and the temperature measurement resistance wire 30 may also be led out to a side surface 13 of the silicon wafer 10a to facilitate connection with an external circuit, a thin silicon layer 10b is grown on the silicon wafer 10a plated with the patterned metal film by chemical deposition and the like, the whole thickness of the silicon flat plate is processed by processes such as thinning and polishing to meet the FSR requirement, and finally, partial reflective films are plated on two optical planes of the silicon flat plate to meet the FWHM requirement.
In other embodiments, a thicker silicon wafer can be manufactured, grooves are etched on the silicon wafer, and the heating resistance wire and the temperature measuring resistance wire are arranged in different grooves or in the same groove. For example, the heating resistance wire and the temperature measuring resistance wire are plated in the groove in a film plating mode, or the manufactured heating resistance wire and the manufactured temperature measuring resistance wire are filled in the groove, and the groove can be filled with a protective material to cover the heating resistance wire and the temperature measuring resistance wire. And then the whole thickness of the silicon wafer is processed to meet the requirement of FSR through processes of polishing and the like, and finally partial reflecting films are plated on two optical planes of the silicon wafer to meet the requirement of FWHM.
The heating resistance wire and the temperature measuring resistance wire are embedded in the optical flat plate, so that the heating resistance wire and the temperature measuring resistance wire can be directly heated in the optical flat plate, the heat loss of the heating resistance wire and the heat interference to other devices are reduced, the heating efficiency is further improved, the power consumption of the devices is reduced, the heating is faster and more uniform, and the faster and more accurate tuning filtering can be realized.
Of course, in other embodiments, only the heating resistance wire may be embedded in the optical flat plate, and the temperature measuring resistance wire may be plated on the optical flat plate.
In the drawings of the above embodiments, two ends of the temperature measuring resistance wire are respectively provided with one temperature measuring electrode, and the resistance of the temperature measuring resistance wire is measured by connecting the two temperature measuring electrodes with an external circuit. In other embodiments, two temperature measuring electrodes can be arranged at two ends of the temperature measuring resistance wire respectively, and the resistance of the temperature measuring resistance wire is measured by a Kelvin four-wire method, so that the measurement precision is further improved.
Example 4
As shown in FIGS. 8 and 9, this embodiment provides a vernier filter, which includes at least two tunable filters 100, where the tunable filter 100 is the tunable filter described in any of the above embodiments, and the two tunable filters 100 have different FSRs, such as the two filter curves (dotted and dashed lines) shown in FIG. 9, and the two FSRs are slightly different, typically by 5 to 30GHz, preferably by 10 to 20 GHz. By utilizing vernier effect, the filter wavelength selected by overlapping two filter curves can be selected by tuning the two tunable filters 100, and the solid curve shown in fig. 9 is the result of overlapping two filter curves, so that a single wavelength (narrow line width) filter is realized, and the tuning speed is high, the power consumption is low, and the tuning bandwidth is high.
In this embodiment, as shown in fig. 8, the vernier filter further includes a mounting stage 40, and the mounting stage 40 has an upper surface provided with conductive traces 41 for connection with an external circuit. The tunable filter 100 is disposed on the upper surface of the mounting table 40, and the heating electrode 21 and the temperature measuring electrode 31 of the tunable filter 100 are electrically connected to the corresponding conductive traces 41, respectively, to supply power to the heating resistance wire 20 and the temperature measuring resistance wire 30. To reduce the thermal interference from the external environment, the mounting stage 40 can be made of a low thermal conductive material to reduce the thermal crosstalk between the tunable filter and the external components. Specifically, as shown in fig. 10, the mounting block 40 may include a mounting plate 42 and a support bracket 43 disposed below the mounting plate 42 to reduce the thermal contact of the tunable filter with the external environment.
Example 5
As shown in fig. 11, this embodiment provides a tunable laser including a housing (not shown), a laser resonator disposed in the housing, a gain chip 50 disposed in the laser resonator, a collimating lens 80, a tunable filter assembly, and an external cavity mirror 60. In this embodiment, the gain chip 50, collimating lens 80, tunable filter assembly and external cavity mirror 60 are all placed on a TEC 70. One end face 51 of the gain chip 50 away from the collimating lens 80 is plated with a partial reflective film to serve as an output cavity face of the laser resonant cavity, one end face of the external cavity mirror 60 is plated with a total reflective film to serve as a total reflective face of the laser resonant cavity, and the two end faces constitute two cavity faces of the laser resonant cavity. The laser light in the laser cavity is coupled into the optical fiber package, in which the optical isolator is integrated, through the turning prism and the coupling lens after being output from the end face 51 of the gain chip 50. Of course, in other embodiments, the laser resonator may be formed by coating on the end surface of other optical devices, where the structure of the laser resonator is not limited, and the isolator may also be disposed on the optical path between the gain chip and the optical fiber plug, and is not necessarily integrated in the optical fiber plug. The tunable filter assembly employs the vernier filter in embodiment 4, which can realize fast wavelength selection by the vernier effect, and the vernier filter employs the tunable filter 100 in any one of embodiments 1 to 3, which can realize a narrow-linewidth laser with stable output, and has a large tuning range, a small size, and low power consumption.
The above list of details is only for the concrete description of the feasible embodiments of the present application, they are not intended to limit the scope of the present application, and all equivalent embodiments or modifications that do not depart from the technical spirit of the present application are intended to be included within the scope of the present application.
Claims (11)
1. A tunable filter comprising an optical flat having a thermo-optic effect, the optical flat having two opposing optical planes, each of the two optical planes being provided with a partially reflective film; the method is characterized in that: the optical flat plate is provided with a light-transmitting area, a patterned heating resistance wire and a temperature measuring resistance wire, heating electrodes are arranged at two ends of the heating resistance wire, and temperature measuring electrodes are arranged at two ends of the temperature measuring resistance wire.
2. The tunable filter of claim 1, wherein: the heating resistance wire and/or the temperature measuring resistance wire are plated on the optical plane or embedded in the optical flat plate.
3. The tunable filter of claim 2, wherein: the heating resistance wire and the temperature measuring resistance wire are respectively plated on different optical planes; or the heating resistance wire and the temperature measuring resistance wire are arranged on the two optical planes.
4. The tunable filter of claim 2, wherein: the heating electrode and/or the temperature measuring electrode are/is arranged on the side surface of the optical flat plate.
5. The tunable filter of claim 1, wherein: the reflectivity of the partial reflecting film is 70-95%.
6. The tunable filter of any one of claims 1-5, wherein: the optical flat plate is a silicon flat plate.
7. The tunable filter of claim 6, wherein: the thickness of the silicon flat plate is within the range of 100-150 mu m.
8. A vernier filter comprising at least two tunable filters, characterized in that: the tunable filter of any one of claims 1-7, the two tunable filters having different free spectral ranges.
9. A vernier filter as claimed in claim 8, wherein: the vernier filter also comprises a mounting table, wherein the mounting table is provided with an upper surface, and the upper surface is provided with a conducting circuit; the tunable filter is arranged on the upper surface of the mounting table, and the heating electrode and the temperature measuring electrode are respectively and electrically connected with the corresponding conductive circuits.
10. A vernier filter as claimed in claim 9, wherein: the mounting table comprises a mounting plate and a support frame arranged below the mounting plate.
11. A tunable laser comprises a shell, a laser resonant cavity arranged in the shell, a gain chip arranged in the laser resonant cavity, a tunable filter component and an external cavity reflector; the method is characterized in that: the tunable filter assembly comprises a vernier filter as claimed in any one of claims 8 to 10.
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| CN202020257596.4U CN211928231U (en) | 2020-03-05 | 2020-03-05 | Tunable filter, vernier filter and tunable laser |
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| CN202020257596.4U CN211928231U (en) | 2020-03-05 | 2020-03-05 | Tunable filter, vernier filter and tunable laser |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113721332A (en) * | 2021-09-07 | 2021-11-30 | 昂纳信息技术（深圳）有限公司 | Coherent light receiving device |
| CN113885154A (en) * | 2021-09-26 | 2022-01-04 | 武汉光迅科技股份有限公司 | Optical filter assembly and manufacturing method thereof |
-
2020
- 2020-03-05 CN CN202020257596.4U patent/CN211928231U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113721332A (en) * | 2021-09-07 | 2021-11-30 | 昂纳信息技术（深圳）有限公司 | Coherent light receiving device |
| CN113885154A (en) * | 2021-09-26 | 2022-01-04 | 武汉光迅科技股份有限公司 | Optical filter assembly and manufacturing method thereof |
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